Anti-carbon-deposition spheroidizing furnace burner for producing electronic-grade submicron spherical silica powder

Abstract

The utility model provides an anti-carbon deposition spheroidizing furnace burner for producing electronic grade submicron spherical silicon micro powder, belongs to the field of spherical silicon micro powder balling equipment, and aims to solve the problem that the burning fire power is inconvenient to adjust through the oxygen inlet amount, the anti-carbon deposition spheroidizing furnace burner comprises a discharge port, and a burner body is fixedly connected to the discharge port; a second spring is fixedly connected to the sliding block, and the other end of the second spring is fixedly connected into the connecting plate. The device is provided with a partition plate; when the air inflow is controlled, a connecting frame can be pulled to drive a sliding plate to move on a connecting shaft, when the sliding plate moves, the sliding plate can drive a clamping rod to be separated from an oxygen pipe and a partition plate, the clamping rod is retracted into a protective shell, and the sliding plate can extrude a first spring while moving; the rotatable protective shell drives the partition plate to rotate through the connecting shaft, the air inlet of the oxygen pipe is adjusted through the partition plate, the air inlet amount can be reduced or increased, and combustion use of fuel gas can be assisted.

Description

Technical Field

[0001] The utility model relates to the field of spherical silica powder forming equipment, and specifically, it relates to a carbon deposition prevention spheroidizing furnace burner for the production of electronic-grade submicron spherical silica powder. Background Art

[0002] Spherical silica powder is mainly used for large-scale integrated circuit packaging and is also applied in high-tech fields such as aviation, aerospace, fine chemical industry, rewritable optical discs, large-area electronic substrates, special ceramics, and daily cosmetics. When producing submicron spherical silica powder, the design and function of the carbon deposition prevention spheroidizing furnace burner are crucial. Such burners are mainly used to control the temperature and atmosphere during the reaction, ensure the smooth progress of the spheroidizing process of silica powder, and enable the product to have the required physical and chemical properties.

[0003] However, most of the current carbon deposition prevention spheroidizing furnace burners for the production of electronic-grade submicron spherical silica powder have the following problems:

[0004] For example, a spherical silica powder forming burner device with the publication number CN213146560U. Although the oxygen transported through the oxygen pipe can help combustion, the combustion firepower cannot be controlled. The combustion firepower is related to the increase in oxygen. If the firepower is small, it is easy to cause insufficient combustion treatment of the material and carbon deposition inside the equipment. If the firepower is increased, it is easy to cause over-combustion and affect the quality of processing and production. It is inconvenient to adjust the combustion firepower by the oxygen intake; at the same time, when adding air through the oxygen pipe to assist combustion, there are some dust impurities in the air. If the dust impurities in the air are not filtered, it is easy to cause dust to pollute the production of the material, and it is inconvenient to filter the dust in the air conveniently.

[0005] Therefore, we make improvements and propose a carbon deposition prevention spheroidizing furnace burner for the production of electronic-grade submicron spherical silica powder. Summary of the Utility Model

[0006] The purpose of the utility model is to address the problems that it is inconvenient to adjust the combustion firepower by the oxygen intake and it is inconvenient to filter the dust in the air conveniently at present.

[0007] To achieve the above purpose, the utility model provides the following technical solutions:

[0008] A carbon deposition prevention spheroidizing furnace burner for the production of electronic-grade submicron spherical silica powder to improve the above problems.

[0009] Specifically, this application is as follows:

[0010] It includes a discharge port, on which a burner main body is fixedly connected, a feeding pipe is fixedly connected, a gas pipe is fixedly connected, a first spray head is installed on the gas pipe, a gas distribution groove is opened in the discharge port, a second spray head is fixedly connected in the discharge port, an oxygen pipe is fixedly connected to the discharge port, a connecting shaft is connected to the oxygen pipe through a sealed bearing, a partition plate is fixedly connected to the connecting shaft, a protective shell is fixedly connected to the connecting shaft, a sliding plate is connected to the connecting shaft in a limited sliding manner, a clamping rod is fixedly connected to the sliding plate, a first spring is fixedly connected to the sliding plate, a connecting frame is fixedly connected to the sliding plate, a support plate is fixedly connected to the discharge port, an air pump is arranged on the support plate, the air pump is installed on the oxygen pipe, a treatment box is fixedly connected to the oxygen pipe, a dust-proof net plate is arranged in the treatment box, a connecting plate is fixedly connected to the dust-proof net plate, a sliding rod is fixedly connected in the connecting plate, a sliding block is connected to the sliding rod in a limited sliding manner, a second spring is fixedly connected to the sliding block, the other end of the second spring is fixedly connected in the connecting plate, and a clamping plate is fixedly connected to the sliding block.

[0011] As a preferred technical solution of the present application, the gas pipes are distributed at equal angles on the discharge port, and through holes are equidistantly opened on the oxygen pipe.

[0012] As a preferred technical solution of the present application, the connecting shaft is fixedly connected to the central part of the partition plate, and the side end face of the sliding plate fits with the inner side face of the protective shell.

[0013] As a preferred technical solution of the present application, the length of the clamping rod is less than the length of the connecting frame, and the side end face of the dust-proof net plate fits with the inner side face of the treatment box.

[0014] As a preferred technical solution of the present application, the sliding blocks are symmetrically distributed on the left and right sides inside the connecting plate, and the sliding blocks correspond to the clamping plates through the second springs one by one.

[0015] As a preferred technical solution of the present application, a clamping groove is opened on the treatment box, a pulling plate is fixedly connected to the sliding block, and the cross section of the clamping plate is in an "L" shape.

[0016] Compared with the prior art, the beneficial effects of the present utility model are:

[0017] In the solution of the present application:

[0018] 1. A partition is provided; when the air intake is controlled, the sliding plate can be driven to move on the connecting shaft by pulling the connecting frame. When the sliding plate moves, the sliding plate can drive the clamping rod to disengage from the oxygen tube and the partition, and retract the clamping rod into the protective shell. The sliding plate can squeeze the first spring while moving. When the partition is not obstructed, the protective shell can be rotated to drive the partition to rotate through the connecting shaft. The air inlet of the oxygen tube can be adjusted through the partition, which can reduce or increase the air intake and assist the combustion of the gas. After the adjustment is completed, the connecting frame can be loosened, and the sliding plate and the clamping rod can be reset under the push of the first spring. The clamping rod can be engaged in the oxygen tube and the partition, which can play a role of limiting and fixing, and avoid the movement of the partition.

[0019] 2. A connecting plate is provided; when conveying air, the gas can filter the dust impurities in the air through the dustproof mesh plate in the processing box. After the filtering is completed, auxiliary combustion treatment is carried out. If the dustproof mesh plate is clogged with dust after long-term use and needs to be cleaned, the pull plates on both sides of the connecting plate can be pushed, and the pull plates push the slider to move on the slide rod. When the slider moves, it can drive the card plate to move at the same time, and the card plate can be disengaged from the card slot on the processing box. At the same time, when the slider moves, it can squeeze the second spring. When the connecting plate is unobstructed, the connecting plate can be pulled to take out the dustproof mesh plate, and the dust impurities on the dustproof mesh plate are cleaned. When installing and resetting, the dustproof mesh plate is inserted into the processing box, the pull plates on both sides are loosened, and the slider and the card plate are reset under the push of the second spring. The card plate can be engaged in the card slot, and the used dustproof mesh plate is limited and fixed, which is convenient for using the dustproof mesh plate for filtering. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the overall three-dimensional structure of the burner of the anti-carbon deposition spheroidizing furnace for producing electronic-grade submicron spherical silicon powder provided in this application;

[0021] Figure 2 A schematic diagram of the side view of the discharge port of the burner of the anti-carbon deposition spheroidizing furnace for the production of electronic-grade submicron spherical silicon powder provided in this application;

[0022] Figure 3 A schematic diagram of the structure of the first nozzle of the anti-carbon deposition spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder provided in the present application, viewed from above;

[0023] Figure 4 A schematic diagram of the top view of the gas distribution slot of the burner of the anti-carbon deposition spheroidizing furnace for the production of electronic-grade submicron spherical silicon powder provided in this application;

[0024] Figure 5 The present invention provides a carbon deposition-proof spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder. Figure 2 The enlarged structural diagram at A in the middle;

[0025] Figure 6 Schematic side view structure diagram of the partition board of the anti-carbon deposition spheroidizing furnace burner for the production of electronic-grade sub-micron spherical silica powder provided by this application;

[0026] Figure 7 Schematic top view structure diagram of the protective shell of the anti-carbon deposition spheroidizing furnace burner for the production of electronic-grade sub-micron spherical silica powder provided by this application;

[0027] Figure 8 Schematic side view structure diagram of the connecting plate of the anti-carbon deposition spheroidizing furnace burner for the production of electronic-grade sub-micron spherical silica powder provided by this application.

[0028] Reference numerals in the figure: 1, discharge port; 2, burner main body; 3, feeding pipe; 4, gas pipe; 5, first spray head; 6, gas distribution groove; 7, second spray head; 8, oxygen pipe; 9, connecting shaft; 10, partition board; 11, protective shell; 12, sliding plate; 13, clamping rod; 14, first spring; 15, connecting frame; 16, support plate; 17, air pump; 18, treatment box; 19, dust-proof net plate; 20, connecting plate; 21, sliding rod; 22, slider; 23, second spring; 24, clamping plate; 25, clamping groove; 26, pulling plate. Detailed implementation manners

[0029] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model.

[0030] Therefore, the following detailed description of the embodiments of the present utility model is not intended to limit the scope of the present utility model to be protected, but merely represents some embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the scope of protection of the present utility model.

[0031] It should be noted that, without conflict, the embodiments in the present utility model and the features and technical solutions in the embodiments may be combined with each other.

[0032] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0033] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "upper" and "lower" is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product is usually placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. Such terms are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, terms such as "first" and "second" are only used for differential description and cannot be understood as indicating or implying relative importance.

[0034] Embodiment 1:

[0035] As Figure 1-8 shown, this embodiment provides a carbon deposition prevention spheroidizing furnace burner for the production of electronic-grade submicron spherical silicon micropowder, including a discharge port 1, on which a burner main body 2 is fixedly connected, a feeding pipe 3 is fixedly connected, a gas pipe 4 is fixedly connected, a first spray head 5 is installed on the gas pipe 4, a gas distribution groove 6 is opened in the discharge port 1, a second spray head 7 is fixedly connected in the discharge port 1, an oxygen pipe 8 is fixedly connected to the discharge port 1, a connecting shaft 9 is connected to the oxygen pipe 8 through a sealed bearing, a partition plate 10 is fixedly connected to the connecting shaft 9, a protective shell 11 is fixedly connected to the connecting shaft 9, a sliding plate 12 is connected to the connecting shaft 9 in a limited sliding manner, a clamping rod 13 is fixedly connected to the sliding plate 12, a first spring 14 is fixedly connected to the sliding plate 12, a connecting frame 15 is fixedly connected to the sliding plate 12, a support plate 16 is fixedly connected to the discharge port 1, an air pump 17 is arranged on the support plate 16, the air pump 17 is installed on the oxygen pipe 8, a treatment box 18 is fixedly connected to the oxygen pipe 8, a dust-proof net plate 19 is arranged in the treatment box 18, a connecting plate 20 is fixedly connected to the dust-proof net plate 19, a sliding rod 21 is fixedly connected in the connecting plate 20, a slider 22 is connected to the sliding rod 21 in a limited sliding manner, a second spring 23 is fixedly connected to the slider 22, the other end of the second spring 23 is fixedly connected in the connecting plate 20, and a clamping plate 24 is fixedly connected to the slider 22.

[0036] Embodiment 2:

[0037] The solution in Embodiment 1 will be further introduced below in combination with the specific working mode, as described in detail below:

[0038] As Figure 3 shown, as a preferred embodiment, on the basis of the above method, further, the gas pipes 4 are distributed at equal angles on the discharge port 1, and through holes are equidistantly arranged on the oxygen pipe 8, which can ensure that when multiple gas pipes 4 deliver gas, comprehensive combustion treatment can be carried out.

[0039] As Figure 6As shown, as a preferred embodiment, on the basis of the above method, further, the connecting shaft 9 is fixedly connected to the central part of the partition plate 10, and the side end face of the sliding plate 12 is in contact with the inner side face of the protective shell 11, which can ensure that when the sliding plate 12 moves, the sliding plate 12 can move smoothly through the support of the inner side face of the protective shell 11.

[0040] As Figure 6 shown, as a preferred embodiment, on the basis of the above method, further, the length of the clamping rod 13 is less than the length of the connecting frame 15, and the side end face of the dust-proof net plate 19 is in contact with the inner side face of the processing box 18, which can ensure that when the connecting frame 15 is pulled, the clamping rod 13 can be completely retracted into the protective shell 11.

[0041] As Figure 8 shown, as a preferred embodiment, on the basis of the above method, further, the sliders 22 are symmetrically distributed on the left and right sides inside the connecting plate 20, and the sliders 22 are in one-to-one correspondence with the clamping plates 24 through the second springs 23, which can ensure that the two clamping plates 24 can stably clamp and limit the connecting plate 20.

[0042] As Figure 8 shown, as a preferred embodiment, on the basis of the above method, further, a clamping groove 25 is formed on the processing box 18, a pulling plate 26 is fixedly connected to the slider 22, and the cross section of the clamping plate 24 is in an "L" shape, which can ensure that the clamping plate 24 in the shape of "L" can be stably clamped in the clamping groove 25 on the processing box 18 for limit fixation.

[0043] Specifically, when the carbon deposition prevention and spheroidization furnace burner for the production of electronic-grade submicron spherical silicon micropowder is in use: combined with Figure 1-8 , the air pump 17 on the support plate 16 is turned on to deliver air, and the gas can filter the dust and impurities in the air through the dust-proof net plate 19 in the processing box 18. After the filtering is completed, auxiliary combustion treatment is carried out. If the dust-proof net plate 19 is blocked by dust after long-term use and needs to be cleaned, the pulling plates 26 on both sides of the connecting plate 20 can be pushed. The pulling plates 26 push the sliders 22 to move on the sliding rods 21. When the sliders 22 move, they can drive the clamping plates 24 to move at the same time. The clamping plates 24 can be disengaged from the clamping grooves 25 on the processing box 18. At the same time, when the sliders 22 move, they can squeeze the second springs 23. When the connecting plate 20 is unobstructed, the connecting plate 20 can be pulled out to remove the dust-proof net plate 19, and the dust and impurities on the dust-proof net plate 19 can be cleaned. When installing and resetting, the dust-proof net plate 19 is inserted into the processing box 18, and the pulling plates 26 on both sides are released. Under the push of the second springs 23, the sliders 22 and the clamping plates 24 are reset, and the clamping plates 24 can be clamped in the clamping grooves 25 to limit and fix the used dust-proof net plate 19, which is convenient to use the dust-proof net plate 19 for filtering treatment.

[0044] The gas is transported to the gas distribution groove 6 at the discharge port 1, and the gas is evenly ejected through a plurality of second nozzles 7 on the gas distribution groove 6. The gas can be transported through the gas pipe 4 inside the burner body 2, ejected through the first nozzle 5 for combustion, and the transported gas can assist the combustion of the gas. Then, the material is transported through the feed pipe 3 and transported to the discharge port 1 for combustion processing and production. When controlling the intake air volume, the connecting frame 15 can be pulled to drive the sliding plate 12 to move on the connecting shaft 9. When the sliding plate 12 moves, the sliding plate 12 can drive the clamping rod 13 to disengage from the oxygen pipe 8 and the partition plate 10, and the clamping rod 13 is retracted into the protective shell 11. At the same time, the sliding plate 12 moves and can squeeze the first spring 14. When the partition plate 10 is unobstructed, the protective shell 11 can be rotated to drive the partition plate 10 to rotate through the connecting shaft 9, and the intake port of the oxygen pipe 8 can be adjusted by the partition plate 10 to reduce or increase the intake air volume, which can assist the combustion and use of the gas. After the adjustment is completed, the connecting frame 15 can be released, and the sliding plate 12 and the clamping rod 13 are driven to reset under the push of the first spring 14. The clamping rod 13 can be clamped in the oxygen pipe 8 and the partition plate 10, which can play a role of limiting and fixing to prevent the partition plate 10 from moving.

[0045] The above embodiments are only used to illustrate the present invention rather than to limit the technical solutions described in the present invention. Although the present specification has described the present invention in detail with reference to the above respective embodiments, the present invention is not limited to the above specific embodiments. Therefore, any modification or equivalent replacement of the present invention; and all technical solutions and their improvements that do not depart from the spirit and scope of the utility model are covered by the scope of the claims of the present invention.

Claims

1. A carbon deposition-proof spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder, comprising a discharge port (1), characterized in that: The discharge port (1) is fixedly connected to a burner body (2), the discharge port (1) is fixedly connected to a feed pipe (3), the discharge port (1) is fixedly connected to a gas pipe (4), the gas pipe (4) is installed with a first nozzle (5), a gas distribution groove (6) is provided in the discharge port (1), a second nozzle (7) is fixedly connected in the discharge port (1), an oxygen pipe (8) is fixedly connected to the discharge port (1), a connecting shaft (9) is connected to the oxygen pipe (8) via a sealing bearing, a partition plate (10) is fixedly connected to the connecting shaft (9), a protective shell (11) is fixedly connected to the connecting shaft (9), a slide plate (12) is slidably connected to the upper limit of the connecting shaft (9), a clamping rod (13) is fixedly connected to the slide plate (12), and a first nozzle (5) is fixedly connected to the slide plate (12). A spring (14), a connecting frame (15) is fixedly connected to the slide plate (12), a support plate (16) is fixedly connected to the discharge port (1), an air pump (17) is arranged on the support plate (16), the air pump (17) is installed on the oxygen pipe (8), a treatment box (18) is fixedly connected to the oxygen pipe (8), a dustproof screen (19) is arranged in the treatment box (18), a connecting plate (20) is fixedly connected to the dustproof screen (19), a sliding rod (21) is fixedly connected in the connecting plate (20), a sliding block (22) is fixedly connected to the sliding block (21) in an upper limit sliding connection, a second spring (23) is fixedly connected to the sliding block (22), the other end of the second spring (23) is fixedly connected in the connecting plate (20), and a clamping plate (24) is fixedly connected to the sliding block (22).

2. The anti-carbon deposition spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The gas pipes (4) are distributed at equal angles on the discharge port (1), and through holes are opened at equal intervals on the oxygen pipe (8).

3. The anti-carbon deposition spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The connecting shaft (9) is fixedly connected to the center of the partition (10), and the side end surface of the slide plate (12) is in contact with the inner side surface of the protective shell (11).

4. The anti-carbon deposition spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The length of the clamping rod (13) is smaller than the length of the connecting frame (15), and the side end surface of the dustproof screen plate (19) is in contact with the inner side surface of the processing box (18).

5. The anti-carbon deposition spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The sliders (22) are symmetrically distributed on the left and right sides of the connecting plate (20), and the sliders (22) correspond one-to-one with the clamping plates (24) via the second springs (23).

6. The anti-carbon deposition spheroidizing furnace burner for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The processing box (18) is provided with a card slot (25), the sliding block (22) is fixedly connected with a pull plate (26), and the cross section of the card plate (24) is in an "L" shape.

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