Chip multi-point testing machine
By designing a chip multi-point testing machine containing ring array testing components, the problem of low chip multi-point testing efficiency in the prior art is solved, efficient testing of multiple contacts of the chip is achieved, and equipment costs are reduced.
Patent Information
- Application Number
- CN202421346274.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-13
- Publication Date
- 2025-06-03
- Estimated Expiration
- 2034-06-13
AI Technical Summary
When conducting multi-point testing, existing chip test machines are less efficient and difficult to test multiple contacts on the chip at the same time, resulting in higher equipment costs.
A chip multi-point testing machine is designed, including a feeding mechanism, a testing device, a transfer device and an identification device. The test device drives the plurality of test components in an annular array through the mounting base, and adjusts the position of the test components through the first lifting drive mechanism and the first translation drive mechanism to align with the plurality of contacts of the chip to be tested.
The test machine can effectively improve the chip testing efficiency, and contact contacts on the chip from different angles through multiple test components, avoiding crowding between the test components and reducing equipment costs.
Smart Images
Figure CN222939218U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor chip manufacturing, in particular to a chip multi-point tester. Background Art
[0002] After the chip is packaged in the packaging factory, the final test of the finished product needs to be carried out. The common test method is to conduct the test on an automatic test equipment. During the test process, the chip on the feeding mechanism is usually automatically obtained by a transfer device, and then the chip is placed into the test module for testing. However, with the progress of the semiconductor manufacturing process, the volume of the chip is getting smaller and smaller, and the test difficulty of the chip is getting greater and greater. When the existing chip tester performs multi-point testing, it is difficult to simultaneously test multiple contacts on the chip, and the efficiency is low, which is not conducive to reducing the equipment cost. Summary of the Utility Model
[0003] The technical problem to be solved by the utility model is to provide a chip multi-point tester that is conducive to improving the test efficiency.
[0004] To solve the above technical problem, the technical solution adopted by the utility model is: a chip multi-point tester, including:
[0005] A feeding mechanism;
[0006] A test device, including a first lifting drive mechanism, a mounting seat, and a plurality of test components. The plurality of test components are annularly and arrayedly mounted on the mounting seat, and the first lifting drive mechanism is used to drive the mounting seat to vertically lift and lower;
[0007] A transfer device, including a test bench and a first translation drive mechanism. The first translation drive mechanism is used to drive the test bench to reciprocate between the test device and the feeding mechanism.
[0008] Further, it further includes an identification device. The identification device includes an identification camera, and the identification camera is arranged above the transfer device.
[0009] Further, the transfer device further includes a second translation drive mechanism. The second translation drive mechanism is used to drive the test bench to move, and the first translation drive mechanism and the second translation drive mechanism are arranged at an angle.
[0010] Further, the first translation drive mechanism or the second translation drive mechanism is a linear motor.
[0011] Further, the identification device further includes a second lifting drive mechanism. The second lifting drive mechanism is used to drive the identification camera to vertically lift and lower.
[0012] Further, the identification device further includes an annular light source, and the identification camera is disposed inside the annular light source.
[0013] Further, it further includes a QR code scanner, and the QR code scanner is fixedly installed above the transfer device.
[0014] Further, the mounting seat is in a C shape.
[0015] Further, a photoelectric sensor is provided on the first translation driving mechanism, and a trigger is provided on the test bench corresponding to the photoelectric sensor.
[0016] The beneficial effects of the present utility model are as follows: The test device of this chip multi-point tester can simultaneously drive multiple test components to approach the chip to be tested on the test bench through the mounting seat, and simultaneously test multiple contacts on the chip to be tested, effectively improving the chip test efficiency. The multiple test components are arranged in an annular array, which can contact the contacts on the chip from different angles, avoiding overcrowding among the multiple test components and being unfavorable for installation or use. Description of the Drawings
[0017] Figure 1 It is a schematic structural diagram of the chip multi-point tester according to Embodiment 1 of the present utility model.
[0018] Label Description:
[0019] 1. Feeding mechanism;
[0020] 2. Test device; 21. First lifting driving mechanism; 22. Mounting seat; 23. Test component;
[0021] 3. Transfer device; 31. Test bench; 311. Trigger; 32. First translation driving mechanism; 321. Photoelectric sensor; 33. Second translation driving mechanism;
[0022] 4. Identification device; 41. Identification camera; 42. Second lifting driving mechanism; 43. Annular light source;
[0023] 5. QR code scanner. Detailed Embodiment
[0024] To describe in detail the technical content, achieved purpose and effects of the present utility model, the following is described in conjunction with the embodiments and with reference to the drawings.
[0025] Please refer to Figure 1 , the chip multi-point tester includes:
[0026] Feeding mechanism 1;
[0027] The testing device 2 includes a first lifting drive mechanism 21, a mounting base 22, and a plurality of testing components 23. The plurality of testing components 23 are mounted on the mounting base 22 in a circular array, and the first lifting drive mechanism 21 is used to drive the mounting base 22 to lift vertically.
[0028] The transfer device 3 includes a test bench 31 and a first translation drive mechanism 32. The first translation drive mechanism 32 is used to drive the test bench 31 to reciprocate between the testing device 2 and the feeding mechanism 1.
[0029] As can be seen from the above description, the beneficial effect of the present utility model is that the testing device 2 of the multi-point chip tester can drive a plurality of testing components 23 to approach the chip to be tested on the test bench 31 through the mounting base 22 at the same time, and test a plurality of contacts on the chip to be tested, effectively improving the chip testing efficiency. The plurality of testing components 23 are arranged in a circular array, which can contact the contacts on the chip from different angles, avoiding overcrowding between the plurality of testing components 23 and being unfavorable for installation or use.
[0030] Further, an identification device 4 is further included. The identification device 4 includes an identification camera 41, and the identification camera 41 is arranged above the transfer device 3.
[0031] As can be seen from the above description, the identification device 4 can identify whether the chip has moved in place, avoiding misjudgment caused by the failure of the testing component 23 and the chip to be accurately aligned.
[0032] Further, the transfer device 3 further includes a second translation drive mechanism 33. The second translation drive mechanism 33 is used to drive the test bench 31 to move, and the first translation drive mechanism 32 and the second translation drive mechanism 33 are arranged at an angle.
[0033] As can be seen from the above description, the first translation drive mechanism 32 cooperates with the second translation drive mechanism 33 to adjust the position of the chip on the test bench 31, so that the chip is aligned with the plurality of testing components 23.
[0034] Further, the first translation drive mechanism 32 or the second translation drive mechanism 33 is a linear motor.
[0035] As can be seen from the above description, the first translation drive mechanism 32 or the second translation drive mechanism 33 is easy to obtain and has precise position control.
[0036] Further, the identification device 4 further includes a second lifting drive mechanism 42. The second lifting drive mechanism 42 is used to drive the identification camera 41 to lift vertically.
[0037] As described above, the second lifting drive mechanism 42 can drive the identification camera 41 closer to the test bench 31 for clearer chip identification, or drive the identification camera 41 away from the test bench 31 to facilitate the movement of the testing device 2 and the transfer device 3.
[0038] Further, the identification device 4 further includes an annular light source 43, and the identification camera 41 is disposed inside the annular light source 43.
[0039] As described above, the annular light source 43 can increase the ambient brightness, which is beneficial to the identification camera 41 for taking pictures and identification.
[0040] Further, a QR code scanner 5 is further included, and the QR code scanner 5 is fixedly installed above the transfer device 3.
[0041] As described above, the QR code scanner 5 can identify the chip batch on the test bench 31, which is convenient for recording the test results.
[0042] Further, the mounting base 22 is in a U-shaped configuration.
[0043] As described above, one side of the mounting base 22 is open to avoid the test bench 31 of the transfer device 3.
[0044] Further, a photoelectric sensor 321 is provided on the first translation drive mechanism 32, and a trigger 311 is provided on the test bench 31 corresponding to the photoelectric sensor 321.
[0045] As described above, the photoelectric sensor 321 cooperating with the trigger 311 can determine the position of the test bench 31, avoid overtravel of the test bench 31 or improve the position accuracy of the test bench 31.
[0046] Please refer to Figure 1 , Embodiment 1 of the present utility model is: a chip multi-point testing machine, including a feeding mechanism 1, a testing device 2, a transfer device 3 and an identification device 4; the feeding mechanism 1 is used for conveying chips; the testing device 2 includes a first lifting drive mechanism 21, a mounting base 22 and a plurality of testing components 23, the plurality of testing components 23 are annularly and arrayedly installed on the mounting base 22, and the first lifting drive mechanism 21 is used for driving the mounting base 22 to vertically lift; the transfer device 3 includes a test bench 31 and a first translation drive mechanism 32, and the first translation drive mechanism 32 is used for driving the test bench 31 to reciprocate between the testing device 2 and the feeding mechanism 1; the identification device 4 includes an identification camera 41, and the identification camera 41 is disposed above the transfer device 3.
[0047] Specifically, the feeding mechanism 1 includes a bracket, a material box disposed on the bracket, and a push rod assembly. The push rod assembly is used to push the wafers with chips out of the material box onto the test bench 31 of the transfer device 3. The first translation drive mechanism 32 is preferably a linear motor. The feeding mechanism 1 and the testing device 2 are respectively located at both ends of the first translation drive mechanism 32. Conveyor belt mechanisms are respectively disposed on both sides of the test bench 31. The two conveyor belt mechanisms are used to transport the wafers with the chips to be tested onto the test bench 31 or transfer them to the next working station. The first lifting drive mechanism 21 is preferably a lead screw slide module driven by a motor. The mounting base 22 is in a U shape, and the opening of the mounting base 22 faces the side close to the transfer device 3 to facilitate avoiding the test bench 31 of the transfer device 3. As a preferred embodiment, the transfer device 3 further includes a second translation drive mechanism 33. The second translation drive mechanism 33 is used to drive the test bench 31 to move. The first translation drive mechanism 32 and the second translation drive mechanism 33 are arranged at an angle. Specifically, the second translation drive mechanism 33 is preferably a linear motor, and the conveying direction of the second translation drive mechanism 33 is perpendicular to the conveying direction of the first translation drive mechanism 32. The first translation drive mechanism 32 cooperates with the second translation drive mechanism 33 to adjust the position of the chips on the test bench 31 so that the chips are aligned with the multiple test components 23.
[0048] The identification device 4 further includes a second lifting drive mechanism 42. The second lifting drive mechanism 42 is used to drive the identification camera 41 to vertically lift. Optionally, the second lifting drive mechanism 42 can be set as a cylinder or a linear slide module driven by a motor. The second lifting drive mechanism 42 can drive the identification camera 41 to approach the test bench 31 for clearer identification of the chips, or drive the identification camera 41 away from the test bench 31 to facilitate the movement of the testing device 2 and the transfer device 3.
[0049] In order to enable the identification camera 41 to take pictures and identify more accurately, the identification device 4 further includes an annular light source 43, and the identification camera 41 is disposed inside the annular light source 43.
[0050] The chip multi-point tester further includes a QR code scanner 5. The QR code scanner 5 is fixedly installed above the transfer device 3, and the QR code scanner 5 is located between the feeding mechanism 1 and the testing device 2. The QR code scanner 5 can identify the chip batches on the test bench 31 to facilitate recording the test results.
[0051] As a preferred embodiment, a photoelectric sensor 321 is disposed on the first translation drive mechanism 32, and a trigger 311 corresponding to the photoelectric sensor 321 is disposed on the test bench 31. The photoelectric sensor 321 cooperates with the trigger 311 to judge the position of the test bench 31, avoid over-travel of the test bench 31 or improve the position accuracy of the test bench 31.
[0052] The working principle of the chip multi-point tester in the first embodiment is as follows: First, place the wafer with the chip to be tested in the cassette of the feeding mechanism 1. Subsequently, the first translation driving mechanism 32 moves the test bench 31 to a position close to the feeding mechanism 1. The push rod assembly of the feeding mechanism 1 pushes the wafer with the chip to be tested out of the cassette onto the two conveyor belt mechanisms of the test bench 31, and the two conveyor belt mechanisms transport the wafer to a preset position on the test bench 31; the QR code scanner 5 identifies and records the QR code on the wafer; the first translation driving mechanism 32 moves the test bench 31 to a test station close to the testing device 2; the identification camera 41 identifies the position of the chip, and then the position of the chip on the test bench 31 is adjusted by the cooperation of the first translation driving mechanism 32 and the second translation driving mechanism 33 to align the chip with the multiple test components 23; the first lifting driving mechanism 21 drives the mounting base 22 and the multiple test components 23 to descend, and the multiple test components 23 are respectively in contact with multiple test contacts of the chip, and then the performance of the chip can be tested; after the performance test of the chip is completed, the two conveyor belt mechanisms on the test bench 31 transport the wafer to the next station.
[0053] In summary, the testing device of the chip multi-point tester provided by the present invention can drive multiple test components to approach the chip to be tested on the test bench simultaneously through the mounting base, and test multiple contacts on the chip to be tested at the same time, effectively improving the chip testing efficiency. The multiple test components are arranged in a circular array, which can contact the contacts on the chip from different angles, avoiding overcrowding between the multiple test components and being unfavorable for installation or use. The first translation driving mechanism cooperates with the second translation driving mechanism to adjust the position of the chip on the test bench to align the chip with the multiple test components. The second lifting driving mechanism can drive the identification camera close to the test bench for clearer identification of the chip, or drive the identification camera away from the test bench for the movement of the testing device and the transfer device. The annular light source can improve the ambient brightness, which is beneficial for the identification camera to take pictures and identify. The QR code scanner can identify the chip batch on the test bench, facilitating the recording of test results. The photoelectric sensor cooperates with the trigger to judge the position of the test bench, avoiding overtravel of the test bench or improving the position accuracy of the test bench.
[0054] The above are only the embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. All equivalent transformations made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in related technical fields, are equally included in the patent protection scope of the present invention.
Claims
1. Chip multi-point tester, characterized in that: Comprising: A feeding mechanism; A testing device, including a first lifting drive mechanism, a mounting base, and a plurality of testing components. The plurality of testing components are mounted on the mounting base in a circular array, and the first lifting drive mechanism is used to drive the mounting base to lift vertically; A transfer device, including a test bench and a first translation drive mechanism. The first translation drive mechanism is used to drive the test bench to reciprocate between the testing device and the feeding mechanism.
2. The chip multi-point tester according to claim 1, characterized in that: It further includes an identification device. The identification device includes an identification camera, and the identification camera is arranged above the transfer device.
3. The chip multi-point tester according to claim 2, characterized in that: The transfer device further includes a second translation drive mechanism. The second translation drive mechanism is used to drive the test bench to move, and the first translation drive mechanism and the second translation drive mechanism are arranged at an angle.
4. The chip multi-point tester according to claim 3, characterized in that: The first translation drive mechanism or the second translation drive mechanism is a linear motor.
5. The chip multi-point tester according to claim 2, characterized in that: The identification device further includes a second lifting drive mechanism. The second lifting drive mechanism is used to drive the identification camera to lift vertically.
6. The chip multi-point tester according to claim 2, characterized in that: The identification device further includes an annular light source, and the identification camera is arranged inside the annular light source.
7. The chip multi-point tester according to claim 1, characterized in that: It further includes a QR code scanner, and the QR code scanner is fixedly installed above the transfer device.
8. The chip multi-point tester according to claim 1, characterized in that: The mounting base is in a C shape.
9. The chip multi-point tester according to claim 1, characterized in that: An optoelectronic sensor is provided on the first translation drive mechanism, and a trigger is provided on the test bench corresponding to the optoelectronic sensor.