Multi-angle coupling type single crystal furnace crystal diameter observation device

Abstract

The utility model discloses a multi-angle coupling type single crystal furnace crystal diameter observation device which comprises a crystal diameter observation mechanism, a crystal distance measurement mechanism and a driving mechanism, the crystal distance measuring mechanism is used for detecting the outward expansion distance in the crystal growth process and calculating the crystal expansion rate according to the expansion distance. The driving mechanism comprises a first driving part used for driving the crystal diameter observation mechanism and a second driving part used for driving the crystal distance measuring mechanism. When the crystal grows, the diameter of the crystal is gradually increased, the first laser range finder and the second laser range finder are respectively used for measuring the distance between the crystal and the crystal, the growth rate (namely the outward expansion speed) of the crystal is calculated, and the crystal diameter observation mechanism is correspondingly adjusted according to the growth expansion speed of the crystal. And the edge of the crystal is observed all the time, so that the real-time diameter and the diameter change in the crystal growth process can be obtained.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a multi-angle coupling type single crystal furnace crystal diameter observation device. Background Art

[0002] Single crystal silicon is an important component of semiconductor materials. However, the amount of natural single crystal silicon in nature is extremely small, and the quality is difficult to meet the actual requirements. Therefore, artificial preparation methods are usually used to obtain high-quality single crystal silicon. Among them, the Czochralski method is widely used in the process of preparing single crystal silicon due to its advantages of low cost and mature preparation process. The use of the Czochralski method to prepare single crystal silicon often requires the steps of seeding, necking, shoulder release, shoulder rotation, equal diameter growth and tailing to complete the growth of single crystal silicon. Among them, shoulder release is a very important step, which is related to whether the single crystal silicon can be successfully pulled and the number of dislocations and defects inside the single crystal silicon. During the shoulder release process, the diameter of the crystal needs to be monitored at all times to adjust the pulling speed.

[0003] Prior art publication number CN220952181U provides a device for monitoring crystal diameter and a CZ single crystal furnace, the device comprising: a bearing member; a first image collector, disposed on the bearing member, for capturing image information of a first edge of the crystal; a second image collector, disposed on the bearing member, for capturing image information of a second edge of the crystal; a driving assembly, disposed on the bearing member, transmission-connecting the first image collector and the second image collector, and configured to drive the first image collector to move to capture image information of the first edge of the crystal and to drive the second image collector to move to capture image information of the second edge of the crystal.

[0004] In the above device, the image information of the edges of the crystal on both sides is collected by the first image collector and the second image collector respectively, and the crystal diameter is obtained based on the analysis of this information. The movement of the first image collector and the second image collector is realized by the driving component, and then the operation of the driving component lacks a reference object. Although the diameter of the crystal continues to increase during growth, the speed and rate of the diameter expansion cannot be measured by the above device. Therefore, the driving component cannot adjust the first image collector and the second image collector in real time according to the change of the crystal diameter, so that the first image collector and the second image collector cannot observe the crystal diameter and diameter change in real time. Utility Model Content

[0005] The purpose of the utility model is to provide a multi-angle coupling type single crystal furnace crystal diameter observation device to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A multi-angle coupled single crystal furnace crystal diameter observation device, comprising:

[0008] A crystal diameter observation mechanism, wherein the crystal diameter observation mechanism is used to observe the diameter change during the crystal growth process;

[0009] A crystal distance measuring mechanism, which is used to detect the distance of outward expansion of the crystal during its growth and to calculate the crystal expansion rate according to the expansion distance;

[0010] A driving mechanism, wherein the driving mechanism comprises a first driving member for driving the crystal diameter observation mechanism and a second driving member for driving the crystal distance measurement mechanism, wherein the driving mechanism drives and moves the crystal diameter observation mechanism and the crystal distance measurement mechanism through corresponding driving members to obtain an optimal observation result.

[0011] As a further solution of the utility model: the crystal diameter observation mechanism includes a first camera and a second camera, the first camera and the second camera are respectively used to capture and shoot the edges of both sides of the crystal, and calculate the diameter of the crystal based on the shooting results.

[0012] As a further solution of the utility model: the crystal ranging mechanism includes a first laser rangefinder and a second laser rangefinder, the first laser rangefinder is arranged above the second laser rangefinder, the first laser rangefinder and the second laser rangefinder are respectively set as two, the first laser rangefinder and the second laser rangefinder cooperate to observe the crystal from multiple angles and perform ranging work.

[0013] As a further solution of the utility model: the first driving member includes a beam frame, which is a frame-shaped frame with a hollow middle part. Grooves are provided on both sides of the bottom of the beam frame, and partitions are fixed at the middle positions of the two grooves. The first screw and the second screw are rotatably connected on both sides of the corresponding partitions in the two grooves, and the two first screws are threadedly connected with a first screw sleeve, and the two second screws are threadedly connected with a second screw sleeve, a first mounting platform is fixed between the two first screw sleeves, and a second mounting platform is fixed between the two second screw sleeves, the first mounting platform and the second mounting platform are both slidably connected to the bottom of the beam frame, the first camera is installed below the first mounting platform, and the second camera is installed below the second mounting platform.

[0014] As a further solution of the utility model: a first motor and a second motor are respectively installed on one side of the outside of the beam corresponding to the first screw and the second screw, a first pulley is fixed to one end of the output shaft of the first motor and one end of the two first screws on the corresponding side, and the multiple first pulleys are connected by a first belt transmission, a second pulley is fixed to one end of the output shaft of the second motor and one end of the two second screws on the corresponding side, and the multiple second pulleys are connected by a second belt transmission.

[0015] As a further solution of the utility model: the second driving member includes a climbing frame arranged on both sides of the bottom of the beam frame, the climbing frame is composed of two front and rear brackets, and guide grooves are provided on the opposite sides of the two brackets. The upper and lower ends between the two guide grooves are respectively slidably connected with a first slide rail and a second slide rail, and the first slide rail and the second slide rail are slidably connected with a slider, and one side of the slider is rotatably connected to the crystal ranging mechanism through a base.

[0016] As a further solution of the utility model: the two first laser rangefinders are respectively installed on the two first slide rails, and the two second laser rangefinders are respectively installed on the two second slide rails.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0018] 1. In the present invention, two first laser rangefinders are respectively aimed at the shoulder of the crystal, and two second laser rangefinders are respectively aimed at the equal diameter part of the crystal. During the growth of the crystal, its diameter will gradually increase. At this time, the distance between the first laser rangefinder and the second laser rangefinder and the crystal will change. The rangefinder measures the distance and records the relevant data. The growth rate of the crystal (i.e., the speed of outward expansion) is calculated by analyzing the distance measurement results. The crystal diameter observation mechanism is adjusted accordingly according to the expansion speed of the crystal growth, so that the first camera and the second camera move synchronously following the crystal growth direction. The edge of the crystal is always observed, so that the real-time diameter and diameter change of the crystal during the growth process can be obtained;

[0019] 2. In the present invention, the first motor and the second motor are driven and used in conjunction with related components to move the first camera and the second camera respectively, so that the two cameras can move outward or inward, and the camera positions can be adjusted to obtain the optimal observation position. When the crystal grows, its diameter will continue to increase. At this time, in order to maintain the accuracy of observation, the camera can be driven by the motor to move synchronously with the crystal growth direction;

[0020] 3. In the utility model, the laser rangefinder is rotatably connected to the corresponding slide rail via a base. The laser rangefinder can rotate in a direction to adjust the distance measuring angle, and can also move on the slide rail to adjust the distance measuring position. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 It is a structural schematic diagram of the utility model.

[0023] Figure 2 It is a front view schematic diagram of the utility model.

[0024] Figure 3 It is a schematic diagram of the connection structure between the crystal diameter observation mechanism and the first driving member in the utility model.

[0025] Figure 4 It is a bottom view structural schematic diagram of the first driving member in the utility model.

[0026] Figure 5 It is a schematic diagram of the connection structure between the crystal distance measuring mechanism and the second driving member in the utility model.

[0027] Figure 6 for Figure 5 Enlarged view of point A in the middle.

[0028] Figure 7 It is a schematic diagram of the crystal distance measuring mechanism in the utility model measuring the distance of the crystal.

[0029] Notes on figure numbers: 1-beam, 2-first motor, 3-second motor, 4-bracket, 5-guide groove, 6-first slide rail, 7-second slide rail, 8-locating pin, 9-locating hole, 10-first camera, 11-second camera, 12-first mounting platform, 13-second mounting platform, 14-groove, 15-partition, 16-second screw, 17-second screw sleeve, 18-first screw, 19-first screw sleeve, 20-first belt, 21-first pulley, 22-second belt, 23-second pulley, 24-first laser rangefinder, 25-second laser rangefinder, 26-locking pin, 27-locking hole, 28-slider, 29-base, 30-crystal, 301-neck, 302-shoulder, 303-equal diameter portion. DETAILED DESCRIPTION

[0030] The following embodiments will be combined with the accompanying drawings to describe the utility model in detail. In the drawings or descriptions, similar or identical parts use the same reference numerals, and in actual applications, the shape, thickness or height of each component can be enlarged or reduced. The various embodiments listed in the utility model are only used to illustrate the utility model, and are not used to limit the scope of the utility model. Any obvious modifications or changes made to the utility model do not depart from the spirit and scope of the utility model.

[0031] In an embodiment of the utility model, a multi-angle coupled single crystal furnace crystal diameter observation device includes a crystal diameter observation mechanism, a crystal distance measurement mechanism and a driving mechanism. The crystal diameter observation mechanism is used to observe the diameter change during the crystal growth process. The crystal distance measurement mechanism is used to detect the outward expansion distance during the crystal growth process and calculate the crystal expansion rate according to the expansion distance. The driving mechanism includes a first driving member for driving the crystal diameter observation mechanism and a second driving member for driving the crystal distance measurement mechanism. The driving mechanism drives and moves the crystal diameter observation mechanism and the crystal distance measurement mechanism through corresponding driving members to obtain the best observation result.

[0032] See also Figure 1 , Figure 2 The crystal diameter observation mechanism includes a first camera 10 and a second camera 11. The first camera 10 and the second camera 11 are respectively used to capture and shoot the two side edges of the crystal, and calculate the diameter of the crystal according to the shooting results. The crystal diameter can be obtained according to the images taken by the two cameras and the relevant image algorithm or directly measured The distance between the first camera 10 and the second camera 11 is obtained. The first camera 10 and the second camera 11 can use existing CCD cameras or other devices that can take pictures.

[0033] See also Figure 3 , Figure 4 The first driving member includes a beam frame 1, which is a frame-shaped frame with a hollowed-out portion. Grooves 14 are provided on both sides of the bottom of the beam frame 1. Partitions 15 are fixed in the middle of the two grooves 14. First screws 18 and second screws 16 are rotatably connected on both sides of the corresponding partitions 15 in the two grooves 14. First screw sleeves 19 are threadedly connected to the two first screws 18, and second screw sleeves 17 are threadedly connected to the two second screw sleeves 16. A first mounting platform 12 is fixed between the two first screw sleeves 19, and a second mounting platform 13 is fixed between the two second screw sleeves 17. The first mounting platform 12 and the second mounting platform 13 are both slidably connected to the bottom of the beam frame 1;

[0034] The first camera 10 is installed below the first mounting platform 12, and the second camera 11 is installed below the second mounting platform 13. The first motor 2 and the second motor 3 are respectively installed on the side of the beam frame 1 corresponding to the first screw rod 18 and the second screw rod 16. The first pulley 21 is fixed to one end of the output shaft of the first motor 2 and one end of the two first screw rods 18 on the corresponding side, and the first pulleys 21 are connected to each other through the first belt 20. The second pulley 23 is fixed to one end of the output shaft of the second motor 3 and one end of the two second screw rods 16 on the corresponding side, and the second pulleys 23 are connected to each other through the second belt 22.

[0035] In this embodiment, the first motor 2 and the second motor 3 are driven and used in conjunction with related components to move the first camera 10 and the second camera 11 respectively, so that the two cameras can move outward or inward, and the camera position can be adjusted to obtain the optimal observation position. When the crystal grows, its diameter will continue to increase. At this time, in order to maintain the accuracy of observation, the camera can be driven by the motor to move synchronously with the crystal growth direction.

[0036] See also Figure 1 , Figure 2 , Figure 5 , Figure 6 The second driving member includes a climbing frame arranged on both sides of the bottom of the beam frame 1, and the climbing frame is composed of two front and rear brackets 4. The two brackets 4 are provided with guide grooves 5 on opposite sides. The upper and lower ends between the two guide grooves 5 are respectively slidably connected with a first slide rail 6 and a second slide rail 7. The climbing frame is provided with a positioning pin 8 and a positioning hole 9. The positioning pin 8 cooperates with the positioning hole 9 to connect and fix the first slide rail 6, the second slide rail 7 and the climbing frame;

[0037] The first slide rail 6 and the second slide rail 7 are both slidably connected with a slider 28, one side of the slider 28 is rotatably connected with a crystal distance measuring mechanism through a base 29, and a lock is provided on the base 29 for locking the crystal distance measuring mechanism so that the distance between it and the crystal is measured at a certain angle. The first slide rail 6 and the second slide rail 7 are both provided with a locking pin 26 and a locking hole 27, and the locking pin 26 and the locking hole 27 cooperate with each other to connect and fix the slider 28 with the corresponding first slide rail 6 and second slide rail 7, thereby fixing and positioning the crystal distance measuring mechanism.

[0038] See also Figure 7The crystal distance measuring mechanism includes a first laser distance meter 24 and a second laser distance meter 25. The first laser distance meter 24 is arranged above the second laser distance meter 25. The first laser distance meter 24 and the second laser distance meter 25 are respectively arranged in two. The two first laser distance meters 24 are respectively installed on the two first slide rails 6, and the two second laser distance meters 25 are respectively installed on the two second slide rails 7. The laser distance meter is rotatably connected to the corresponding slide rail through a base 29. The laser distance meter can rotate in a direction to adjust the distance measuring angle, and can also move on the slide rail to adjust the distance measuring position. The first laser distance meter 24 and the second laser distance meter 25 cooperate with each other to observe the crystal from multiple angles and perform distance measuring work;

[0039] In this embodiment, the crystal 30 includes a narrow neck 301, a shoulder 302, an equal diameter portion 303 and a tail (not shown in the figure), two first laser rangefinders 24 are respectively aligned with the shoulder 302 of the crystal 30, and two second laser rangefinders 25 are respectively aligned with the equal diameter portion of the crystal 30. During the crystal growth process, its diameter is as follows: Figure 7 As shown in , it will gradually become larger. At this time, the distance between the first laser rangefinder 24 and the second laser rangefinder 25 and the crystal 30 will change. The rangefinder measures the distance and records the relevant data. The growth rate of the crystal 30 (i.e., the speed of outward expansion) is calculated by analyzing the distance measurement results. The crystal diameter observation mechanism is adjusted accordingly according to the expansion speed of the crystal growth, so that the first camera 10 and the second camera 11 move synchronously following the crystal growth direction. The edge of the crystal 30 is always observed, so that the real-time diameter and diameter change during the crystal growth process can be obtained.

[0040] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0041] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A multi-angle coupled single crystal furnace crystal diameter observation device, characterized in that: include A crystal diameter observation mechanism, wherein the crystal diameter observation mechanism is used to observe the diameter change during the crystal growth process; A crystal distance measuring mechanism, which is used to detect the distance of outward expansion of the crystal during its growth and to calculate the crystal expansion rate according to the expansion distance; A driving mechanism, wherein the driving mechanism comprises a first driving member for driving the crystal diameter observation mechanism and a second driving member for driving the crystal distance measurement mechanism, wherein the driving mechanism drives and moves the crystal diameter observation mechanism and the crystal distance measurement mechanism through corresponding driving members to obtain an optimal observation result.

2. The multi-angle coupling type single crystal furnace crystal diameter observation device according to claim 1, characterized in that: The crystal diameter observation mechanism comprises a first camera (10) and a second camera (11), wherein the first camera (10) and the second camera (11) are respectively used to capture and photograph the edges of both sides of the crystal, and calculate the diameter of the crystal based on the photographing results.

3. The multi-angle coupling type single crystal furnace crystal diameter observation device according to claim 2, characterized in that: The crystal distance measuring mechanism comprises a first laser distance measuring instrument (24) and a second laser distance measuring instrument (25); the first laser distance measuring instrument (24) is arranged above the second laser distance measuring instrument (25); two of the first laser distance measuring instrument (24) and two of the second laser distance measuring instrument (25) are respectively arranged; the first laser distance measuring instrument (24) and the second laser distance measuring instrument (25) cooperate with each other to observe the crystal from multiple angles and perform distance measuring work.

4. The multi-angle coupling type single crystal furnace crystal diameter observation device according to claim 3, characterized in that: The first driving member comprises a beam frame (1), the beam frame (1) is a frame-shaped frame, the middle of which is hollowed out, grooves (14) are provided on both sides of the bottom of the beam frame (1), a partition (15) is fixed at the middle position of the two grooves (14), a first screw rod (18) and a second screw rod (16) are rotatably connected on both sides of the corresponding partition plates (15) in the two grooves (14), a first screw sleeve (19) is threadedly connected to the two first screw rods (18), a second screw sleeve (17) is threadedly connected to the two second screw rods (16), a first mounting platform (12) is fixed between the two first screw sleeves (19), a second mounting platform (13) is fixed between the two second screw sleeves (17), the first mounting platform (12) and the second mounting platform (13) are both slidably connected to the bottom of the beam frame (1), the first camera (10) is mounted below the first mounting platform (12), and the second camera (11) is mounted below the second mounting platform (13).

5. The multi-angle coupling type single crystal furnace crystal diameter observation device according to claim 4, characterized in that: A first motor (2) and a second motor (3) are respectively installed on the side of the beam frame (1) corresponding to the first screw rod (18) and the second screw rod (16); a first pulley (21) is fixed to one end of the output shaft of the first motor (2) and one end of the two first screw rods (18) on the corresponding side; a plurality of the first pulleys (21) are connected to each other through a first belt (20); a second pulley (23) is fixed to one end of the output shaft of the second motor (3) and one end of the two second screw rods (16) on the corresponding side; a plurality of the second pulleys (23) are connected to each other through a second belt (22).

6. The multi-angle coupling type single crystal furnace crystal diameter observation device according to claim 5, characterized in that: The second driving member comprises a climbing frame arranged on both sides of the bottom of the beam frame (1), the climbing frame is composed of two front and rear brackets (4), the two brackets (4) are provided with guide grooves (5) on opposite sides, the upper and lower ends between the two guide grooves (5) are respectively slidably connected with a first slide rail (6) and a second slide rail (7), the first slide rail (6) and the second slide rail (7) are slidably connected with a slider (28), and one side of the slider (28) is rotatably connected to the crystal distance measurement mechanism through a base (29).

7. The multi-angle coupling type single crystal furnace crystal diameter observation device according to claim 6, characterized in that: The two first laser rangefinders (24) are respectively mounted on the two first slide rails (6), and the two second laser rangefinders (25) are respectively mounted on the two second slide rails (7).

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