Relay lens focusing device

Abstract

The utility model provides a relay lens focusing device which comprises a first part and a second part, the first part is provided with a groove, the second part is provided with a connecting piece, and the connecting piece is clamped in the groove so that the first part can be connected with the second part. The first component is provided with two installation positions, the displacement sensors are installed in the installation positions, the displacement sensors are used for detecting displacement changes of the relay lens, and the displacement sensors are in communication connection with the digital display. According to the relay lens focusing device provided by the utility model, the rotation possibly occurring in the displacement process of the relay lens is considered, the actual displacement change of the relay lens can be accurately reflected through the digital display and the two displacement sensors, the problems of focusing drift and the like in the focusing process are avoided, and the working efficiency and the focusing success rate are remarkably improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of optics, and specifically relates to a relay mirror focusing device. Background Art

[0002] In a lithography machine, the relay mirror assembly is an important component of the illumination system. It is responsible for imaging the illumination field onto the mask surface. The uniformity of the light field directly affects the resolution and critical dimension uniformity of the lithography process, which is an important performance parameter in advanced lithography systems.

[0003] When repairing the focusing optical path of the lithography machine, it is necessary to use a focusing device to adjust the focal length of the relay lens. However, this process often encounters the problem of focus drift. Once it occurs, the focus center needs to be repositioned, which is time-consuming and laborious. After in-depth research, it was found that the problem lies in the focusing device. The existing focusing device uses a displacement sensor to measure the displacement of the lens, but by default, it assumes that no rotation will occur during the displacement process. However, in actual applications, due to the gap and tolerance of the focusing device, rotation is inevitable. This rotation causes the measurement data to be unable to accurately reflect the actual displacement change of the lens, and ultimately leads to the failure of the focus adjustment. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the utility model provides a relay mirror focusing device, including a first component and a second component, the first component has a groove, the second component has a connecting piece, the connecting piece is stuck in the groove, so that the first component is connected to the second component; the first component has two mounting positions, the displacement sensor is installed in the mounting position, the displacement sensor is used to detect the displacement change of the relay mirror, and the displacement sensor is connected to the digital display for communication. The relay mirror focusing device provided by the utility model takes into account the rotation that may occur during the displacement of the relay mirror, and can accurately reflect the actual displacement change of the relay mirror through the digital display and the two displacement sensors, avoiding the problem of focus drift during the focusing process, and significantly improving the work efficiency and the success rate of focusing.

[0005] To achieve the above-mentioned purpose and other related purposes, the utility model provides a relay lens focusing device, comprising a first component and a second component, wherein the upper surface of the first component has a groove, and the second component has a connecting piece, and the connecting piece is clamped in the groove to connect the first component with the second component;

[0006] The first component has two installation positions, which are respectively located on both sides of the groove along a first direction, and the installation positions penetrate the first component along a second direction, and the second direction is perpendicular to the first direction.

[0007] Optionally, two displacement sensors are further included, and the two displacement sensors are respectively located in the two installation positions.

[0008] Optionally, a digital display is also included, and the digital display is communicatively connected to the two displacement sensors.

[0009] Optionally, the second component further includes a fixing member and a connecting shaft, and along the second direction, the connecting member, the connecting shaft and the fixing member are arranged in sequence.

[0010] Optionally, the second component further includes an adjusting piece, and the adjusting piece is located on the connecting shaft, and the two are threadedly connected.

[0011] Optionally, the adjusting member is a circular ring structure with a side wall having a plurality of circular holes, and the plurality of circular holes are evenly arranged along the circumferential direction.

[0012] Optionally, a first mounting piece is provided on a surface of the fixing piece, and the second component is mounted on the relay lens via the first mounting piece.

[0013] Optionally, a gap is provided inside the first component, the gap extends from the mounting position to the upper surface of the first component, and an angle between an extending direction of the gap and the first direction is less than 90°.

[0014] Optionally, a fastener is provided on the upper surface of the first component, and the fastener passes through the gap; in the first direction, the fastener is located on a side of the installation position away from the groove.

[0015] Optionally, a mounting hole is provided on the upper surface of the first component, and the mounting hole is used to install a second mounting piece, and the first component is mounted on the relay lens through the second mounting piece.

[0016] The relay mirror focusing device provided by the utility model has at least the following beneficial effects:

[0017] The relay mirror focusing device provided by the utility model has two installation positions, so two displacement sensors are set up, taking into account the rotation that may occur during the displacement of the relay mirror. Through the digital display and the two displacement sensors, the actual displacement changes of the relay mirror can be accurately reflected, avoiding problems such as focus drift during the focusing process, and significantly improving work efficiency and focusing success rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Shown is a top view of a relay lens focusing device provided in an embodiment.

[0019] Figure 2 A front view of a first component provided for an embodiment is shown.

[0020] Figure 3 A top view of a second component provided for an embodiment is shown.

[0021] Component number description

[0022] 1 First part

[0023] 2 Second component

[0024] 3 Grooves

[0025] 4 Connectors

[0026] 5 Mounting position

[0027] 6 Displacement Sensor

[0028] 7 Gap

[0029] 8 Fasteners

[0030] 9 Mounting holes

[0031] 10 Connecting shaft

[0032] 11 Fixing parts

[0033] 12 Adjustment parts

[0034] 13 First mounting piece

[0035] 14 Waist round hole

[0036] 15 Digital Display DETAILED DESCRIPTION

[0037] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0038] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner. Although the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation, the form, quantity, positional relationship and proportion of each component in actual implementation can be changed at will under the premise of realizing the technical solution of this party, and the component layout form may also be more complicated.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0040] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, unless otherwise specified, features defined as "first" and "second" may explicitly or implicitly include one or more of the features; "plurality" means two or more. The term "including" and any variation thereof means non-exclusive inclusion, and one or more other features, integers, steps, operations, units, components and / or combinations thereof may exist or be added.

[0041] In addition, terms indicating orientation or positional relationships, such as “center,” “lateral,” “up,” “down,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inside,” and “outside,” are described based on the orientation or relative positional relationships shown in the accompanying drawings and are merely simplified descriptions for the convenience of describing the present application. They do not indicate that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limitations on the present application.

[0042] In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be internally connected between two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0043] The present application is described in detail below with reference to the accompanying drawings and optional embodiments. It should be noted that, under the premise of no conflict, the embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0044] Example

[0045] This embodiment provides a relay lens focusing device, such as Figure 1 As shown, it includes a first component 1 and a second component 2, combined Figure 2 and Figure 3 As shown, the upper surface of the first component 1 has a groove 3 , and the second component 2 has a connecting member 4 , which is stuck in the groove 3 to connect the first component 1 with the second component 2 .

[0046] like Figure 2 As shown, the first component 1 has two mounting positions 5, and the two mounting positions 5 are arranged along a first direction ( Figure 1 and Figure 2 The X-axis direction shown) is located on both sides of the groove 3, and the mounting position 5 is along the second direction ( Figure 1 and Figure 2The Y-axis direction shown in the figure) passes through the first component 1. As an example, the longitudinal cross section of the mounting position 5 is circular, and the mounting position 5 is used to mount the displacement sensor 6.

[0047] like Figure 1 As shown, two displacement sensors 6 pass through two installation positions 5 respectively, and the displacement sensors 6 are in communication connection with the digital display 15. During the focusing process, the displacement sensor 6 is used to monitor the displacement change of the relay lens, and the digital display 15 can display the displacement change of the relay lens.

[0048] like Figure 2 As shown, the first component 1 has a gap 7 inside, and the gap 7 extends from the mounting position 5 to the upper surface of the first component 1. The extending direction of the gap 7 is parallel to the first direction ( Figure 2 The angle between the two axes (in the X-axis direction shown) is less than 90°, that is, the gap 7 is arranged tilted.

[0049] like Figure 2 As shown, the upper surface of the first component 1 is provided with a fastener 8, in the first direction ( Figure 2 In the X-axis direction shown in FIG. 1 , the fastener 8 is located on the side of the mounting position 5 away from the groove 3; Figure 2 In the Z-axis direction, the fastener 8 penetrates the gap 7. The displacement sensor 6 is placed in the mounting position 5, and the fastener 8 is tightened to reduce the width of the gap 7, thereby fixing the displacement sensor 6 in the mounting position 5.

[0050] like Figure 1 As shown, the upper surface of the first component 1 is provided with a mounting hole 9, in the first direction ( Figure 1 In the X-axis direction shown in the figure, the mounting hole 9 is located on the side of the fastener 8 away from the mounting position 5, and the mounting hole 9 is used to install the second mounting member (not shown in the figure), and the first component 1 is installed on the relay lens through the second mounting member (not shown in the figure). As an example, the mounting hole 9 can be a threaded hole, and the second mounting member can be a screw that matches the threaded hole.

[0051] like Figure 3 As shown, along the second direction ( Figure 3 The second component 2 includes a connecting member 4, a connecting shaft 10 and a fixing member 11 which are connected in sequence, and an adjusting member 12 is arranged on the connecting shaft 10.

[0052] As an example, the connecting member 4 is a square-shaped structure, and its size is adapted to the groove 3 so that the connecting member 4 is stuck in the groove 3, thereby connecting the first component 1 and the second component 2.

[0053] As an example, the connecting shaft 10 has an external thread, and the adjusting member 12 has an internal thread, and the two are threadedly connected. By rotating the adjusting member 12, the distance between the first component 1 and the fixing member 11 is adjusted, thereby achieving focusing.

[0054] As an example, the adjusting member 12 is a circular ring structure with a plurality of circular holes on its side wall. The plurality of circular holes are evenly arranged along the circumference and can be inserted into the circular holes with the aid of corresponding tools, so that the adjusting member 12 can rotate on the connecting shaft 10 .

[0055] As an example, the surface of the fixing member 11 has a first mounting member 13 and a waisted hole 14 , the first mounting member 13 is located in the waisted hole 14 , and the first mounting member 13 can move along the length direction of the waisted hole 14 , and the second component 2 is mounted on the relay lens through the first mounting member 13 .

[0056] The working principle of the relay mirror focusing device provided in this embodiment is as follows:

[0057] First, the connecting member 4 is clamped in the groove 3 to connect the first component 1 with the second component 2; the displacement sensor 6 is installed in the mounting position 5, and the displacement sensor 6 is zeroed on the digital display 15; the first component 1 is installed on the relay lens through the second mounting member (not shown in the figure), and the second component 2 is installed on the relay lens through the first mounting member 13.

[0058] Next, during the focusing process, the adjusting member 12 is rotated, and the distance between the first component 1 and the fixing member 11 increases, so the displacement sensor 6 needs to be moved in the installation position 5 so that one end of the displacement sensor 6 is against the side wall of the fixing member 11. During the movement, the displacement sensor 6 may rotate slightly, so after the movement is completed, the displacement sensor 6 needs to be further adjusted until the values ​​of the two displacement sensors 6 displayed on the digital display 15 are consistent, and the focusing is completed.

[0059] The relay lens focusing device provided in this embodiment includes a first component and a second component, the first component has a groove, the second component has a connecting piece, the connecting piece is stuck in the groove, so that the first component is connected to the second component; the first component has two mounting positions, the displacement sensor is installed in the mounting position, the displacement sensor is used to detect the displacement change of the relay lens, and the displacement sensor is connected to the digital display for communication. The relay lens focusing device provided in this embodiment takes into account the rotation that may occur during the displacement of the relay lens. Through the digital display and the two displacement sensors, the actual displacement change of the relay lens can be accurately reflected, avoiding the problem of focus drift during the focusing process, and significantly improving the work efficiency and the success rate of focusing.

[0060] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A relay lens focusing device, characterized in that: The invention comprises a first component and a second component, wherein the upper surface of the first component has a groove, and the second component has a connecting piece, and the connecting piece is stuck in the groove to connect the first component with the second component; The first component has two installation positions, which are respectively located on both sides of the groove along a first direction, and the installation positions penetrate the first component along a second direction, and the second direction is perpendicular to the first direction.

2. The relay lens focusing device according to claim 1, characterized in that: It also includes two displacement sensors, which are respectively located in the two installation positions.

3. The relay lens focusing device according to claim 2, characterized in that: A digital display is also included, and the digital display is communicatively connected with the two displacement sensors.

4. The relay lens focusing device according to claim 1, characterized in that: The second component further includes a fixing member and a connecting shaft. Along the second direction, the connecting member, the connecting shaft and the fixing member are arranged in sequence.

5. The relay lens focusing device according to claim 4, characterized in that: The second component also includes an adjusting piece, and the adjusting piece is located on the connecting shaft, and the two are threadedly connected.

6. The relay lens focusing device according to claim 5, characterized in that: The adjusting member is a circular ring structure, and a plurality of circular holes are arranged evenly along the circumferential direction on the side wall of the adjusting member.

7. The relay lens focusing device according to claim 4, characterized in that: The surface of the fixing part has a first mounting part, and the second component is mounted on the relay mirror through the first mounting part.

8. The relay lens focusing device according to claim 1, characterized in that: The first component has a gap inside, the gap extends from the mounting position to the upper surface of the first component, and the angle between the extension direction of the gap and the first direction is less than 90°.

9. The relay lens focusing device according to claim 8, characterized in that: A fastener is disposed on the upper surface of the first component and passes through the gap; in the first direction, the fastener is located at a side of the installation position away from the groove.

10. The relay lens focusing device according to claim 9, characterized in that: The upper surface of the first component is provided with a mounting hole, and the mounting hole is used to mount a second mounting piece, and the first component is mounted on the relay lens through the second mounting piece.

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