Spraying device and deposition equipment

Abstract

The utility model discloses a spraying device and deposition equipment, the spraying device comprises a door body, a bracket, a spraying piece and a supporting mechanism, the bracket is located on one side of the door body and is arranged close to the lower end of the door body; the spraying piece is arranged on one side of the door body and located above the bracket, the spraying piece is in sliding connection with the door body, and the sliding direction is in the direction close to or away from the door body; the supporting mechanism is used for supporting the spraying part and comprises a mounting seat arranged at the lower end of the spraying part, and the mounting seat is in rolling connection or sliding connection with the bracket. The lower end of the spraying piece is supported by the supporting mechanism, deflection caused by drooping due to dead weight can be avoided, the sealing performance of butt joint of the spraying piece and the gas circuit is guaranteed when the door body is closed, and leakage of noble gas can be reduced. When the spraying plate slides, the mounting base and the bracket slide or roll synchronously, and it is guaranteed that the supporting mechanism can conduct supporting stably.

Description

Technical Field

[0001] This application relates to the field of atomic layer deposition, and particularly relates to a spraying device and a deposition apparatus. Background Art

[0002] In a photovoltaic atomic layer deposition apparatus, the deposition reaction mainly occurs in a stainless steel chamber. The chamber consists of an inner cavity and an outer cavity. There is a heating plate between the inner cavity and the outer cavity to heat the chamber, and the outer cavity is cooled by cooling water. In the inner cavity, the workpiece is deposited by spraying. The spraying method is to supply gas from the front end of the inner cavity through a spraying plate and extract gas at the tail of the inner cavity to ensure that the noble gas can flow uniformly in the inner cavity. As the size of the workpiece (photovoltaic panel) increases, the reaction chamber also becomes larger. To achieve film thickness uniformity and improve production efficiency, the size of the spraying plate also increases accordingly, and thus the spraying plate becomes heavier. During actual use, the spraying plate will sag, and the spraying plate itself will deflect at a certain angle. The poor connection between the spraying plate and the noble gas pipeline will cause the reaction gas to leak, and in severe cases, it will affect the flow field in the inner cavity, thereby affecting the process effect. Summary of the Utility Model

[0003] This application provides a spraying device and a deposition apparatus, which can avoid the spraying plate from sagging and reduce the leakage of reaction gas.

[0004] This application provides a spraying device, including:

[0005] A door body;

[0006] A bracket, located on one side of the door body and close to the lower end of the door body;

[0007] A spraying member, arranged on one side of the door body and above the bracket, the spraying member is slidably connected to the door body, and the sliding direction is along the direction of approaching or departing from the door body;

[0008] A support mechanism for supporting the spraying member, the support mechanism includes a mounting seat arranged at the lower end of the spraying member, and the mounting seat is in rolling connection or sliding connection with the bracket.

[0009] In some embodiments, the support mechanism includes a slide rail arranged on the bracket and a slider arranged on the mounting seat, and the slide rail is adapted to the slider.

[0010] In some embodiments, the support mechanism further includes a rolling member arranged on the mounting seat, and the rolling member can roll on the bracket.

[0011] In some embodiments, the rolling member includes a rolling bearing rotatably arranged on the mounting seat.

[0012] In some embodiments, a receiving groove is provided at the upper part of the mounting base. The receiving groove is adapted to the spraying member. The mounting base is provided with a receiving cavity. The support mechanism further includes a shaft body disposed in the receiving cavity. The rolling bearing is disposed on the shaft body and is located in the receiving cavity.

[0013] In some embodiments, the spraying device further includes a bearing plate disposed on the bracket. The bearing plate is used to bear the rolling bearing.

[0014] In some embodiments, the support mechanism further includes a height-adjusting member threadedly connected to the mounting base. The height-adjusting member is disposed at the bottom of the receiving groove and is used to receive and abut against the spraying member.

[0015] In some embodiments, the spraying device further includes a sliding bearing disposed on the door body, and a guide rod with one end disposed on the spraying member. The guide rod cooperates with the sliding bearing.

[0016] In some embodiments, the spraying device further includes an elastic member sleeved outside the guide rod. One end of the elastic member abuts against the spraying member, and the other end abuts against the door body.

[0017] The present application also provides a deposition device, including the above-mentioned spraying device, and a furnace body for accommodating the bracket. The door body is used to dock with the furnace body to close the furnace body.

[0018] The spraying device in the present application includes a door body, a bracket, a spraying member, and a support mechanism. The bracket is located on one side of the door body and is disposed near the lower end of the door body. The spraying member is disposed on one side of the door body and above the bracket. The spraying member is slidably connected to the door body, and the sliding direction is along the direction of approaching or departing from the door body. The support mechanism is used to support the spraying member. The support mechanism includes a mounting base disposed at the lower end of the spraying member. The mounting base is in rolling connection or sliding connection with the bracket. The lower end of the spraying member is supported by the support mechanism, which can avoid deflection caused by self-weight sagging, ensure the sealing performance of the connection between the spraying member and the gas path when the door body is closed, and reduce the leakage of precious gas. When the spraying plate slides, the mounting base and the bracket slide or roll synchronously, ensuring that the support mechanism can stably support. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic structural diagram of the spraying device in an embodiment of the present application;

[0020] Figure 2 is Figure 1 a side view of the spraying device in the embodiment;

[0021] Figure 3 is Figure 1 a schematic structural diagram of the support mechanism in the embodiment;

[0022] Figure 4 This is a schematic structural diagram of a deposition device in an embodiment of the present application.

[0023] Label description:

[0024] 10. Door body; 20. Spraying member; 21. Sliding bearing; 22. Guide rod; 23. Elastic member; 30. Bracket; 40. Support mechanism; 41. Receiving groove; 42. Screw; 43. Height-adjusting member; 44. Accommodating groove; 45. Rolling bearing; 46. Shaft body; 50. Furnace body.

[0025] The realization of the purpose, functional features and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. Specific embodiments

[0026] Next, the solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present application.

[0027] It should be noted that all directional indications such as up, down, left, right, front, back... in the embodiments of the present application are only used to explain the relative positional relationship and movement conditions between components in a specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indications will also change accordingly.

[0028] It should also be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may be an intermediate element at the same time. When an element is referred to as "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0029] In addition, the descriptions involving "first", "second", etc. in the present application are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement it. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present application.

[0030] The present application proposes a spraying device, referring to Figures 1 to 4, the spraying device includes: a door body 10; a bracket 30 located on one side of the door body 10 and close to the lower end of the door body 10; a spraying member 20 provided on one side of the door body 10 and above the bracket 30, the spraying member 20 is slidably connected to the door body 10, and the sliding direction is along the direction of approaching or departing from the door body 10; a support mechanism 40 for supporting the spraying member 20, the support mechanism 40 includes a mounting seat provided at the lower end of the spraying member 20, and the mounting seat is connected to the bracket 30 in a rolling or sliding manner. In this embodiment, the upper end of the mounting seat is connected to the lower end of the spraying member 20, and a sliding assembly, such as a slide rail and a slider, can be provided between the mounting seat and the bracket 30; the sliding assembly includes a slide rail provided on the bracket 30 and a slider provided on the mounting seat, and the slide rail is adapted to the slider.

[0031] Of course, a rolling assembly, such as a universal wheel and a rolling bearing 45, can also be provided on the mounting seat. The lower end of the spraying member 20 is supported by the support mechanism 40, which can avoid deflection caused by self-weight sagging, ensure the sealing performance of the connection between the spraying member 20 and the gas path when the door body 10 is closed, and reduce the leakage of precious gas. When the spraying member 20 slides relative to the door body 10, the mounting seat can slide or roll relative to the bracket 30 to ensure that the support mechanism 40 can stably support.

[0032] In some embodiments, referring to Figures 1 to 4 , the rolling member includes a rolling bearing 45 rotatably provided on the mounting seat. A receiving groove 41 is provided at the upper part of the mounting seat, the receiving groove 41 is adapted to the spraying member 20, the mounting seat is provided with a receiving groove 44, and the support mechanism further includes a shaft body 46 provided in the receiving groove 44. The rolling bearing 45 is provided on the shaft body 46 and is located in the receiving groove 44. In this embodiment, the spraying member 20 can be a spraying plate arranged parallel to the door body 10, and the length direction of the receiving groove 41 is perpendicular to the length direction of the receiving groove 44. The lower end of the spraying plate can be inserted into the receiving groove 41, and a screw 42 is further provided on the side wall of the receiving groove 41. By screwing the screw 42 so that its end abuts against the spraying plate, the mounting seat can be fixed on the spraying plate. The shaft body 46 penetrates through the two side walls of the receiving groove 44 and is fixed by a snap ring. The rolling bearing 45 is provided in the receiving groove 44, the inner ring thereof cooperates with the shaft body 46, and the outer ring can roll as the spraying plate moves.

[0033] In addition, the support mechanism 40 further includes a height-adjusting member 43 threadedly connected to the mounting base. The height-adjusting member 43 is disposed at the bottom of the receiving groove 41 and is used to receive and support the spraying member 20. Two extending portions are formed by the bottom of the receiving groove 41 extending outward along the length direction, and the height-adjusting member 43 is disposed on the extending portions. When installing the support mechanism 40, the mounting base and the spraying plate can be inserted into each other first, and the rolling bearing 45 is supported by the bracket 30. Then, by screwing the height-adjusting member 43, the height of the height-adjusting member 43 in the receiving groove 41 can be adjusted to ensure that the height-adjusting member 43 can support the spraying plate and prevent the spraying plate from sagging. Finally, the screw 42 on the side wall of the receiving groove 41 is tightened to fix the mounting base on the spraying plate. The height-adjusting member 43 can penetrate through the bottom of the receiving groove 41, and an internal hexagonal hole is provided at the lower end for screwing and height adjustment. By providing the height-adjusting member 43, spraying plates of different heights can be adapted, and the support mechanism 40 has a large adaptation range.

[0034] Further, the spraying device further includes a bearing plate disposed on the bracket 30, and the bearing plate is used to bear the rolling bearing 45. Since the door body 10 is frequently opened and closed, the corresponding spraying plate also slides frequently. The rolling bearing 45 and the bearing plate can be made of high-strength stainless steel material to reduce material wear. In some embodiments, the spraying device further includes a sliding bearing 21 disposed on the door body 10, and a guide rod 22 with one end disposed on the spraying member 20. The guide rod 22 cooperates with the sliding bearing 21. The spraying device further includes an elastic member 23 sleeved outside the guide rod 22. One end of the elastic member 23 abuts against the spraying member 20, and the other end abuts against the door body 10. The elastic member 23 can be a spring, and the elastic force of the spring can make the spraying member 20 away from the door body 10. When the door body 10 is closed, the elastic force can also ensure that the spraying member 20 is in close contact with the gas supply pipeline on the furnace body 50, further reducing the leakage of precious gas.

[0035] It should be noted that the guide rod 22 can be disposed near the two side edges of the spraying plate. The support mechanism 40 is disposed directly below the guide rod 22. Specifically, a pair can be provided and are respectively close to the two sides of the spraying plate to ensure balanced stress on both sides of the spraying plate and reduce the friction between the guide rod 22 and the linear bearing.

[0036] This application also proposes a deposition device. Referring to Figures 1 to 4 , the deposition device includes the above-mentioned spraying device, and a furnace body 50 for accommodating the bracket 30. The door body 10 is used to dock with the furnace body 50 to close the furnace body 50. One end of the furnace body 50 is provided with an opening for the bracket 30 to enter and exit, and the door body 10 is used to close the opening. An air path for docking with the spraying plate is also provided at the opening. When the door body 10 is closed, the spraying plate is docked with the air path, and the precious gas can be transported to the spraying plate through the air path. When the spraying plate is docked with the air path, it slides towards the door body 10, and the spring is compressed. The elastic force is used for the spraying plate to dock with the air path. When the spraying plate slides towards the door body 10, the lower support mechanism 40 plays a role of rolling support and guiding.

[0037] In the embodiment of the present application, the specific working principle of the spraying device is as follows:

[0038] The spraying device includes a door body 10, a bracket 30, a spraying member 20 and a support mechanism 40. The bracket 30 is located on one side of the door body 10 and is arranged near the lower end of the door body 10. The spraying member 20 is arranged on one side of the door body 10 and above the bracket 30. The spraying member 20 is slidably connected to the door body 10, and the sliding direction is along the direction of approaching or departing from the door body 10. The support mechanism 40 is used to support the spraying member 20. The support mechanism 40 includes a mounting seat arranged at the lower end of the spraying member 20 and a rolling member arranged on the mounting seat. The lower end of the spraying member 20 is supported by the support mechanism 40, which can avoid deflection caused by self-weight sagging, ensure the sealing performance of the connection between the spraying member 20 and the gas path when the door body 10 is closed, and reduce the leakage of precious gas. When the spraying plate slides, the rolling member can follow and roll on the bracket 30 to ensure that the support mechanism 40 can stably support.

[0039] The above are only partial or preferred embodiments of the present application. Neither the text nor the drawings can limit the protection scope of the present application. Any equivalent structural transformation made by using the content of the specification and drawings of the present application under the overall concept of the present application, or any direct / indirect application in other related technical fields is included in the protection scope of the present application.

Claims

1. A spray device, characterized in that: include: Door body; A bracket is located on one side of the door body and is arranged close to the lower end of the door body; A spraying member is provided on one side of the door body and is located above the bracket, the spraying member is slidably connected to the door body, and the sliding direction is along the direction of approaching or moving away from the door body; The supporting mechanism is used to support the spraying member, and the supporting mechanism includes a mounting seat arranged at the lower end of the spraying member, and the mounting seat is rollingly connected or slidingly connected to the bracket.

2. The spray device according to claim 1, characterized in that: The supporting mechanism comprises a slide rail arranged on the bracket and a slider arranged on the mounting seat, and the slide rail is adapted to the slider.

3. The spray device according to claim 1, characterized in that: The supporting mechanism further comprises a rolling member arranged on the mounting seat, and the rolling member can roll on the bracket.

4. The spray device according to claim 3, characterized in that: The rolling element includes a rolling bearing rotatably arranged on the mounting seat.

5. The spray device according to claim 4, characterized in that: The upper part of the mounting seat is provided with a receiving groove, the receiving groove is adapted to the spraying member, the mounting seat is provided with a receiving groove, the supporting mechanism also includes a shaft body arranged in the receiving groove, the rolling bearing is arranged on the shaft body and is located in the receiving groove.

6. The spray device according to claim 4, characterized in that: The spray device further comprises a bearing plate arranged on the bracket, and the bearing plate is used for bearing the rolling bearing.

7. The spray device according to claim 5, characterized in that: The support mechanism also includes a height-adjusting member threadedly connected to the mounting seat, and the height-adjusting member is arranged at the bottom of the receiving groove and is used to receive and support the spraying member.

8. The spray device according to claim 1, characterized in that: The spray device further comprises a sliding bearing arranged on the door body, and a guide rod with one end arranged on the spray member, and the guide rod cooperates with the sliding bearing.

9. The spray device according to claim 8, characterized in that: The spray device further comprises an elastic member sleeved outside the guide rod, one end of the elastic member abuts against the spray member, and the other end of the elastic member abuts against the door body.

10. A deposition device, characterized in that: The invention comprises the spray device according to any one of claims 1 to 9, and a furnace body for accommodating the bracket, wherein the door body is used to dock with the furnace body to close the furnace body.

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