Vacuum sintering furnace with replaceable heating pipes

Abstract

The utility model relates to the technical field of vacuum sintering, in particular to a vacuum sintering furnace with a replaceable heating pipe, which is characterized in that a first gate valve is arranged at the inlet end of a preheating zone through a sealing plate, a second gate valve is arranged at the outlet end of the preheating zone through a sealing plate, and a second gate valve is arranged at the inlet end of a welding zone through a sealing plate; the outlet end of the welding area is provided with a third gate valve through a sealing plate, the inlet end of the first cooling area is provided with a third gate valve through a sealing plate, the outlet end of the first cooling area is provided with a fourth gate valve through a sealing plate, the preheating area and the welding area are each evenly provided with a plurality of heating sleeves, and the heating sleeves are electrically connected with an indicator light and a fuse. The service life of the heating pipe is prolonged, and the heating pipe can be replaced without shutdown.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering, in particular to a vacuum sintering furnace with replaceable heating tubes. Background Art

[0002] A vacuum gate valve is used to isolate a vacuum pipeline and block the flow of air, and is an important vacuum component. When semiconductor chips are packaged, it needs to be carried out in a vacuum environment, and generally can be realized in the form of a vacuum reflow soldering furnace. The existing vacuum reflow soldering furnace has multiple temperature zones, which are divided into a preheating zone, a soldering zone and a cooling zone. Among them, the preheating zone is protected by nitrogen and is not a completely low-oxygen environment; the soldering zone is a vacuum environment. After the chips are soldered, the door connecting the soldering zone and the cooling zone is opened, and the chips enter the cooling zone from the soldering zone. At the same time, the door connecting the soldering zone and the preheating zone is opened, and the preheated chips are sent into the soldering zone for soldering. In this way, when completing one soldering process and proceeding to the next soldering process, the front and rear doors of the soldering zone need to be opened simultaneously, and the vacuum environment of the soldering zone will be damaged in the cooling zone and the preheating zone. When the heating tube of the existing vacuum sintering furnace is damaged, it needs to be shut down for replacement, which affects the working efficiency and the service life of the heating tube is low. Summary of the Invention

[0003] The utility model provides a vacuum sintering furnace with replaceable heating tubes to solve the problem that when the heating tube of the existing vacuum sintering furnace is damaged, it needs to be shut down for replacement, which affects the working efficiency.

[0004] The utility model provides a vacuum sintering furnace with replaceable heating tubes, which includes a first gate valve, a second gate valve, a third gate valve, a fourth gate valve, a heating sleeve, an indicator light, a fuse protector, a plurality of sealing plates, a preheating zone, a soldering zone and a first cooling zone; the inlet end of the preheating zone is provided with the first gate valve through the sealing plate, the outlet end of the preheating zone is provided with the second gate valve through the sealing plate, the inlet end of the soldering zone is provided with the second gate valve through the sealing plate, the outlet end of the soldering zone is provided with the third gate valve through the sealing plate, the inlet end of the first cooling zone is provided with the third gate valve through the sealing plate, the outlet end of the first cooling zone is provided with the fourth gate valve through the sealing plate, the preheating zone and the soldering zone are respectively and evenly provided with a plurality of the heating sleeves, and the heating sleeves are electrically connected to the indicator light and the fuse protector.

[0005] According to the vacuum sintering furnace with replaceable heating tubes of the utility model, it further includes a lifting mechanism, and the lifting mechanism is arranged below the preheating zone, the soldering zone and the first cooling zone.

[0006] The vacuum sintering furnace with replaceable heating tubes according to the present utility model further includes a second cooling zone and a fifth gate valve. The second cooling zone is arranged in the next working station area of the first cooling zone. The inlet end of the second cooling zone is connected to the fourth gate valve, and the outlet end of the second cooling zone is connected to the fifth gate valve.

[0007] In the vacuum sintering furnace with replaceable heating tubes according to the present utility model, driving wheels and guide wheels are arranged on both inner sides of the preheating zone, the welding zone and the first cooling zone.

[0008] In the vacuum sintering furnace with replaceable heating tubes according to the present utility model, transmission mechanisms are arranged on both outer sides of the preheating zone, the welding zone and the first cooling zone, and the transmission mechanisms drive the driving wheels.

[0009] In the vacuum sintering furnace with replaceable heating tubes according to the present utility model, the heating sleeve is a quartz glass heating sleeve.

[0010] In the vacuum sintering furnace with replaceable heating tubes according to the present utility model, the transmission mechanism is a gear, a belt or a chain.

[0011] In the vacuum sintering furnace with replaceable heating tubes according to the present utility model, the preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0012] The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage;

[0013] The first cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

[0014] In the vacuum sintering furnace with replaceable heating tubes according to the present utility model, the heating sleeve is connected to a switch.

[0015] In the vacuum sintering furnace with replaceable heating tubes according to the present utility model, the indicator light is an off and green color-changing indicator light. Being off indicates a fault, and being green indicates normal.

[0016] In the present utility model, the heating tube is electrically connected to the indicator light and the fuse. When the current is too large, the indicator light goes off and the fuse melts, then the fuse is directly replaced, improving the service life of the heating tube. When the indicator light goes off, but the fuse does not melt, the heating tube is replaced, achieving non-stop replacement of the heating tube, thus improving the working efficiency of the sintering furnace. The sheet metal shell is made of transparent plexiglass, and the indicator light can be clearly seen. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a schematic front view structure diagram of a vacuum sintering furnace;

[0019] Figure 2 It is a schematic perspective view structure diagram of a preheating zone;

[0020] Figure 3 It is a schematic perspective view structure diagram of the cavity of the preheating zone;

[0021] Figure 4 It is a schematic front view structure diagram of a heating sleeve;

[0022] Reference numerals: 1, first gate valve; 2, second gate valve; 3, third gate valve; 4, fourth gate valve; 5, fifth gate valve; 6, preheating zone; 7, welding zone; 8, first cooling zone; 9, second cooling zone; 10, quartz sleeve; 11, heating tube; 12, indicator light; 13, fuse; 61, first sealing plate; 62, upper cover of the sealing cavity; 63, cavity; 64, lifting mechanism; 65, driving wheel; 66, guide wheel; 67, heating plate; 68, second sealing plate; 69, heat dissipation water tank. Specific embodiments

[0023] The following will further describe in detail the embodiments of the present invention in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0024] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0025] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0026] In the embodiments of the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0027] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0028] The following is combined with Figures 1-4Describes a vacuum sintering furnace with replaceable heating tubes according to an embodiment of the present utility model, including a first gate valve 1, a second gate valve 2, a third gate valve 3, a fourth gate valve 4, a heating sleeve, an indicator light 12, a fuse protector 13, multiple sealing plates, a preheating zone 6, a welding zone 7, and a first cooling zone 8; the inlet end of the preheating zone 6 is provided with a first gate valve 1 through a sealing plate, the outlet end of the preheating zone 6 is provided with a second gate valve 2 through a sealing plate, the inlet end of the welding zone 7 is provided with a second gate valve 2 through a sealing plate, the outlet end of the welding zone 7 is provided with a third gate valve 3 through a sealing plate, the inlet end of the first cooling zone 8 is provided with a third gate valve 3 through a sealing plate, the outlet end of the first cooling zone 8 is provided with a fourth gate valve 4 through a sealing plate, the outlet end of the first cooling zone is provided with the fourth gate valve through the sealing plate, multiple heating sleeves are evenly arranged in the preheating zone 6 and the welding zone 7 respectively, and the heating sleeves are electrically connected to the indicator light 12 and the fuse protector 13. The fuse protector 13 is preferably a fuse 13.

[0029] See Figure 3 As shown, the sealing plates are a first sealing plate 61 and a second sealing plate 68, which are the same sealing plates. A heating sleeve is provided below the heating plate 76. A heating sleeve is also provided inside the sealing cavity upper cover 62. The heating sleeve spans the cavity 63. A heat dissipation water tank 69 is arranged around the periphery of the cavity 63.

[0030] In this embodiment, the heating sleeve includes a quartz sleeve 10 and a heating tube 11; the heating tube 11 is sleeved inside the quartz sleeve 10 and both ends of the heating tube 11 protrude, and one protruding end of the heating tube 11 is electrically connected to the indicator light 12 and the fuse 13. The indicator light 12 and the fuse 13 are connected in series electrically. It can be that the heating tube 11 is first electrically connected to the indicator light 12 and then to the fuse 13, or the heating tube 11 is first electrically connected to the fuse 13 and then to the indicator light 12.

[0031] In the above embodiment, the indicator light 12 is an off and green color-changing indicator light. Off indicates a fault and green indicates normal.

[0032] When the current is too large, the indicator light 12 is off and the fuse 13 melts, which improves the service life of the heating tube 11. When the indicator light 12 is off, but the fuse 13 does not melt, then replace the heating tube 11, achieving the replacement of the heating tube 11 without stopping the machine, thus improving the working efficiency of the sintering furnace. The sheet metal housing is made of transparent plexiglass, and the indicator light 12 can be clearly seen. The heating sleeve is a quartz glass heating sleeve. The heating sleeve is connected to a switch, and each heating sleeve can be connected to a switch one by one. The switch is preferably an air switch, which is convenient for centralized management.

[0033] In the above embodiment, it further includes a lifting mechanism 64, and a lifting mechanism 64 is arranged below the preheating zone 6, the welding zone 7, and the first cooling zone 8.

[0034] In this embodiment, a second cooling zone 9 and a fifth plug valve 5 are further included. The second cooling zone 9 is arranged in the next working station area of the first cooling zone 8. The inlet end of the second cooling zone 9 is connected to the fourth plug valve 4, and the outlet end of the second cooling zone 9 is connected to the fifth plug valve 5.

[0035] In the above embodiment, driving wheels 65 and guide wheels 66 are arranged on both inner sides of the preheating zone 6, the welding zone 7, and the first cooling zone 8.

[0036] In the above embodiment, a transmission mechanism is arranged on both outer sides of the preheating zone 9, the welding zone 7, and the first cooling zone 8, and the transmission mechanism drives the guide wheels 66.

[0037] In the above embodiment, the transmission mechanism is a gear, a belt, or a chain.

[0038] In the above embodiment, the preheating zone 6 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating stage;

[0039] The welding zone 7 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece welding stage;

[0040] The first cooling zone 8 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece cooling stage.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum sintering furnace with replaceable heating tube, characterized in that: It includes a first gate valve, a second gate valve, a third gate valve, a fourth gate valve, a heating sleeve, an indicator light, a fuse protector, multiple sealing plates, a preheating zone, a welding zone and a first cooling zone; the inlet end of the preheating zone is provided with a first gate valve through the sealing plate, the outlet end of the preheating zone is provided with a second gate valve through the sealing plate, the inlet end of the welding zone is provided with the second gate valve through the sealing plate, the outlet end of the welding zone is provided with the third gate valve through the sealing plate, the inlet end of the first cooling zone is provided with the third gate valve through the sealing plate, the outlet end of the first cooling zone is provided with the fourth gate valve through the sealing plate, the preheating zone and the welding zone are respectively and evenly provided with multiple heating sleeves, and the heating sleeves are electrically connected to the indicator light and the fuse protector.

2. The vacuum sintering furnace with replaceable heating tube according to claim 1, characterized in that: It also includes a lifting mechanism, which is arranged below the preheating zone, the welding zone and the first cooling zone.

3. The vacuum sintering furnace with replaceable heating tube according to claim 1, characterized in that: It also includes a second cooling zone and a fifth gate valve. The second cooling zone is arranged in the next workstation of the first cooling zone. The inlet end of the second cooling zone is connected to the fourth gate valve, and the outlet end of the second cooling zone is connected to the fifth gate valve.

4. The vacuum sintering furnace with replaceable heating tube according to claim 1, characterized in that: Power wheels and guide wheels are arranged on both sides of the interior of the preheating zone, the welding zone and the first cooling zone.

5. The vacuum sintering furnace with replaceable heating tube according to claim 4, characterized in that: Transmission mechanisms are provided on both sides of the outside of the preheating zone, the welding zone and the first cooling zone, and the transmission mechanisms drive the power wheel.

6. The vacuum sintering furnace with replaceable heating tube according to claim 1, characterized in that: The heating sleeve is a quartz glass heating sleeve.

7. The vacuum sintering furnace with replaceable heating tube according to claim 5, characterized in that: The transmission mechanism is a gear, a belt or a chain.

8. The vacuum sintering furnace with replaceable heating tube according to claim 1, characterized in that: The preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage; The first cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

9. The vacuum sintering furnace with replaceable heating tube according to claim 1, characterized in that: The heating sleeve is connected to a switch.

10. The vacuum sintering furnace with replaceable heating tube according to claim 1, characterized in that: The indicator light is an off and green color changing indicator light, off indicates a fault, and green indicates normal.

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