Spraying disc ventilation flow detection equipment

Abstract

The utility model discloses a spraying disc ventilation flow detection device which comprises a pneumatic control assembly, a butt joint assembly and a clamping assembly, a spraying disc is fixed on the clamping assembly, and the output end of the pneumatic control assembly can convey gas into a nozzle and / or a ventilation hole through the butt joint assembly; the pneumatic control assembly comprises air pipes corresponding to the nozzles and / or the vent holes in number, and the air pipes extend to an outlet of the butt joint assembly and can correspond to the nozzles and / or the vent holes in a one-to-one mode and adsorb the nozzles and / or the vent holes. The pneumatic control assembly further comprises a valve terminal unit, the input end of the valve terminal unit is connected with an external air source, and the output end is connected with the nozzle and / or the vent hole through an air pipe. Detection gas enters the gas pipe through an inlet of the pneumatic control assembly and is conveyed to the spraying disc through transmission of the butt joint assembly, and detection of the ventilation flow of the spraying disc is achieved. The spray disc ventilation flow detection equipment provided by the utility model improves the stability of a test result, saves the labor cost and improves the working efficiency at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a spray tray ventilation flow rate detection device. Background Art

[0002] In semiconductor thin film equipment, a plurality of ventilation holes or a structural form in which ventilation holes and nozzles coexist are usually processed on the spray tray of the equipment. To ensure that process gas can be evenly sprayed into the reaction chamber of the machine tool after passing through the spray tray, in the design stage, the flow rate of the ventilation holes and / or nozzles on the spray tray is ensured through theoretical calculation, computer simulation, workpiece machining accuracy, etc. Then, in the assembly stage, the nozzles and / or ventilation holes on the installed spray tray need to be subjected to a flow rate test to verify whether the requirements are met.

[0003] At present, one method for detecting the ventilation flow rate of nozzles and / or ventilation holes is to use a gas path test fixture, and manually press a pneumatic hose onto the nozzles and / or ventilation holes for flow rate testing. The actual operation is complex and cumbersome, requires two people to operate simultaneously, has low work efficiency, and during the manual pressing process, due to different operation methods and forces of each person, it may also affect the test results, resulting in inaccurate detection. Another method is to detect the ventilation flow rate by measuring the machining accuracy of the air holes and nozzles on the spray tray. This detection method has the drawback that the sizes of the air holes and / or nozzles are small and difficult to accurately measure. Summary of the Utility Model

[0004] An embodiment of the utility model provides a spray tray ventilation flow rate detection device, aiming to solve the technical problems of complex and cumbersome operation and inaccurate detection existing in the existing ventilation flow rate detection methods.

[0005] To solve the above problems, according to one aspect of the present application, the utility model provides a spray tray ventilation flow rate detection device for detecting the flow rate of nozzles and / or ventilation holes on a spray tray. The spray tray ventilation flow rate detection device includes a pneumatic control component, a docking component, and a clamping component. The spray tray is fixed on the clamping component, and the output end of the pneumatic control component can deliver gas into the nozzles and / or ventilation holes through the docking component;

[0006] The pneumatic control component includes air pipes corresponding to the number of nozzles and / or ventilation holes. The air pipes extend to the outlet of the docking component and can be adsorbed corresponding to the nozzles and / or ventilation holes one by one. The pneumatic control component further includes a valve island unit for controlling the on-off of the air pipes. The input end of the valve island unit is connected to an external air source, and the output end of the valve island unit is connected to the nozzles and / or ventilation holes through the air pipes.

[0007] In some embodiments, the valve island unit includes a plurality of two-position five-way double-solenoid valves connected in parallel, and the outlets of each of the two-position five-way double-solenoid valves are respectively connected to two of the air pipes.

[0008] In some embodiments, the docking assembly includes a moving unit, a docking suction cup, and an adjusting unit. The docking suction cup is disposed at an end of the moving unit, the adjusting unit is disposed on the clamping assembly, and one end of the adjusting unit can adsorb to the docking suction cup, and the other end of the adjusting unit can communicate with a nozzle and / or a vent hole of a spray disk fixed on the clamping assembly.

[0009] In some embodiments, the docking suction cup has test channels corresponding to the number of the air pipes, and the number of the adjusting units corresponds to the number of the test channels; after the gas sequentially passes through the air pipe, the test channel corresponding to the air pipe, and the adjusting unit corresponding to the test channel, it enters the corresponding nozzle or vent hole.

[0010] In some embodiments, the docking suction cup further has an interface for vacuum pumping, and the interface for vacuum pumping is connected to a vacuum pumping device so that the docking suction cup adsorbs to the adjusting unit.

[0011] In some embodiments, the adjusting unit includes a housing and an air path pipeline. The air path pipeline is inserted into the housing and extends out of the housing. The air path pipeline can move up and down so that its bottom end communicates with the nozzle and / or the vent hole, and through the moving unit, the test channel on the docking suction cup can communicate with the top of the air path pipeline.

[0012] In some embodiments, a partition is provided on the air path pipeline. The partition divides the interior of the housing into an upper chamber and a lower chamber. An adjusting screw is disposed in the upper chamber, and the inner wall of the upper chamber has an internal thread matching the adjusting screw; and a first elastic member is disposed in the upper chamber, and a second elastic member is disposed in the lower chamber.

[0013] In some embodiments, the top of the air path pipeline has a first sealing structure matching the test channel;

[0014] And / or, the bottom of the air path pipeline has a second sealing structure matching the nozzle and / or the vent hole.

[0015] In some embodiments, the moving unit includes an X-axis moving module, a Y-axis moving module, and a Z-axis moving module. The X-axis moving module is horizontally disposed, the Z-axis moving module is vertically disposed and connected to the X-axis moving module, and the Y-axis moving module is connected to the Z-axis moving module;

[0016] And / or, a reflective strip is provided on one side of the spray tray facing the X-axis moving module, and a laser rangefinder is provided on one side of the X-axis moving module facing the spray tray. The reflective strip and the laser rangefinder cooperate to achieve the positioning of the moving unit moving along the X-axis direction.

[0017] In some embodiments, the clamping assembly includes an upper pressing plate, a transition plate, and a bottom plate. The upper pressing plate is of an annular structure, the transition plate is clamped within the annular structure, the spray tray is disposed on the bottom plate, the adjusting unit is disposed between the transition plate and the bottom plate, and the top of the adjusting unit passes through the transition plate and is connected to the test channel.

[0018] Compared with the prior art, the spray tray air flow detection device of the present utility model has the following beneficial effects:

[0019] The present utility model provides a spray tray air flow detection device for detecting the flow rate of nozzles and / or ventilation holes on a spray tray. The spray tray air flow detection device includes a pneumatic control assembly, a docking assembly, and a clamping assembly. The spray tray is fixed on the clamping assembly, and the output end of the pneumatic control assembly can deliver gas into the nozzles and / or ventilation holes through the docking assembly. The pneumatic control assembly includes air pipes corresponding to the number of the nozzles and / or ventilation holes. The air pipes extend to the outlet of the docking assembly and can correspond to and adsorb to the nozzles and / or ventilation holes one by one. The pneumatic control assembly further includes a valve island unit for controlling the on / off of the air pipes. The input end of the valve island unit is connected to an external air source, and the output end of the valve island unit is connected to the nozzles and / or ventilation holes through the air pipes.

[0020] The detection gas enters the air pipes through the inlet of the pneumatic control assembly, and then is delivered to the spray tray through the transfer of the docking assembly. The air flow rate of the spray tray is calculated by comparing the intake volume of the detection gas and the outlet volume ejected from the nozzles and / or ventilation holes of the spray tray. Compared with the traditional manual operation, the spray tray air flow detection device provided in this embodiment has no uncertain factors, so the stability of the test results is improved, and at the same time, the labor cost is saved and the work efficiency is improved. Moreover, the valve island unit can control the input and output of the detection gas, and the input volume of the detection gas can also be controlled. That is to say, the valve island unit can accurately control the flow rate of the detection gas, thereby making the detection more accurate. Description of the Drawings

[0021] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0022] Figure 1 It is a schematic structural diagram of a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0023] Figure 2 It is another schematic structural diagram of a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0024] Figure 3 It is a pneumatic control schematic diagram of a pneumatic control component in a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0025] Figure 4 It is a schematic structural diagram of the cooperation between a clamping component and an adjustment unit in a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0026] Figure 5 It is a schematic structural diagram of an adjustment unit in a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0027] Figure 6 It is a front view of an adjustment unit in a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0028] Figure 7 It is a front view of a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0029] Figure 8 It is a top view of a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0030] Figure 9 is Figure 8 a cross-sectional view along the A-A direction in;

[0031] Figure 10 is Figure 9 a cross-sectional view along the E-E direction in;

[0032] Figure 11 It is a cross-sectional view of the cooperation between a docking suction cup and an adjustment unit in a spray tray ventilation flow rate detection device provided by an embodiment of the present utility model;

[0033] Figure 12 is Figure 11 a partial enlarged view at B in;

[0034] Reference numerals:

[0035] 1. Spray tray; 11. Reflective strip;

[0036] 2. Pneumatic control assembly; 21. Valve island unit; 22. Globe valve; 23. Pressure regulating valve; 24. Solenoid directional control valve; 25. Flow regulating valve; 26. Gas flow meter; 211. Two-position five-way double-electric-control solenoid valve;

[0037] 3. Docking assembly; 31. Moving unit; 311. X-axis moving module; 312. Y-axis moving module; 313. Z-axis moving module; 314. Laser rangefinder; 32. Docking suction cup; 321. Test channel; 322. Vacuum extraction interface; 323. Sealing ring; 324. Vacuum suction cup; 325. Vacuum extraction channel; 33. Adjusting unit; 331. Housing; 332. Gas pipeline; 333. Upper cavity; 334. Lower cavity; 335. Adjusting screw; 336. First elastic member; 337. Second elastic member; 338. First sealing structure; 339. Second sealing structure; 3321. Partition board;

[0038] 4. Clamping assembly; 41. Upper pressing plate; 42. Transition plate; 43. Bottom plate; 44. Connecting column. Detailed implementation manners

[0039] To further illustrate the technical means and effects adopted by the present invention to achieve the intended utility model purpose, the following combines the drawings and preferred embodiments to elaborate in detail on the specific implementation manners, structures, features and their effects of the application according to the present invention. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0040] In the description of the present invention, it should be clear that the terms "first", "second", etc. in the specification and claims of the present invention and the above drawings are used to distinguish similar objects and do not have to be used to describe a specific order or sequence; the terms "vertical", "horizontal", "longitudinal", "front", "rear", "left", "right", "upper", "lower", "horizontal", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention, rather than meaning that the indicated device or element must have a specific orientation or position, so it cannot be understood as a limitation to the present invention.

[0041] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0042] In a semiconductor thin film device, a showerhead is used to ensure that process gas can be evenly sprayed into the reaction chamber of the machine tool, and it plays a crucial role. The showerhead has a structure in which there are multiple ventilation holes or both ventilation holes and nozzles. The process gas is sprayed through the ventilation holes or nozzles. Therefore, to ensure the even spraying of the process gas, it is necessary to detect the ventilation flow rate of each ventilation hole or nozzle. The traditional detection method is manual operation, and there are many uncertain factors in manual operation, which often leads to inaccurate detection results. Therefore, the present utility model provides a showerhead ventilation flow rate detection device, which replaces the traditional manual detection with an automated detection method, improves the stability of the test results, and saves labor costs while improving work efficiency.

[0043] To better understand the above technical solution, the following will describe the above technical solution in detail in conjunction with the accompanying drawings of the specification and specific embodiments.

[0044] Please refer to Figures 1 - 12 , an embodiment of the present utility model provides a showerhead ventilation flow rate detection device for detecting the flow rate of nozzles and / or ventilation holes on a showerhead 1. The showerhead ventilation flow rate detection device includes a pneumatic control component 2, a docking component 3, and a clamping component 4. The showerhead 1 is fixed on the clamping component 4, and the output end of the pneumatic control component 2 can deliver gas into the nozzles and / or ventilation holes through the docking component 3; the pneumatic control component 2 includes air pipes corresponding to the number of nozzles and / or ventilation holes, the air pipes extend to the outlet of the docking component 3, and can be in one-to-one correspondence with and adsorb to the nozzles and / or ventilation holes; as Figure 3 shown, the pneumatic control component 2 further includes a valve island unit 21 for controlling the on / off of the air pipes. The input end of the valve island unit 21 is connected to an external air source, and the output end of the valve island unit 21 is connected to the nozzles and / or ventilation holes through the air pipes.

[0045] Specifically, the control elements and valve island unit 21 in the pneumatic control assembly 2 are installed in the start control box. The air pipes of the pneumatic control assembly 2 extend through a drag chain and are used to convey the detection gas into the nozzle and / or vent hole. The docking assembly 3 is mainly used to achieve docking with the spray disc 1 and simultaneously achieve gas transfer. The clamping assembly 4 is mainly used to fix the spray disc 1. In the specific use process, the detection gas enters the air pipe through the inlet of the pneumatic control assembly 2, and then is conveyed to the spray disc 1 through the transfer of the docking assembly 3. The ventilation flow rate of the spray disc 1 is calculated by comparing the intake volume of the detection gas and the outlet volume ejected from the nozzles and / or vent holes of the spray disc 1. Compared with the traditional manual operation, the spray disc ventilation flow rate detection device provided in this embodiment has no uncertain factors, so the stability of the test results is improved, and at the same time, labor costs are saved and work efficiency is increased. Moreover, in this embodiment, the pneumatic control assembly 2 further includes a valve island unit 21. The input end of the valve island unit 21 is connected to an external air source, and the output end of the valve island unit 21 is connected to the nozzle and / or vent hole through an air pipe. The valve island unit 21 is used to control the on / off of the air pipe. The valve island unit 21 is a control component composed of multiple electric control valves, and it integrates signal input / output and signal control. In this embodiment, the signal input / output and signal control of the valve island unit 21 refer to the control of the input and output of the detection gas. In this process, the input volume of the detection gas can also be controlled. Therefore, in this embodiment, the valve island unit 21 can accurately control the flow rate of the detection gas, thereby making the detection more accurate.

[0046] In a specific embodiment, as Figure 3 shown, the valve island unit 21 includes a plurality of two-position five-way double solenoid valves 211 connected in parallel. The outlet of each two-position five-way double solenoid valve 211 is respectively connected to two of the air pipes. The two-position five-way double solenoid valve 211 has an air inlet (connected to an intake air source), a forward action air outlet and a reverse action air outlet, a forward action exhaust hole and a reverse action exhaust hole (equipped with a muffler). In this embodiment, the forward action air outlet and the reverse action air outlet are respectively connected to two of the air pipes.

[0047] The valve island unit 21 includes a plurality of two-position five-way double solenoid valves 211 connected in parallel. Each two-position five-way double solenoid valve 211 can independently or simultaneously control the air flow of two paths leading to the nozzle and / or vent hole. According to the number of nozzles and / or vent holes of different spray discs 1, it can be made compatible by adding the number of two-position five-way double solenoid valves 211. After adjusting the gas inlet pressure and flow rate once, the nozzle and / or vent hole can be automatically selected for testing the flow rate. During the detection process, either the flow rate of a single nozzle and / or vent hole can be selected for testing, or the entire spray disc 1, that is, all nozzles and / or vent holes, can be simultaneously tested for flow rate by controlling the two-position five-way double solenoid valves 211 to conduct simultaneously.

[0048] That is to say, in this embodiment, after adjusting the gas inlet pressure and flow rate once through multiple two-position five-way double-electromagnetic control solenoid valves 211 in parallel, the nozzle and / or vent hole are automatically selected for flow rate testing, and the flow rate testing of the spray disc 1 with different numbers of nozzles and / or vent holes is compatible. The stability of the test results is improved, and at the same time, the labor cost is saved and the work efficiency is improved.

[0049] In addition, the valve island unit 21 is an integrated module. Different modules correspond to different numbers and different types of solenoid valves, and different spray discs 1 can be corresponded by replacing the entire valve island unit 21.

[0050] As Figure 3 shown, the pneumatic control assembly 2 further includes a globe valve 22, a pressure regulating valve 23, an electromagnetic reversing valve 24, a flow regulating valve 25, and a gas flow meter 26. The globe valve 22, the pressure regulating valve 23, the electromagnetic reversing valve 24, the flow regulating valve 25, the gas flow meter 26, and the valve island unit 21 are connected in series in sequence. The globe valve 22 plays an important role in cutting off and throttling the medium in the pipeline where it is located. In this embodiment, the globe valve 22 plays a role in cutting off and throttling the flow of the detection gas in the air pipe. The pressure regulating valve 23 drives the valve to change the cross-sectional area between the valve core and the valve seat by receiving signals from the control system, thereby controlling parameters such as the flow rate, temperature, and pressure of the detection gas, and realizing the automatic adjustment function. The electromagnetic reversing valve 24 is used to control the flow direction of the detection gas in the air pipe. The flow regulating valve 25 is used to control the flow rate of the detection gas. The gas flow meter 26 can directly reflect the flow rate of the detection gas without being affected by temperature and pressure.

[0051] In a specific embodiment, as Figure 1 shown, the docking assembly 3 includes a moving unit 31, a docking suction cup 32, and an adjusting unit 33. The docking suction cup 32 is arranged at the end of the moving unit 31. The adjusting unit 33 is arranged on the clamping assembly 4, and one end of the adjusting unit 33 can be adsorbed to the docking suction cup 32, and the other end of the adjusting unit 33 can be communicated with the nozzle and / or vent hole of the spray disc 1 fixed on the clamping assembly 4.

[0052] The moving unit 31 is mainly used to drive the docking suction cup 32 to move. It can move in six directions: up and down, left and right, and front and back, enabling the docking suction cup 32 to perfectly cooperate with the adjusting unit 33. The docking suction cup 32 is mainly used to achieve gas transfer. The adjusting unit 33 is used to achieve docking with the nozzles and / or ventilation holes on the spray tray 1. In this embodiment, first, the adjusting unit 33 operates to closely fit and adsorb its lower end with the nozzles and / or ventilation holes on the spray tray 1. Then, the position of the docking suction cup 32 is adjusted through the moving unit 31 so that its central axis coincides with the central axis of the spray tray 1 and closely fits and adsorbs with the upper end of the adjusting unit 33.

[0053] More specifically, as Figures 10 - 12 shown, the docking suction cup 32 is provided with test channels 321 corresponding to the number of the air pipes. The number of the adjusting units 33 corresponds to the number of the test channels 321. After the gas sequentially passes through the air pipe, the test channel 321 corresponding to the air pipe, and the adjusting unit 33 corresponding to the test channel 321, it enters the corresponding nozzle or ventilation hole. The numbers of the test channels 321, air pipes, nozzles and / or ventilation holes, and adjusting units 33 are the same and are connected in one-to-one correspondence. The detection gas in the air pipe enters the corresponding adjusting unit 33 through the corresponding test channel 321, and then enters the corresponding nozzle and / or ventilation hole.

[0054] In a specific embodiment, the docking suction cup 32 is further provided with a vacuum pumping interface 322 and a vacuum pumping channel 325. One end of the vacuum pumping interface 322 is connected to a vacuum pumping device, and the other end is connected to the vacuum pumping channel 325 for vacuum pumping the docking suction cup.

[0055] During the specific testing process, the vacuum pumping interface 322 is communicated with the vacuum pumping channel 325. When the docking suction cup 32 contacts the adjusting unit 33, through the cooperation of the vacuum pumping interface 322 and the vacuum pumping channel 325, the docking suction cup 32 is vacuum pumped so that the central part of the docking suction cup 32 becomes a vacuum suction cup 324. At this time, it can closely adsorb on the adjusting unit 33, and then the detection gas passes through the test channel 321 to the nozzles and / or ventilation holes for testing.

[0056] In addition, as Figure 11 and Figure 12 shown, there is a sealing ring 323 between the vacuum pumping channel 325 and the test channel 321 to prevent the detection gas in the test channel 321 from being pumped out during vacuum pumping.

[0057] In a specific embodiment, as Figure 5 and Figure 6As shown, the adjusting unit 33 includes a housing 331 and an air pipeline 332. The air pipeline 332 is inserted into the housing 331 and extends out of the housing 331. The air pipeline 332 can move up and down so that its bottom end communicates with the nozzle and / or the ventilation hole. And through the moving unit 31, the test channel 321 on the docking suction cup 32 can communicate with the top of the air pipeline 332. Specifically, the air pipe extends to the test channel 321 of the docking suction cup 32, and then the detection gas is transmitted through the air pipeline 332. Since the air pipeline 332 can move up and down, its bottom end can communicate with the nozzle and / or the ventilation hole. Then, under the action of the moving unit 31, the docking suction cup 32 can communicate with the top of the air pipeline 332.

[0058] And, as Figure 5 shown, a partition plate 3321 is arranged on the air pipeline 332. The partition plate 3321 divides the interior of the housing 331 into an upper cavity 333 and a lower cavity 334. An adjusting screw 335 is arranged in the upper cavity 333, and the inner wall of the upper cavity 333 has an internal thread matching the adjusting screw 335; and a first elastic member 336 is arranged in the upper cavity 333, and a second elastic member 337 is arranged in the lower cavity 334.

[0059] Specifically, the air pipeline 332 is arranged vertically, the partition plate 3321 is arranged horizontally, and the air pipeline 332 and the partition plate 3321 are integrally formed. The housing 331 and the air pipeline 332 are both hollow columnar structures. The air pipeline 332 is arranged in the housing 331, and there is a gap between them. The partition plate 3321 extends along the outer wall of the air pipeline 332 into this gap. The upper cavity 333 is formed above the partition plate 3321, and the lower cavity 334 is formed below the partition plate 3321; in addition, in the upper cavity 333, there is a first elastic member 336, and in the lower cavity 334, there is a second elastic member 337. The first elastic member 336 cooperates with the adjusting screw 335 to realize the downward movement of the air pipeline 332 by pressing down the partition plate 3321, while the second elastic member 337 is used to realize the reset of the air pipeline 332 by pushing up the partition plate 3321.

[0060] Among them, the first elastic member 336 is the first spring, and the second elastic member 337 is the second spring. Both are sleeved on the gas path pipeline 332. In this way, during the specific use process, when the adjusting screw 335 is rotated along the first direction, it is in threaded engagement with the internal thread on the inner wall of the upper cavity 333, pressing down the first spring. The first spring presses down the partition 3321, thereby causing the gas path pipeline 332 to move downward until it is in close fit with the nozzle and / or vent hole. When the test is completed, the adjusting screw 335 is rotated along the second direction, which is in threaded engagement with the internal thread on the inner wall of the upper cavity 333 and moves upward. At this time, the first spring loses pressure, and at the same time, the second spring pushes up the partition 3321 under the action of the restoring force, thereby causing the gas path pipeline 332 to move upward and return to the initial state.

[0061] In a specific embodiment, such as Figure 5 , the top of the gas path pipeline 332 has a first sealing structure 338 that cooperates with the test hole 321; the first sealing structure 338 can be a sealing ring, which makes the top of the gas path pipeline 332 in close fit with the test hole 321 to prevent the detection gas from leaking from this connection.

[0062] In a specific embodiment, the bottom of the gas path pipeline 332 has a second sealing structure 339 that cooperates with the nozzle and / or vent hole; the second sealing structure 339 can also be a sealing ring, or a covering structure customized according to the structural form of the nozzle and / or vent hole.

[0063] In a specific embodiment, such as Figure 2 As shown, the moving unit 31 includes an X-axis moving module 311, a Y-axis moving module 312, and a Z-axis moving module 313. The X-axis moving module 311 is horizontally arranged, the Z-axis moving module 313 is vertically arranged and connected to the X-axis moving module 311, and the Y-axis moving module 312 is connected to the Z-axis moving module 313; the X-axis moving module 311, the Y-axis moving module 312, and the Z-axis moving module 313 all include corresponding servo motors and sliders.

[0064] And, as Figure 2 shown, a reflective strip 11 is provided on one side of the spray tray 1 facing the X-axis moving module 311, and a laser rangefinder 314 is provided on one side of the X-axis moving module 311 facing the spray tray 1. The reflective strip 11 cooperates with the laser rangefinder 314 to realize the positioning of the moving unit 31 moving along the X-axis direction.

[0065] The X-axis moving module 311 adopts a linear module to drive the servo motor, and a reflective strip 11 is set at the horizontal position of the center of the spray disc 1. A laser rangefinder 314 is set on the side of the X-axis moving module 311 facing the spray disc 1, and the slide moves along the horizontal X direction. When the laser rangefinder 314 scans the reflective strip 11, the central axis of the docking suction cup 32 coincides with the center of the spray disc 1, that is, the accurate positioning of the docking suction cup 32 and the adjustment unit 33 in the X-axis direction is completed.

[0066] The Z-axis moving module 313 realizes movement in the up and down directions. It is driven by a linear module. The linear module slide is equipped with a servo motor to realize the automatic up and down movement of the docking suction cup 32. The accurate positioning of the docking suction cup 32 and the adjustment unit 33 in the vertical direction is realized by inputting the coordinate value in the Z-axis direction.

[0067] Regarding the Y-axis moving module 312, since the position of the center of different spray discs 1 relative to the slide can be determined in advance, the universal base plate 43 can be made concentric with the spray disc 1 through tooling, while the position size from the center of the circle to the slide is fixed. At the same time, the machining dimensional accuracy of the slide robot mechanism is ensured to ensure the position size of the docking suction cup 32 to the slide, so that the accurate positioning of the docking suction cup 32 and the adjustment unit 33 in the Y-axis direction can be achieved.

[0068] In a specific embodiment, Figure 1 and Figure 4 As shown, the clamping assembly 4 includes an upper pressure plate 41, a transition plate 42 and a bottom plate 43, the upper pressure plate 41 is a circular ring structure, the transition plate 42 is clamped in the circular ring structure, the spray plate 1 is arranged on the bottom plate 43, the adjustment unit 33 is arranged between the transition plate 42 and the bottom plate 43, and the top of the adjustment unit 33 passes through the transition plate 42 and is connected to the test channel 321.

[0069] Specifically, the upper pressing plate 41 is a circular structure, in which the transition plate 42 is clamped, and the bottom plate 43 is a circular structure, on which the spray disc 1 is fixed by a connecting column 44. The transition plate 42 has through holes corresponding to the number of nozzles and / or vents, which are used for the same number of adjustment units 33 to pass through. The through holes on the transition plate 42 directly correspond to the distribution of the nozzles and / or vents on the spray disc 1. For the commonly used spray discs 1 of different specifications, the external dimensions are not much different, and the upper pressing plate 41 and the bottom plate 43 can be made into a universal specification, and the adjustment units 33 passing through the transition plate 42 are matched with the nozzles and / or vents to achieve the test purpose.

[0070] The specific detection process of the spray tray ventilation flow rate detection device provided in this embodiment is as follows: First, rotate the adjusting screw 335, which is matched with the internal thread on the inner wall of the upper cavity 333, press down the first spring, and the first spring presses down the partition plate 3321, so that the gas pipeline 332 moves downward until it is tightly matched with the nozzle and / or ventilation hole; then the moving unit 31 works, so that the docking suction cup 32 contacts the upper end of the gas pipeline 332, and then vacuum is pumped through the vacuum interface 322 to make the docking suction cup 32 tightly adsorbed on the upper end of the gas pipeline 332. When the above docking is completed, the detection gas can be introduced, and the detection gas passes through the trachea, the test channel 321, and the gas pipeline 332 to the nozzle and / or ventilation hole for testing in sequence.

[0071] The spray tray ventilation flow rate detection device provided in this embodiment has the following beneficial effects:

[0072] First of all, the pneumatic control component adopts the valve island unit 21, which is configured with multiple groups of two-position five-way double-electric control solenoid valves 211. Each two-position five-way double-electric control solenoid valve 211 can independently or simultaneously control two airflows leading to the nozzle and / or ventilation hole. According to the number of nozzles and / or ventilation holes of different spray trays 1, it can be compatible by adding the number of two-position five-way double-electric control solenoid valves 211, so as to automatically select the nozzle and / or ventilation hole for testing the flow rate after adjusting the gas inlet pressure and flow rate once. During the detection process, either the flow rate of a single nozzle or ventilation hole can be selected for testing, or the flow rate of all nozzles and ventilation holes on the entire spray tray 1 can be simultaneously tested by controlling the two-position five-way double-electric control solenoid valve 211 to conduct simultaneously. That is to say, after adjusting the gas inlet pressure and flow rate once through multiple parallel two-position five-way double-electric control solenoid valves 211, the nozzle and / or ventilation hole can be automatically selected for flow rate testing, and the gas flow rates of the nozzles and / or ventilation holes on the spray tray can be detected separately or as a whole, so as to test the difference in the gas flow rate of each nozzle and / or ventilation hole on the spray tray 1 and the overall gas circulation effect.

[0073] Secondly, in this embodiment, through the cooperation of the clamping assembly 4 and the adjusting unit 33, the gas pipeline 332 is tightly fitted with the nozzles and / or ventilation holes on the spray tray 1, and different spray trays 1 with different numbers of nozzles and / or ventilation holes can be compatibly applied by replacing the transition plate 42 and the bottom plate 43. For the numerous spray trays 1 in mass production, the clamping assembly 4 and the adjusting unit 33 can be compatible with spray trays 1 with different numbers of nozzles and / or ventilation holes, dock the gas pipeline 332 with the spray tray 1, so as to efficiently test the flow rate of the nozzles and / or ventilation holes.

[0074] In this embodiment, a mobile unit 31 and a docking suction cup 32 are designed. In the mobile unit 31, a linear module slide is equipped with a servo motor to realize the automatic operation of the docking suction cup 32, so as to achieve the quick and precise docking of the docking suction cup 32 with the adjustment unit 33. The docking suction cup 32 includes a test channel 321 and a vacuum pumping interface 322. The mobile unit 31 makes the docking suction cup 32 fit the adjustment unit 33, and vacuum is pumped through the vacuum pumping interface 322 so that the docking suction cup 32 is tightly adsorbed on the adjustment unit 33, and then the gas is detected and passes through the test channel 321 to the nozzle and / or ventilation hole for testing. For the numerous spray trays in mass production, the gas pipeline 332 can be quickly docked with the spray tray 1, so as to efficiently test the flow rate of the nozzle and / or ventilation hole. By replacing the transition plate 42 and the docking suction cup 32, the compatible test of spray trays 1 with different structural forms can be realized.

[0075] In summary, it is easy for those skilled in the art to understand that, on the premise of no conflict, the above-mentioned advantageous technical features can be freely combined and superimposed.

[0076] The above are only the preferred embodiments of the present invention, and do not impose any form of limitation on the present invention. Any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A spray plate ventilation flow detection device, used to detect the flow of nozzles and / or vents on the spray plate, characterized in that: The spray plate ventilation flow detection device comprises a pneumatic control component, a docking component and a clamping component, the spray plate is fixed on the clamping component, and the output end of the pneumatic control component can transport gas to the nozzle and / or the vent hole through the docking component; The pneumatic control component includes air pipes corresponding to the number of the nozzles and / or air holes, the air pipes extend to the outlet of the docking component, and can correspond to and adsorb the nozzles and / or air holes one by one; the pneumatic control component also includes a valve island unit for controlling the on and off of the air pipes, the input end of the valve island unit is connected to an external air source, and the output end of the valve island unit is connected to the nozzles and / or air holes through the air pipes.

2. The spray plate ventilation flow detection device according to claim 1, characterized in that: The valve island unit comprises a plurality of two-position five-way double-electrically controlled solenoid valves connected in parallel, and an outlet of each of the two-position five-way double-electrically controlled solenoid valves is respectively connected to two of the air pipes.

3. The spray plate ventilation flow detection device according to claim 1, characterized in that: The docking assembly includes a moving unit, a docking suction cup and an adjusting unit, wherein the docking suction cup is arranged at the end of the moving unit, and the adjusting unit is arranged on the clamping assembly, and one end of the adjusting unit can be adsorbed on the docking suction cup, and the other end of the adjusting unit can be connected to the nozzle and / or the vent hole of the spray plate fixed on the clamping assembly.

4. The spray plate ventilation flow detection device according to claim 3, characterized in that: The docking suction cup has test holes corresponding to the number of the air pipes, and the number of the adjustment units corresponds to the number of the test holes; the gas passes through the air pipe, the test hole corresponding to the air pipe, and the adjustment unit corresponding to the test hole in sequence, and then enters the corresponding nozzle or vent.

5. The spray plate ventilation flow detection device according to claim 4, characterized in that: The docking suction cup also has a vacuum interface and a vacuum channel, one end of the vacuum interface is connected to the vacuum device, and the other end of the vacuum interface is connected to the vacuum channel for vacuuming the docking suction cup.

6. The spray plate ventilation flow detection device according to claim 4, characterized in that: The adjusting unit includes an outer shell and an air pipeline, wherein the air pipeline is inserted into the outer shell and extends out of the outer shell, and the air pipeline can move up and down so that its bottom end is connected with the nozzle and / or the air vent, and through the moving unit, the test channel on the docking suction cup can be connected with the top of the air pipeline.

7. The spray plate ventilation flow detection device according to claim 6, characterized in that: A partition is arranged on the gas pipeline, and the partition divides the interior of the shell into an upper chamber and a lower chamber. An adjusting screw is arranged in the upper chamber, and the inner wall of the upper chamber has an internal thread matching the adjusting screw; and a first elastic member is arranged in the upper chamber, and a second elastic member is arranged in the lower chamber.

8. The spray plate ventilation flow detection device according to claim 6 or 7, characterized in that: The top of the gas pipeline has a first sealing structure that matches the test channel; And / or, the bottom of the gas pipeline has a second sealing structure that cooperates with the nozzle and / or the vent hole.

9. The spray plate ventilation flow detection device according to claim 3, characterized in that: The mobile unit includes an X-axis mobile module, a Y-axis mobile module and a Z-axis mobile module, the X-axis mobile module is horizontally arranged, the Z-axis mobile module is vertically arranged and connected to the X-axis mobile module, and the Y-axis mobile module is connected to the Z-axis mobile module; And / or, a reflective strip is provided on the side of the spray plate facing the X-axis moving module, and a laser rangefinder is provided on the side of the X-axis moving module facing the spray plate, and the reflective strip and the laser rangefinder cooperate to realize the positioning of the moving unit along the X-axis direction.

10. The spray plate ventilation flow detection device according to any one of claims 4 to 6, characterized in that: The clamping assembly includes an upper pressure plate, a transition plate and a bottom plate. The upper pressure plate is a circular ring structure. The transition plate is clamped in the circular ring structure. The spray plate is arranged on the bottom plate. The adjustment unit is arranged between the transition plate and the bottom plate. The top of the adjustment unit passes through the transition plate and is connected to the test channel.

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