Quick-release XY adjusting seat of semiconductor testing and sorting equipment

Abstract

The utility model discloses a quick-release XY adjusting seat for semiconductor testing and sorting equipment, which comprises a Y-direction guide strip fixedly mounted on a platform, a base mounted on the Y-direction guide strip in a Y-direction sliding manner, and an upper mounting plate mounted on the base in a sliding manner through an X-direction guide strip and used for adjusting the X-direction position through an eccentric adjusting shaft, the adjusting screw is arranged at one end of the base in the Y direction and used for adjusting the relative position of the base and the Y-direction guide strip in the Y direction, the hasp is installed on the base, and a hook corresponding to the hasp is arranged on the Y-direction guide strip. According to the quick-release XY adjusting seat provided by the utility model, the module is fixed in a lock catch manner, and compared with an eccentric shaft manner, the quick-release XY adjusting seat has the advantages that the requirement on the machining precision of parts is not high, no tool is needed for disassembly and assembly, the positioning precision is high, and the phenomenon of loosening is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing equipment, and particularly relates to a quick-release XY adjustment seat for a semiconductor testing and sorting device. Background Art

[0002] At present, in the process of semiconductor production, semiconductor testing and sorting machines adopt a modular design. Each module needs to be quickly disassembled and assembled, and the repeat positioning accuracy after disassembly and assembly needs to reach within ±0.05 mm, so as to achieve the purpose that the position does not need to be adjusted after module disassembly and repair.

[0003] The prior art realizes the quick disassembly and assembly of the module by using the eccentric shaft clamping and fixing method, that is, the model inclined plane is clamped by the rotation of the eccentric shaft to achieve the purpose of the fixing mechanism. However, the eccentric shaft clamping method has high processing accuracy requirements for the corresponding components, especially the eccentric shaft. Therefore, the processing difficulty is large, and the fixing of the eccentric shaft is not very reliable, and it is easy to have problems such as natural loosening during use due to factors such as vibration. Summary of the Utility Model

[0004] To solve the above technical problems, the utility model provides a quick-release XY adjustment seat for a semiconductor testing and sorting device, which includes a Y-direction guiding strip fixedly installed on a platform, a base slidably installed in the Y-direction on the Y-direction guiding strip, an upper mounting plate slidably installed on the base through an X-direction guiding strip and adjusted in the X-direction position by an eccentric adjustment shaft, an adjustment screw arranged at one end of the base in the Y-direction and used to adjust the relative Y-direction position between the base and the Y-direction guiding strip, and a buckle installed on the base, and a hook corresponding to the buckle is arranged on the Y-direction guiding strip.

[0005] Wherein, a mounting seat is arranged on the base, and the buckle is arranged on the mounting seat.

[0006] Wherein, a sensor bent plate is arranged at the Y-direction end of the Y-direction guiding strip, and a proximity sensor corresponding to the base is installed on the sensor bent plate to be used for sensing whether components such as the base are installed in place.

[0007] Wherein, a pressing plate adjusted in the Z-direction height by a locking screw is further arranged in the Z-direction at one end of the Y-direction guiding strip, and both X-direction side ends of the pressing plate are located above the base to prevent the base from tilting when being locked by the buckle and the hook.

[0008] Wherein, a mounting block is arranged at the Y-direction end of the base, and the adjustment screw is arranged in the Y-direction on the mounting block to be used for adjusting the relative Y-direction position between the base and the Y-direction guiding strip.

[0009] Through the above technical solution, the quick-release XY adjustment base provided by the present utility model fixes the module by means of a lock, which has the advantages of low requirement for the machining accuracy of components, no need for tools for disassembly and assembly, high positioning accuracy, and no loosening phenomenon compared with the eccentric shaft method. Description of the Drawings

[0010] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the drawings required for use in the description of the embodiments will be briefly introduced below.

[0011] Figure 1 It is a top view structural schematic diagram disclosed in the embodiments of the present utility model;

[0012] Figure 2 is Figure 1 the sectional view taken along the line A-A in

[0013] Figure 3 is Figure 1 the sectional view taken along the line C-C in

[0014] In the figure: 10. Base; 11. Mounting block; 12. Upper mounting plate; 13. X-direction guiding strip; 14. Mounting seat; 15. Y-direction guiding strip; 151. Hook; 16. Eccentric adjustment shaft; 17. Sensor bending plate; 18. Pressure plate; 19. Adjusting screw; 20. Proximity sensor; 21. Buckle; 22. Locking screw. Detailed Embodiment

[0015] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model.

[0016] Refer to Figures 1-3 , a quick-release XY adjustment base for a semiconductor test and sorting device provided by an embodiment of the present utility model includes a Y-direction guiding strip 15 fixedly installed on a platform, a base 10 slidably installed in the Y direction on the Y-direction guiding strip 15, an upper mounting plate 12 slidably installed on the base 10 through an X-direction guiding strip 13 and adjusted in the X direction by an eccentric adjustment shaft 16, an adjusting screw 19 disposed at one end of the base 10 in the Y direction and used to adjust the relative position of the base 10 and the Y-direction guiding strip 15 in the Y direction, and a buckle 21 installed on the base 10 through a mounting seat 14, and a hook 151 corresponding to the buckle 21 is provided on the Y-direction guiding strip 15.

[0017] Wherein, a sensor bending plate 17 is provided at the Y-direction end of the Y-direction guiding strip 15, and a proximity sensor 20 corresponding to the base 10 is installed on the sensor bending plate 17 to be used for sensing whether components such as the base 10 are installed in place.

[0018] One end of the Y-direction guide bar 15 is further provided with a pressing plate 18 whose Z-direction height is adjusted by a locking screw 22. Both X-direction ends of the pressing plate 18 are located above the base 10.

[0019] An installation block 11 is provided at the Y-direction end of the base 10. An adjusting screw 19 is arranged in the Y-direction on the installation block 11 to adjust the relative Y-direction position between the base 10 and the Y-direction guide bar 15.

[0020] The working principle of the present utility model:

[0021] In the normal state, the Y-direction guide bar 15 is fixedly installed on the working platform of the sorting machine through screws;

[0022] Then, the detachable module composed of the base 10, the upper mounting plate 12, the adjusting screw 19 and the buckle 21 is slidably installed in the Y-direction on the Y-direction guide bar 15, and the proximity sensor 20 is used to sense whether components such as the base 10 are installed in place;

[0023] After the proximity sensor 20 senses that components such as the base 10 are installed in place, the Z-direction height of the pressing plate 18 is adjusted by the locking screw 22 to press the non-buckled end of the base 10 to prevent the base 10 from tilting when being locked with the hook 151 through the buckle 21;

[0024] Finally, the relative locking is achieved through the buckle 21 corresponding to the hook 151 arranged on the Y-direction guide bar 15, so as to realize the relative locking of the detachable module composed of the base 10, the upper mounting plate 12, the adjusting screw 19 and the buckle 21 on the Y-direction guide bar 15. During work, the X-direction position between the upper mounting plate 12 and the base 10 is adjusted by the eccentric adjusting shaft 16 in cooperation with the X-direction guide bar 13, so as to adjust the X-direction position of the workpiece installed on the upper mounting plate 12.

[0025] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present utility model. Various modifications to the above embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present utility model. Therefore, the present utility model will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A quick-release XY adjustment base for semiconductor testing and sorting equipment, characterized in that: The invention comprises a Y-direction guide bar (15) fixedly mounted on a platform, a base (10) slidably mounted on the Y-direction guide bar (15) in the Y direction, an upper mounting plate (12) slidably mounted on the base (10) via an X-direction guide bar (13) and whose X-direction position is adjusted via an eccentric adjustment shaft (16), an adjustment screw (19) arranged at one end of the base (10) in the Y direction and used for adjusting the Y-direction relative position of the base (10) and the Y-direction guide bar (15), and a buckle (21) mounted on the base (10), wherein the Y-direction guide bar (15) is provided with a hook (151) corresponding to the buckle (21).

2. The quick-release XY adjustment base for semiconductor testing and sorting equipment according to claim 1, characterized in that: A mounting seat (14) is provided on the base (10), and the buckle (21) is provided on the mounting seat (14).

3. The quick-release XY adjustment base for semiconductor testing and sorting equipment according to claim 1, characterized in that: A sensor bent plate (17) is provided at the Y-direction end of the Y-direction guide bar (15), and a proximity sensor (20) corresponding to the base (10) is installed on the sensor bent plate (17).

4. The quick-release XY adjustment base for semiconductor testing and sorting equipment according to claim 1, characterized in that: One end of the Y-direction guide bar (15) is also provided with a pressing plate (18) in the Z direction, the height of which is adjusted in the Z direction by a locking screw (22), and both side ends of the pressing plate (18) in the X direction are located above the base (10).

5. The quick-release XY adjustment base for semiconductor testing and sorting equipment according to claim 1, characterized in that: A mounting block (11) is provided at the Y-direction end of the base (10), and the adjusting screw (19) is arranged on the mounting block (11) in the Y-direction to adjust the Y-direction relative position of the base (10) and the Y-direction guide bar (15).

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