Silicon resistivity detection device
By designing knob-controlled adjustment brackets and guides in the silicon resistivity detection device, the problem of inaccurate length of probes in traditional detection devices is solved, and higher detection accuracy and flexibility are achieved.
Patent Information
- Application Number
- CN202421813114.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2034-07-30
AI Technical Summary
In traditional silicon resistivity detection devices, the downvoltage amount of the probe cannot be accurately controlled, resulting in inaccurate length of the probe, which in turn affects the accuracy of resistivity detection.
A silicon resistivity detection device is designed to accurately control the lifting and lowering of the adjustment bracket using a knob to ensure that the lifting and lowering of the probe is accurately controlled, thereby accurately controlling the telescopic length of the probe. At the same time, the guide rail allows the translation bracket to move forward and back, improving the flexibility and convenience of detection.
By accurately controlling the telescopic length of the probe, the accuracy of resistivity detection is improved, and the flexibility and convenience of detection is improved through the design of the guide rail.
Smart Images
Figure CN222965317U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of detection devices, in particular to a silicon resistivity detection device. Background Art
[0002] After the production of some silicon products, resistivity detection is required. At present, the detection method for these products is as follows: Fix a multi-probe head on a rack, and then press down the probe until the probe contacts the product to detect the product resistance. However, in the traditional method, the downward pressure of the probe is manually controlled by an operator, and the stroke control is relatively rough, that is, the downward pressure cannot be accurately controlled, so the telescopic length of the probe cannot be accurately controlled to find the most accurate telescopic amount for detecting the resistance value, resulting in inaccurate measured resistivity. Summary of the Utility Model
[0003] Aiming at the technical problem of defects existing in the existing resistivity testing device, the utility model provides a silicon resistivity detection device, which can accurately control the lifting of the adjusting bracket by using a knob, so that the lifting degree of the probe is accurately controlled, thereby accurately controlling the telescopic length of the probe on the probe to find the most accurate telescopic amount for detecting the resistance value, and the guide rail can move the translation bracket back and forth, improving the flexibility and convenience of detection.
[0004] The technical solution provided by the utility model is: A silicon resistivity detection device, comprising a machine table, a translation bracket and a probe; A guide rail is fixedly arranged on the machine table, and a slider is movably arranged on the guide rail, and the translation bracket is fixedly connected with the slider; A connecting rod is arranged on the translation bracket, and a locking seat and an adjusting fixing seat are fixedly arranged on the connecting rod, and the adjusting fixing seat is located below the locking seat; A dial indicator is fixedly arranged on the locking seat; One side of the adjusting fixing seat is movably provided with an adjusting bracket, and at least part of the adjusting bracket is in limit fit with a clamping groove on one side of the adjusting fixing seat; The probe is fixed on one side of the adjusting bracket; A pressing piece is fixedly arranged on the adjusting bracket, and the pressing piece is used for abutting against the pointer of the dial indicator; A rotating shaft is arranged through the adjusting fixing seat, at least one end of the rotating shaft is fixedly provided with a knob, a gear is fixedly arranged on the rotating shaft, a rack is arranged on the adjusting bracket, and the gear is meshed with the rack.
[0005] Optionally, it further comprises a mounting block, the mounting block is fixedly connected with the translation bracket, a mounting hole is arranged on the mounting block, one side of the mounting hole has an opening, the connecting rod is clamped in the mounting hole, and a locking piece is fixedly arranged on the mounting hole near the opening.
[0006] Optionally, a connecting ring is arranged on the adjusting bracket, a connecting base is fixedly arranged in the connecting ring, and the probe is fixedly connected with the connecting base.
[0007] Optionally, the locking seat includes a first locking block and a second locking block, the first locking block and the second locking block are connected by a locking member, and the dial indicator and the connecting rod are clamped between the first locking block and the second locking block.
[0008] Optionally, engaging members are provided on the first locking block and the second locking block, and the dial indicator is fixed to the locking seat through the engaging members.
[0009] Optionally, a placement table is provided on the machine table, and the placement table is rotationally matched with the machine table.
[0010] Optionally, feet are fixedly provided at the bottom of the translation bracket, the translation bracket is fixedly connected to the slider through the feet, through holes are provided on the feet, and a bolt is further included. The bolt passes through the through hole, and the end of the bolt is used to abut against the surface of the machine table.
[0011] Optionally, a second guide rail is provided on the translation bracket along the extending direction, a second slider is provided on the second guide rail, and the connecting rod is fixedly connected to the second slider.
[0012] Advantageous Effects
[0013] Adopting the technical solution provided by the present utility model, compared with the prior art, it has the following advantageous effects: Aiming at the technical problem that the existing resistivity testing device has defects, the present utility model can precisely control the lifting of the adjusting bracket by using a knob, so that the lifting degree of the probe is precisely controlled, thereby precisely controlling the telescopic length of the probe on the probe to find the most accurate telescopic amount for detecting the resistance value, and the guide rail can move the translation bracket back and forth, improving the flexibility and convenience of detection. Description of the Drawings
[0014] Figure 1 It is a schematic structural diagram of a silicon resistivity detection device proposed by an embodiment of the present utility model.
[0015] Figure 2 is Figure 1 an enlarged schematic view of part A in
[0016] Figure 3 It is a partial structural schematic diagram of a silicon resistivity detection device proposed by an embodiment of the present utility model. Detailed Embodiments
[0017] To further understand the content of the present utility model, the present utility model will be described in detail in combination with the drawings and embodiments.
[0018] The present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the relevant utility model, rather than limiting the utility model. Additionally, it should be noted that for the convenience of description, only the parts related to the utility model are shown in the drawings. The terms "first", "second", etc. used in the present utility model are set for the convenience of describing the technical solution of the present utility model and have no specific limiting effect. They are all general references and do not constitute a limiting effect on the technical solution of the present utility model. It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Unless otherwise clearly specified and limited, the terms "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. Multiple technical solutions in the same embodiment, as well as multiple technical solutions in different embodiments, can be arranged and combined to form new technical solutions without contradiction or conflict, and all are within the scope of protection required by the present utility model.
[0019] Embodiment 1
[0020] Combined with the attached Figures 1-3The present embodiment provides a silicon resistivity detection device, including a machine platform 10, a translation bracket 11 and a probe 12; a guide rail 13 is fixedly provided on the machine platform 10, a slider 14 is movably provided on the guide rail 13, and the translation bracket 11 is fixedly connected to the slider 14; a connecting rod 15 is provided on the translation bracket 11, a locking seat 16 and an adjustment fixing seat 17 are fixedly provided on the connecting rod 15, and the adjustment fixing seat 17 is located at the lower side of the locking seat 16; a dial indicator 18 is fixedly provided on the locking seat 16; the adjustment fixing seat 1 An adjustment bracket 19 is movably provided on one side of 7, and at least part of the adjustment bracket 19 is limitedly matched with a slot located on one side of the adjustment fixing seat 17; the probe 12 is fixed to one side of the adjustment bracket 19; a pressing piece 20 is fixedly provided on the adjustment bracket 19, and the pressing piece 20 is used to abut against the pointer of the dial indicator 18; a rotating shaft is penetrated through the adjustment fixing seat 17, a knob 21 is fixedly provided on at least one end of the rotating shaft, a gear is fixedly provided on the rotating shaft, and a rack is provided on the adjustment bracket 19, and the gear is meshed with the rack.
[0021] The silicon resistivity detection device of this embodiment can use the knob 21 to accurately control the lifting and lowering of the adjustment bracket 19, so that the lifting degree of the probe 12 is accurately controlled, thereby accurately controlling the extension and retraction length of the probe on the probe 12 to find the most accurate extension and retraction amount for detecting the resistance value, and the guide rail 13 can enable the translation bracket 11 to move back and forth, thereby improving the flexibility and convenience of detection.
[0022] The silicon resistivity detection device of the present embodiment is used as follows: first, place the product to be tested on the machine table 10, push the translation bracket 11 to move the probe 12 to the vicinity of the product's area to be tested, then rotate the knob 21 to lower the adjustment bracket 19 until the probe on the probe 12 abuts against the product, and continue to slightly rotate the knob 21 to accurately control the extension length of the probe on the probe 12. At the same time, the pointer of the dial indicator 18 will abut against the pressing piece 20, thereby displaying the fine-tuning amount, so as to find the most accurate extension amount for detecting the resistance value, and finally complete the resistivity detection through the probe 12.
[0023] In combination with the above-mentioned usage method, it can be known that in this embodiment, the adjustment bracket 19 is raised and lowered relative to the adjustment fixing base 17 by rotating the knob 21, wherein the rotational movement of the knob 21 is converted into the lifting and lowering movement of the adjustment bracket 19 through the engagement of the gear rack, and due to the engagement of the gear rack, the finer the gear rack, the more accurately the lifting and lowering movement can be controlled.
[0024] In some embodiments, a mounting block 22 is further included, and the mounting block 22 is fixedly connected to the translation bracket 11. A mounting hole is provided on the mounting block 22, and one side of the mounting hole has an opening. The connecting rod 15 is clamped in the mounting hole, and a locking member is fixedly provided near the opening on the mounting hole. Thus, the connecting rod 15 is clamped by the mounting hole fixed to the translation bracket 11. Specifically, the opening amplitude of the mounting hole can be reduced by locking the locking member such as the bolt 27, thereby reducing the diameter of the mounting hole, thereby achieving a stable clamping of the connecting rod 15. Moreover, due to the provision of the locking member such as the screw and the bolt 27, the disassembly can be easily achieved, so that the mounting block 22 can adjust its position relative to the connecting rod 15, thereby better adapting to the thickness characteristics of the product to be tested and improving the convenience of use.
[0025] In some embodiments, a connecting ring 23 is provided on the adjustment bracket 19, a connecting base 24 is fixedly provided inside the connecting ring 23, and the probe 12 is fixedly connected to the connecting base 24. In this embodiment, the adjustment bracket 19 fixes the probe 12 via the connecting base 24 inside the connecting ring 23, and a threaded hole may be provided on the connecting base 24, and the probe 12 may be fixed by threaded fit.
[0026] In some embodiments, the locking seat 16 includes a first locking block 161 and a second locking block 162, the first locking block 161 and the second locking block 162 are connected by a locking member, and the dial gauge 18 and the connecting rod 15 are sandwiched between the first locking block 161 and the second locking block 162. In this embodiment, the first locking block 161 and the second locking block 162 can clamp the dial gauge 18 and the connecting rod 15 at the same time through a locking member such as a bolt 27 or a screw, so that the dial gauge 18 is fixed to the connecting rod 15. And due to the provision of the locking member such as the screw, the bolt 27, etc., it can be easily disassembled, so that the locking seat 16 can adjust its position relative to the connecting rod 15, so as to better adapt to the thickness characteristics of the product to be tested and improve the convenience of use.
[0027] In a further embodiment, the first locking block 161 and the second locking block 162 are provided with a snap-fitting member 163, and the dial indicator 18 is fixed to the locking seat 16 through the snap-fitting member 163. Figure 2 As shown, the first locking block 161 and the second locking block 162 are provided with staggered bosses to form an engaging member 163 , and part of the dial indicator 18 can be fixed by the engaging member 163 .
[0028] In other embodiments, a storage table 25 is provided on the machine 10, and the storage table 25 is rotatably matched with the machine 10. In this case, the relative position of the product and the probe 12 can be further adjusted by rotating the storage table 25, thereby improving the convenience of use.
[0029] In some embodiments, a support leg 26 is fixedly provided at the bottom of the bracket, and the bracket is fixedly connected to the slider 14 through the support leg 26. The support leg 26 is provided with a through hole and also includes a bolt 27, and the bolt 27 passes through the through hole. The end of the bolt 27 is used to abut against the surface of the machine table 10. When the translation bracket 11 moves to the desired position, the tightened bolt 27 can abut against the surface of the machine table 10 to play a limiting role. Ensure that the fixed frame will not move when the device is operated to avoid errors.
[0030] In other embodiments, a second guide rail is provided on the translation bracket 11 along the extension direction, a second slider is provided on the second guide rail, and the connecting rod 15 is fixedly connected to the second slider. Thus, the connecting rod 15 can be moved along the extension direction of the translation bracket 11, thereby further improving the flexibility of the probe 12 and further improving the convenience of use.
[0031] The above schematically describes the present invention and its implementation methods, which are not restrictive. The drawings show only one implementation method of the present invention, and the actual structure is not limited thereto. Therefore, if ordinary technicians in this field are inspired by it and design structural methods and embodiments similar to the technical solution without creative design without departing from the purpose of the present invention, they should all fall within the protection scope of the present invention.
Claims
1. A silicon resistivity detection device, characterized in that: The invention comprises a machine platform (10), a translation support (11) and a probe (12); a guide rail (13) is fixedly arranged on the machine platform (10), a slider (14) is movably arranged on the guide rail (13), and the translation support (11) is fixedly connected to the slider (14); a connecting rod (15) is arranged on the translation support (11), a locking seat (16) and an adjustment fixing seat (17) are fixedly arranged on the connecting rod (15), and the adjustment fixing seat (17) is located at the lower side of the locking seat (16); a dial indicator (18) is fixedly arranged on the locking seat (16); An adjustment bracket (19) is movably provided on one side of the adjustment fixing seat (17), and at least a part of the adjustment bracket (19) is limitedly matched with a slot located on one side of the adjustment fixing seat (17); the probe (12) is fixed to one side of the adjustment bracket (19); a pressing piece (20) is fixedly provided on the adjustment bracket (19), and the pressing piece (20) is used to abut against the pointer of the dial indicator (18); A rotating shaft is provided through the adjusting fixed seat (17), a knob (21) is fixedly provided at at least one end of the rotating shaft, a gear is fixedly provided on the rotating shaft, a rack is provided on the adjusting bracket (19), and the gear is meshed with the rack.
2. A silicon resistivity detection device according to claim 1, characterized in that: It also includes a mounting block (22), the mounting block (22) is fixedly connected to the translation bracket (11), a mounting hole is provided on the mounting block (22), one side of the mounting hole has an opening, the connecting rod (15) is clamped in the mounting hole, and a locking piece is fixedly provided on the mounting hole near the opening.
3. A silicon resistivity detection device according to claim 1, characterized in that: The adjustment bracket (19) is provided with a connection ring (23), a connection base (24) is fixedly provided inside the connection ring (23), and the probe (12) is fixedly connected to the connection base (24).
4. A silicon resistivity detection device according to claim 1, characterized in that: The locking seat (16) comprises a first locking block (161) and a second locking block (162); the first locking block (161) and the second locking block (162) are connected via a locking member; and the dial indicator (18) and the connecting rod (15) are clamped between the first locking block (161) and the second locking block (162).
5. A silicon resistivity detection device according to claim 4, characterized in that: The first locking block (161) and the second locking block (162) are provided with engaging pieces (163), and the dial indicator (18) is fixed to the locking seat (16) via the engaging pieces (163).
6. A silicon resistivity detection device according to claim 1, characterized in that: The machine platform (10) is provided with a storage platform (25), and the storage platform (25) is rotatably matched with the machine platform (10).
7. A silicon resistivity detection device according to claim 1, characterized in that: A support foot (26) is fixedly provided at the bottom of the translation bracket (11), and the translation bracket (11) is fixedly connected to the slider (14) via the support foot (26). The support foot (26) is provided with a through hole and also includes a bolt (27). The bolt (27) passes through the through hole, and the end of the bolt (27) is used to abut against the surface of the machine platform (10).
8. A silicon resistivity detection device according to any one of claims 1 to 7, characterized in that: A second guide rail is provided on the translation bracket (11) along the extension direction, a second slider is provided on the second guide rail, and the connecting rod (15) is fixedly connected to the second slider.