Cavity structure

Abstract

The utility model relates to the technical field of photovoltaics or semiconductors, and solves the problem that the capacity of a vacuum cavity for bearing external atmospheric pressure is limited in the prior art. The cavity structure is provided, the cavity structure comprises a frame and a plurality of heating structures, the frame comprises two end supports and a plurality of supporting pieces extending in the first direction, and the supporting pieces are located between the two end supports and fixedly connected with the two end supports respectively; the multiple heating structures are fixedly connected with the supporting piece, and a process cavity is defined by the multiple heating structures and the frame. The frame in the cavity structure can support the heating structures, and the multiple heating structures and the frame jointly define the process cavity, so that the capability of the cavity structure for bearing external atmospheric pressure is enhanced, and the stability and safety of the cavity structure in various gas atmosphere environments are ensured; the structural form that the supporting piece in the frame is connected with the heating structure can simplify the installation structure of the heating structure, and the structural complexity and the production cost are reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic or semiconductor technologies, and particularly to a cavity structure. Background Art

[0002] In fields such as scientific research, industrial production, and laboratory equipment, vacuum cavities have a wide range of applications due to their unique vacuum environment. However, existing vacuum cavities have deficiencies in withstanding external atmospheric pressure. Therefore, it is particularly important to develop a vacuum cavity with a stable structure and the ability to withstand external atmospheric pressure.

[0003] Traditional vacuum cavities often use a single metal or alloy material, and their ability to withstand external atmospheric pressure and face different gas atmospheres is limited. In addition, traditional preparation methods also have problems such as complex operations and high costs, which limit the wide application of vacuum cavities with a thermal field. Summary of the Utility Model

[0004] In view of this, embodiments of the present disclosure provide a cavity structure to solve the problem of limited ability of vacuum cavities in related technologies to withstand external atmospheric pressure.

[0005] The first aspect of the present disclosure provides a cavity structure, including: a frame, including two end brackets and a plurality of support members extending along a first direction, the plurality of support members being located between the two end brackets and respectively fixedly connected to the two end brackets; a plurality of heating structures fixedly connected to the support members, and the plurality of heating structures and the frame enclose a process chamber.

[0006] In one embodiment, the support member includes: a first component plate extending along the first direction; a second component plate extending along the first direction and perpendicularly fixedly connected to the first component plate; the plurality of heating structures include: at least one first heating structure extending along a second direction, and both ends of the first heating structure are respectively connected to the first component plate of the corresponding support member; at least one second heating structure extending along a third direction, and both ends of the second heating structure are respectively connected to the second component plate of the corresponding support member; wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

[0007] In one embodiment, the support member forms an angle between the first component plate and the second component plate, and the angle faces away from the process chamber.

[0008] In one embodiment, the number of the first heating structures is plural, the plural first heating structures are arranged along the first direction, and the plural first heating structures are respectively connected to the first component plate; and / or, the number of the second heating structures is plural, the plural second heating structures are arranged along the first direction, and the plural first heating structures are respectively connected to the second component plate.

[0009] In one embodiment, the support further includes: a reinforcing rib, the reinforcing rib is disposed between the first component plate and the second component plate, and is perpendicularly fixed to the first component plate and the second component plate respectively.

[0010] In one embodiment, the heating structure includes: a tube body, one end of the tube body is fixedly connected to one of the supports, and the other end of the tube body is fixedly connected to the other support; a heating wire, including a heating section and a connection section, the heating section is located inside the tube body, the connection section is connected to the heating section and extends to the outside of the tube body, and the connection section is configured to connect to a power source.

[0011] In one embodiment, the heating structure further includes: a thermally conductive insulating material, filled between the tube body and the heating wire.

[0012] In one embodiment, the thermally conductive insulating material is one of a thermally conductive ceramicized silica gel, a thermally conductive silicone grease, and a thermally conductive potting adhesive.

[0013] In one embodiment, the heating structure further includes: a reinforcing member, located inside the tube body and fixedly connected to the tube body.

[0014] In one embodiment, the material of the frame is a metal material; and / or, the material of the tube body is a stainless steel or a titanium alloy material; and / or, the material of the heating section is a nickel-chromium alloy or an iron-chromium aluminum alloy material.

[0015] In one embodiment, it further includes: a plurality of sealing layers, located on a side of the heating structure facing away from the process chamber, and fixedly connected to the support and / or the end bracket.

[0016] In one embodiment, the material of the sealing layer is a metal material.

[0017] In one embodiment, it further includes: at least one layer of heat-insulating layer, disposed outside the plurality of sealing layers and fixedly connected to the sealing layer and / or the frame.

[0018] According to the cavity structure provided by the embodiments of the present disclosure, the frame in the cavity structure can support the heating structure, and a plurality of heating structures and the frame together enclose a process cavity, which is beneficial to enhancing the ability of the cavity structure to withstand external atmospheric pressure and ensuring its stability and safety in various gas atmosphere environments. The structural form of the support member in the frame connected to the heating structure can simplify the installation structure of the heating structure and reduce the structural complexity and production cost. Description of the Drawings

[0019] By describing the embodiments of the present disclosure in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present disclosure will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation to the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0020] Figure 1 is a perspective view of a cavity structure provided by an embodiment of the present disclosure.

[0021] Figure 2 is a cross-sectional view of a cavity structure provided by an embodiment of the present disclosure.

[0022] Figure 3 is a front view of a cavity structure provided by an embodiment of the present disclosure.

[0023] Figure 4 is a perspective view of a cavity structure provided by another embodiment of the present disclosure.

[0024] Figure 5 is a perspective view of a heating structure in a cavity structure provided by an embodiment of the present disclosure.

[0025] Figure 6 is a cross-sectional view of a heating structure in a cavity structure provided by an embodiment of the present disclosure.

[0026] Figure 7 is Figure 1 an enlarged view of part A in

[0027] Figure 8 is a flowchart of a manufacturing method of a cavity structure provided by an embodiment of the present disclosure.

[0028] Reference Signs:

[0029] 100. Frame; 110. End bracket; 111. End plate; 112. Square tube; 120. Support member; 121. First component plate; 122. Second component plate; 123. Extension portion; 124. Reinforcing rib; 125. First through hole; 126. Second through hole; 200. First heating structure; 210. Tube body; 220. Heating wire; 221. Heating section; 222. Connection section; 230. Thermally conductive insulating material; 300. Second heating structure; 400. Sealing layer; 500. Thermal insulation layer; 600. Process chamber; 700. Loading port; 800. Cover plate. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present disclosure. Apparently, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present disclosure without creative efforts shall fall within the protection scope of the present disclosure.

[0031] As Figures 1 to 3 shown, the cavity structure of the embodiment of the present disclosure includes a frame 100 and multiple heating structures.

[0032] The frame 100 includes two end brackets 110 and multiple support members 120 extending along the first direction X. The two end brackets 110 are arranged in parallel at intervals along the first direction X. The multiple support members 120 are located between the two end brackets 110 and are respectively fixedly connected to the two end brackets 110. The multiple heating structures are respectively fixedly connected to the support members 120, and the multiple heating structures and the frame 100 enclose a process chamber 600.

[0033] In this embodiment, the frame 100 can support the heating structures, and has advantages such as a simple structure, easy installation and operation, and strong ability to withstand external atmospheric pressure.

[0034] The process chamber 600 is used to place a sheet and process the sheet. The sheet includes but is not limited to one of a silicon wafer, a semiconductor wafer, and a wafer. The processing refers to that the sheet can perform a coating process or a thermal process in the process chamber 600.

[0035] The shape of the process chamber 600 can be any one of a rectangle, a circle, and an ellipse.

[0036] It should be noted that the cavity structure also has a loading port 700 communicating with the process chamber 600, and the sheet enters the process chamber 600 through the loading port 700. Exemplarily, at least one of the end brackets 110 is provided with a loading port 700.

[0037] Correspondingly, as Figure 4As shown, the cavity structure may further include a cover plate 800. A moving mechanism (not shown) is provided on the cover plate 800 and can move the carrier holding the sheet and the cover plate 800 from the loading port 700 into the process chamber 600, and move them out of the process chamber 600 to the outside of the loading port 700. That is, the moving mechanism can move the carrier and the cover plate 800 reciprocally in Figure 1 the X-axis direction of

[0038] In this embodiment, the frame 100 in the cavity structure can support the heating structure. The multiple heating structures and the frame 100 together enclose the process chamber 600, which is beneficial to enhancing the ability of the cavity structure to withstand external atmospheric pressure and ensuring its stability and safety in various gas atmosphere environments. The structural form of the support members in the frame connected to the heating structure can simplify the installation structure of the heating structure and reduce the structural complexity and production cost.

[0039] Optionally, the materials of the frame 100 are all metal materials, such as stainless steel materials, which have good high-temperature resistance and corrosion resistance and are convenient for ensuring the structural strength of the cavity structure.

[0040] In some embodiments of the present disclosure, the end bracket 110 is a square frame 100 structure. The end bracket 110 includes an end plate 111 and a plurality of square tubes 112. The plurality of square tubes 112 are located on the same side of the end plate 111. The end plate 111 includes four side edges, and at least one square tube 112 is correspondingly connected to each side edge. The extending directions of the four side edges of the end plate 111 are the same as the extending directions of the corresponding square tubes 112 connected thereto. The end plate 111 and the square tubes 112 can be fixedly connected by, for example, welding or bolt connection. Preferably, the end plate 111 and the square tubes 112 are welded and fixed to improve the sealing performance. Further, the adjacent square tubes 112 are vertically fixed.

[0041] Optionally, the number of the support members 120 is four, and the positions where the four support members 120 are connected to the end plate 111 are the corner positions of the end bracket 110.

[0042] Optionally, as Figure 7 shown, both ends of the support member 120 are abutted against and welded to the square tube 112. Further, at least one end of the support member 120 is provided with an extension portion 123. The extension portion 123 is located inside the end bracket 110 and is fixedly connected to the end bracket 110 by, for example, welding.

[0043] In the above embodiment, the end bracket 110 can connect the multiple support members 120 into a whole to form a stable support structure, which is beneficial to ensuring the structural strength of the cavity structure.

[0044] In some embodiments of the present disclosure, the support member 120 includes a first component plate 121 and a second component plate 122. Both the first component plate 121 and the second component plate 122 are straight plate structures extending along the first direction X, and the second component plate 122 is perpendicularly fixed to the first component plate 121.

[0045] The plurality of heating structures include at least one first heating structure 200. The first heating structure 200 extends along the second direction Y, and both ends of the first heating structure 200 are fixedly connected to the first component plate 121 of the corresponding support member 120 by means such as welding.

[0046] The plurality of heating structures further include at least one second heating structure 300. The second heating structure 300 extends along the third direction Z, and both ends of the second heating structure 300 are fixedly connected to the second component plate 122 of the corresponding support member 120 by means such as welding. Among them, the first direction X, the second direction Y, and the third direction Z are perpendicular to each other.

[0047] In the above embodiments, the first component plate 121 and the second component plate 122 of the support member 120 can respectively support the heating structures in different directions. Thus, only one support member 120 can be arranged at the corner position, reducing the number of arranged support members 120 and lowering the production difficulty and production cost. In addition, the first component plate 121 and the second component plate 122 are perpendicular to each other, which can increase the structural strength of the support member 120, and further improve the ability of the cavity structure to withstand the external atmospheric pressure.

[0048] Optionally, the support member 120 forms an angle between the first component plate 121 and the second component plate 122, and this angle faces away from the process chamber 600. Since the first component plate 121 and the second component plate 122 are perpendicularly fixed to each other, the above angle is a 90° angle. The side where the angle faces away from the process chamber 600 means that the side edge formed at the connection position of the first component plate 121 and the second component plate 122 faces the process chamber 600. This setting form can reduce the installation difficulty of the first heating structure 200 and the second heating structure 300, avoid interference between the first heating structure 200 and the second heating structure 300, and also increase the installation quantity of the first heating structure 200 and the second heating structure 300.

[0049] In some embodiments of the present disclosure, the number of the first heating structures 200 is multiple. The multiple first heating structures 200 are arranged along the first direction X, and the multiple first heating structures 200 are respectively connected to the first component plate 121.

[0050] In some embodiments of the present disclosure, the number of the second heating structures 300 is multiple. The multiple second heating structures 300 are arranged along the first direction X, and the multiple first heating structures 200 are respectively connected to the second component plate 122.

[0051] The number of the first heating structure 200 and the second heating structure 300 can each be one or more, and the number of the first heating structure 200 and the second heating structure 300 can be equal or unequal.

[0052] Optionally, the number of the first heating structure 200 and the second heating structure 300 are both multiple, and a plurality of the first heating structures 200 are respectively arranged on two opposite inner walls of the process chamber 600 in the cavity structure, and a plurality of the second heating structures 300 are respectively arranged on the other two opposite inner walls.

[0053] In some embodiments of the present disclosure, the support member 120 further includes a reinforcing rib 124. The reinforcing rib 124 is disposed between the first forming plate 121 and the second forming plate 122, and is perpendicularly fixed to the first forming plate 121 and the second forming plate 122 respectively. Specifically, the reinforcing rib 124 is located within the angle formed between the first forming plate 121 and the second forming plate 122. The reinforcing rib 124 is a plate body structure in the shape of a right triangle. One right side of the reinforcing rib 124 is fixedly connected to the first forming plate 121, and the other right side is fixedly connected to the second forming plate 122.

[0054] Optionally, the support member 120 includes a plurality of reinforcing ribs 124, and the plurality of reinforcing ribs 124 are arranged at intervals along the first direction X.

[0055] The structural strength of the support member 120 can be increased through the reinforcing rib 124, and the structural stability of the cavity structure can be improved.

[0056] Combined Figure 5 and Figure 6 , in some embodiments of the present disclosure, the heating structure includes a tube body 210 and a heating wire 220. One end of the tube body 210 is fixedly connected to one of the support members 120, and the other end of the tube body 210 is fixedly connected to another support member 120. The heating wire 220 includes a heating section 221 and a connection section 222. The heating section 221 is located inside the tube body 210. The connection section 222 is connected to the heating section 221 and extends to the outside of the tube body 210. The connection section 222 is configured to connect to a power source.

[0057] The tube body 210 is a rigid member with a certain anti-deformation ability, so that it can form a shielding protection for the heating wire 220. The tube body 210 can also function to connect adjacent support members 120, increasing the structural stability of the cavity structure.

[0058] In this embodiment, the cross-sectional shape of the tube body 210 includes a circle, a rectangle, an ellipse, etc., and no specific limitation is made here.

[0059] Optionally, the material of the tube body 210 is stainless steel or titanium alloy material, which has the advantages of high strength and corrosion resistance.

[0060] Optionally, the material of the heating section 221 is nickel-chromium alloy or iron-chromium-aluminum alloy material, which has the advantages of high temperature resistance and high resistivity.

[0061] Optionally, the heating section 221 is in a spiral structure, or the heating section 221 is in an S-shaped bending structure, thereby improving the heat generation efficiency and better meeting the heat generation requirements.

[0062] In some embodiments of the present disclosure, the heating structure further includes a reinforcing member, which is located inside the tube body 210 and fixedly connected to the tube body 210. The reinforcing member can be a rib plate or a rod body, etc. The reinforcing member and the tube body 210 can be integrally formed, or can be separately formed and fixedly connected by means such as welding. The structural strength of the tube body 210 can be increased through the reinforcing member, and the anti-deformation ability of the tube body 210 can be improved.

[0063] In some embodiments of the present disclosure, the heating structure further includes a thermally conductive insulating material 230, which is filled between the tube body 210 and the heating wire 220. By providing the thermally conductive insulating material 230, not only can the electrical contact between the heating wire 220 and the tube body 210 be effectively isolated, but also the overall mechanical strength of the heating mechanism can be improved, and the bending and compressive strengths can be increased.

[0064] In this embodiment, the thermally conductive insulating material 230 is selected from materials with excellent thermal conductivity and insulation properties. For example, the thermally conductive insulating material 230 is one of thermally conductive ceramicized silica gel, thermally conductive silicone grease, and thermally conductive potting adhesive.

[0065] In some embodiments of the present disclosure, the first component plate 121 is provided with at least one first through hole 125, and the second component plate 122 is provided with at least one second through hole 126. The first through hole 125 can be used as a wiring channel for the first heating structure 200, and the second through hole 126 can be used as a wiring channel for the second heating structure 300. Specifically, when installing the first heating structure 200 and the second heating structure 300, the first heating structure 200 can be aligned with the corresponding first through hole 125 and then fixed to the first component plate 121, and the circuit of the first heating structure 200 (such as the connecting section 222 described above) can be installed through the first through hole 125. The second heating structure 300 is aligned with the corresponding second through hole 126 and then fixed to the second component plate 122, and the circuit of the second heating structure 300 (such as the connecting section 222 described above) can be installed through the second through hole 126.

[0066] Optionally, the first component board 121 is provided with a plurality of first through holes 125 arranged along the first direction X, and the second component board 122 is provided with a plurality of second through holes 126 arranged along the first direction X, so that when the number of the first heating structure 200 and the second heating structure 300 is plural, the requirement of separate wiring is satisfied.

[0067] Combined Figure 1 with Figure 2 and, in some embodiments of the present disclosure, the cavity structure further includes a plurality of sealing layers 400, and the plurality of sealing layers 400 are fixedly connected to at least one of the support 120 and the end bracket 110. Preferably, the plurality of sealing layers 400 are simultaneously fixedly connected to the support 120 and the end bracket 110. By providing the sealing layer 400, the cavity structure has good corrosion resistance and sealing performance, ensuring the airtightness of the cavity structure.

[0068] In the case where the heating structure includes the tube body 210, the tube body 210 of the heating structure can support the sealing layer 400, improving the ability of the sealing layer 400 to withstand external air pressure and effectively enhancing the structural strength of the cavity structure.

[0069] Optionally, the materials of the sealing layers 400 are all metal materials, such as stainless steel materials, which have good high temperature resistance and corrosion resistance, and are convenient for ensuring the structural strength and sealing performance of the cavity structure.

[0070] Optionally, the number of the sealing layers 400 is four, and each sealing layer 400 is fixedly connected to two adjacent supports 120.

[0071] Optionally, both ends of the sealing layer 400 are fixedly welded to the square tube 112 in the corresponding end bracket 110.

[0072] Combined Figure 1 with Figure 2 and, in some embodiments of the present disclosure, the cavity structure further includes at least one layer of heat insulation layer 500, and the heat insulation layer 500 is arranged outside the plurality of sealing layers 400 and is fixedly connected to the sealing layer 400 and / or the frame 100.

[0073] The heat insulation layer 500 includes a plurality of heat insulation boards, and each heat insulation board is respectively attached to the plurality of sealing layers 400, and the heat insulation board is fixedly connected to at least one of the sealing layer 400 and the frame 100. According to needs, the heat insulation board can be provided with one layer or multiple layers, and no specific limitation is made here.

[0074] Next, Figure 8 a manufacturing method of the cavity structure according to an embodiment of the present disclosure will be described, and the manufacturing method of the cavity structure described below can be mutually referred to the cavity structure in the above embodiment.

[0075] A manufacturing method of a cavity structure according to an embodiment of the present disclosure includes:

[0076] S100. Manufacture a heating structure.

[0077] S200. Provide two end brackets 110 and a plurality of support members 120, and fixedly connect the two end brackets 110 and the plurality of support members 120 to obtain a frame 100. Specifically, one end of the plurality of support members 120 is fixedly welded to one of the end brackets 110, and the other end of the plurality of support members 120 is fixedly welded to the other end bracket 110.

[0078] S300. Fix the heating structure to the support member 120. Optionally, fixing the heating structure to the support member 120 includes: fixedly welding both ends of the heating structure to the corresponding support members 120 by a welding method.

[0079] Optionally, before fixedly welding both ends of the heating structure to the corresponding support members 120 by the welding method, fixing the heating structure to the support member 120 further includes: forming a first through hole 125 and a second through hole 126 on the support member 120, and aligning both ends of the heating structure with the corresponding first through hole 125 or second through hole 126 respectively.

[0080] In some embodiments of the present disclosure, after fixing the heating structure to the support member 120, it further includes:

[0081] S400. Provide a sealing layer 400, and fixedly connect the sealing layer 400 to the support member 120 and / or the end bracket 110.

[0082] In some embodiments of the present disclosure, after fixedly connecting the sealing layer 400 to the support member 120 and / or the end bracket 110, it further includes:

[0083] S500. Provide a heat insulation layer 500, and fix the heat insulation layer 500 on the outer side of the sealing layer 400.

[0084] In some embodiments of the present disclosure, the heating structure includes a tube body 210 and a heating wire 220, and manufacturing the heating structure in step S100 includes:

[0085] S101. Provide the tube body 210 and the heating wire 220;

[0086] S102. Install the heating wire 220 inside the tube body 210.

[0087] In some embodiments of the present disclosure, the heating structure further includes a reinforcing member, and manufacturing the heating structure in step S100 further includes:

[0088] S103. Provide a reinforcing member and fix the reinforcing member inside the tube body 210.

[0089] It should be noted that there is no sequential order between step S102 and step S103.

[0090] In some embodiments of the present disclosure, the heating structure further includes a thermally conductive insulating material 230. After installing the tube body 210 inside the heating wire 220 in step S102, manufacturing the heating structure further includes:

[0091] S104. Provide a thermally conductive insulating material 230 and fill the thermally conductive insulating material 230 between the tube body 210 and the heating wire 220.

[0092] According to the cavity structure and its manufacturing method provided by the embodiments of the present disclosure, the frame 100 in the cavity structure can support the sealing layer 400, which is beneficial to enhancing the ability of the sealing layer 400 to withstand the external atmospheric pressure. The structural form of the support member 120 in the frame 100 connected to the heating structure can simplify the installation structure of the heating structure, reduce the structural complexity and production cost. In addition, since the heating structure is located inside the sealing layer 400 and is connected to the support member 120, the heating structure can also support the sealing layer 400, further enhancing the ability of the sealing layer 400 to withstand the external atmospheric pressure.

[0093] The phrases "an embodiment" and "embodiments" mentioned in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but not necessarily every embodiment includes such specific features, structures, or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. Moreover, when combining specific features, structures, or characteristics with an embodiment, implementing such features, structures, or characteristics in combination with other embodiments, whether explicitly or implicitly described, is within the knowledge scope of those skilled in the art.

[0094] It should be understood that the terms "on...", "above...", and "over..." in the present disclosure should be interpreted in the broadest manner, such that "on..." not only means "directly on something", but also includes the meaning of "on something" with intermediate features or layers therebetween, and "above..." or "over..." not only includes the meaning of "above or over something", but also can include the meaning of "above or over something" with no intermediate features or layers therebetween (i.e., directly on something).

[0095] In addition, for the convenience of description, spatial relative terms may be used in this text, such as "below", "beneath", "under", "above", "upper", etc., to describe the relationship of one component or feature to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of a component in use or operation other than the orientation shown in the drawings. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatial relative descriptors used in this text may be interpreted accordingly.

[0096] It should be noted that in this text, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0097] The above are only the preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.

Claims

1. A cavity structure, characterized in that: include: A frame, comprising two end brackets and a plurality of support members extending along a first direction, wherein the plurality of support members are located between the two end brackets and are respectively fixedly connected to the two end brackets; A plurality of heating structures are fixedly connected to the support member, and the plurality of heating structures and the frame form a process cavity.

2. The cavity structure according to claim 1, characterized in that: The support member comprises: a first constituent plate extending along the first direction; a second constituent plate extending along the first direction and fixed perpendicularly to the first constituent plate; The plurality of heating structures include: At least one first heat-generating structure extends along the second direction, and two ends of the first heat-generating structure are respectively connected to the first constituent plates of the corresponding support members; at least one second heating structure extending along the third direction, and two ends of the second heating structure are respectively connected to the second constituent plates of the corresponding support member; The first direction, the second direction and the third direction are perpendicular to each other.

3. The cavity structure according to claim 2, characterized in that: The support member forms an angle between the first constituent plate and the second constituent plate, and the angle is directed toward a side away from the process chamber.

4. The cavity structure according to claim 2 or 3, characterized in that: The number of the first heat-generating structures is plural, the plurality of the first heat-generating structures are arranged along the first direction, and the plurality of the first heat-generating structures are respectively connected to the first constituent plate; And / or, there are multiple second heat-generating structures, the multiple second heat-generating structures are arranged along the first direction, and the multiple first heat-generating structures are respectively connected to the second constituent plates.

5. The cavity structure according to claim 2 or 3, characterized in that: The support member also includes: The reinforcing ribs are arranged between the first constituent plate and the second constituent plate and are respectively fixed vertically to the first constituent plate and the second constituent plate.

6. The cavity structure according to any one of claims 1 to 3, characterized in that: The heating structure comprises: A tube body, one end of which is fixedly connected to one of the supports, and the other end of which is fixedly connected to the other support; The heating wire comprises a heating section and a connecting section, wherein the heating section is located in the tube body, the connecting section is connected to the heating section and extends to the outside of the tube body, and the connecting section is configured to be connected to a power source.

7. The cavity structure according to claim 6, characterized in that: The heating structure further comprises: The heat-conducting insulating material is filled between the tube body and the heating wire.

8. The cavity structure according to claim 7, characterized in that: The thermally conductive insulating material is one of thermally conductive ceramic silica gel, thermally conductive silicone grease and thermally conductive potting glue.

9. The cavity structure according to claim 6, characterized in that: The heating structure further comprises: The reinforcing member is located inside the tube body and is fixedly connected to the tube body.

10. The cavity structure according to claim 6, characterized in that: The material of the frame is metal material; And / or, the material of the tube body is stainless steel or titanium alloy; And / or, the material of the heating section is nickel-chromium alloy or iron-chromium-aluminum alloy.

11. The cavity structure according to any one of claims 1 to 3, characterized in that: Also includes: A plurality of sealing layers are located on a side of the heating structure away from the process chamber and are fixedly connected to the support member and / or the end bracket.

12. The cavity structure according to claim 11, characterized in that: The sealing layer is made of metal material.

13. The cavity structure according to claim 11, characterized in that: Also includes: At least one thermal insulation layer is arranged outside the plurality of sealing layers and is fixedly connected to the sealing layers and / or the frame.

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