Sample carrier clamp, electron microscope bearing module and sample carrier mounting tool

Abstract

The utility model provides a sample carrier clamp, an electron microscope bearing module and a sample carrier mounting tool, the sample carrier clamp comprises a first limiting piece and a second limiting piece, the first limiting piece limits a limiting area used for positioning a sample carrier, the observation direction of the sample carrier is defined as the axial direction, the two ends of the limiting area in the axial direction are open, and the second limiting piece is arranged in the limiting area. The second limiting piece is clamped with the first limiting piece, and the first limiting piece can press the second limiting piece from one side of the limiting area to the other side of the limiting area in the axial direction, so that the second limiting piece and the first limiting piece clamp the sample carrier in the axial direction. An operator can carry the sample carrier through the sample carrier clamp, so that direct contact with the sample carrier is avoided, the risk that the sample carrier is damaged or polluted in the carrying process is reduced, and the quality of a supporting film is improved.

Description

Technical Field

[0001] This application relates to the field of electron microscope detection, in particular to a sample carrier fixture, an electron microscope loading module, and a sample carrier installation tool. Background Art

[0002] Transmission electron microscopes (TEMs) are used to observe submicroscopic or ultramicroscopic structures in multiple fields such as materials, physics, and biochemistry.

[0003] During the process of using a cryo-electron microscope for sample detection, it is usually necessary to cover a support film on an electron microscope grid to prepare a sample carrier for carrying samples such as biological single particles. The sample carrier is then installed on a sample transfer device, such as a specimen holder, and the sample is placed in the electron microscope through the sample transfer device.

[0004] When attaching the support film to the grid, it is easy to contaminate the support film, and at the same time, it is difficult to ensure the flatness of the support film during attachment. Moreover, the grid may also have a problem of poor flatness, which will correspondingly result in poor flatness of the support film covering the grid, ultimately reducing the quality of the support film and being unfavorable for sample observation.

[0005] To solve the above problems, a substrate-based sample carrier has been proposed in related technologies. The support film is formed on the surface of the substrate through semiconductor processing technology, so it has high flatness and is not easily contaminated. However, the sample carrier is still prone to damage or contamination during handling and transfer, which is unfavorable for sample observation.

[0006] In some related technologies, such as US11373840B1, an elastic snap ring is often used to clamp and fix the sample carrier on the fixture for easy handling of the sample carrier. However, the current snap ring design is only applicable to sample carriers with a relatively thin thickness, such as a sample carrier formed by attaching a support film to a grid, and it is difficult to effectively clamp and fix a relatively thick substrate, so it cannot be applied to the substrate-based sample carrier. Summary of the Utility Model

[0007] This application aims to solve at least one of the technical problems existing in the prior art. For this purpose, this application provides a sample carrier fixture, an electron microscope loading module, and a sample carrier installation tool. The sample carrier fixture can be used to handle the sample carrier, which helps to improve the quality of the support film.

[0008] The sample carrier clamp provided in the present application is used to install the sample carrier, and the sample carrier clamp includes a first limit member and a second limit member, the first limit member defines a limit area for placing the sample carrier, and defines the observation direction of the sample carrier as axial, the limit area is open at both ends of the axial direction, the second limit member is engaged with the first limit member, and the first limit member can press the second limit member from one side of the limit area to the other side of the limit area in the axial direction, so that the second limit member and the first limit member clamp the sample carrier in the axial direction.

[0009] The sample carrier clamp provided in the present application has at least the following technical effects: when the sample carrier is placed in the limiting area, the first limiting member and the second limiting member respectively press the two sides of the sample carrier from the axial direction, thereby clamping the sample carrier. The operator can carry the sample carrier through the sample carrier clamp, thereby avoiding direct contact with the sample carrier and reducing the risk of damage or contamination of the sample carrier during transportation. The sample carrier clamp can be used to carry sample carriers, which helps to improve the quality of the support film.

[0010] According to some embodiments of the present application, the first limiting member and / or the second limiting member can be deformed to expand and shrink in the radial direction to allow the second limiting member to pass through the first engaging portion of the first limiting member along the axial direction and enter the limiting area when engaged, and the radial direction is perpendicular to the axial direction.

[0011] According to some embodiments of the present application, the second limiting member includes a clamping ring, which surrounds the circumference and is not closed, so as to shrink and deform inward when squeezed.

[0012] According to some embodiments of the present application, one side of the clamping ring along the axial direction is used to abut against the first clamping portion, and the other side of the clamping ring along the axial direction is used to abut against the sample carrier.

[0013] According to some embodiments of the present application, the first limiting member includes a first locking plate, which is closed along a circle to define the limiting area, and the first locking plate extends inward along a direction inclined to the axial direction on both sides of the axial direction, one side of which is used to engage with the clamping ring, and the other side is used to resist the sample carrier.

[0014] According to some embodiments of the present application, the second limiting member can be bent and deformed with the radial direction as the rotation axis.

[0015] According to some embodiments of the present application, the second limiting member includes a second pressing plate and a plurality of second clamping plates arranged around the outer circumference of the second pressing plate, and the second pressing plate and the second clamping plates can be bent and deformed with the radial direction as the rotation axis.

[0016] According to some embodiments of the present application, in the engaged state, the degree of deformation of the second engaging plate is greater than that of the second pressing plate.

[0017] According to some embodiments of the present application, the second engaging plate is formed with hollow holes for increasing the deformation ability.

[0018] According to some embodiments of the present application, the two second engaging plates are respectively disposed on both sides of the second pressing plate, and the two second engaging plates extend outward from the edge of the second pressing plate in opposite directions.

[0019] According to some embodiments of the present application, three or more second engaging plates are arranged at equal intervals around the second pressing plate, and each second engaging plate extends outward respectively.

[0020] According to some embodiments of the present application, the first limiting member includes a first pressing plate and a first engaging plate, the first engaging plate is disposed around the edge of the first pressing plate, and the first engaging plate and the first pressing plate define the limiting area.

[0021] According to some embodiments of the present application, the first engaging plate extends inward, and the first engaging plate and the second engaging plate are engaged with each other.

[0022] According to some embodiments of the present application, the first limiting member is formed with a first window, the second limiting member is formed with a second window, and the first window, the second window and the imaging window of the sample carrier are at least partially aligned in the axial direction to expose the sample located on the sample carrier.

[0023] According to some embodiments of the present application, the first limiting member includes a first positioning portion and / or the second limiting member includes a second positioning portion, and the first positioning portion and / or the second positioning portion are used for contacting and positioning the sample carrier in the radial direction.

[0024] According to some embodiments of the present application, the second positioning portion is arranged around the second window.

[0025] According to some embodiments of the present application, the second positioning portion extends from the edge of the second window towards the first limiting member.

[0026] According to some embodiments of the present application, the material of the first limiting member and / or the second limiting member is a conductive material.

[0027] The electron microscope carrier module provided by the present application includes a sample carrier and the sample carrier fixture provided by the present application, and the sample carrier includes a substrate and a support film covering the substrate.

[0028] According to some embodiments of the present application, at least one through imaging window is formed in the substrate along the axial direction, the support film covers the imaging window, at least one through carrying hole is formed in the support film, and the projection of the carrying hole on the substrate is located within the imaging window.

[0029] According to some embodiments of the present application, the sample carrier includes a flange extending radially outwards, the radial direction is perpendicular to the axial direction, and the first limiting member and the second limiting member clamp the flange.

[0030] According to some embodiments of the present application, the sample carrier includes a carrier mesh, the carrier mesh covers the substrate, the carrier mesh includes a first joint portion, the first joint portion extends outwards from the edge of the substrate along the radial direction, and the first joint portion serves as the flange.

[0031] According to some embodiments of the present application, the substrate includes a bearing portion and a second joint portion, the bearing portion is used to support the support film, the second joint portion surrounds the bearing portion in the circumferential direction, the thickness of the second joint portion is less than the thickness of the bearing portion, and the second joint portion serves as the flange.

[0032] According to some embodiments of the present application, the support film is made of a nickel-titanium film or a silicon nitride film, and the nickel-titanium film contacts the first limiting member and / or the second limiting member.

[0033] According to some embodiments of the present application, the sample carrier includes a conductive film, the conductive film covers the substrate, the conductive film contacts the support film, the conductive film contacts the first limiting member and / or the second limiting member, and the conductivity of the conductive film is greater than that of the support film.

[0034] The sample carrier installation tool provided by the present application is used to assemble the sample carrier fixture provided by the present application. The sample carrier installation tool includes a clamping sleeve and a push rod. The clamping sleeve is provided with a through clamping hole along its own axial direction. In the radial direction, the size of the clamping hole is less than or equal to the size of the opening of the limiting area. The push rod is used to push the second limiting member into the clamping hole and push the second limiting member out of the clamping hole.

[0035] According to some embodiments of the present application, the clamping sleeve is provided with a positioning hole, the positioning hole communicates with one end of the clamping hole, the positioning hole and the clamping hole are coaxially arranged, and the positioning hole is used to accommodate and position the first limiting member.

[0036] According to some embodiments of the present application, the push rod includes a first push rod and a second push rod. The first push rod is used to push the second limiting member, and the second push rod is used to push the second limiting member out.

[0037] According to some embodiments of the present application, a positioning protrusion is formed on the end face of the first push rod, and the positioning protrusion is used to insert into the second window of the second limiting member to position the second limiting member.

[0038] According to some embodiments of the present application, the projection of the end face of the first push rod falls within the range of the second pressing plate.

[0039] According to some embodiments of the present application, the second push rod includes a limiting structure, and the limiting structure is used to limit the pushing stroke of the second push rod.

[0040] According to some embodiments of the present application, the second push rod includes a rod body and a handle, the rod body is installed on the handle, and the step portion between the rod body and the handle serves as the limiting structure.

[0041] According to some embodiments of the present application, the sample carrier installation tool includes a fixed seat, and the first push rod is installed on the fixed seat.

[0042] According to some embodiments of the present application, the fixed seat is provided with a first counterbore, the first push rod is installed in the first counterbore, the diameter of the first counterbore matches the outer diameter of the clamping sleeve, and the first counterbore is used to guide the first push rod to insert into the clamping hole.

[0043] According to some embodiments of the present application, the fixed seat is provided with a second counterbore, the diameter of the second counterbore matches the outer diameter of the clamping sleeve, the second counterbore is used to place the first limiting member containing the sample carrier, and the second counterbore is used to guide the first limiting member to press into the positioning hole.

[0044] The electron microscope carrier module of the embodiments of the present application includes the sample carrier clamp of the embodiments of the present application. The sample carrier installation tool of the embodiments of the present application is used to install the sample carrier clamp of the embodiments of the present application. Therefore, it correspondingly has the beneficial effects provided by the sample carrier clamp, which will not be elaborated here. Description of the Drawings

[0045] The above and / or additional aspects and advantages of the present application will become obvious and easy to understand from the description of the embodiments in conjunction with the following drawings, where:

[0046] Figure 1 is an exploded structural schematic diagram of the sample carrier clamp according to the embodiment of the first aspect of the present application;

[0047] Figure 2 is a sectional structural schematic diagram of the sample carrier clamp according to the embodiment of the first aspect of the present application;

[0048] Figure 3It is a schematic cross-sectional structure diagram of a sample carrier fixture according to an embodiment of the first aspect of the present application;

[0049] Figure 4 It is an exploded structure diagram of a sample carrier fixture according to an embodiment of the second aspect of the present application;

[0050] Figure 5 It is an exploded structure diagram of a sample carrier fixture according to an embodiment of the third aspect of the present application;

[0051] Figure 6 It is an exploded structure diagram of a sample carrier fixture according to an embodiment of the fourth aspect of the present application;

[0052] Figure 7 It is a schematic principle diagram of installing a sample carrier using a sample carrier installation tool in an embodiment of the second aspect of the present application;

[0053] Figure 8 It is a schematic principle diagram of installing a sample carrier using a sample carrier installation tool in an embodiment of the second aspect of the present application;

[0054] Figure 9 It is a schematic principle diagram of installing a sample carrier using a sample carrier installation tool in an embodiment of the second aspect of the present application;

[0055] Figure 10 It is a schematic principle diagram of installing a sample carrier using a sample carrier installation tool in an embodiment of the second aspect of the present application.

[0056] Reference numerals:

[0057] Sample carriers 1100, 2100, 3100; substrates 1110, 2110, 3110; bearing part 1111; second joint part 1112; support films 1120, 2120, 3120; carrier meshes 1130; first joint part 1131;

[0058] First limit members 1200, 2200, 3200, 4200; first pressing plates 2210, 3210, 4210; first windows 1220, 2220, 3220, 4220; first engaging plates 1230, 2230, 3230, 4230;

[0059] Second limit members 1300, 2300, 3300, 4300; second windows 1310, 2310, 3310, 4310; snap rings 1320; second engaging plates 2320, 3320, 4320; hollow holes 2340; second positioning plates 3350; second pressing plates 2360, 3360, 4360;

[0060] Clamping sleeve 2410; clamping hole 2411; positioning hole 2412; first push rod 2420; positioning protrusion 2421; second push rod 2430; rod body 2431; handle 2432; fixing seat 2440; first counterbore 2441; second counterbore 2442. Detailed implementation manners

[0061] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and should not be construed as a limitation to the present application.

[0062] In the description of the present application, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0063] In the description of the present application, the meaning of "several" is one or more, the meaning of "multiple" is two or more, and understandings such as "greater than", "less than", "exceeding", etc. do not include the present number, and understandings such as "above", "below", "within", etc. include the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features, and should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0064] In the description of the present application, unless otherwise clearly defined, terms such as "set", "install", "connect", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present application in combination with the specific content of the technical solution.

[0065] For cryo-EM detection, the sample needs to be placed on a sample carrier. The sample carrier carries the sample through a support film. When used for cryo-EM imaging, the support film is provided with a plurality of holes. First, the solution carrying the sample is titrated on the support film so that a liquid film is formed in the holes, and then the solution is frozen to the glass state, and then the sample in the holes is observed through the electron microscope.

[0066] The specimen grid is usually a porous metal sheet, which can be made of materials such as Cu, Ni, Mo, Au, and nylon, and plays a role in strengthening and supporting the sample and the support film. In some related technologies, the prepared support film is first floated on the water surface, and then the support film is picked up by the specimen grid so that the support film adheres to the specimen grid.

[0067] The separate support film is thin and fragile, and the fishing process requires manual operation, which is difficult and costly. It is not conducive to the mass production of the support film. At the same time, manual operation also has defects such as poor consistency and easy contamination, resulting in poor imaging quality and being unfavorable for sample observation. Moreover, the specimen grid may have problems with poor flatness, which will correspondingly lead to poor flatness of the support film covering the specimen grid, reducing the film-forming quality. For example, it is difficult to accurately control the thickness of the liquid film, etc., which is not conducive to sample observation.

[0068] In addition, when the operator fishes up the support film and transports the sample carrier, it is also easy to contact the support film (by contacting with tools or directly touching with hands), causing damage or contamination to the support film.

[0069] Therefore, the present application provides a sample carrier clamp, which is used for the installation and transportation of the sample carrier.

[0070] Referring to Figure 1 、 Figure 2 and Figure 3 According to an embodiment of the first aspect of the present application, the sample carrier clamp includes a first limiting member 1200 and a second limiting member 1300. The first limiting member 1200 defines a limiting area for placing the sample carrier 1100. Define the observation direction of the sample carrier 1100 as the axial direction (that is, the Z direction in Figure 1 ). The limiting area is open at both ends in the axial direction. The second limiting member 1300 is engaged with the first limiting member 1200. The first limiting member 1200 can press the second limiting member 1300 from one side of the limiting area to the other side in the axial direction, so that the second limiting member 1300 and the first limiting member 1200 clamp the sample carrier 1100 in the axial direction.

[0071] According to the sample carrier clamp provided by the embodiment of the present application, the limiting area is open at both ends in the axial direction, thereby forming two openings for exposing the sample carrier 1100 during observation. The opening at the same end as the first limiting member 1200 is also used for placing the sample carrier 1100. During use, first place the sample carrier 1100 into the limiting area from the opening, then engage the second limiting member 1300 with the first limiting member 1200. The first limiting member 1200 and the second limiting member 1300 respectively press both sides of the sample carrier 1100 from the axial direction, thereby clamping the sample carrier 1100. The operator can transport the sample carrier 1100 through the sample carrier clamp, thereby avoiding direct contact with the sample carrier 1100 and reducing the risk of damage or contamination of the sample carrier 1100 during the transportation process. The sample carrier clamp can be used to transport the sample carrier 1100, which helps to improve the quality of the support film.

[0072] It can be understood that the first limiting member 1200 also needs to form an opening for exposing the sample carrier 1100. Specifically, refer toFigure 1 The first limiting member 1200 forms a first window 1220. The two first windows 1220 are respectively located on both axial sides of the limiting region. The second limiting member 1300 forms a second window 1310. The first window 1220 and the second window 1310 are at least partially aligned axially to expose the sample located on the sample carrier 1100.

[0073] The sample carrier fixture is usually used in combination with the sample carrier 1100. Therefore, the present application also provides an electron microscope loading module, which includes the sample carrier 1100 and the sample carrier fixture of the present application. The sample carrier 1100 at least includes a support film 1120. The electron microscope loading module correspondingly has the beneficial effects provided by the sample carrier fixture, which will not be elaborated here.

[0074] Returning to the sample carrier fixture, it can be understood that the first limiting member 1200 exerts a resultant force along the axial direction and towards the other side of the limiting region on the second limiting member 1300 through the extrusion deformation during contact, achieving the clamping effect. The part on the first limiting member 1200 used to contact and exert an extrusion force on the second limiting member 1300 can be defined as the first engaging part, and the corresponding part on the second limiting member 1300 can be defined as the second engaging part. As long as the normal direction of the first engaging part faces the other side of the limiting region (tilted with respect to the axial direction, preferably perpendicular to the axial direction), the requirement for exerting a force can be met. Therefore, the specific arrangement position of the first engaging part on the first limiting member 1200 can be adjusted according to the design of the second limiting member 1300. For example, the first engaging part can be located within the limiting region or outside the limiting region.

[0075] Exemplarily, referring to Figure 1 、 Figure 2 and Figure 3 when the sample carrier 1100 is compressed, the second limiting member 1300 can entirely enter the limiting region. At this time, the first engaging part is also the inner surface of the limiting region, that is, the first engaging part is located within the limiting region.

[0076] On the one hand, to achieve the contact between the first engaging part and the second limiting member 1300 requires that the projected parts of the first engaging part and the second limiting member 1300 overlap. On the other hand, the second limiting member 1300 entirely entering the limiting region requires that the projected area of the second limiting member 1300 falls within the opening range of the limiting region. Therefore, the sample carrier fixture can be further designed such that the first limiting member 1200 and / or the second limiting member 1300 can deform to expand and contract radially to allow the second limiting member 1300 to cross the first engaging part axially and enter the limiting region during engagement, where the radial direction is perpendicular to the axial direction.

[0077] That is to say, through the shape change, the projection area of ​​the first limit member 1200 and / or the second limit member 1300 changes during the stage of inserting the second limit member 1300 and the stage of engaging the second limit member 1300, thereby meeting the different requirements of the two stages.

[0078] Exemplarily, the second stopper 1300 can be deformed and contracted inwardly in the radial direction. Optionally, the second stopper 1300 can be constructed by an open-loop design. Figure 1 , Figure 2 and Figure 3 The second stopper 1300 may include a snap ring 1320, which is circumferentially encircled and not closed (ie, an open-loop design) so as to shrink and deform inward when squeezed. Alternatively, the snap ring 1320 may be made of an elastically deformable material so that the snap ring 1320 has a deformation capability.

[0079] Specifically, one side of the clamping ring 1320 along the axial direction is used to abut against the first limiting member 1200 , and the other side of the clamping ring 1320 along the axial direction is used to abut against the sample carrier 1100 .

[0080] When the second limiting member 1300 is placed, the second limiting member 1300 (for example, the retaining ring 1320) shrinks and deforms so that the projection area moves inward, thereby allowing the second limiting member 1300 to axially pass over the opening of the limiting area and the first engaging portion in sequence, and transfer from the side of the first engaging portion away from the sample carrier 1100 to the side of the first engaging portion facing the sample carrier 1100; next, the second limiting member 1300 returns to its original shape, thereby moving its own projection area outward, and the second limiting member 1300 contacts the surface of the side of the first engaging portion facing the sample carrier 1100, generating a force to press the sample carrier 1100.

[0081] Since the second stopper 1300 is designed to be deformed inwardly and is located in the limit area, correspondingly, the first stopper 1200 may include a first clamping plate 1230, which is closed along the circumference to define the limit area, and the first clamping plate 1230 extends inward along the direction inclined to the axial direction on both sides in the axial direction, one side of which is used to clamp with the clamping ring 1320, and the other side is used to resist the sample carrier 1100. In other words, the first clamping portion is located at the edge of one side of the first clamping plate 1230, and the edge of the other side of the first clamping plate 1230 is in contact with the sample carrier 1100 for positioning.

[0082] Based on the same principle, the first limiting member 1200 can also be designed to be able to expand and deform outward in the radial direction. For example, the first engaging plate 1230 adopts an open-loop design that is not closed or the first engaging plate 1230 is made of an elastically deformable material, so that the projection area of the first engaging plate 1230 can expand outward, and at the same time, the opening of the limiting area is increased to meet the requirement of inserting the second limiting member 1300. The sample carrier fixture can also be designed such that both the first limiting member 1200 and the second limiting member 1300 can undergo radial deformation, which will not be elaborated here.

[0083] It should be noted that in the embodiments of the first aspect, the second limiting member 1300 entirely enters the limiting area. Therefore, it is required that the deformation of the first limiting member 1200 and / or the second limiting member 1300 reaches a degree that allows the second limiting member 1300 to cross the opening of the limiting area.

[0084] In some other embodiments, the second limiting member 1300 can also be designed to partially enter the limiting area. The part of the second limiting member 1300 located within the limiting area is used to contact the sample carrier 1100, while the part of the second limiting member 1300 located outside the limiting area is used to contact the first engaging part.

[0085] In such an embodiment, the contact part between the first engaging part and the second limiting member 1300 is located outside the limiting area. Although the sample carrier fixture still needs to be designed such that the first limiting member 1200 and / or the second limiting member 1300 can deform in the radial direction, the radial deformation of the first limiting member 1200 and / or the second limiting member 1300 only needs to reach a degree that allows the second limiting member 1300 to cross the first engaging part, and it is not necessary to deform to enable the second limiting member 1300 to enter the limiting area. Additionally, since there is no space limitation of the limiting area at this time, the shapes of the first engaging part of the first limiting member 1200 and the second engaging part of the second limiting member 1300 can be designed more flexibly.

[0086] Although transporting the sample carrier 1100 through the sample carrier fixture can avoid contact damage to the support film during transportation, there is still a risk of contacting the support film 1120 and causing damage or contamination when fishing up the support film 1120 through the grid. Additionally, in order to be suitable for electron microscope observation, the size of the support film 1120 is generally small, with a diameter of about 3 mm. Therefore, preparing the support film 1120 by fishing up is also not conducive to precisely controlling the covering effect of the support film 1120, and it is difficult to ensure the consistency of different batches of support films 1120.

[0087] For this reason, referring to Figure 2 and Figure 3In the electron microscope carrier module corresponding to the embodiment of the first aspect, the sample carrier 1100 also includes a substrate 1110 , and a support film 1120 covers the substrate 1110 .

[0088] It is understood that the substrate 1110 is a base for depositing materials. Since the substrate 1110 is used to support the support film 1120, the support film 1120 can be directly formed on the surface of the substrate 1110 through a deposition process (for example, through a photolithography method). On the one hand, the step of using a carrier net to pick up the support film 1120 in the related technology is avoided, and the support film 1120 is avoided from being damaged during the preparation process. On the other hand, the deposition process also improves the thickness consistency and surface flatness of the support film 1120, which helps to improve the quality of electron microscope observation. The deposition process is also conducive to the mass production of the sample carrier 1100.

[0089] In order to observe the sample through the substrate 1110, the substrate 1110 also needs to be formed with at least one through imaging window along the axial direction, the support film 1120 covers the imaging window, and the support film 1120 is formed with at least one through object-carrying hole, and the projection of the object-carrying hole on the substrate 1110 is located within the imaging window. When performing an electron microscope experiment, the object-carrying hole forms a liquid film, the sample is located in the liquid film, and the electron beam passes through the imaging window and the object-carrying hole to image the sample. It can be understood that the opening of the limiting area exposes the imaging window and the object-carrying hole.

[0090] The imaging principle of electron microscopy is to emit an electron beam to a sample for imaging. During the imaging process, electric charges will accumulate on the sample carrier 1100. In cryo-EM experiments, the sample is usually a protein or other biological material, and the electric charges can easily cause sample damage. Therefore, the electric charges on the sample carrier 1100 can be guided out through the sample carrier fixture to avoid the phenomenon of electric charge accumulation.

[0091] The charge can be derived in many ways, such as designing a special derivation structure on the sample carrier fixture, such as a conductive circuit, but this will complicate the sample carrier fixture and increase the difficulty of processing. A more convenient way is to use a conductive material as the material of the first limiter 1200 and / or the second limiter 1300 to achieve a conductive effect.

[0092] On the premise of meeting the strength requirement for compressing the sample carrier 1100 , the specific specifications of the conductive material can be determined according to actual needs. For example, materials such as gold and titanium that have good conductivity, biocompatibility and stability can be selected.

[0093] The support film 1120 can be made of nitinol film, silicon nitride film or other film materials. To accelerate the conduction of charges from the support film 1120 to the sample carrier fixture, the support film 1120 is preferably made of nitinol film, and the nitinol film is in contact with the first limiting member 1200 and / or the second limiting member 1300.

[0094] "Nitinol film" refers to a thin film composed of nitinol alloy. The nitinol film has poor protein adsorption, and ideally does not adsorb proteins. Therefore, protein samples tend to aggregate in the liquid film formed by the support film 1120 rather than stay on the surface of the support film 1120, thereby increasing the distribution density of the samples in the liquid film and improving the observation effect of the samples; the nitinol film has good electrical conductivity, so the charges generated during observation can be timely conducted out through the nitinol film and are difficult to accumulate in the liquid film, effectively avoiding the decline in sample quality and sample damage and improving the observation effect of the samples.

[0095] However, limited by the requirements of the support film 1120 for sample bearing performance, it is difficult for the support film 1120 to adopt a material with better electrical conductivity. To further accelerate the conduction of charges from the support film 1120 to the sample carrier fixture, the sample carrier 1100 can also include a conductive film, the conductive film covers the substrate 1110, the conductive film is in contact with the support film, the conductive film is in contact with the first limiting member 1200 and / or the second limiting member 1300, and the electrical conductivity of the conductive film is greater than that of the support film 1120.

[0096] To clamp and fix the sample carrier 1100 with the substrate 1110, optionally, the sample carrier 1100 includes a flange extending radially outward, the radial direction is perpendicular to the axial direction, and the first limiting member 1200 and the second limiting member 1300 clamp the flange.

[0097] The flange can be formed by the substrate 1110. Exemplarily, referring to Figure 2 , the substrate 1110 can include a bearing portion 1111 and a second joint portion 1112. The bearing portion 1111 is used to support the support film 1120, the second joint portion 1112 surrounds the bearing portion 1111 in the circumferential direction, the thickness of the second joint portion 1112 is less than the thickness of the bearing portion 1111, and the second joint portion 1112 serves as the flange. At this time, the sample carrier 1100 may not have a carrier grid.

[0098] However, such a design will lead to the complication of the processing technology of the substrate 1110, greatly increase the processing cost of the substrate 1110, and may also cause unstable installation of the sample carrier 1100 if the cutting accuracy is not high.

[0099] The flange can also be formed by the carrier grid. Exemplarily, referring to Figure 3The sample carrier 1100 may include a grid 1130, the grid 1130 covers the substrate 1110, and the grid 1130 includes a first joint portion 1131, the first joint portion 1131 extends radially outward from the edge of the substrate 1110, and the first joint portion 1131 serves as a flange. At this time, the grid may be bonded to the support film 1120 or the substrate 1110 after the support film 1120 is formed.

[0100] The mesh 1130 can be bonded to the substrate 1110 or the support film 1120 by bonding or snapping. Bonding is a commonly used bonding method between the mesh 1130 and the support film 1120 in the related technology of lifting the support film 1120 by the mesh 1130, which can ensure the stability of the bonding, but the adhesive used for bonding is likely to contaminate the support film 1120; snapping is to design a snap-fit ​​structure on the substrate 1110 to snap with the mesh 1130. The snapping requires high processing accuracy of the substrate 1110 and the mesh 1130, otherwise the connection is prone to be too tight or too loose, thereby increasing the processing difficulty of the sample carrier 1100 and reducing the processing efficiency of the sample carrier 1100.

[0101] The reason for the above problems is that the second stopper 1300 in the first embodiment uses a snap ring 1320, which is engaged by radial contraction deformation. On the one hand, the size of the snap ring 1320 in the axial direction is relatively large, and it occupies relatively more space. On the other hand, the substrate 1110 needs to have a certain thickness to ensure the support effect on the support film 1120. Therefore, the substrate 1110 needs to be thinned at the edge (that is, the flange is processed) before it can be inserted between the first stopper 1200 and the second stopper 1300 for clamping, or the flange needs to be indirectly formed through the carrier mesh 1130.

[0102] To avoid machining problems caused by flange setting, refer to Figure 4 According to the embodiment of the second aspect of the present application, the sample carrier clamp includes a first stopper 2200 and a second stopper 2300. Different from the embodiment of the first aspect, in the embodiment of the second aspect, the second stopper 2300 can be bent and deformed with the radial direction as the rotation axis (that is, the direction of the torque is along the radial direction).

[0103] Exemplarily, the second position-limiting member 2300 includes a second pressing plate 2360 and a plurality of second engaging plates 2320 arranged around the outer circumference of the second pressing plate 2360 , and the second pressing plate 2360 and the second engaging plates 2320 can be bent and deformed with the radial direction as the rotation axis.

[0104] It can be understood that, in order to provide radial deformation ability, compared with the snap ring 1320, the second limiting member 2300 (such as the combination of the second pressing plate 2360 and the second engaging plate 2320) has a smaller dimension (defined as thickness) in the axial direction, so that the occupation of the limiting space can be reduced, and thus the substrate 2110 can be clamped by the first limiting member 2200 and the second limiting member 2300 without being thinned. Therefore, the sample carrier 2100 can be installed without a flange, thus overcoming the problems such as increased processing difficulty caused by the flange and easy contamination of the support film 2120.

[0105] The second engaging plate 2320 is used for engagement, and the second pressing plate 2360 is used for clamping. During use, first place the sample carrier 2100 into the limiting area; next, bend the second limiting member 2300 so that the second limiting member 2300 bulges in the axial direction and contracts inward in the radial direction to be placed into the limiting area; finally, release the bending so that the second limiting member 2300 rebounds under the action of its own elastic force, the second engaging plate 2320 contacts the first limiting member 2200, and the second pressing plate 2360 contacts the sample carrier 2100.

[0106] Optionally, in Figure 4 , the two second engaging plates 2320 are respectively arranged on both sides of the second pressing plate 2360, and the two second engaging plates 2320 extend radially outward from the edge of the second pressing plate 2360 in opposite directions. Of course, the extending direction of the second engaging plate 2320 is not limited to the radial direction, as long as the second engaging plate 2320 is inclined to the axial direction so that the acting force generated between the first engaging part and the second engaging part can decompose an axial component force for pressing the sample carrier 2100.

[0107] Since the thickness of the second limiting member 2300 is reduced while the moving space of the sample carrier 2100 in the limiting area is increased, the sample carrier 2100 is prone to move in the limiting area, and there is a risk of attitude deviation (that is, the actual axial direction is deviated compared with the ideal axial direction), which has a negative impact on the observation effect of the sample.

[0108] For this reason, continuing to refer to Figure 4 , the first limiting member 2200 may include a first pressing plate 2210. The second pressing plate 2360 and the first pressing plate 2210 respectively contact the end faces on both sides of the sample carrier 2100 in the axial direction to position the placement attitude of the sample carrier 2100, so as to obtain a better positioning effect.

[0109] It can be understood that the first pressing plate 2210 can be designed as Figure 4A flat plate extending radially therein, at this time the entire first pressing plate 2210 positions the sample carrier 2100 through surface contact. Alternatively, protrusions for positioning may be formed on the surface of the first pressing plate 2210, and the number of protrusions is at least three to position the sample carrier 2100 based on the principle of determining a plane by three points. Other possible design methods of the first pressing plate 2210 can refer to the related technologies involving end face positioning, which will not be elaborated here.

[0110] Of course, the first limiting member 2200 also includes a first engaging plate 2230. The first engaging plate 2230 is disposed around the edge of the first pressing plate 2210. The first engaging plate 2230 and the first pressing plate 2210 define a limiting area, and the first engaging portion is located at one end of the first engaging plate 2230 away from the first pressing plate 2210.

[0111] To achieve the engagement between the first engaging plate 2230 and the second engaging plate 2320, the first engaging plate 2230 extends inward in a direction inclined to the axial direction (for example Figure 4 radially therein). It can be understood that first, the first engaging plate 2230 and the second engaging plate 2320 extend towards each other so that they can be engaged together. At the same time, since the extending direction is inclined to the axial direction, an axial component force can be generated to achieve an extrusion effect.

[0112] In the embodiment of the second aspect, since the sample carrier fixture is installed by pressing the two end faces of the sample carrier 2100 in the axial direction, the requirements for the shape and processing accuracy of the sample carrier 2100 by the sample carrier fixture are further relaxed.

[0113] Exemplarily, the sample carrier 2100 can be designed in a prism shape, such as Figure 4 a cuboid in, rather than the common circular thin sheet in the related technologies. Since the material of the substrate 2110 can be silicon or silicide, the substrate 2110 can be prepared with reference to the wafer dicing process in the semiconductor processing field. The cuboid substrate 2110 is convenient for processing, which not only improves the processing speed but also reduces the loss of the raw materials of the substrate 2110.

[0114] In addition, referring to Figure 4 , the first pressing plate 2210 further forms a first window 2220, the second pressing plate 2360 further forms a second window 2310, and the first window 2220, the second window 2310 and the imaging window of the sample carrier 2100 are at least partially aligned axially to expose the sample located on the sample carrier 2100, so as to prevent the first pressing plate 2210 and the second pressing plate 2360 from blocking the end faces of the sample carrier 2100 and affecting the observation.

[0115] Optionally, the second position-limiting member 2300 may further form a hollow hole 2340 for increasing the deformation capability, so that the installation operation of the second position-limiting member 2300 is easier.

[0116] After the bending is released, the first clamping plate 2230 still applies a squeezing force to the second clamping plate 2320, so the shape of the second pressing plate 2360 may not be restored to the initial planar state, resulting in insufficient contact between the second pressing plate 2360 and the sample carrier 2100. Although a convexity can be designed on the second pressing plate 2360 to ensure the contact effect, this will increase the rigidity of the second pressing plate 2360 and make it more difficult to deform.

[0117] To this end, it can be further defined that, in the engaged state, the deformation degree of the second engaging plate 2320 is greater than that of the second pressing plate 2360. This allows the deformation to be further concentrated on the second engaging plate 2320, further reducing the deformation degree of the second pressing plate 2360. In other words, when pressing the sample carrier 2100, the strain of the second pressing plate 2360 should be less than the strain of the second pressing plate 2360.

[0118] For example, refer to Figure 4 The hollow hole 2340 can be designed on the second clamping plate 2320 (that is, the second clamping plate 2320 forms the hollow hole 2340), so that the hollow hole 2340 has a stronger weakening effect on the rigidity of the second clamping plate 2320 than on the second pressing plate 2360, thereby reducing the deformation degree of the second pressing plate.

[0119] In the embodiments of the second aspect, the remaining technical details of the sample carrier clamp not mentioned can refer to the embodiments of the first aspect, such as the design of the first clamping plate 1230 (which can be closed or not), the position design of the contact part between the first limiting member 2200 and the second limiting member 2300 (which can be within the limiting area or outside the limiting area), the charge extraction design of the sample carrier 3100 (including the substrate 3110 and the supporting film 3120), etc., which will not be repeated here.

[0120] It should be noted that, although in the embodiment of the second aspect, the second pressure plate 2360 and the second engaging plate 2320 extend in the same direction, under the premise of satisfying the engagement with the first engaging plate 2230, the second engaging plate 2320 may also adopt other structures, for example, the extension direction may be different from the second pressure plate 2360, and the number of second engaging plates 2320 may be further increased.

[0121] For example, refer to Figure 5, according to an embodiment of the third aspect of the present application, the sample carrier fixture includes a first limiting member 3200 and a second limiting member 3300. The second limiting member 3300 also includes a second pressing plate 3360 and a second engaging plate 3320. However, different from the embodiment of the second aspect, the second engaging plate 3320 first extends axially along the edge of the second pressing plate 3360 to be axially offset from the second pressing plate 3360, and then extends radially outward so as to extend into 3230 to achieve engagement.

[0122] Optionally, the second limiting member 3300 is provided with three second engaging plates 3320 in total. The three second engaging plates 3320 are arranged at equal intervals around the second pressing plate 3360, and each second engaging plate 3320 extends outward respectively. Increasing the number of the second engaging plates 3320 also helps to reduce the strain of the second pressing plate 3360 to a certain extent. Of course, the number of the second engaging plates 3320 can also be set to more than three, which will not be elaborated here.

[0123] It can be understood that since the first pressing plate 2210 and the second pressing plate 2360 can only play the role of axial positioning, in the embodiment of the second aspect, the sample carrier 2100 may be displaced in the radial direction due to the lack of radial positioning, resulting in an unsatisfactory observation effect (such as non-centered imaging).

[0124] For this reason, continue to refer to Figure 5 , exemplarily, the second limiting member 3300 may include a second positioning plate 3350, and the second positioning plate 3350 is used to contact and position the sample carrier 3100 in the radial direction.

[0125] The second positioning plate 3350 protrudes from the second pressing plate 3360, so as to achieve the effect of contact positioning. At least three second positioning plates 3350 are arranged around the second window 3310, so as to fully restrict the freedom of movement of the sample carrier 3100 in the radial direction, so that the imaging window of the sample carrier 3100 is accurately aligned with the second window 3310. When the second limiting member 3300 is bent and deformed, the second positioning plate 3350 can also play the role of clamping the sample carrier 3100 from the radial direction.

[0126] For the convenience of processing, sheet metal technology can be used to form the second pressing plate 3360 and the second engaging plate 2320 through steps such as blanking and bending. At this time, the second positioning plate 3350 can be designed to extend from the edge of the second window 3310 towards the first limiting member 1200, so that the second positioning plate 3350 can also be formed by bending.

[0127] Of course, it is not excluded that a first positioning plate is provided on the first limiting member 3200 to play a radial positioning role similar to that of the second positioning plate 3350. Additionally, a first positioning plate can be provided on the first limiting member 3200 and a second positioning plate 3350 can be provided on the second limiting member 3300.

[0128] In the embodiments of the third aspect, for the technical details of the sample carrier fixture that are not mentioned otherwise, reference can be made to the embodiments of the second aspect, such as the designs of the first pressing plate 3210 and the first engaging plate 3230, the designs of the first window 3220 and the second window 3310, the design of the sample carrier 3100 (including the substrate 3110 and the support film 3120), etc., which will not be elaborated here.

[0129] It should be noted that in the embodiments of the second and third aspects, the sample carrier fixture is engaged by the deformation of the second limiting member. However, as mentioned before, the sample carrier fixture can also be engaged by the deformation of the first limiting member.

[0130] Exemplarily, referring to Figure 6 , according to the embodiments of the fourth aspect of the present application, the sample carrier fixture includes a first limiting member 4200 and a second limiting member 4300. The first limiting member 4200 also includes a first pressing plate 4210 and a first engaging plate 4230. However, different from the embodiments of the third aspect, the first engaging plate 4230 is not closed in the circumferential direction, but a plurality of first engaging plates 4230 are arranged at intervals around the first pressing plate 4210, so that the first engaging plate 4230 can be deformed.

[0131] That is to say, when installing the second limiting member 4300, the second limiting member 4300 can enter the limiting area by the bending deformation of the second limiting member 4300, or the second limiting member 4300 can enter the limiting area by the deformation of the first limiting member 4200 (expanding the first engaging plate 4230).

[0132] In the embodiments of the fourth aspect, for the technical details of the sample carrier fixture that are not mentioned otherwise, reference can be made to the embodiments of the second and third aspects, such as the designs of the second pressing plate 4360 and the second engaging plate 4320, the designs of the first window 4220 and the second window 4310, the design of the sample carrier (including the substrate and the support film), etc., which will not be elaborated here.

[0133] The size of the sample carrier for electron microscope observation is small, and the size of the corresponding sample carrier fixture is also small. In actual use, it is not convenient to deform the sample carrier fixture by tools such as tweezers. Therefore, the present application also provides a sample carrier installation tool, which is applicable to assembling a sample carrier fixture in which the second limiting member can contract and deform inward in the radial direction.

[0134] Exemplarily, referring toFigure 4 and Figure 7 Taking the sample carrier fixture of the second aspect embodiment as an example, the sample carrier installation tool includes a clamping sleeve 2410 and a push rod. The clamping sleeve 2410 is axially provided with a through clamping hole 2411. In the radial direction, the size of the clamping hole 2411 is less than or equal to the size of the opening of the limiting area. The push rod is used to push the second limiting member 2300 into the clamping hole 2411 and push the second limiting member 2300 out of the clamping hole 2411.

[0135] It can be understood that the size in the radial direction refers to the projected size on the radial plane. The opening of the limiting area is the first window 2220 in the embodiment of the second aspect. The fact that the size of the clamping hole 2411 is less than or equal to the size of the opening 2230 of the limiting area means that the projection of the clamping hole 2411 can fall within the range of the first window 2220 (and of course is also inside the circumference where the first engaging plate 2230 is located).

[0136] In use, first place the second limiting member 2300 into the clamping hole 2411. The clamping hole 2411 can cause the second limiting member 2300 to be compressed and deformed and remain in the compressed state. Next, align the clamping hole 2411 with the first window 2220, and use the push rod to push out the second limiting member 2300, so that the second limiting member 2300 transfers to the limiting area in the compressed state. After entering the limiting area, the second limiting member 2300 loses the constraint of the clamping hole 2411 and rebounds, so as to expand outwards, so that the projection area of the second limiting member 2300 partially overlaps with the projection area of the first engaging plate 2230 again.

[0137] The clamping hole 2411 can stably maintain the compressed state of the second limiting member 2300, and the sample carrier installation tool can push the second limiting member 2300 in the compressed state. Therefore, the sample carrier installation tool is convenient to use and helps to simplify the operation steps of the sample carrier fixture.

[0138] In order to facilitate accurately aligning the clamping hole 2411 and the first window 2220 during pushing, the clamping sleeve 2410 may further be provided with a positioning hole 2412. The positioning hole 2412 communicates with one end of the clamping hole 2411. The positioning hole 2412 and the clamping hole 2411 are coaxially arranged. The positioning hole 2412 is used to accommodate and position the first limiting member 2200.

[0139] The positioning hole 2412 can achieve the positioning of the first limiting member 2200 in the positioning hole 2412 through the side wall in the radial direction, or the positioning post with a raised structure additionally arranged in the axial direction, etc. As long as it is ensured that the positioning method does not interfere with the pushing route of the second limiting member 2300. The first limiting member 2200 and the second limiting member 2300 are positioned with the same reference (that is, the clamping sleeve 2410), which can make the positioning more accurate and avoid the pushing failure caused by misalignment.

[0140] The positioning hole 2412 and the clamping hole 2411 can be made in the same machining process to further improve the coaxiality between the two.

[0141] Optionally, referring to Figure 8 , the push rod can be divided into a first push rod 2420 and a second push rod 2430. The first push rod 2420 is used to push the second limiting member 2300, and the second push rod 2430 is used to push out the second limiting member 2300. This is beneficial for designing the first push rod 2420 and the second push rod 2430 with different shapes according to different requirements during pushing and pushing out.

[0142] For the first push rod 2420, exemplarily, a positioning protrusion 2421 can be formed on the end face of the first push rod 2420. The positioning protrusion 2421 is used to insert into the second window 2310 of the second limiting member 2300 to position the second limiting member 2300. Designing the positioning protrusion 2421 can prevent the second limiting member 2300 from running off during compression deformation.

[0143] In addition, it can be understood that the projection of the end face of the first push rod 2420 needs to fall within the range of the second limiting member 2300 to facilitate the compression deformation of the second limiting member 2300. For the second limiting member 2300 with a second pressing plate as an example in the second aspect embodiment, the projection of the end face of the first push rod 2420 preferably falls within the range of the second pressing plate 2360.

[0144] For the second push rod 2420, exemplarily, the second push rod 2430 can include a limiting structure, and the limiting structure is used to limit the pushing stroke of the second push rod 2430. So as to prevent the second push rod 2430 and the second limiting member 2300 from squeezing and damaging the sample carrier 3100.

[0145] Specifically referring to Figure 7 , the second push rod 2430 can include a rod body 2431 and a handle 2432. The rod body 2431 is installed on the handle 2432, and the step portion between the rod body 2431 and the handle 2432 serves as the limiting structure. Of course, the limiting structure can also have other structural forms, such as opening a guide groove on the second push rod 2430 for limiting the stroke range, etc.

[0146] Optionally, the sample carrier installation tool includes a fixing base 2440, and a first push rod 2420 is installed on the fixing base 2440. Obviously, the size of the fixing base 2440 is larger than that of the first push rod 2420. Therefore, on the one hand, the fixing base 2440 can enable the first push rod 2420 to be stably placed, facilitating the placement of the first limiting member 2200 on the first push rod 2420. On the other hand, it can also facilitate the operator to hold and use the first push rod 2420.

[0147] To increase the functions of the fixing base 2440 and make it more convenient to use the sample carrier installation tool, referring to Figure 8 and Figure 9 , the fixing base 2440 may further be provided with a first counterbore 2441, the diameter of the first counterbore 2441 being matched with the outer diameter of the clamping sleeve 2410. The first push rod 2420 is installed in the first counterbore 2441, and the first counterbore 2441 is used to guide the first push rod 2420 to insert into the clamping hole 2411.

[0148] In addition, referring to Figure 9 and Figure 10 , the fixing base 2440 may further be provided with a second counterbore 2442, the diameter of the second counterbore 2442 being matched with the outer diameter of the clamping sleeve 2410. The second counterbore 2442 is used to place the first limiting member 2200 equipped with the sample carrier 2100, and the second counterbore 2442 is used to guide the first limiting member 2200 to press into the positioning hole 2412.

[0149] To make full use of the space of the fixing base 2440, the first counterbore 2441 and the second counterbore 2442 may be respectively located on both sides of the fixing base 2440.

[0150] In the description of this specification, the descriptions with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0151] In some alternative embodiments, the functions / operations recited in the block diagrams may not occur in the order presented in the operational illustrations. For example, depending on the functionality / operation involved, two blocks shown in succession may actually be executed substantially concurrently or the blocks may sometimes be executed in reverse order. Additionally, the embodiments presented and described in the flowcharts of the present application are provided by way of example to provide a more comprehensive understanding of the technology. The disclosed methods are not limited to the operations and logical flows presented herein. Alternative embodiments are contemplated in which the order of various operations is altered and where sub-operations described as part of a larger operation are executed independently.

[0152] Although embodiments of the present application have been shown and described, those of ordinary skill in the art will understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A sample carrier fixture, characterized in that: The sample carrier fixture is used to install the sample carrier, and the sample carrier fixture comprises: A first limiting member, wherein the first limiting member defines a limiting area for placing the sample carrier, and defines an observation direction of the sample carrier as an axial direction, and the limiting area is open at both ends of the axial direction; A second limiting member, the second limiting member is engaged with the first limiting member, and the first limiting member can press the second limiting member from one side of the limiting area to the other side of the limiting area in the axial direction, so that the second limiting member and the first limiting member clamp the sample carrier in the axial direction.

2. The sample carrier fixture according to claim 1, characterized in that: The first limiting member and / or the second limiting member can be deformed to expand and shrink in a radial direction, thereby allowing the second limiting member to pass over the first engaging portion of the first limiting member along the axial direction and enter the limiting area when engaged, and the radial direction is perpendicular to the axial direction.

3. The sample carrier fixture according to claim 2, characterized in that: The first limiting member and / or the second limiting member are made of conductive material.

4. The sample carrier fixture according to claim 2, characterized in that: The second limiting member includes a clamping ring, which surrounds the circumference and is not closed, so as to shrink and deform inward when being squeezed.

5. The sample carrier fixture according to claim 4, characterized in that: One side of the clamping ring along the axial direction is used to abut against the first clamping portion, and the other side of the clamping ring along the axial direction is used to abut against the sample carrier.

6. The sample carrier fixture according to claim 5, characterized in that: The first limiting member includes a first locking plate, which is closed along a circle to define the limiting area. The first locking plate extends inwardly along the directions inclined to the axial direction on both sides of the axial direction, one side of which is used to engage with the clamping ring, and the other side is used to resist the sample carrier.

7. The sample carrier fixture according to claim 2, characterized in that: The second position-limiting member can be bent and deformed with the radial direction as the rotation axis.

8. The sample carrier fixture according to claim 7, characterized in that: The second position-limiting member includes a second pressing plate and a plurality of second clamping plates arranged around the outer circumference of the second pressing plate. The second pressing plate and the second clamping plates can be bent and deformed with the radial direction as the rotation axis.

9. The sample carrier fixture according to claim 8, characterized in that: In the engaged state, the deformation degree of the second engaging plate is greater than that of the second pressing plate.

10. The sample carrier fixture according to claim 9, characterized in that: The second clamping plate is formed with a hollow hole for increasing the deformation capability.

11. The sample carrier fixture according to claim 9, characterized in that: The two second clamping plates are respectively arranged on two sides of the second pressing plate, and the two second clamping plates extend outward from the edge of the second pressing plate in opposite directions.

12. The sample carrier fixture according to claim 9, characterized in that: Three or more second clamping plates are arranged around the second pressure plate at equal intervals, and each of the second clamping plates extends outwards respectively.

13. The sample carrier fixture according to any one of claims 8 to 10, characterized in that: The first limiting member includes a first pressing plate and a first engaging plate, wherein the first engaging plate is arranged around the edge of the first pressing plate, and the first engaging plate and the first pressing plate define the limiting area.

14. The sample carrier fixture according to claim 13, characterized in that: The first clamping plate extends inwardly, and the first clamping plate and the second clamping plate are clamped with each other.

15. The sample carrier fixture according to claim 1, characterized in that: The first stopper forms a first window, the second stopper forms a second window, and the first window, the second window, and the imaging window of the sample carrier are at least partially aligned in the axial direction to expose the sample on the sample carrier.

16. The sample carrier fixture according to claim 15, characterized in that: The first limiting member includes a first positioning plate and / or the second limiting member includes a second positioning plate, and the first positioning plate and / or the second positioning plate are used to contact and position the sample carrier in a radial direction.

17. The sample carrier fixture according to claim 16, characterized in that: The second positioning plate is arranged around the second window.

18. The sample carrier fixture according to claim 17, characterized in that: The second positioning plate extends from an edge of the second window toward the first limiting member.

19. An electron microscope carrying module, characterized in that: The electron microscope carrying module comprises a sample carrier and a sample carrier fixture as described in any one of claims 1 to 18, wherein the sample carrier comprises a substrate and a supporting film covering the substrate.

20. The electron microscope carrying module according to claim 19, characterized in that: The substrate is formed with at least one through imaging window along the axial direction, the supporting film covers the imaging window, the supporting film is formed with at least one through object-carrying hole, and the projection of the object-carrying hole on the substrate is located within the imaging window.

21. The electron microscope supporting module according to claim 19, characterized in that: The sample carrier includes a flange extending outward in a radial direction, wherein the radial direction is perpendicular to the axial direction, and the first limiting member and the second limiting member clamp the flange.

22. The electron microscope carrying module according to claim 21, characterized in that: The sample carrier includes a grid, the grid covers the substrate, the grid includes a first joint portion, the first joint portion extends outward from the edge of the substrate along the radial direction, and the first joint portion serves as the flange.

23. The electron microscope supporting module according to claim 21, characterized in that: The substrate includes a bearing portion and a second bonding portion, the bearing portion is used to support the support film, the second bonding portion surrounds the bearing portion in a circumferential direction, the thickness of the second bonding portion is smaller than the thickness of the bearing portion, and the second bonding portion serves as the flange.

24. The electron microscope supporting module according to claim 19, characterized in that: The support film is a nickel titanium film or a silicon nitride film, and the nickel titanium film is in contact with the first limiting member and / or the second limiting member.

25. The electron microscope supporting module according to claim 19 or 24, characterized in that: The sample carrier comprises a conductive film, the conductive film covers the substrate, the conductive film contacts the supporting film, the conductive film contacts the first limiting member and / or the second limiting member, and the conductivity of the conductive film is greater than that of the supporting film.

26. A sample carrier installation tool, characterized in that: The sample carrier installation tool is used to assemble the sample carrier fixture according to any one of claims 2 to 14, and the sample carrier installation tool comprises: A clamping sleeve, wherein the clamping sleeve is provided with a penetrating clamping hole along its axial direction, and in the radial direction, the size of the clamping hole is smaller than or equal to the size of the opening of the limiting area; A push rod, wherein the push rod is used to push the second limiting member into the clamping hole and push the second limiting member out of the clamping hole.

27. The sample carrier installation tool according to claim 26, characterized in that: The clamping sleeve is provided with a positioning hole, the positioning hole is connected to one end of the clamping hole, the positioning hole is coaxially arranged with the clamping hole, and the positioning hole is used to accommodate and position the first limiting member.

28. The sample carrier installation tool according to claim 27, characterized in that: The push rod includes a first push rod and a second push rod, the first push rod is used to push in the second limiting member, and the second push rod is used to push out the second limiting member.

29. The sample carrier installation tool according to claim 28, characterized in that: A positioning protrusion is formed on the end surface of the first push rod, and the positioning protrusion is used to be inserted into the second window of the second limiting member to position the second limiting member.

30. The sample carrier installation tool according to claim 28, characterized in that: The projection of the end surface of the first push rod falls within the range of the second pressing plate.

31. The sample carrier installation tool according to claim 28, characterized in that: The second push rod includes a limiting structure, and the limiting structure is used to limit the pushing stroke of the second push rod.

32. The sample carrier installation tool according to claim 31, characterized in that: The second push rod includes a rod body and a handle, the rod body is mounted on the handle, and the step portion between the rod body and the handle serves as the limiting structure.

33. The sample carrier installation tool according to any one of claims 28 to 32, characterized in that: The sample carrier installation tool comprises a fixing seat, and the first push rod is installed on the fixing seat.

34. The sample carrier installation tool according to claim 33, characterized in that: The fixing seat is provided with a first countersunk hole, the first push rod is installed in the first countersunk hole, the diameter of the first countersunk hole matches the outer diameter of the clamping sleeve, and the first countersunk hole is used to guide the first push rod to be inserted into the clamping hole.

35. The sample carrier installation tool according to claim 34, characterized in that: The fixing seat is provided with a second countersunk hole, the diameter of which matches the outer diameter of the clamping sleeve, and the second countersunk hole is used to accommodate the first limiting member equipped with the sample carrier, and the second countersunk hole is used to guide the first limiting member to be pressed into the positioning hole.

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