Automatic detection equipment for flower basket silicon wafer in photovoltaic field

Abstract

The utility model relates to the technical field of silicon wafer production, and provides an automatic flower basket silicon wafer detection device in the photovoltaic field, which comprises a rack, an upper computer, a PLC control unit, a main cross beam, an X-axis moving module, a Y-axis moving module, a Z-axis moving module, a camera bracket, a manipulator, a line scanning camera and a manual inspection drawer, an upper computer and a plurality of manual inspection drawers are respectively arranged on the rack; a PLC (Programmable Logic Controller) control unit is arranged in the rack; a first Y-axis moving module and a second Y-axis moving module are respectively arranged on the main cross beam; an X-axis moving module is arranged on the first Y-axis moving module, a Z-axis moving module is arranged on the X-axis moving module, and a manipulator is mounted at the bottom of the Z-axis moving module; a camera bracket is arranged on the second Y-axis moving module; and a plurality of line scanning cameras are mounted on the camera bracket. According to the utility model, the production efficiency is improved and the production cost is reduced by timely identifying the flower basket with the abnormal silicon wafer and manually removing the abnormal silicon wafer.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to an automatic detection device for basket silicon wafers in the photovoltaic field. Background Art

[0002] In the photovoltaic field, currently, there is no detection device arranged after the silicon wafer cleaning equipment. The basket will carry abnormal silicon wafers (broken wafers, stacked wafers, misaligned slots, fragmented wafers) to the subsequent production links. When the abnormal silicon wafer basket reaches the high-speed wafer picking unit of the next sorter, it is found that there will be a large number of silicon wafer jamming and breakage situations, thus seriously reducing the production efficiency, increasing the maintenance cost, and raising the scrap rate.

[0003] Therefore, the utility model provides an automatic detection device for basket silicon wafers in the photovoltaic field to detect whether the silicon wafers inserted in the basket are intact after cleaning. Summary of the Utility Model

[0004] The utility model mainly solves the technical problem that in the prior art, when the basket carries abnormal silicon wafers to the subsequent production links, there will be situations such as jamming, fragmentation, and equipment damage, seriously reducing the production efficiency. The utility model proposes an automatic detection device for basket silicon wafers in the photovoltaic field. By timely identifying the basket with abnormal silicon wafers and manually removing the abnormal silicon wafers and then sending them back to the main production line, the production efficiency is improved and the production cost is reduced.

[0005] The utility model provides an automatic detection device for basket silicon wafers in the photovoltaic field, including: a frame, a host computer, a PLC control unit, a main cross beam, an X-axis moving module, a Y-axis moving module, a Z-axis moving module, a camera support, a manipulator, a line scan camera, and an artificial inspection drawer;

[0006] The host computer and multiple artificial inspection drawers are respectively arranged on the frame;

[0007] The PLC control unit is arranged inside the frame; the PLC control unit is connected to the host computer through Ethernet;

[0008] The main cross beam is fixedly arranged above the frame; the first Y-axis moving module and the second Y-axis moving module are respectively arranged on the main cross beam;

[0009] The X-axis moving module is arranged on the first Y-axis moving module, the Z-axis moving module is arranged on the X-axis moving module, and the manipulator is installed at the bottom of the Z-axis moving module;

[0010] The camera support is arranged on the second Y-axis moving module; multiple line scan cameras are installed on the camera support; the line scan cameras are connected to the host computer through Ethernet.

[0011] Preferably, the frame has a table body and a support;

[0012] The main crossbeam is fixedly arranged on the bracket, and the axial direction of the main crossbeam is perpendicular to the bracket;

[0013] The upper computer and multiple manual inspection drawers are respectively arranged on the table body.

[0014] Preferably, the upper computer is configured with a display, a keyboard and a mouse.

[0015] Preferably, the rack is arranged on one side of the area to be detected, and the manipulator and multiple line scan cameras move above the area to be detected;

[0016] The area to be detected is located in the output direction of the cleaning machine.

[0017] An automatic detection device for flower basket silicon wafers in the photovoltaic field provided by the present utility model is based on a main crossbeam with a compact design. A manipulator and line scan cameras are installed thereon, and manual inspection drawers are arranged on the rack. By promptly identifying the flower basket with abnormal silicon wafers and manually removing the abnormal silicon wafers and then sending them back to the main production line, the card rate and failure rate in subsequent production links are reduced, and finally cost reduction and efficiency increase in the production workshop are realized. The pictures collected by the line scan cameras have advantages such as high resolution and small image distortion; in terms of capturing small silicon wafer defects, it has higher judgment reliability than the commonly used area array cameras. The manual inspection area and the production line area are completely separated, providing guarantee for safe production. The present utility model adopts an integrated design, having advantages such as compact structure, simple movement stroke, high movement efficiency, high recognition accuracy, and fast workshop deployment. This device does not need secondary assembly in the workshop, can be quickly introduced into the existing production line, and can be quickly put into use. Compared with the commonly used six-axis industrial manipulator, the present utility model selects a PLC and a servo system with mature and reliable technology, making its maintenance cost lower, failure rate lower, and production efficiency higher. In the production of silicon wafers in the photovoltaic field, the present utility model detects the integrity of the flower basket silicon wafers coming out of the cleaning equipment, with reliable detection and improved silicon wafer detection efficiency. Description of the Drawings

[0018] Figure 1 is the structural schematic diagram of the automatic detection device for flower basket silicon wafers in the photovoltaic field provided by the present utility model Figure 1 ;

[0019] Figure 2 is the structural schematic diagram of the automatic detection device for flower basket silicon wafers in the photovoltaic field provided by the present utility model Figure 2 ;

[0020] Figure 3 is the rear view of the automatic detection device for flower basket silicon wafers in the photovoltaic field provided by the present utility model;

[0021] Figure 4 is the side view of the automatic detection device for flower basket silicon wafers in the photovoltaic field provided by the present utility model;

[0022] Figure 5 It is a layout schematic diagram of an automatic detection device for flower basket silicon wafers in the photovoltaic field provided by the present utility model.

[0023] Reference numerals: 1, frame; 2, manipulator; 3, line scan camera; 4, flower basket; 5, manual inspection drawer; 6, main beam; 7, cleaning machine; 8, area to be detected; 9, PLC control unit; 10, upper computer; 11, camera support; 12, X-axis moving module; 13, first Y-axis moving module; 14, Z-axis moving module; 15, second Y-axis moving module. Specific embodiments

[0024] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present utility model clearer, the present utility model will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the sake of description, only parts related to the present utility model are shown in the drawings, rather than all the content.

[0025] As Figures 1-5 shown, an automatic detection device for flower basket silicon wafers in the photovoltaic field provided by an embodiment of the present utility model includes: a frame 1, an upper computer 10, a PLC control unit 9, a main beam 6, an X-axis moving module 12, a Y-axis moving module 13, a Z-axis moving module 14, a camera support 11, a manipulator 2, a line scan camera 3, and a manual inspection drawer 5.

[0026] The frame 1 has a table body and a support.

[0027] The upper computer 10 and multiple manual inspection drawers 5 are respectively arranged on the frame 1; specifically, the upper computer 10 and multiple manual inspection drawers 5 are respectively arranged on the table body. The upper computer 10 is configured with a display, a keyboard, and a mouse.

[0028] The manual inspection drawer 5 is used to store the flower basket 4 of abnormal silicon wafers for manual inspection and confirmation. In this embodiment, four manual inspection drawers 5 are provided, and one of the manual inspection drawers 5 is kept reserved. When three manual inspection drawers 5 are filled with the flower basket 4 of abnormal silicon wafers, the PLC control unit 9 enters the detection shielding state. When less than three manual inspection drawers 5 are full, the device normally detects the flower basket 4. The manual inspection drawer 5 is equipped with an indicator light. When the staff sees the indicator light of the corresponding manual inspection drawer 5 flashing, they pull out the manual inspection drawer 5, manually clean the abnormal silicon wafers, and then push it in and press the confirmation completion button.

[0029] The PLC control unit 9 is arranged inside the frame 1; the PLC control unit 9 is connected to the upper computer 10 through an Ethernet. The PLC control unit 9 controls the device actions.

[0030] A main cross beam 6 is fixedly arranged above the frame 1. Specifically, the main cross beam 6 is fixedly arranged on the bracket, and the axial direction of the main cross beam 6 is perpendicular to the bracket. A first Y-axis movement module 13 and a second Y-axis movement module 15 are respectively arranged on the main cross beam 6. Specifically, a rack guide rail is installed on the main cross beam 6. The first Y-axis movement module 13 and the second Y-axis movement module 15 are respectively independent rack modules, but share this rack guide rail. The first Y-axis movement module 13 and the second Y-axis movement module 15 can respectively move along the Y-axis direction on the main cross beam 6.

[0031] An X-axis movement module 12 is arranged on the first Y-axis movement module 13, a Z-axis movement module 14 is arranged on the X-axis movement module 12, and a manipulator 2 is installed at the bottom of the Z-axis movement module 14. The manipulator 2 can adopt a truss manipulator.

[0032] A camera support 11 is arranged on the second Y-axis movement module 15; a plurality of line scan cameras 3 are installed on the camera support 11; in this embodiment, three line scan cameras 3 are arranged. The line scan cameras 3 are connected to the upper computer 10 through Ethernet. After the upper computer 10 connects to three groups of line array cameras 3 through Ethernet to obtain high-definition images, it can be manually inspected by the staff or automatically inspected by the automatic vision detection software to confirm whether the silicon wafers in the flower basket 4 are abnormal; the upper computer 10 feeds back the signal corresponding to the inspection result to the PLC control unit 9, and the PLC control unit 9 controls the corresponding actions of the manipulator 2.

[0033] The driving motors of the X-axis movement module 12, the first Y-axis movement module 13, the second Y-axis movement module 15, the Z-axis movement module 14 and the manipulator 2 are respectively electrically connected to the PLC control unit 9. The driving motors of each movement module of the present utility model adopt servo motors, and the corresponding servo motors are respectively electrically connected to the PLC control unit 9 and are controlled by the PLC control unit 9.

[0034] In the above solution, the first Y-axis movement module 13 on the main cross beam 6 can drive the X-axis movement module 12 and its components to move along the Y-axis direction, the X-axis movement module 12 can drive the Z-axis movement module 14 and the manipulator 2 to move along the X-axis direction; the Z-axis movement module 14 can drive the manipulator 2 to move along the Z-axis direction, realizing the three-axis movement of the manipulator 2. The second Y-axis movement module 15 of the main cross beam 6 can drive the camera support 11 and the line scan cameras 3 to move along the Y-axis direction. In summary, the manipulator 2 can move in three directions of the X-axis, Y-axis, and Z-axis to grab and move the flower basket 4; the line scan cameras 3 can move along the Y-axis direction to collect images of the flower basket 4.

[0035] In this embodiment, the frame 1 is arranged on one side of the area to be detected 8, and the manipulator 2 and multiple line scan cameras 3 move above the area to be detected 8; the area to be detected 8 is located in the output direction of the cleaning machine 7. A position detection sensor is configured on the area to be detected 8, and the position detection sensor is electrically connected to the PLC control unit 9. After detecting that the carrier 4 is in place, a signal indicating its arrival is sent to the PLC control unit 9.

[0036] The working process of the present utility model: After a set of six carriers come out of the cleaning machine 7 and reach the area to be detected 8, the PLC control unit 9 receives the signal indicating the arrival of the area to be detected 8, and the second Y-axis movement module 15 starts to control the movement of the line scan camera 3 to collect images of the carrier 4. After three line scan cameras 3 scan six carriers 4, the generated image data is transmitted to the host computer 10 through Ethernet. The host computer 10 performs manual inspection or automatic inspection of the images. When no abnormal wafers are found, the carriers 4 that have completed the detection will continue to be conveyed to the next wafer sorting process; when abnormal wafers are found, the host computer 10 notifies the PLC control unit 9 of the serial number of the carrier 4 with abnormal wafers through Ethernet communication. The PLC control unit 9 controls the manipulator 2 to pick up the carrier and place it in the manual inspection drawer 5. When the carrier 4 with abnormal wafers in the manual inspection drawer 5 is manually confirmed, and the abnormal wafers are removed and the carrier 4 is pushed back into the manual inspection drawer 5 again, the PLC control unit 9 controls the manipulator 2 to pick up the carrier 4 that has been manually confirmed and place it in the empty position of the area to be detected 8.

[0037] After all the abnormal wafers in a set of six carriers 4 are manually removed and the carriers 4 are put back into the area to be detected 8, the carriers 4 in this set that have not been found with abnormal wafers and the carriers 4 from which abnormal wafers have been removed continue to flow to the next station. The device enters the preparation for the next set of detection cycles. The present utility model can realize the detection of abnormal wafers in the carrier and the removal of abnormal wafers.

[0038] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit it; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: modifications made to the technical solutions recorded in the foregoing embodiments, or equivalent replacements of some or all of the technical features therein, do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present utility model.

Claims

1. An automatic detection device for silicon wafers in photovoltaic field, characterized in that: include: Rack (1), host computer (10), PLC control unit (9), main beam (6), X-axis moving module (12), Y-axis moving module (13), Z-axis moving module (14), camera bracket (11), manipulator (2), line scan camera (3), manual inspection drawer (5); A host computer (10) and a plurality of manual inspection drawers (5) are respectively arranged on the frame (1); A PLC control unit (9) is arranged in the frame (1); the PLC control unit (9) is connected to a host computer (10) via Ethernet; A main crossbeam (6) is fixedly arranged above the frame (1); a first Y-axis moving module (13) and a second Y-axis moving module (15) are respectively arranged on the main crossbeam (6); An X-axis moving module (12) is arranged on the first Y-axis moving module (13), a Z-axis moving module (14) is arranged on the X-axis moving module (12), and a robot (2) is installed at the bottom of the Z-axis moving module (14); A camera bracket (11) is arranged on the second Y-axis moving module (15); a plurality of line scan cameras (3) are installed on the camera bracket (11); and the line scan cameras (3) are connected to a host computer (10) via Ethernet.

2. The photovoltaic field flower basket silicon wafer automatic detection equipment according to claim 1 is characterized in that: The frame (1) comprises a platform and a bracket; The main cross beam (6) is fixedly arranged on the bracket, and the axial direction of the main cross beam (6) is perpendicular to the bracket; The host computer (10) and a plurality of manual inspection drawers (5) are respectively arranged on the platform.

3. The photovoltaic field flower basket silicon wafer automatic detection equipment according to claim 2 is characterized in that: The host computer (10) is equipped with a display, a keyboard and a mouse.

4. The photovoltaic field flower basket silicon wafer automatic detection equipment according to claim 1, characterized in that: The frame (1) is arranged on one side of the area to be inspected (8), and the manipulator (2) and the plurality of line scan cameras (3) move above the area to be inspected (8); The area to be detected (8) is located in the output direction of the cleaning machine (7).

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