Cold cathode gas discharge electron gun capable of replacing cathode block on line

Abstract

The utility model relates to the technical field of electron beam melting, in particular to a cold cathode gas discharge electron gun capable of replacing a cathode block on line. According to the traditional electronic gun design, shutdown and vacuum environment release are usually needed when a cathode block is replaced, so that the shutdown time is increased, thermal stress is possibly caused to equipment, and the long-term stability is influenced. The inner space of the upper cavity is a water-cooling discharge cavity, the inner space of the lower cavity is an optical waveguide chamber, a gate valve assembly is arranged between the upper cavity and the lower cavity and comprises a valve body, one end of the valve body is provided with an air cylinder assembly, and a sliding sealing assembly is arranged in the valve body. The air cylinder assembly drives the sliding sealing assembly to move to seal the upper cavity and the lower cavity, so that the cathode block in the upper cavity is replaced under the condition that the vacuum environment of an optical waveguide chamber in the lower cavity is not damaged, the situation that the production efficiency is reduced due to shutdown replacement of the cathode block is avoided, and the maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of electron beam melting, and particularly relates to a cold cathode gas discharge electron gun capable of online replacing a cathode block. Background Art

[0002] In the process of high-precision melting and processing, the cold cathode gas discharge electron gun plays a crucial role. As a key component for electron emission, the performance of the cathode block directly affects the quality and stability of the electron beam. However, in the traditional electron gun design, it is usually necessary to stop the machine and relieve the vacuum environment when replacing the cathode block, which not only increases the downtime but also may cause thermal stress to the equipment, affecting the long-term stability. Therefore, developing an electron gun that can quickly replace the cathode block without destroying the vacuum environment is of great significance for improving production efficiency and reducing maintenance costs. Content of the Utility Model

[0003] The purpose of the utility model is to provide a cold cathode gas discharge electron gun capable of online replacing a cathode block, which can realize the quick replacement of the cathode block without destroying the vacuum environment in the optical waveguide chamber.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions, including an upper cavity and a lower cavity. The internal space of the upper cavity is a water-cooled discharge chamber. A first cavity opening communicating with the water-cooled discharge chamber is arranged at the bottom of the upper cavity. A cathode block is arranged in the upper part of the water-cooled discharge chamber. An anode block is arranged at the first cavity opening at the bottom of the water-cooled discharge chamber. The anode block is provided with a hole corresponding to the position and matching the size of the first cavity opening.

[0005] The internal space of the lower cavity is an optical waveguide chamber. A first focusing coil, a second focusing coil and a deflection coil are sequentially arranged on the outer side of the lower cavity from top to bottom. A second cavity opening is arranged at the top of the lower cavity. The first cavity opening and the second cavity opening are corresponding in position.

[0006] An insertion plate valve assembly is arranged between the upper cavity and the lower cavity. The insertion plate valve assembly includes a valve body. An upper valve opening communicating with the first cavity opening is arranged at the upper end of the valve body. A lower valve opening communicating with the second cavity opening is arranged at the lower end of the valve body. A sliding seal assembly is arranged at one end inside the valve body. The sliding seal assembly includes an upper valve plate, a ball seat and a lower valve plate. The ball seat is arranged between the upper valve plate and the lower valve plate. The upper valve plate and the lower valve plate are connected by a spring. Spheres are arranged between the ball seat and the upper valve plate and between the ball seat and the lower valve plate. Installation grooves for the spheres are arranged at the upper end and the lower end of the ball seat, and at the lower end of the upper valve plate and the upper end of the lower valve plate.

[0007] One end of the valve body close to the sliding seal assembly is fixedly connected with a cylinder assembly. The cylinder assembly includes a cylinder barrel fixedly connected with the valve body and a cylinder rod arranged inside the valve body. The cylinder rod is connected with a ball seat. The size of the upper valve plate matches the size of the first cavity opening, and the size of the lower valve plate matches the size of the second cavity opening.

[0008] As a preferred embodiment of the present invention, a limiting protrusion is arranged at one end of the upper valve plate away from the first cavity opening. The lower end of the anode block protrudes from the first cavity opening, and the position of the limiting protrusion corresponds to the position of the lower end of the anode block.

[0009] As another preferred embodiment of the present invention, the number of spheres arranged at the upper end and the lower end of the ball seat is the same.

[0010] As the third preferred embodiment of the present invention, a control system for controlling the operation of the cylinder assembly is arranged outside the cylinder assembly.

[0011] The beneficial effects of the present invention:

[0012] In the present invention, a knife gate valve assembly is arranged between the upper cavity and the lower cavity. The knife gate valve assembly is normally in an open state. After the control system issues an instruction to replace the cathode block, the knife gate valve assembly closes, realizing the separation and sealing of the upper cavity and the lower cavity, so as to realize the rapid replacement of the cathode block in the upper cavity without damaging the vacuum environment of the optical waveguide chamber in the lower cavity. During the whole replacement process, it is ensured that effective sealing can be achieved when the knife gate valve assembly is closed, maintaining the vacuum environment inside the optical waveguide chamber and the melting furnace body below it. The present invention realizes the replacement of the cathode block without stopping the machine, improves the production efficiency, and reduces the maintenance cost of the machine. Description of the Drawings

[0013] Figure 1 It is a sectional view of the cold cathode gas discharge electron gun capable of online replacing the cathode block of the present invention.

[0014] Figure 2 It is a sectional view of the open state of the knife gate valve of the present invention.

[0015] Figure 3 It is a sectional view of the closed state of the knife gate valve of the present invention.

[0016] In the drawings, 1 is the upper cavity, 2 is the cathode block, 3 is the anode block,

[0017] 4 is the knife gate valve assembly, 401 is the cavity, 402 is the upper valve plate, 403 is the lower valve plate, 404 is the ball seat, 405 is the sphere, 406 is the cylinder assembly, 411 is the cylinder barrel, 412 is the cylinder rod,

[0018] 5 is the control system, 6 is the lower cavity, 7 is the first focusing coil, 8 is the second focusing coil, 9 is the deflection coil. Detailed implementation mode

[0019] The present utility model adopts the following specific scheme. As Figure 1 shown, it includes an upper cavity 1 and a lower cavity 6. The internal space of the upper cavity 1 is a water-cooled discharge chamber. A first cavity opening communicating with the water-cooled discharge chamber is provided at the bottom of the upper cavity 1. A cathode block 2 is arranged in the upper part of the water-cooled discharge chamber. An anode block 3 is arranged at the first cavity opening at the bottom of the water-cooled discharge chamber. The anode block 3 is provided with a hole corresponding to the position and matching the size of the first cavity opening;

[0020] The internal space of the lower cavity 6 is an optical waveguide chamber. A first focusing coil 7, a second focusing coil 8 and a deflection coil 9 are sequentially arranged on the outer side of the lower cavity 6 from top to bottom. A second cavity opening is provided at the top of the lower cavity 6. The first cavity opening and the second cavity opening are corresponding in position;

[0021] An insertion plate valve assembly 4 is arranged between the upper cavity 1 and the lower cavity 6. The insertion plate valve assembly 4 includes a valve body 401. An upper valve opening communicating with the first cavity opening is provided at the upper end of the valve body 401. A lower valve opening communicating with the second cavity opening is provided at the lower end of the valve body 401. A sliding sealing assembly is arranged at one end inside the valve body 401. The sliding sealing assembly includes an upper valve plate 402, a ball seat 404 and a lower valve plate 403. The ball seat 404 is arranged between the upper valve plate 402 and the lower valve plate 403. The upper valve plate 402 and the lower valve plate 403 are connected by a spring. Spheres 405 are arranged between the ball seat 404 and the upper valve plate 402 and the lower valve plate 403 respectively. Installation grooves for the spheres 405 are provided at the upper end and the lower end of the ball seat 404, the lower end of the upper valve plate 402 and the upper end of the lower valve plate 403;

[0022] One end of the valve body 401 close to the sliding sealing assembly is fixedly connected with a cylinder assembly 406. The cylinder assembly 406 includes a cylinder barrel 411 fixedly connected with the valve body 401 and a cylinder rod 412 arranged inside the valve body 401. The cylinder rod 412 is connected with the ball seat 404. The size of the upper valve plate 402 matches the size of the first cavity opening, and the size of the lower valve plate 403 matches the size of the second cavity opening.

[0023] As a preferred scheme of the present utility model, a limiting protrusion is arranged at one end of the upper valve plate 402 away from the first cavity opening. The lower end of the anode block 3 protrudes from the first cavity opening. The position of the limiting protrusion corresponds to the position of the lower end of the anode block 3.

[0024] As another preferred scheme of the present utility model, the number of spheres 405 arranged at the upper end and the lower end of the ball seat 404 is the same, and two spheres 405 are arranged at the upper and lower ends respectively.

[0025] As the third preferred scheme of the present utility model, a control system 5 for controlling the operation of the cylinder assembly 406 is arranged outside the cylinder assembly 406.

[0026] The specific working process of the present utility model is as follows:

[0027] 1. The plug valve assembly 4 is normally in the open state. As shown in the figure, the control system 5 receives the operation instruction to replace the cathode block 2 of the electron gun. Figure 2 The control system 5 sends a valve closing signal to the cylinder assembly 406, and the cylinder rod 412 extends.

[0028] 2. The ball seat 404 advances along with the cylinder rod 412. The ball seat 404 drives the upper valve plate 402 and the lower valve plate 403 to advance through the sphere 405.

[0029] 3. The limiting protrusion on the upper valve plate 404 collides with the part of the anode block 3 protruding from the first cavity opening, and the upper valve plate 404 gets stuck and stops moving.

[0030] 4. The cylinder rod 412 continues to advance. The sphere 405 between the upper valve plate 402 and the ball seat 404 disengages from the installation groove, and under the action of the sphere 405, the upper valve plate 402 is pushed upward to completely seal the first cavity opening. At this time, the state of the plug valve assembly 4 is as shown in the figure and is in the closed state.

[0031] 5. After the control system 5 receives the signal that the cylinder rod 412 is in place, the cathode block 2 in the upper cavity 1 is removed and a new cathode block 2 is installed. Figure 3 After installation, the operator issues an open valve instruction.

[0032] 6. After the control system 5 receives the opening instruction, it sends a signal to the cylinder assembly 406 to drive the cylinder rod 412 to retract.

[0033] 7. The sphere 405, the upper valve plate 402 and the lower valve plate 403 are reset in sequence as the cylinder rod 412 retracts.

[0034] 8. After the reset is completed, the plug valve assembly 4 is in the open state and the entire replacement process ends.

[0035] 9. During the whole replacement process, it is ensured that the vacuum environment in the optical waveguide chamber and the melting furnace below can be effectively maintained when the plug valve assembly is closed. In addition, the control system can be manually or automatically controlled according to actual needs to adapt to different operation scenarios.

[0036] 10. The cold cathode gas discharge electron gun capable of replacing the cathode block online proposed by the present utility model can realize the rapid replacement of the cathode block of the electron gun without damaging the vacuum environment of the optical waveguide chamber and the melting furnace below, improve production efficiency, reduce downtime and maintenance costs; at the same time, the design takes into account the convenience and safety of operation, providing strong support for high-precision melting and processing.

[0037] During the whole replacement process, it is ensured that the vacuum environment in the optical waveguide chamber and the melting furnace below can be effectively maintained when the plug valve assembly is closed. In addition, the control system can be manually or automatically controlled according to actual needs to adapt to different operation scenarios.

[0038] The cold cathode gas discharge electron gun capable of replacing the cathode block online proposed by the present utility model can realize the rapid replacement of the cathode block of the electron gun without damaging the vacuum environment of the optical waveguide chamber and the melting furnace below, improve production efficiency, reduce downtime and maintenance costs; at the same time, the design takes into account the convenience and safety of operation, providing strong support for high-precision melting and processing.

[0039] It is understandable that the above specific description of the present utility model is only for the purpose of illustrating the present utility model and is not limited to the technical solutions described in the embodiments of the present utility model. Those of ordinary skill in the art should understand that the present utility model can still be modified or equivalently replaced to achieve the same technical effects; as long as the use requirements are met, they are all within the protection scope of the present utility model.

Claims

1. A cold cathode gas discharge electron gun with online replaceable cathode blocks, comprising an upper cavity (1) and a lower cavity (6), characterized in that: The internal space of the upper cavity (1) is a water-cooled discharge cavity, a first cavity opening communicating with the water-cooled discharge cavity is arranged at the bottom of the upper cavity (1), a cathode block (2) is arranged at the upper part of the water-cooled discharge cavity, an anode block (3) is arranged at the first cavity opening at the bottom of the water-cooled discharge cavity, and a hole corresponding to the position of the first cavity opening and matching in size is arranged on the anode block (3); The interior space of the lower cavity (6) is an optical waveguide chamber, and a first focusing coil (7), a second focusing coil (8) and a deflection coil (9) are arranged in order from top to bottom on the outer side of the lower cavity (6), and a second cavity opening is arranged at the top of the lower cavity (6), and the positions of the first cavity opening and the second cavity opening correspond to each other; A gate valve assembly (4) is provided between the upper cavity (1) and the lower cavity (6), the gate valve assembly (4) comprising a valve body (401), an upper valve port communicating with the first cavity port being provided at the upper end of the valve body (401), a lower valve port communicating with the second cavity port being provided at the lower end of the valve body (401), a sliding seal assembly being provided at one end of the inner side of the valve body (401), the sliding seal assembly comprising an upper valve plate (402), a ball seat (404) and a lower valve plate (403 ), a ball seat (404) is arranged between an upper valve plate (402) and a lower valve plate (403), the upper valve plate (402) and the lower valve plate (403) are connected via a spring, a ball (405) is arranged between the ball seat (404) and the upper valve plate (402) and the lower valve plate (403), and mounting grooves for the ball (405) are arranged at the upper end and the lower end of the ball seat (404), the lower end of the upper valve plate (402) and the upper end of the lower valve plate (403); A cylinder assembly (406) is fixedly connected to one end of the valve body (401) close to the sliding seal assembly. The cylinder assembly (406) includes a cylinder barrel (411) fixedly connected to the valve body (401) and a cylinder rod (412) arranged inside the valve body (401). The cylinder rod (412) is connected to the ball seat (404). The size of the upper valve plate (402) matches the size of the first cavity, and the size of the lower valve plate (403) matches the size of the second cavity.

2. A cold cathode gas discharge electron gun with online replaceable cathode blocks as claimed in claim 1, characterized in that: A limiting protrusion is provided at one end of the upper valve plate (402) away from the first cavity opening, the lower end of the anode block (3) protrudes from the first cavity opening, and the position of the limiting protrusion corresponds to the position of the lower end of the anode block (3).

3. A cold cathode gas discharge electron gun with online replaceable cathode blocks as claimed in claim 1, characterized in that: The number of balls (405) arranged at the upper end and the lower end of the ball seat (404) is the same.

4. A cold cathode gas discharge electron gun with online replaceable cathode blocks as claimed in claim 1, characterized in that: A control system (5) for controlling the operation of the cylinder assembly (406) is arranged outside the cylinder assembly (406).

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