Cleaning device for sample introduction pipe of liquid particle counter

Abstract

The utility model discloses a cleaning device for a sample injection pipe of a liquid particle counter. The cleaning device comprises a cleaning liquid bottle, a liquid injection pump, a filter, a cleaning liquid pipe and a flushing mechanism, the cleaning liquid bottle is connected with the liquid inlet end of the filter through the liquid injection pump; the liquid outlet end of the filter is connected with a flushing mechanism used for being connected into a sample injection pipe of the liquid particle counter through a cleaning liquid pipe, so that the liquid injection pump operates to enable the cleaning liquid in the cleaning liquid bottle to be filtered by the filter and then pumped into the flushing mechanism, and flushing operation is conducted on the sample injection pipe of the liquid particle counter. The liquid particle counter solves the problems that a sample feeding pipe of an existing liquid particle counter is exposed, a cleaning device is lacked, and pollution is easily caused, and is easy to operate and good in using effect.

Description

Technical Field

[0001] The utility model relates to the technical field of auxiliary equipment for liquid particle counters, and more specifically, to a cleaning device for a sampling tube of a liquid particle counter. Background Technique

[0002] The control of the particle size of photoresist is inseparable from professional testing equipment for particle size. At present, there are mainly two methods for testing particle size: for chip factories, they mainly use surface particle analyzers (SP2, SP5, SP7) to scan the particles on the wafer after coating; for photoresist manufacturers, they mainly use liquid particle counters, abbreviated as LPC. This equipment mainly provides two testing forms: online and offline. Among them, online testing is suitable for mass production, and the offline mode is suitable for laboratory testing.

[0003] At present, the particle size of photoresist in offline detection is tested by sampling, which has the following defects:

[0004] 1. The sampling tube of the liquid particle counter is exposed to the air, and there is no independent cleaning device for the sampling tube of the liquid particle counter, so there is a risk of being contaminated by the previous test samples.

[0005] 2. Particles will be generated during the storage of the cleaning liquid, and there is a possibility of secondary contamination during the cleaning operation. Summary of the Utility Model

[0006] The purpose of the utility model is to solve the problems raised in the above background technique, and then a cleaning device for a sampling tube of a liquid particle counter is proposed.

[0007] The technical solution adopted by the utility model to solve its technical problems is:

[0008] A cleaning device for a sampling tube of a liquid particle counter includes a cleaning liquid bottle, a liquid injection pump, a filter, a cleaning liquid tube and a flushing mechanism; the cleaning liquid bottle is connected to the liquid inlet end of the filter through the liquid injection pump; the liquid outlet end of the filter is connected with a flushing mechanism for accessing the sampling tube of the liquid particle counter through the cleaning liquid tube, so that the liquid injection pump operates to pump the cleaning liquid in the cleaning liquid bottle into the flushing mechanism after being filtered by the filter, and flush the sampling tube of the liquid particle counter.

[0009] Furthermore, the flushing mechanism includes a flushing box, a flushing tube and a flushing head; the top of the flushing box is open and used for accessing the sampling tube of the liquid particle counter. An annular flushing tube is arranged in the flushing box. The flushing tube is connected with the cleaning liquid tube and a plurality of flushing heads are arranged on its circumference.

[0010] Further, the flushing mechanism further includes a cover plate; the cover plate is placed on the top of the cleaning tank, and a through hole for connecting the liquid particle counter inlet pipe is provided in the middle of the cover plate, and the size of the through hole matches the size of the liquid particle counter inlet pipe.

[0011] Further, the flushing tank is connected to a waste liquid bottle through a waste liquid pipe, and a liquid discharging member is installed on the waste liquid pipe, so that when the liquid discharging member is opened, the waste liquid in the flushing tank is introduced into the waste liquid bottle for unified collection.

[0012] Further, the waste liquid bottle is arranged below the flushing tank, and the liquid discharging member is a valve. When the valve is opened, the waste liquid in the flushing tank is introduced into the waste liquid bottle for unified collection.

[0013] Further, the waste liquid bottle is arranged in the horizontal direction of the flushing tank, and the liquid discharging member is a waste liquid pump. When the waste liquid pump is opened, the waste liquid in the flushing tank is pumped into the waste liquid bottle for unified collection.

[0014] Further, both the cleaning liquid bottle and the waste liquid bottle are transparent bottles to facilitate the observation of the capacity in the cleaning liquid bottle and the waste liquid bottle.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0016] The present utility model integrates the cleaning liquid bottle, the injection pump, the filter, the cleaning liquid pipe and the flushing mechanism. The sampling pipe of the liquid particle counter is connected to the flushing mechanism during non-use; during use, starting the injection pump can complete the cleaning operation of the sampling pipe of the liquid particle counter. At the same time, the cleaning liquid will be filtered by the filter before spraying, avoiding secondary pollution during the cleaning process of the sampling pipe of the liquid particle counter. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural diagram of the present utility model;

[0018] Figure 2 is a schematic installation position diagram of the waste liquid pump;

[0019] Figure 3 is a schematic structural diagram of the flushing mechanism;

[0020] Figure 4 is a schematic installation position diagram of the cover plate;

[0021] Among them: 1. Cleaning liquid bottle; 2. Injection pump; 3. Filter; 4. Cleaning liquid pipe; 5. Flushing mechanism; 51. Flushing tank; 52. Flushing pipe; 53. Flushing head; 54. Cover plate; 541. Through hole; 6. Waste liquid pipe; 61. Valve; 62. Waste liquid pump; 7. Waste liquid bottle. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model. The present utility model will be further described in conjunction with the drawings and embodiments:

[0023] Referring to the attached Figure 1 As shown, a cleaning device for a sampling tube of a liquid particle counter includes a cleaning liquid bottle 1, a liquid injection pump 2, a filter 3, a cleaning liquid tube 4 and a flushing mechanism 5; the cleaning liquid bottle 1 is connected to the liquid inlet end of the filter 3 through the liquid injection pump 2. Among them, the liquid injection pump 2 and the filter 3 are commonly used settings in the prior art, and this application will not elaborate too much. By using this configuration, the particles generated during the storage of the cleaning liquid are filtered, reducing the possibility of secondary pollution during the cleaning operation; the liquid outlet end of the filter 3 is connected to a flushing mechanism 5 for accessing the sampling tube of the liquid particle counter through the cleaning liquid tube 4, so that when the liquid injection pump 2 operates, the cleaning liquid in the cleaning liquid bottle 1 is filtered by the filter 3 and then pumped into the flushing mechanism 5 to perform a flushing operation on the sampling tube of the liquid particle counter.

[0024] This device integrates the cleaning liquid bottle 1, the liquid injection pump 2, the filter 3, the cleaning liquid tube 4 and the flushing mechanism 5. The sampling tube of the liquid particle counter is connected into the flushing mechanism 5 during non-use; during use, starting the liquid injection pump 2 can complete the cleaning operation of the sampling tube of the liquid particle counter. At the same time, the cleaning liquid will be filtered by the filter 3 before spraying, avoiding secondary pollution during the cleaning process of the sampling tube of the liquid particle counter.

[0025] Regarding the above solution, specifically for the structure of the flushing mechanism 5:

[0026] Referring to the attached Figure 3 As shown, the flushing mechanism 5 includes a flushing box 51, a flushing tube 52 and a flushing head 53; the top of the flushing box 51 is open and is used for accessing the sampling tube of the liquid particle counter. An annular flushing tube 52 is arranged in the flushing box 51. The flushing tube 52 is connected to the cleaning liquid tube 4 and a number of flushing heads 53 are arranged on its circumference; during the implementation process, a number of flushing heads 53 are outside the sampling tube of the liquid particle counter. During flushing, the cleaning liquid is sprayed from multiple directions to achieve a comprehensive flushing operation of the sampling tube of the liquid particle counter;

[0027] In addition, considering the anti-pollution effect on the liquid inlet tube of the liquid particle counter, for this reason, referring to the attached Figure 4As shown, the flushing mechanism 5 further includes a cover plate 54; the cover plate 54 is placed on the top of the cleaning tank, and a through hole 541 for connecting the liquid particle counter inlet pipe is provided in the middle of the cover plate 54, and the size of the through hole 541 matches the size of the liquid particle counter inlet pipe.

[0028] Among them, considering the problem of the recovery of the waste liquid after flushing the liquid particle counter inlet pipe, for this reason, refer to the appendix Figure 1 As shown, the flushing tank 51 is connected to a waste liquid bottle 7 through a waste liquid pipe 6, and a liquid discharge member is installed on the waste liquid pipe 6 so that when the liquid discharge member is opened, the waste liquid in the flushing tank 51 is introduced into the waste liquid bottle 7 for unified collection;

[0029] For the above solution, when the waste liquid bottle 7 is arranged below the flushing tank 51, at this time, refer to the appendix Figure 1 As shown, the liquid discharge member is a valve 61. When the valve 61 is opened, the waste liquid in the flushing tank 51 is introduced into the waste liquid bottle 7 for unified collection;

[0030] For the above solution, when the waste liquid bottle 7 is arranged in the horizontal direction of the flushing tank 51, at this time, refer to the appendix Figure 2 As shown, the liquid discharge member is a waste liquid pump 62. When the waste liquid pump 62 is opened, the waste liquid in the flushing tank 51 is pumped into the waste liquid bottle 7 for unified collection.

[0031] In addition, for the convenience of observing the content of the cleaning liquid bottle 1 and the waste liquid bottle 7, both the cleaning liquid bottle 1 and the waste liquid bottle 7 are transparent bottles.

[0032] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of protection required by the present invention. The scope of protection required by the present invention is defined by the appended claims and their equivalents.

Claims

1. A cleaning device for a liquid particle counter inlet tube, characterized in that: It comprises a cleaning liquid bottle (1), a liquid injection pump (2), a filter (3), a cleaning liquid pipe (4) and a flushing mechanism (5); The cleaning liquid bottle (1) is connected to the liquid inlet end of the filter (3) via a liquid injection pump (2); The liquid outlet end of the filter (3) is connected to a flushing mechanism (5) for connecting to a sample inlet tube of a liquid particle counter via a cleaning liquid pipe (4).

2. The cleaning device for a liquid particle counter inlet tube according to claim 1, characterized in that: The flushing mechanism (5) comprises a flushing box (51), a flushing pipe (52) and a flushing head (53); The top of the flushing box (51) is open and is used to connect the liquid particle counter sampling tube. A flushing pipe (52) with an annular structure is arranged in the flushing box (51). The flushing pipe (52) is connected to the cleaning liquid pipe (4) and has a plurality of flushing heads (53) arranged on its upper circumference.

3. The cleaning device for a liquid particle counter inlet tube according to claim 2, characterized in that: The flushing mechanism (5) further comprises a cover plate (54); The cover plate (54) is placed on the top of the cleaning box, and a through hole (541) for connecting to a liquid inlet pipe of a liquid particle counter is provided in the middle of the cover plate (54), and the size of the through hole (541) matches the size of the liquid inlet pipe of the liquid particle counter.

4. The cleaning device for a liquid particle counter inlet tube according to claim 3, characterized in that: The flushing box (51) is connected to a waste liquid bottle (7) via a waste liquid pipe (6), and a liquid discharge member is installed on the waste liquid pipe (6).

5. The cleaning device for a liquid particle counter inlet tube according to claim 4, characterized in that: The waste liquid bottle (7) is arranged below the flushing box (51), and the liquid discharge member is a valve (61).

6. The cleaning device for a liquid particle counter inlet tube according to claim 4, characterized in that: The waste liquid bottle (7) is arranged in the horizontal direction of the flushing box (51), and the liquid discharge member is a waste liquid pump (62).

7. The cleaning device for a liquid particle counter inlet tube according to claim 4, characterized in that: The cleaning liquid bottle (1) and the waste liquid bottle (7) are both transparent bottles.

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