Chemical nickel plating device for inner surface of electronic-grade special gas storage steel cylinder

Abstract

The utility model relates to the technical field of metal surface treatment equipment, in particular to a chemical nickel plating device for the inner surface of an electronic-grade special gas storage steel cylinder, which comprises a device body, the device body comprises a reaction tank, a workpiece is placed in the reaction tank, and the device body comprises a liquid medicine circulating assembly, a water bath heating assembly and an electrode protection assembly. The outlet end of the liquid medicine circulating assembly is connected to the top of the inner cavity of the reaction tank and the inner cavity of the workpiece; the inlet end is connected to the bottom of the inner cavity of the reaction tank; the water bath heating assembly is arranged around the periphery of the reaction tank; the electrode protection assembly is arranged in the reaction tank. According to the chemical nickel plating device, chemical nickel plating treatment on the inner surface of the electronic-grade special gas storage steel cylinder is achieved, it can be ensured that chemical liquid medicine in the cylinder circularly flows in the treatment process, good temperature consistency and component stability are kept, and a nickel plating layer in the cylinder has good thickness consistency after treatment.

Description

Technical Field

[0001] The utility model relates to the technical field of metal surface treatment equipment, in particular to a chemical nickel plating device for the inner surface of an electronic-grade special gas storage cylinder. Background Art

[0002] Electronic-grade special gases, also known as electronic-grade special gases, refer to special gas consumables used in the production and manufacturing of high-precision electronic devices such as microelectronics, semiconductors, integrated circuits, etc. Their consumption in the production and manufacturing links is very large, and different types of special gases are used in different production process links.

[0003] The use of electronic-grade special gases has extremely strict purity requirements. For example, in the semiconductor chip industry, the requirements for the content of impurity heavy metals in silicon-based precursor raw materials are extremely strict. The production process based on this raw material mostly involves nano-level chip manufacturing, and the purity is required to be above 99.999%. Therefore, in the manufacturing process, even trace impurities may lead to defective products. Based on this situation, the requirements for storage conditions of electronic-grade special gases are also extremely high. Correspondingly, the requirements for storage containers are also extremely high. Not only is it required to make a heavy metal shielding layer on the inner surface of the bottle, but it is also required that the thickness of the shielding layer achieves good consistency. In the prior art, electroplating processes are often used for surface treatment of gas storage metal containers. The storage cylinders of electronic-grade special gases generally have the structural characteristics of fat bellies and thin necks, and the bottle mouths are mostly narrow. The electroplating process cannot achieve a good uniform treatment effect on the inner surface. The existing chemical nickel plating method and corresponding equipment also encounter difficult problems when processing electronic-grade special gas storage cylinders, such as the difficulty of exchanging the potion inside the bottle and the outside world, the potion circulation flow cannot be effectively controlled, and the treatment quality cannot meet the storage requirements of electronic-grade special gases. like Figure 5 The figure shows a typical 47L electronic grade special gas storage cylinder, which has a long body and a deep inner cavity. The bottle mouth is narrow. In addition, compared with the side wall structure 4' with better thickness consistency, the arcuate outer wall 2' connected to the bottleneck 1' and the bottle bottom 3' are thickened, and the thickest part is located at the connection between the bottleneck 1' and the arcuate outer wall 2'. For such a bottle body with a deep and long straight inner cavity structure, the traditional method of chemical nickel plating is used. The chemical solution cannot flow well in the inner cavity while maintaining fullness. The flow rate of the circulating flow through the bottle mouth cannot be too high to avoid partial omission of the inner cavity. The flow rate cannot be too low, otherwise it will cause the problem of different thickness of the local nickel layer and affect the consistency of the treatment effect (even cause leakage plating); in addition, due to the deep inner cavity of the bottle, it is easy to cause the liquid to fail to maintain good concentration and temperature consistency when flowing through the inner cavity of the bottle, which still leads to problems such as poor consistency of nickel layer thickness at various locations.

[0004] In summary, traditional surface treatment methods cannot effectively cope with the inner surface treatment of electronic-grade special gas storage cylinders. Utility Model Content

[0005] The purpose of the present utility model is to provide a chemical nickel plating device for the inner surface of an electronic-grade special gas storage steel cylinder to solve the above technical problems.

[0006] The technical problems solved by the present utility model can be realized by the following technical solutions:

[0007] A chemical nickel plating device for the inner surface of an electronic-grade special gas storage steel cylinder includes a device body. The device body includes a reaction tank, and a workpiece is placed in the reaction tank for chemical nickel plating treatment. The chemical plating solution for nickel plating circulates through the inner cavity of the reaction tank and the inner cavity of the workpiece, and exchanges and circulates between the inner cavity of the reaction tank and the inner cavity of the workpiece. Among them, the device body includes a chemical solution circulation component, a water bath heating component, and an electrode protection component.

[0008] The outlet end of the chemical solution circulation component is connected to the top of the inner cavity of the reaction tank and the inner cavity of the workpiece, and the inlet end is connected to the bottom of the inner cavity of the reaction tank, so as to make the chemical solution circulate through the inner cavity of the reaction tank and the inner cavity of the workpiece, and make the chemical solution flow through and exchange between the reaction tank and the workpiece.

[0009] The water bath heating component is arranged around the outer periphery of the reaction tank to heat the reaction tank so as to keep the temperature of the chemical solution relatively consistent.

[0010] The electrode protection component is arranged in the reaction tank to ensure the stability of the chemical solution circulating through the inner cavity of the reaction tank.

[0011] The present utility model enables the chemical solution to be smoothly exchanged and circulated between the reaction tank and the workpiece by setting the chemical solution circulation component, and ensures the temperature consistency during the chemical nickel plating process by setting the water bath heating component and the electrode protection component, thereby ensuring the chemical stability of the chemical solution during the treatment process.

[0012] Preferably, the chemical solution circulation component includes a first delivery pump, a three-way pipe fitting, a tank inlet pipe, a workpiece inlet pipe, and a tank outlet pipe.

[0013] The first and second interfaces of the three-way pipe fitting are respectively connected to the inner cavity of the reaction tank and the inner cavity of the workpiece through the tank inlet pipe and the workpiece inlet pipe, and the third interface of the three-way pipe fitting is connected to the outlet of the first delivery pump.

[0014] One end of the tank outlet pipe is connected to the inner cavity of the reaction tank, and the other end is connected to the inlet of the first delivery pump.

[0015] Preferably, the chemical solution circulation component includes a filter barrel, and the third interface of the three-way pipe fitting is connected to the outlet of the first delivery pump through the filter barrel.

[0016] Preferably, the liquid medicine circulation component includes a workpiece interface part. Through the workpiece interface part, the workpiece inlet pipe vertically extends into the inner cavity of the workpiece, and the liquid medicine exchange between the workpiece and the reaction tank is realized. The workpiece interface part has a connection end, a liquid medicine inlet and a liquid medicine outlet. The connection end is connected to the top opening of the workpiece. After the workpiece inlet pipe extends into the inner cavity of the workpiece through the liquid medicine inlet, the liquid medicine is pumped in. Through the liquid medicine outlet, the liquid medicine in the inner cavity of the workpiece flows back into the inner cavity of the reaction tank;

[0017] The liquid medicine inlet is located at the opposite position of the connection end.

[0018] Preferably, the workpiece inlet pipe vertically extends downward into the inner cavity of the workpiece after passing through the top opening of the workpiece interface part, and the distance between the pipe orifice at the extending end and the bottom of the inner cavity of the workpiece is between 1 / 10 and 1 / 2 of the height of the inner cavity of the workpiece.

[0019] Preferably, the water bath heating component includes a first interlayer, a second delivery pump, and a heating coil. The first interlayer is arranged around the reaction tank. The heating coil is arranged in the first interlayer and coils around the outer wall of the reaction tank. The second delivery pump is arranged outside the first interlayer.

[0020] The first interlayer is provided with a pipe inlet and a pipe outlet communicating with its inner cavity on its side wall. Both outlets penetrate through the first interlayer and are respectively connected to the outlet and the inlet of the second delivery pump.

[0021] Preferably, the water bath heating component includes a second interlayer and heat insulation cotton. The second interlayer is arranged around the first interlayer, and the heat insulation cotton is placed in the second interlayer.

[0022] Preferably, the electrode protection component includes a power supply and a cathode rod. The cathode rod is placed in the inner cavity of the reaction tank, and the cathode rod is connected to the negative pole of the power supply. The positive pole of the power supply is connected to the inner wall of the reaction tank.

[0023] Preferably, the device body includes a workpiece support seat. The workpiece support seat is arranged in the reaction chamber of the tank and is used to support the workpiece so that it is at a certain distance from the bottom of the inner cavity of the reaction tank.

[0024] Preferably, a bracket is arranged at the bottom of the reaction tank. The lower surface of the bracket is provided with feet to play a shock absorption role.

[0025] Beneficial effects: Due to the adoption of the above technical solutions, the present invention realizes the electroless nickel plating treatment on the inner surface of the electronic-grade special gas storage steel cylinder. During the treatment process, it can ensure that the chemical liquid medicine in the cylinder circulates and flows, and maintain good temperature consistency and component stability. After the treatment, the nickel plating layer in the cylinder has good thickness consistency. Description of the Drawings

[0026] Figure 1 This is a schematic structural diagram of one embodiment of the present utility model;

[0027] Figure 2 is Figure 1 a schematic cross-sectional structural diagram of the structure;

[0028] Figure 3 This is a schematic structural diagram of a reaction component of the present utility model;

[0029] Figure 4 This is a schematic cross-sectional structural diagram of a workpiece interface part in the present utility model;

[0030] Figure 5 This is a schematic structural diagram of an electronic-grade special gas storage steel cylinder. Detailed Embodiment

[0031] In order to make the technical means, creative features, achieved purposes and functions of the present utility model easy to understand, the present utility model will be further described below with reference to specific illustrations. It should be noted that the terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present utility model are used to distinguish similar objects, and do not necessarily need to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments described here can be implemented in an order other than that shown or described here. In addition, the term "comprising" or "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a product or device comprising a series of components or units does not necessarily have to be limited to those components or units clearly listed, but may include other components or units inherent to these products or devices that are not clearly listed.

[0032] Referring to Figure 1 、 Figure 2 , an electroless nickel plating device for the inner surface of an electronic-grade special gas storage steel cylinder, comprising a device body. The device body includes a reaction tank. The workpiece is placed in the inner cavity 9001 of the reaction tank for electroless nickel plating treatment. The chemical solution for nickel plating circulates through the inner cavity of the reaction tank and the inner cavity 9002 of the workpiece, and exchanges and circulates between the inner cavity of the reaction tank and the inner cavity of the workpiece.

[0033] The device body includes a chemical solution circulation component, a water bath heating component, and an electrode protection component. Among them, the outlet end of the chemical solution circulation component is connected to the top of the inner cavity 9001 and the inner cavity 9002, and the inlet end is connected to the bottom of the inner cavity 9001, for circulating the chemical solution through the inner cavity 9001 and the inner cavity 9002, and making the chemical solution flow through and exchange between the reaction tank and the workpiece;

[0034] The water bath heating component is arranged around the outer periphery of the reaction tank and is used to heat the reaction tank so as to keep the temperature of the liquid medicine relatively consistent.

[0035] The electrode protection component is arranged in the reaction tank and is used to ensure the stability of the liquid medicine circulating through the inner cavity of the reaction tank, and at the same time protect the inner wall of the reaction tank from being eroded by chemical liquid medicine.

[0036] The electrode protection component of the present utility model is arranged in the following structure: In some embodiments, as Figure 2 shown, the electrode protection component includes a power supply 301 and a cathode rod 302.

[0037] The cathode rod 302 is built into the inner cavity 9001 of the reaction tank, and the cathode rod 302 is connected to the negative pole of the power supply 301, and the positive pole of the power supply 301 is connected to the inner wall of the reaction tank.

[0038] Specifically, as Figure 2 shown, the present utility model is provided with four cathode rods 302, which are vertically built into the inner cavity 9001 of the reaction tank and are distributed at four corners. That is to say, as Figure 1 、 Figure 3 shown, when viewed from above, a cathode rod 302 is respectively arranged at the inner cavity positions corresponding to the four corners of the tank cover 401, and insulating brackets can be arranged on the inner wall to support the top and bottom of the cathode rod 302.

[0039] It should be noted that during the electroless nickel plating process, the liquid medicine has the characteristics of autocatalytic reaction. Usually, a medicament is added to make the chemical reaction balanced so that the reaction maintains a certain deposition rate to achieve the electroless plating effect, but the autocatalytic process is not terminated. During this process, fine nickel slag particles will be generated due to the autocatalytic reaction. Without the protection of the current protection component, the nickel slag will be randomly distributed in any corner and position of the reaction tank along with the circulation of the liquid medicine. As the autocatalytic process continues, the size and quantity of the nickel slag will also continue to accumulate (become nickel flakes, nickel blocks, etc.) and sink to the bottom of the inner cavity of the reaction tank. This process not only consumes a large amount of raw materials additionally, but also uncontrollably accelerates the instability of the reaction (the loss of the liquid medicine increases, resulting in a decrease in the content of the liquid medicine components and also making the overall temperature of the liquid medicine uncontrollable).

[0040] When the electrode protection component of the present utility model is working, nickel ions will be more enriched near the cathode. This is because the nickel ions in the liquid medicine are positively charged and are enriched towards the cathode rod under the action of the current, and at the same time they are away from the anode (the inner wall of the reaction tank). The formation and accumulation of nickel slag mostly occur at the cathode rod, rather than at the anode (the inner wall of the reaction tank). In this way, the inner wall of the reaction tank is protected, avoiding nickel plating on it and avoiding the loss of the liquid medicine caused thereby.

[0041] In addition, since there are only a few cathode rods and their surface area is small, even if they are fully plated with nickel, the amount of catalytic reaction consumed is small and the wasted liquid medicine is also less. Therefore, for the entire electroless plating process, both the content of the liquid medicine components and the temperature are within the controllable range.

[0042] The reaction tank of the present utility model is made of stainless steel, preferably a reaction tank made of 316 stainless steel.

[0043] The present utility model is provided with a liquid medicine circulation component according to the following structure: In some embodiments, as Figure 1 shown, the liquid medicine circulation component includes a first delivery pump 101, a three-way pipe fitting 102, a tank inlet pipe 103, a workpiece inlet pipe 104, and a tank outlet pipe 105.

[0044] The first and second interfaces of the three-way pipe fitting 102 are respectively connected to the inner cavity 9001 of the reaction tank and the inner cavity 9002 of the workpiece through the tank inlet pipe 103 and the workpiece inlet pipe 104, and the third interface of the three-way pipe fitting 102 is connected to the outlet of the first delivery pump 101.

[0045] One end of the tank outlet pipe 105 is connected to the inner cavity 9001, and the other end is connected to the inlet of the first delivery pump 101.

[0046] It should be noted that for facilitating real-time monitoring and control of the flow rate in the pipe, a flow meter and a control valve can be provided on the pipe bodies of the tank inlet pipe and the workpiece inlet pipe. As Figure 1 shown, a regulating valve 106-1 is provided on the tank inlet pipe 103, and a flow meter 107 and a regulating valve 106-2 are provided on the workpiece inlet pipe.

[0047] In some preferred embodiments, for achieving a better control effect of the pipe entering the inner cavity of the workpiece, it can be arranged according to the following structure: the workpiece inlet pipe 104 is connected to an inlet hose 108, and the inlet hose 108 extends into the inner cavity 9002.

[0048] In order to ensure a certain cleanliness of the liquid medicine in the nickel tank during the circulation process of the present utility model, so that the liquid medicine continuously pumped into the inner cavity of the workpiece and the tank reaction cavity meets the cleanliness requirements for the reaction, it can be arranged according to the following structure: In some embodiments, as Figure 1 shown, the liquid medicine circulation component includes a filter barrel 109, and the third interface of the three-way pipe fitting 102 is connected to the outlet of the first delivery pump 101 through the filter barrel 109.

[0049] When performing electroless nickel plating on the present utility model, a pumping-in type treatment process of pumping the liquid medicine into the inner cavity of the workpiece can be adopted, or conversely, an extraction type treatment process of extracting the liquid medicine from the inner cavity of the workpiece can be adopted. Gas will be generated during the reaction in the electroless nickel plating process, and the reaction is too concentrated. To prevent the gas from accumulating in the upper part of the inner cavity of the workpiece and blocking the electroless nickel reaction, a pumping-in type treatment process for the inner cavity of the workpiece is preferably adopted instead of the extraction type.

[0050] Based on the above situation, in order to achieve better liquid medicine exchange between the reaction tank and the workpiece, make the liquid medicine circulation flow process between the inner cavity 9002 of the workpiece and the inner cavity 9001 of the reaction tank smoother, and make the liquid medicine inflow and outflow at the bottle mouth at the top of the workpiece stable, with uniform flow velocity and appropriate force, it can be set as follows: In some embodiments, such as Figure 1 , Figure 2 shown, the liquid medicine circulation component includes a workpiece interface part 1010. Through the workpiece interface part 1010, the workpiece inlet pipe 104 vertically extends into the inner cavity 9002 of the workpiece, and the liquid medicine exchange between the workpiece and the reaction tank is realized.

[0051] The workpiece interface part has a connection end, a liquid medicine inlet, and a liquid medicine outlet. The connection end is connected to the top opening of the workpiece. The workpiece inlet pipe extends into the inner cavity of the workpiece through the liquid medicine inlet and then pumps in the liquid medicine. The liquid medicine in the inner cavity of the workpiece flows back to the inner cavity of the reaction tank through the liquid medicine outlet; the liquid medicine inlet is located at the opposite position of the connection end.

[0052] In order to make the distance between the workpiece inlet pipe and the inner wall of the workpiece close after the workpiece inlet pipe extends into the inner cavity of the workpiece, it can be set as follows: In some of these preferred embodiments, such as Figure 4 shown, the workpiece interface part 1010 is integrally of a hollow structure, with one end open and the opposite end closed.

[0053] The open end is the connection end, and its inner wall is provided with an internal thread 101001 for connecting the bottle mouth of the workpiece (the outer wall of the workpiece bottle mouth is provided with a corresponding external thread);

[0054] The closed end 101002 is provided with a pipe hole, and the pipe hole is of a through-hole structure, facilitating the pipe (i.e., the inlet hose 108 connected to the workpiece inlet pipe) connected to the outlet end of the liquid medicine circulation component to pass through it and then extend into the inner cavity 9002; in the illustrated structure, the inlet hose 108 has already passed through the pipe hole. The pipe hole is located at the exact center position of the closed end 101002 (the exact center position here means that when observing from the hollow inner cavity of the workpiece interface part, the pipe hole is at the exact center position);

[0055] The workpiece interface part 1010 is provided with an overflow hole 101003 on its side wall to achieve the effect of the liquid medicine outlet. The overflow hole 101003 is of a through-hole structure. The overflow hole 101003 and the pipe hole construct the circulation interface of the workpiece (that is, one is the liquid medicine inlet, and the other is the liquid medicine outlet), so as to realize the cyclic inflow and outflow of the liquid medicine in the inner cavity 9002.

[0056] When the overflow hole 101003 is arranged on the side wall of the workpiece interface part 1010, it is arranged at equal intervals around the side wall.

[0057] In some cases, when the present invention is implemented by adopting a workpiece inner cavity pumping treatment process, the overflow hole is used as the liquid circulation outlet, and the tube hole is used as the liquid circulation inlet (the present invention preferably adopts this pumping treatment process);

[0058] In other cases, on the contrary, when the utility model is implemented using a workpiece inner cavity extraction treatment process, the overflow hole serves as a liquid medicine circulation inlet, and the tube hole serves as a liquid medicine circulation outlet. The liquid medicine is extracted from the tube hole / the pipe passing through the tube hole. Correspondingly, the overflow hole draws the liquid medicine from the inner cavity of the reaction tank into the workpiece inner cavity.

[0059] In some of the embodiments, the overflow holes of the side wall of the workpiece interface are arranged at equal intervals around the side wall, and multiple layers of overflow holes may be provided. Figure 4 In the structure shown, the workpiece interface member is provided with two layers of overflow holes 101003 on its side wall.

[0060] Based on the above examples, in some preferred embodiments, the overflow holes of adjacent layers may be arranged in a staggered manner (the structures shown in the drawings of the present utility model do not adopt this structural arrangement).

[0061] The above examples are based on the layout structures of the overflow holes when the tube hole is centrally placed, which can keep the overflow flow at the bottle mouth of the workpiece stable and uniform, and the overflow force at each location is relatively balanced and can be effectively controlled.

[0062] It should be noted that, in order to correspond to the shape of the top of the workpiece, the main body of the workpiece interface can be set to a cylindrical structure, with an inner thread set on the inner wall of one opening and a closed opening on the other side. Figure 4 As shown, the closed end 101002 is in a hexagonal nut structure on the outside so as to serve as a fulcrum for locking the workpiece interface member onto the top opening of the workpiece with the aid of a wrench or other tool.

[0063] In addition, in order to facilitate the inlet hose 108 inserted into the pipe hole to maintain a better vertical state, the thickness of the closed end 101002 can be increased to enhance the supporting effect of the inlet hose 108.

[0064] In order to further improve the reaction quality of the inner cavity of the workpiece, the utility model can be arranged according to the following structure: In some embodiments, such as Figure 2 , Figure 4 , Figure 5 As shown, the workpiece inlet pipe 104 (actually the inlet hose 108 here) passes through the top opening of the workpiece interface part 1010 and extends vertically downward into the inner cavity 9002 of the workpiece, and the distance between the pipe opening at its extending end and the bottom of the inner cavity 9002 of the workpiece is between 1 / 10 and 1 / 2 of the height of the inner cavity of the workpiece.

[0065] When the present utility model is implemented, after being connected to the inner cavity 9002 of the workpiece through the workpiece inlet pipe 104 (which is actually the inlet hose 108 here), the pipe orifice is suspended to avoid touching the bottom. There is a certain distance between the pipe orifice and the bottom of the inner cavity 9002, and this distance is preferably set between 1 / 10 and 1 / 2 of the total height of the inner cavity 9002. The reason for this structural setting is as follows:

[0066] If the pipe orifice is too close to the bottom of the workpiece inner cavity, the inner wall of the workpiece at the pipe orifice will have the problem of missing plating;

[0067] If the pipe orifice is too high (that is, the distance from the bottom of the workpiece inner cavity is too large), the circulation effect between the inner cavity of the workpiece and the external reaction tank is weak or insufficient, which is likely to cause the concentration of various components in the chemical reaction in the inner cavity of the workpiece to be low, the nickel thickness distribution to be uneven, resulting in problems such as rough nickel layer or insufficient nickel thickness at local positions.

[0068] It should be noted that the position where the tank inlet pipe 103 is connected to the reaction tank is at the top of the reaction tank. As Figure 1 shown, a raised structure tank cover 401 is provided at the top of the tank. The tank inlet pipe 103 passes through the side wall of the tank cover 401 and then leads into the inner cavity 9001 of the reaction tank, so that the liquid medicine can flow down from the top of the reaction tank into the tank inner cavity.

[0069] The present utility model is provided with a water bath heating component according to the following structure to control the temperature of the liquid medicine during the reaction process: In some embodiments, as Figure 1 、 Figure 2 、 Figure 3 shown,

[0070] The water bath heating component includes a first sandwich layer 2011, a second delivery pump 202, and a heating coil 206. A water bath chamber is constructed through the first sandwich layer 2011 to control the temperature of the reaction tank. The water body in the water bath chamber is circulated by the second delivery pump 202, and the water body in the water bath chamber is heated by the heating coil 206;

[0071] The first sandwich layer 2011 surrounds the reaction tank 901. The heating coil 206 is arranged inside the first sandwich layer 2011 and coils around the outer wall of the reaction tank 206. Its air inlet and air outlet are both arranged on the outer wall of the first sandwich layer;

[0072] The second delivery pump 202 is arranged outside the first sandwich layer 2011.

[0073] The first sandwich layer is provided with a pipe inlet 2031 and a pipe outlet 2032 communicating with its inner cavity on its side wall. Both interfaces pass through the first sandwich layer 2011 and are respectively connected to the outlet and inlet of the second delivery pump 202.

[0074] Figure 1 、 Figure 2In the shown structure, the second delivery pump 202 is connected to the inlet 2031 of the pipe through the pipe 2041 and to the outlet 2032 of the pipe through the pipe 2042, so that the water in the water bath chamber where the second interlayer 2011 is located can circulate.

[0075] Based on the above example, the first interlayer 2011 in the present utility model can be implemented in the following structure: A water bath is provided outside the reaction tank, and the reaction tank is placed inside the inner cavity of the water bath, so that there is a gap between the inner wall of the water bath and the outer wall of the reaction tank, thus forming the interlayer structure of the first interlayer 2011.

[0076] As Figure 2 、 Figure 3 shown, in the present utility model, the workpiece 902, the reaction tank 901, and the water bath 903 are arranged at intervals from the inside out. The heating coil 206 is located in the first interlayer between the water bath 903 and the reaction tank 902 and is coiled around the outer wall of the reaction tank 902. The air inlet 20602 and the air return port 20601 of the heating coil 206 pass through the outer wall of the water bath 903 and are externally connected to the air supply and air return pipes. After steam is introduced into the heating coil 206, heat exchange between the water in the water bath and the hot steam in the heating coil is carried out in the first interlayer through the coil structure, so as to control the water bath temperature. The water generated during the condensation of the hot steam in the coil is then discharged together with the water vapor in the subsequent filling pipeline.

[0077] In order to ensure the temperature control effect of the water bath heating assembly in the present utility model, a heat preservation structure can be set up in the following structure to achieve the purpose of temperature control: In some embodiments, as Figure 2 shown,

[0078] the water bath heating assembly includes a second interlayer 2012 and heat preservation cotton,

[0079] the second interlayer 2012 is arranged around the first interlayer 2011,

[0080] and the heat preservation cotton is placed inside the second interlayer 2012.

[0081] Based on the above example, the second interlayer 2012 of the present utility model can be implemented in the following structure: As Figure 1 、 Figure 2 shown, a housing 402 is arranged outside the first interlayer 2011, so that the water bath that constructs the first interlayer 2011 is placed inside the inner cavity of the housing 402, and the inner wall of the housing 402 is spaced from the outer wall of the water bath to form the interlayer structure of the second interlayer 2012, and then heat preservation cotton is filled in the interlayer structure of the second interlayer 2012 to form the heat preservation structure of the reaction tank, reducing the influence of the outside on the heating effect of the water bath heating assembly, so as to more accurately control the heating effect of the reaction tank.

[0082] In order to enhance the strength and stability of the interlayer structure between each interlayer, horizontal support members can be arranged in the first and second interlayers. For example, Figure 2 As shown in the figure, a support member 2051 is arranged in the first interlayer 2011, and both ends thereof are respectively connected to the outer wall of the reaction tank and the inner wall of the water bath tank; a support member 2052 is arranged in the second interlayer 2012, and both ends thereof are respectively connected to the outer wall of the water bath tank and the outer shell 402.

[0083] It should be noted that in the present utility model, the structural arrangement of the heating coil can also be replaced with a stainless steel electric heating tube or a Teflon heating tube.

[0084] In some embodiments, in order to prevent the hot steam of the heating coil from forming condensed water in the first interlayer, a condensed water outlet pipe 206 can be arranged.

[0085] In order to fix the workpiece in the reaction tank in the present utility model, the following structure can be arranged: In some embodiments, the device body includes a workpiece support seat, and the workpiece support seat is arranged in the reaction cavity of the tank. After supporting the workpiece, it keeps a certain distance from the bottom of the inner cavity of the reaction tank. For example, Figure 2 As shown in the figure, the workpiece support seat 500 is placed at the bottom of the inner cavity 9001 and supports the workpiece upward.

[0086] In order to facilitate the installation and fixation of the structures of each component and the reasonable layout of pipelines in the present utility model, the following structure can be arranged: In some embodiments, for example, Figure 2 As shown in the figure, a bracket 800 is arranged at the bottom of the reaction tank, and a foot pad 801 is arranged on the lower surface of the bracket 800 to play a shock-absorbing role.

[0087] Specifically, for example, Figure 1 As shown in the figure, the bracket includes a tray 802, a first bracket, and a second bracket 8032. The tray 802 has four side plates that are turned up vertically. The four side plates are adjacent and connected after being distributed in the front, rear, left, and right directions, so that the tray 802 has a trough-shaped structure with an upward opening. The first bracket and the second bracket 8032 are both arranged inside the trough. The first bracket is used to support the reaction tank (including the second interlayer structure of its heat insulation layer and the first interlayer structure of the water bath) and keep it spaced from the bottom of the tank, so as to facilitate the layout of the tank outlet pipe at the bottom of the reaction tank.

[0088] The second bracket 8032 is used to support the filter barrel 109, the first delivery pump 101, the second delivery pump 202, and the power supply 301 and keep them spaced from the bottom of the tank. On the one hand, it can be protected from being contaminated by the spilled and polluted liquid medicine, and on the other hand, it can realize the pipeline erection and hiding. For example, the tank outlet pipe can be arranged under the first bracket and the second bracket. Figure 1 In the shown structure, the tank outlet pipe 105 can pass through the plate surface upward from the bottom of the second bracket 8032 and then be connected to the first delivery pump 101, and the first delivery pump 101 is connected to the filter cartridge 109 through an intermediate pipeline 1011.

[0089] For the convenience of operation and maintenance, a ladder 700 is also provided and located on one side of the reaction tank. In addition, a water bath buoyancy positioning switch 601 is provided in the first interlayer 2011, and a tank temperature control device 602 is provided in the inner cavity 9001. By setting the water bath buoyancy positioning switch 601, when the water in the water bath tank is consumed to the limit, the phenomenon of dry burning of the water bath tank can be avoided by means of alarm or power-off. The tank temperature control device 602 can adopt a corrosion-resistant thermocouple temperature sensing probe in cooperation with a PID constant temperature controller, and connect the two to the temperature control circuit of the water bath tank (that is, the control circuit for controlling the second delivery pump and the heating coil for heat supply), so as to achieve the water temperature control effect in the water bath tank.

[0090] It should be noted that since the structures and connection methods of the various components of the water bath buoyancy positioning switch (also known as the float switch, float ball switch, float liquid level sensor, etc.) and the tank temperature control device belong to the prior art, and their settings can be applied to the structure of the present invention by traditional means, so no further elaboration will be made here.

[0091] In summary, the present invention enables the smooth exchange and circulation of the liquid medicine between the reaction tank and the workpiece by setting the liquid medicine circulation component, and ensures the temperature consistency during the electroless nickel plating process by setting the water bath heating component and the electrode protection component, thereby ensuring the chemical stability of the liquid medicine during the treatment process.

[0092] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An electronic-grade special gas storage cylinder inner surface chemical nickel plating device, comprising a device body, the device body comprising a reaction tank, the workpiece is placed in the reaction tank, characterized in that: The device body comprises a liquid medicine circulation component, a water bath heating component, and an electrode protection component. The outlet end of the liquid medicine circulation component is connected to the top of the inner cavity of the reaction tank and the inner cavity of the workpiece, and the inlet end is connected to the bottom of the inner cavity of the reaction tank; the water bath heating component is arranged around the periphery of the reaction tank; and the electrode protection component is arranged in the reaction tank; The liquid medicine circulation assembly comprises a first delivery pump, a three-way pipe, a tank inlet pipe, a workpiece inlet pipe, and a tank outlet pipe. The first and second interfaces of the three-way pipe are respectively connected to the inner cavity of the reaction tank and the inner cavity of the workpiece through the tank inlet pipe and the workpiece inlet pipe, and the third interface of the three-way pipe is connected to the outlet of the first delivery pump; one end of the tank outlet pipe is connected to the inner cavity of the reaction tank, and the other end is connected to the inlet of the first delivery pump; The water bath heating assembly includes a first interlayer, a second delivery pump, and a heating coil. The first interlayer is arranged around the reaction tank. The heating coil is arranged in the first interlayer and coiled around the outer wall of the reaction tank. The second delivery pump is arranged outside the first interlayer. The first interlayer is provided with a pipe inlet and a pipe outlet communicating with its inner cavity on its side wall. Both outlets pass through the first interlayer and are respectively connected to the outlet and inlet of the second delivery pump.

2. The device for chemical nickel plating on the inner surface of an electronic-grade special gas storage cylinder according to claim 1, characterized in that: The liquid medicine circulation component includes a filter barrel, and the third interface of the three-way pipe is connected to the outlet of the first delivery pump through the filter barrel.

3. The device for chemical nickel plating on the inner surface of an electronic-grade special gas storage cylinder according to claim 1, characterized in that: The liquid medicine circulation component includes a workpiece interface component, which has a connecting end, a liquid medicine inlet and a liquid medicine outlet. The top opening of the workpiece is connected through the connecting end, the workpiece inlet pipe is extended into the inner cavity of the workpiece through the liquid medicine inlet, and the liquid medicine in the inner cavity of the workpiece flows back to the inner cavity of the reaction tank through the liquid medicine outlet; the liquid medicine inlet is located at a position opposite to the connecting end.

4. The device for chemical nickel plating on the inner surface of an electronic-grade special gas storage cylinder according to claim 1, characterized in that: The workpiece inlet pipe passes through the top opening of the workpiece interface and extends vertically downward into the inner cavity of the workpiece, and the distance between the pipe opening at the extending end and the bottom of the inner cavity of the workpiece is between 1 / 10 and 1 / 2 of the height of the inner cavity of the workpiece.

5. The device for chemical nickel plating on the inner surface of an electronic-grade special gas storage cylinder according to claim 1, characterized in that: The water bath heating assembly includes a second interlayer and thermal insulation cotton. The second interlayer is arranged around the first interlayer, The thermal insulation cotton is built in the second interlayer.

6. The device for chemical nickel plating on the inner surface of an electronic-grade special gas storage cylinder according to claim 1, characterized in that: The electrode protection assembly comprises a power supply and a cathode rod. The cathode rod is built into the inner cavity of the reaction tank and connected to the negative electrode of the power supply, and the positive electrode of the power supply is connected to the inner wall of the reaction tank.

7. The device for chemical nickel plating on the inner surface of an electronic-grade special gas storage cylinder according to any one of claims 1 to 6, characterized in that: The device body comprises a workpiece support seat, and the workpiece support seat is arranged in the inner cavity of the reaction tank.

8. The device for chemical nickel plating on the inner surface of an electronic-grade special gas storage cylinder according to any one of claims 1 to 6, characterized in that: A bracket is arranged at the bottom of the reaction tank, and a foot is arranged on the lower surface of the bracket.

Images