Novel mask plate storage cabinet

Abstract

The utility model discloses a novel mask plate storage cabinet, which relates to the technical field of mask plate storage equipment, and comprises a cabinet body, a fetching door, an emergency side door, a fixed seat, a pedal, a vertical rod, a connecting rod and a cross rod, a mounting frame, a supporting seat, a storage rotating frame and a center shaft are mounted in the cabinet body, the bottom end of the center shaft penetrates through the supporting seat and is connected with a driving motor, a limiting gear ring is arranged on the outer side face of the lower end of the center shaft, two locking mechanisms are symmetrically arranged on the upper surface of the supporting seat, and a monitoring mechanism is further arranged in the cabinet body. A plurality of storage spaces and a bearing platform are arranged on the storage rotating frame, the storage capacity of the mask plate can be improved, in addition, the ammonia concentration and the temperature and humidity in the cabinet body are monitored in real time, the situation that the ammonia concentration exceeds mask plate storage standard or personnel safety standard equipment, and consequently the safety of stored objects or personnel is affected is avoided, a driving system can be locked, and the safety of the storage objects or personnel is guaranteed. And when the door of the cabinet body is opened, the storage rotating stand is prevented from rotating to harm workers.

Description

Technical Field

[0001] The utility model relates to the technical field of mask storage equipment, in particular to a novel mask storage cabinet. Background Art

[0002] In the process of semiconductor device manufacturing, the metal mask is an important process tool and is widely used in processes such as oxidation, lithography, and etching. The storage conditions of the mask are relatively harsh and need to be stored in a low-oxygen, dry, and clean environment to effectively prevent the items from being affected by moisture, oxidation, or contamination. This requires the use of a mask storage cabinet. The mask storage cabinet is a storage device specifically designed to store sensitive items with strict environmental requirements, such as masks (photolithography masks). It is one of the indispensable storage devices in industries such as semiconductors and electronics.

[0003] However, for the existing mask storage cabinets, the internal storage space is limited and the capacity is small. Secondly, the storage environment cannot be effectively monitored and warned, and the staff cannot know in time, which is likely to affect the storage effect of the stored items. Therefore, a novel mask storage cabinet is provided. Summary of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the utility model provides a novel mask storage cabinet, which solves the problems raised in the above background art.

[0005] To achieve the above object, the utility model is realized through the following technical solutions: A novel mask storage cabinet includes a cabinet body. A pick-up door and an emergency side door are arranged on the front surface of the cabinet body. And a fixed seat is installed below the pick-up door on the front surface of the cabinet body. A rotatable pedal is hinged to the upper part of the fixed seat. A vertical rod is hinged to one side surface of the pedal. The top of the vertical rod is hinged to a connecting rod. The other end of the connecting rod is hinged to a cross bar vertically installed at the top end of the front surface of the cabinet body.

[0006] An installation rack is installed at the top end inside the cabinet body, and a support seat is installed at the bottom end inside the cabinet body. A storage turntable for storing masks is also arranged inside the cabinet body. A central shaft penetrates through the center of the storage turntable. The top end of the central shaft is rotatably connected to the installation rack, and the bottom end of the central shaft penetrates through the support seat and extends to the inside thereof to be connected with a driving motor. The output end of the driving motor is fixed to the bottom end of the central shaft.

[0007] A limit gear ring is arranged on the outer side surface of the lower end of the central shaft above the support seat. Two locking mechanisms for locking the limit gear ring are symmetrically arranged on the upper surface of the support seat. A monitoring mechanism for monitoring the internal environment of the cabinet body is also arranged inside the cabinet body.

[0008] As a further technical solution of the present utility model, a three-color warning light, a control box, a control screen and a power supply box are installed on one side of the front surface of the cabinet from top to bottom. A first maintenance door is further provided in the middle of the side surface of the cabinet, and an emergency stop switch is provided on one side of the first maintenance door on the side surface of the cabinet.

[0009] As a further technical solution of the present utility model, a rear hatch for facilitating the maintenance of the control box, the control screen and the power supply box is provided on one side of the rear surface of the cabinet, and a second maintenance door for facilitating the maintenance of the drive motor is provided on the other side of the rear surface of the cabinet. A plurality of FFUs communicating with the inside of the cabinet are installed on the top of the cabinet, and a plurality of floor feet are distributed at the bottom of the cabinet.

[0010] As a further technical solution of the present utility model, a plurality of partition plates are distributed around the central axis on the storage turntable. A plurality of bearing plates are evenly installed on both side surfaces of each partition plate from top to bottom at equal intervals. A storage space is formed between every two partition plates, and a platform for carrying and storing the mask plate storage box is formed between two corresponding bearing plates in the horizontal direction in each storage space.

[0011] As a further technical solution of the present utility model, the inner side of the support seat is a hollow structure. The drive motor is located inside the support seat. The bottom end of the central axis penetrates through the support seat and is rotatably connected thereto. The central axis is fixedly connected to the storage turntable.

[0012] As a further technical solution of the present utility model, the monitoring mechanism includes a support rod installed inside the cabinet, and an ammonia sensor and a temperature and humidity sensor are installed at the top end of the support rod.

[0013] As a further technical solution of the present utility model, the access door, the emergency side door and the first maintenance door are all connected to the cabinet through hinges. Door frames for facilitating their installation are provided on the cabinet corresponding to the access door, the emergency side door and the first maintenance door, and infrared sensors are embedded at the upper and lower ends of the inner wall of each door frame corresponding to one side edge of the access door or the emergency side door or the first maintenance door.

[0014] As a further technical solution of the present utility model, the locking mechanism includes a positioning seat installed on the upper surface of the support seat. Two hydraulic push rods are symmetrically installed on one side surface of the positioning seat. The telescopic ends of the two hydraulic push rods are jointly connected with an arc-shaped lock plate. Teeth adapted to the tooth grooves on the surface of the limit gear ring are distributed on the inner side surface of the arc-shaped lock plate, and the radian of the arc-shaped lock plate is adapted to the outer ring radian of the limit gear ring;

[0015] On both sides of the lower surface of the arc-shaped lock plate, two limit sliders are installed. At the positions corresponding to the two limit sliders on the upper surface of the support base, limit sliding grooves are provided, and the bottom of the support base slides in the arc-shaped lock plate through the limit sliders.

[0016] The utility model provides a new type of mask plate storage cabinet, which has the following beneficial effects compared with the prior art:

[0017] 1. For the new type of mask plate storage cabinet designed in this way, an electric-controlled rotating storage turntable design is adopted, which can make the access operation of the mask plate more convenient. Moreover, there are multiple storage spaces and bearing platforms on each storage turntable, which can improve the storage capacity of the mask plate. Secondly, a monitoring mechanism is built into the cabinet body, and a warning light is configured to monitor the ammonia concentration, temperature and humidity inside the cabinet body in real time, so as to avoid the ammonia concentration exceeding the storage standard of the mask plate or the safety standard of personnel, which may affect the safety of stored items or personnel.

[0018] 2. For the new type of mask plate storage cabinet designed in this way, the cabinet body is also equipped with multiple infrared sensors, which can ensure that when the door on the cabinet body is opened, a signal is transmitted to the control box, and the control box controls the locking mechanism to lock the limit gear ring, that is, to lock the drive system, so as to avoid the storage turntable rotating when the door of the cabinet body is opened, which may endanger the staff. Brief Description of the Drawings

[0019] Figure 1 It is a schematic structural diagram of the new type of mask plate storage cabinet;

[0020] Figure 2 It is a rear view of the new type of mask plate storage cabinet;

[0021] Figure 3 It is a schematic internal structure diagram of the new type of mask plate storage cabinet;

[0022] Figure 4 It is a first perspective view of the storage turntable in the new type of mask plate storage cabinet;

[0023] Figure 5 It is a second perspective view of the storage turntable in the new type of mask plate storage cabinet;

[0024] Figure 6 It is a schematic structural diagram of the locking mechanism and the limit gear ring in the new type of mask plate storage cabinet.

[0025] In the figure: 1. Cabinet body; 11. Control box; 12. Control screen; 13. Power supply box; 14. Three-color warning light; 15. FFU; 16. Rear hatch; 17. Second maintenance door; 18. Floor feet.

[0026] 2. Retrieving door; 21. Infrared sensor; 3. Emergency side door; 4. Storage turntable; 41. Mounting rack; 42. Support base; 43. Partition board; 44. Bearing plate; 45. Limit gear ring; 46. Central axis;

[0027] 5. Pedal; 51. Fixed seat; 6. Cross bar; 61. Connecting rod; 62. Vertical rod; 7. First maintenance door; 71. Emergency stop switch;

[0028] 8. Support rod; 81. Ammonia sensor; 82. Temperature and humidity sensor;

[0029] 9. Locking mechanism; 91. Positioning seat; 92. Hydraulic push rod; 93. Arc-shaped lock plate; 94. Limit sliding groove. Detailed implementation manner

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] Please refer to Figure 1-4, the present utility model provides a technical solution for a new mask plate storage cabinet: A new mask plate storage cabinet includes a cabinet body 1. The cabinet body 1 is designed in a box structure. The outer wall is designed with a sandwich shelter large plate. The inner side plate is made of stainless steel, and the outer side plate is made of aluminum alloy. The internal storage turntable 4 is made of aluminum alloy. On one side of the front surface of the cabinet body 1, a three-color warning light 14, a control box 11, a control screen 12, and a power supply box 13 are installed from top to bottom. A pick-up door 2 and an emergency side door 3 are provided on the front surface of the cabinet body 1. A first maintenance door 7 is also provided in the middle of the side of the cabinet body 1. The design of the first maintenance door 7 facilitates the later opening for the maintenance of the internal storage turntable 4, providing a maintenance space for the internal turntable. And on the side of the cabinet body 1, on one side of the first maintenance door 7, an emergency stop switch 71 is provided. When a device failure occurs, it is convenient to cut off the power of the device by pressing this switch. It should be noted that when this switch is pressed, the device power input switch of the power supply box 13 will be cut off. Only after checking and ensuring there is no error, can the switch be reset, and the power input switch of the power supply box 13 be used to power on the device again for operation. The pick-up door 2, the emergency side door 3, and the first maintenance door 7 are all connected to the cabinet body 1 through hinges. Corresponding to the pick-up door 2, the emergency side door 3, and the first maintenance door 7 on the cabinet body 1, door frames for facilitating their installation are provided. And at the upper and lower ends of the inner wall of each door frame, corresponding to one side edge of the pick-up door 2 or the emergency side door 3 or the first maintenance door 7, an infrared sensor 21 is embedded and installed. Infrared sensors 21 are provided at the pick-up door 2, the emergency side door 3, the first maintenance door 7, as well as the second maintenance door 17 and the rear hatch 16. The purpose is to detect the opening and closing state of the doors. When the corresponding door is opened or not closed in place, the infrared sensor 21 will transmit a signal to the control box 11, and the drive motor on the cabinet body 1 cannot work, avoiding the danger of personnel being squeezed by the rotating parts of the device.

[0032] A fixing seat 51 is installed below the pick-up door 2 on the front surface of the cabinet body 1. A rotatable pedal 5 is hinged to the upper part of the fixing seat 51. A vertical rod 62 is hinged to one side surface of the pedal 5. The top of the vertical rod 62 is hinged to a connecting rod 61. The other end of the connecting rod 61 is hinged to a cross bar 6 vertically installed at the top end of the front surface of the cabinet body 1. In the working state, the pedal 5 is horizontally placed and perpendicular to the fixing seat 51, facilitating the staff to stand on the pedal 5 for the operation of accessing the mask plate storage box. If the device is not used for a long time or during transportation, the vertical rod 62 connected to one side of the pedal 5 can be pulled upward to turn the pedal 5 into a folded state. When pulling, the connecting rod 61 will turn from a horizontal state to be perpendicular to the cross bar 6, and then the bolt at their hinged part is tightened to lock and fix them. When using it again, loosen the bolt and pull the vertical rod 62 downward to put the pedal 5 in the working state.

[0033] Such as Figure 4 and 5As shown in the figure, an installation frame 41 is installed at the inner top of the cabinet body 1, and a support seat 42 is installed at the inner bottom of the cabinet body 1. A storage turntable 4 for storing mask plates is also arranged inside the cabinet body 1. A plurality of partition plates 43 are distributed around the central axis 46 on the storage turntable 4. A plurality of bearing plates 44 are evenly installed at equal intervals from top to bottom on both side surfaces of each partition plate 43. A storage space is formed between every two partition plates 43. A platform (i.e., a bearing platform) for bearing and storing the mask plate storage box is formed between two corresponding bearing plates 44 in the horizontal direction in each storage space. In the vertical direction of the storage space, there are a plurality of bearing platforms for bearing and storing the mask plate storage boxes. The mask plate is protected and enclosed by using a storage box. When storing, the storage box is placed together on the bearing platform in the storage space. Secondly, it should also be noted that there is an electronic positioning label corresponding to each storage space on the storage turntable 4.

[0034] As Figure 5 and 6 shown in the figure, a central axis 46 is arranged through the center of the storage turntable 4. The top end of the central axis 46 is rotatably connected to the installation frame 41, and the bottom end of the central axis 46 penetrates through the support seat 42 and extends to the inside thereof to be connected with a driving motor. The output end of the driving motor is fixed to the bottom end of the central axis 46. The inside of the support seat 42 is a hollow structure. The driving motor is located inside the support seat 42. The bottom end of the central axis 46 penetrates through the support seat 42 and is rotatably connected thereto. The central axis 46 is fixedly connected to the storage turntable 4. By controlling the driving motor to work, the driving motor drives the central axis 46 to rotate, so as to drive the storage turntable 4 to rotate (i.e., the driving system of the storage turntable 4), making it more convenient for the staff to store or take the mask plate from the access door 2.

[0035] A limiting tooth ring 45 is provided on the outer side surface of the lower end of the central shaft 46 above the support base 42. Two locking mechanisms 9 for locking the limiting tooth ring 45 are symmetrically arranged on the upper surface of the support base 42. A monitoring mechanism for monitoring the internal environment of the cabinet body 1 is also provided inside the cabinet body 1. The locking mechanism 9 includes a positioning seat 91 installed on the upper surface of the support base 42. Two hydraulic push rods 92 are symmetrically installed on one side surface of the positioning seat 91. The telescopic ends of the two hydraulic push rods 92 are jointly connected with an arc-shaped locking plate 93. Teeth adapted to the tooth grooves on the surface of the limiting tooth ring 45 are distributed on the inner side surface of the arc-shaped locking plate 93, and the arc of the arc-shaped locking plate 93 is adapted to the outer arc of the limiting tooth ring 45. When any one of the access door 2, the emergency side door 3, the first maintenance door 7, the second maintenance door 17, and the rear hatch 16 is opened by the staff and the corresponding infrared sensor 21 cannot detect a signal, it will transmit information to the control box 11, which will control the driving motor to stop working and control the two locking mechanisms 9 to work synchronously, so that the two hydraulic push rods 92 extend synchronously, pushing the arc-shaped locking plate 93 closer to the limiting tooth ring 45, and making the teeth on the inner side of the arc-shaped locking plate 93 engage into the tooth grooves on the surface of the limiting tooth ring 45, realizing the restriction of the rotation of the limiting tooth ring 45 and further restricting the rotation of the central shaft 46 and the storage turntable 4 to achieve the locking operation.

[0036] Further, two limiting sliders are installed on both sides of the lower surface of the arc-shaped locking plate 93. Limiting sliding grooves 94 are respectively opened on the upper surface of the support base 42 corresponding to the two limiting sliders. The bottom of the support base 42 slides inside the arc-shaped locking plate 93 through the limiting sliders. When the hydraulic push rod 92 pushes the arc-shaped locking plate 93 to move, the two limiting sliders at the bottom of the arc-shaped locking plate 93 will slide synchronously in the limiting sliding grooves 94, thereby improving the stability of the movement of the arc-shaped locking plate 93 and the firmness after locking.

[0037] A rear hatch 16 for facilitating the maintenance of the control box 11, the control panel 12, and the power supply box 13 is provided on one side of the rear surface of the cabinet body 1, and a second maintenance door 17 for facilitating the maintenance of the driving motor is provided on the other side of the rear surface of the cabinet body 1. A plurality of FFUs 15 communicating with the inside of the cabinet body 1 are installed on the top of the cabinet body 1. The FFUs 15 can be used to conveniently provide clean air flow inside the cabinet body 1, and a plurality of floor feet 18 are distributed at the bottom of the cabinet body 1.

[0038] The monitoring mechanism includes a support rod 8 installed inside the cabinet body 1. At the top of the support rod 8, an ammonia sensor 81 and a temperature and humidity sensor 82 are installed. The ammonia sensor 81 and the temperature and humidity sensor 82 can be used to monitor the ammonia concentration, temperature, and humidity inside the cabinet body 1 in real time. When the ammonia concentration inside the cabinet body 1 exceeds the storage standard or the personnel safety standard, a signal will be transmitted to the control box 11, and the control box 11 will control the three-color warning light 14 to give an alarm prompt to ensure the safety of the stored items and personnel. At the same time, the temperature and humidity inside the storage area of the equipment will also be monitored. If the temperature and humidity exceed the storage standard or the personnel safety standard, the equipment will also give an automatic alarm prompt to ensure the safety of the stored items and personnel.

[0039] The working principle of the present utility model is as follows: During the use of the storage cabinet designed in this way, the pedal 5 is flipped to a horizontal state, which is convenient for the staff to stand on the pedal 5 when storing the mask plate, facilitating the storage or retrieval of the mask plate storage box at a high position of the storage turntable 4.

[0040] The staff can perform access operations by opening the access door 2. Moreover, through the monitoring of the infrared sensor 21, after the access door 2 is opened, the locking mechanism 9 will restrict the rotation of the central shaft 46 and the storage turntable 4 to achieve the locking operation, ensuring the safety of the staff during access operations.

[0041] In addition, a monitoring mechanism is also provided inside the cabinet body 1, which can monitor the ammonia concentration, temperature, and humidity inside the cabinet body 1 in real time and send out warning messages in real time to ensure the safety of the stored items and personnel.

[0042] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present utility model, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present utility model. The structures, devices, and operation methods not specifically described and explained in the present utility model, unless otherwise specifically stated and limited, are implemented according to the conventional means in this field.

Claims

1. A novel mask plate storage cabinet, comprising a cabinet body (1), characterized in that: The front surface of the cabinet (1) is provided with a take-out door (2) and an emergency side door (3), and a fixing seat (51) is installed on the front surface of the cabinet (1) below the take-out door (2), a reversible pedal (5) is hinged on the upper part of the fixing seat (51), a vertical rod (62) is hinged on one side of the pedal (5), a connecting rod (61) is hinged on the top of the vertical rod (62), and the other end of the connecting rod (61) is hinged on a cross rod (6) vertically installed on the top of the front surface of the cabinet (1); A mounting frame (41) is installed at the top end of the cabinet (1), and a support seat (42) is installed at the bottom end of the cabinet (1). A storage rotating frame (4) for storing mask plates is also arranged inside the cabinet (1). A central shaft (46) is arranged through the center of the storage rotating frame (4). The top end of the central shaft (46) is rotatably connected to the mounting frame (41), and the bottom end of the central shaft (46) passes through the support seat (42) and extends to the inner side thereof to be connected to a driving motor, and the output end of the driving motor is fixed to the bottom end of the central shaft (46); A limit gear ring (45) is provided on the outer side surface of the lower end of the central axis (46) above the support seat (42), and two locking mechanisms (9) for locking the limit gear ring (45) are symmetrically provided on the upper surface of the support seat (42). A monitoring mechanism for monitoring the internal environment of the cabinet (1) is also provided inside the cabinet (1).

2. A novel mask plate storage cabinet according to claim 1, characterized in that: A three-color warning light (14), a control box (11), a control panel (12) and a power supply box (13) are installed from top to bottom on one side of the front surface of the cabinet (1); a first maintenance door (7) is also provided in the middle of the side of the cabinet (1); and an emergency stop switch (71) is provided on the side of the cabinet (1) located on one side of the first maintenance door (7).

3. A novel mask plate storage cabinet according to claim 2, characterized in that: A rear hatch (16) is provided on one side of the rear surface of the cabinet (1) for convenient maintenance of the control box (11), the control panel (12) and the power supply box (13), and a second maintenance door (17) is provided on the other side of the rear surface of the cabinet (1) for convenient maintenance of the drive motor. A plurality of FFUs (15) connected to the interior of the cabinet (1) are installed on the top of the cabinet (1), and a plurality of footings (18) are distributed on the bottom of the cabinet (1).

4. A novel mask plate storage cabinet according to claim 1, characterized in that: The storage rotating rack (4) is provided with a plurality of partition plates (43) distributed around a central axis (46), and a plurality of supporting plates (44) are installed on both sides of each partition plate (43) at even intervals from top to bottom, a storage space is formed between every two partition plates (43), and a platform for carrying and storing the mask plate storage box is formed between two corresponding supporting plates (44) in a horizontal direction in each storage space.

5. A novel mask plate storage cabinet according to claim 1, characterized in that: The inner side of the support base (42) is a hollow structure, the driving motor is located inside the support base (42), the bottom end of the central shaft (46) passes through the support base (42) and is rotatably connected thereto, and the central shaft (46) is fixedly connected to the storage rotating rack (4).

6. A novel mask plate storage cabinet according to claim 1, characterized in that: The monitoring mechanism comprises a support rod (8) installed inside the cabinet (1), and an ammonia sensor (81) and a temperature and humidity sensor (82) are installed on the top of the support rod (8).

7. A novel mask plate storage cabinet according to claim 1, characterized in that: The access door (2), the emergency side door (3) and the first maintenance door (7) are all connected to the cabinet (1) via hinges. Door frames are provided on the cabinet (1) at locations corresponding to the access door (2), the emergency side door (3) and the first maintenance door (7) to facilitate their installation. Infrared sensors (21) are embedded and installed at the upper and lower ends of the inner wall of each door frame at one side corresponding to the access door (2), the emergency side door (3) or the first maintenance door (7).

8. The novel mask plate storage cabinet according to claim 1 is characterized in that: The locking mechanism (9) comprises a positioning seat (91) mounted on the upper surface of the support seat (42), two hydraulic push rods (92) are symmetrically mounted on one side of the positioning seat (91), the telescopic ends of the two hydraulic push rods (92) are commonly connected to an arc-shaped locking plate (93), the inner side surface of the arc-shaped locking plate (93) is distributed with teeth matching the tooth grooves on the surface of the limiting gear ring (45), and the curvature of the arc-shaped locking plate (93) matches the curvature of the outer ring of the limiting gear ring (45); Two limit slide blocks are installed on both sides of the lower surface of the arc-shaped locking plate (93), and limit slide grooves (94) are provided on the upper surface of the support seat (42) corresponding to the two limit slide blocks, and the bottom of the support seat (42) slides in the arc-shaped locking plate (93) through the limit slide blocks.

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