Detection device
By using the ranging sensor and processing system in the detection equipment to calculate the wafer offset and adjust the bearing table position, the problem of low detection efficiency in the prior art is solved, and efficient wafer edge detection is achieved.
Patent Information
- Application Number
- CN202421694959.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-16
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-07-16
AI Technical Summary
Existing wafer edge detection devices require complex edge extraction algorithms, resulting in reduced detection efficiency.
A detection device is provided, which uses a first ranging sensor and a second ranging sensor to detect the side wall distance of the object to be measured, calculates the offset of the object to be measured through a processing system, and adjusts the position of the carrier table to reduce the offset, and realizes efficient detection.
The process of obtaining the offset of the object to be measured is simplified, the detection efficiency is improved, and the dependence on complex edge extraction algorithms is reduced.
Smart Images
Figure CN223021196U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of optical equipment, and particularly relates to a detection device. Background Art
[0002] In a wafer edge detection device, an imaging device is required to take pictures of the edge of the wafer. In order to ensure that the edge of the wafer is always within the depth of field of the imaging device during the rotation of the wafer, an autofocus device is needed to detect the position of the wafer edge during the detection process to determine whether the wafer is in focus. If the wafer is not in focus, the relative position of the wafer and the imaging device needs to be adjusted.
[0003] The prior art often takes images above the wafer through a camera, and obtains the position of the wafer edge by performing edge extraction on the acquired images. However, this wafer edge detection device requires complex edge extraction algorithms, resulting in reduced detection efficiency. Summary of the Utility Model
[0004] The technical solution of this application is to provide a detection device for improving the detection efficiency.
[0005] The utility model provides a detection device, including: a carrier for supporting the object to be measured; a first distance measuring sensor and a second distance measuring sensor; the first distance measuring sensor is used to detect a first distance along a first direction between the side wall of the object to be measured and a first reference plane, and the second distance measuring sensor is used to detect a second distance along a second direction between the side wall of the object to be measured and a second reference plane, the second direction intersects with the first direction, and both the second direction and the first direction are parallel to the supporting surface of the carrier; a processing system for determining the offset of the object to be measured through the first distance and the second distance.
[0006] Optionally, the first direction and the second direction are perpendicular.
[0007] Optionally, the first distance measuring sensor is one or a combination of a laser ranging module, a triangulation measurement module, a chromatic confocal module, and an interferometer, and the second distance measuring sensor is one or a combination of a laser ranging module, a triangulation measurement module, a chromatic confocal module, and an interferometer.
[0008] Optionally, it further includes: a third distance measuring sensor located on one side of the supporting surface of the carrier, and the third distance measuring sensor is used to detect the height of the object to be measured along a direction perpendicular to the supporting surface.
[0009] Optionally, the third distance measuring sensor is one or a combination of a laser ranging module, a triangulation measurement module, a chromatic confocal module, and an interferometer.
[0010] Optionally, the laser ranging module is a reflective distance sensor.
[0011] Optionally, it further includes an edge detection module; the edge detection module includes one or a combination of a first edge detection module, a second edge detection module, and a third edge detection module; the first edge detection module is configured to obtain a side wall image of the object to be measured along a third direction, and the third direction is parallel to the support surface of the carrier; the second edge detection module is configured to detect the side wall of the object to be measured along a fourth direction, and the fourth direction has an inclined angle with the support surface of the carrier; the third edge detection module is configured to detect the side wall of the object to be measured along a fifth direction, and the fifth direction has an inclined angle with the support surface of the carrier; the third edge detection module and the second edge detection module are located on both sides of the first edge detection module in a direction perpendicular to the support surface.
[0012] Optionally, it further includes a first driving component for driving the relative rotation of the carrier and the edge detection module.
[0013] Optionally, the first distance measuring sensor is configured to obtain the coordinate of a first point on the side wall of the object to be measured along the first direction according to the first distance, and the second distance measuring sensor is configured to obtain the coordinate of a second point on the side wall of the object to be measured along the second direction according to the second distance; the object to be measured is circular; the processing system includes a center position obtaining unit and an offset obtaining unit; the center position obtaining unit is configured to obtain the coordinates of the center or edge of the object to be measured along the first direction and the second direction according to the coordinate of the first point along the first direction, the coordinate of the second point along the second direction, and the radius of the object to be measured; the offset obtaining unit is configured to obtain the offset between the position of the object to be measured at the processing moment and a preset position according to the coordinates of the object to be measured along the first direction and the second direction during the rotation of the object to be measured around the central axis of the object to be measured; the carrier is configured to adjust the position of the carrier at the corresponding processing moment according to the offset.
[0014] Optionally, it further includes a second driving component for driving the carrier to move along the first direction according to the first distance and / or driving the carrier to move along the second direction according to the second distance.
[0015] The technical solution of the present utility model has the following beneficial effects.
[0016] In the detection device provided by the technical solution of the present utility model, the first distance measuring sensor is used to detect the first distance along the first direction between the side wall of the object to be measured and the first reference plane, and the second distance measuring sensor is used to detect the second distance along the second direction between the side wall of the object to be measured and the second reference plane. Thus, the offset between the position of the object to be measured at the processing moment and the preset position can be obtained. According to the offset, the position of the carrier is adjusted to make the offset of the object to be measured less than the threshold value. When the offset of the object to be measured is less than the threshold value, the object to be measured is detected. The process of obtaining the offset of the object to be measured in this application is simple, which can improve the detection efficiency. Brief Description of the Drawings
[0017] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0018] Figure 1 Structural diagram of the detection device provided by an embodiment of the present utility model;
[0019] Figure 2 Top view of the detection device provided by an embodiment of the present utility model;
[0020] Figure 3 Schematic diagram of the position offset of the object to be measured in an embodiment of the present utility model. Detailed Description of the Embodiments
[0021] The following will clearly and completely describe the technical solutions of the present utility model in conjunction with the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the protection scope of the present utility model.
[0022] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.
[0023] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.
[0024] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.
[0025] An embodiment of the present utility model provides a detection device. Referring to Figure 1 and Figure 2 , it includes: a carrier table 7, a first distance measuring sensor 1, a second distance measuring sensor 2, and a processing system.
[0026] Referring to Figure 1 and Figure 2 , the carrier table 7 is used to support the object to be measured 8. The object to be measured 8 is, for example, a wafer. The carrier table 7 is used to move along a first direction X and a second direction Y. The carrier table 7 is also used to rotate around the central axis of the carrier table 7.
[0027] In this embodiment, referring to Figure 1 and Figure 2 , the first distance measuring sensor 1 and the second distance measuring sensor 2 are arranged circumferentially around the central axis of the carrier table 7.
[0028] The first distance measuring sensor 1 is used to detect a first distance along the first direction X between the side wall of the object to be measured 8 and a first reference plane. The first reference plane can be any plane perpendicular to the first direction X. Exemplarily, the first reference plane is the surface of the light incident port of the first distance measuring sensor 1.
[0029] The second distance measuring sensor 2 is used to detect a second distance along the second direction Y between the side wall of the object to be measured 8 and a second reference plane. The second reference plane can be any plane perpendicular to the second direction Y. Exemplarily, the second reference plane is the surface of the light incident port of the second distance measuring sensor 2.
[0030] Both the second direction Y and the first direction X are parallel to the support surface of the carrier table 7. The second direction Y and the first direction X intersect. In one embodiment, the first direction X and the second direction Y are perpendicular. In another embodiment, there is an acute angle between the first direction and the second direction.
[0031] When the object to be measured 8 is placed on the support surface of the carrier table 7, both the first direction X and the second direction Y are perpendicular to the side wall of the object to be measured 8.
[0032] The processing system is used to determine the offset of the object 8 to be measured through the first distance and the second distance.
[0033] In this embodiment, the first distance measuring sensor 1 is used to detect the first distance along the first direction X between the side wall of the object 8 to be measured and the first reference plane, and the second distance measuring sensor 2 is used to detect the second distance along the second direction Y between the side wall of the object 8 to be measured and the second reference plane. Furthermore, the offset between the position of the object 8 at the processing moment and the preset position can be obtained. The position of the carrier 7 is adjusted according to the offset so that the offset of the object 8 is less than the threshold value. When the offset of the object 8 is less than the threshold value, the object 8 is detected. The process of obtaining the offset of the object 8 in this application is simple and can improve the detection efficiency.
[0034] In this embodiment, the first distance measuring sensor 1 is one or a combination of a laser ranging module, a triangulation measurement module, a chromatic confocal module, and an interferometer.
[0035] In this embodiment, the second distance measuring sensor 2 is one or a combination of a laser ranging module, a triangulation measurement module, a chromatic confocal module, and an interferometer.
[0036] In this embodiment, refer to Figure 1 , the detection device further includes: a third distance measuring sensor 3, located on one side of the supporting surface of the carrier 7. The third distance measuring sensor 3 is used to detect the height of the object 8 to be measured along the direction perpendicular to the supporting surface. The defocus condition of the object 8 in the z direction is determined according to the detection result of the third distance measuring sensor 3. The z direction is perpendicular to the supporting surface of the carrier 7.
[0037] In other embodiments of the present utility model, the detection device may not include the third distance measuring sensor.
[0038] In this embodiment, the z direction is parallel to the central axis of the carrier 7.
[0039] In this embodiment, the third distance measuring sensor 3 is one or a combination of a laser ranging module, a triangulation measurement module, a chromatic confocal module, and an interferometer.
[0040] In this embodiment, the laser ranging module is a reflective distance sensor. The reflective distance sensor includes a transmitting end and a receiving end. The light beam emitted by the transmitting end irradiates on the object 8 to be measured and is reflected by the object 8 to form a feedback light, and the feedback light is received by the receiving end. In other embodiments of the present utility model, the laser ranging module may also be a transmissive type.
[0041] The edge detection module is used to obtain an image of the edge area of the object 8 to be measured. The edge detection module is used to detect whether there are defects in the edge area of the object 8 to be measured.
[0042] In this embodiment, refer toFigure 1 and Figure 2 The detection device further includes an edge detection module, and the edge detection module includes one or a combination of a first edge detection module 4, a second edge detection module 5, and a third edge detection module 6.
[0043] The first edge detection module 4 is configured to obtain a sidewall image of the object to be measured 8 along a third direction, and the third direction is parallel to the support surface of the carrier 7. The first edge detection module 4 is configured to detect whether there are defects on the sidewall of the object to be measured 8.
[0044] In this embodiment, the third direction is parallel to the first direction X, and the first edge detection module 4 and the first distance measuring sensor 1 are respectively located on both sides of the carrier 7 along the first direction X.
[0045] In another embodiment, the third direction is parallel to the second direction Y, and the first edge detection module and the second distance measuring sensor 2 are respectively located on both sides of the carrier 7 along the second direction Y.
[0046] In another embodiment, the third direction intersects both the first direction X and the second direction Y.
[0047] In this embodiment, refer to Figure 1 , the second edge detection module 5 is configured to detect the sidewall of the object to be measured 8 along a fourth direction, and the fourth direction has an inclined angle with the support surface of the carrier 7. The second edge detection module 5 is configured to detect whether there are defects on the sidewall of the object to be measured 8.
[0048] In this embodiment, refer to Figure 1 , the third edge detection module 6 is configured to detect the sidewall of the object to be measured 8 along a fifth direction, and the fifth direction has an inclined angle with the support surface of the carrier 7. The third edge detection module 6 is configured to detect whether there are defects on the sidewall of the object to be measured 8.
[0049] In this embodiment, the third edge detection module 6 and the second edge detection module 5 are located on both sides of the first edge detection module 4 in a direction perpendicular to the support surface.
[0050] In this embodiment, the distance from the third edge detection module 6 to the carrier 7 in the z direction is greater than the distance from the first edge detection module 4 to the carrier 7 in the z direction, and the distance from the first edge detection module 4 to the carrier 7 in the z direction is less than the distance from the second edge detection module 5 to the carrier 7 in the z direction.
[0051] In this embodiment, refer to Figure 2 and Figure 3, the first distance measurement sensor 1 is used to obtain the coordinate of the first point B on the side wall of the object to be measured 8 along the first direction X according to the first distance, and the second distance measurement sensor 2 is used to obtain the coordinate of the second point A on the side wall of the object to be measured 8 along the second direction Y according to the second distance.
[0052] The object to be measured 8 is a wafer. The processing system includes: a central position acquisition unit and an offset acquisition unit.
[0053] The central position acquisition unit is used to obtain the coordinates of the center or edge of the object to be measured 8 along the first direction X and the second direction Y according to the coordinate of the first point B along the first direction X, the coordinate of the second point A along the second direction Y, and the radius of the object to be measured 8.
[0054] The offset acquisition unit is used to obtain the offset between the position of the object to be measured 8 at the processing moment and the preset position according to the coordinates of the object to be measured 8 along the first direction X and the second direction Y during the rotation of the object to be measured 8 around the central axis of the object to be measured 8.
[0055] The carrier stage 7 is used to adjust the position of the carrier stage 7 at the corresponding processing moment according to the offset. After adjusting the position of the carrier stage 7, the offset of the object to be measured 8 is made less than the threshold value, and then the edge detection module detects the object to be measured 8.
[0056] In this embodiment, the position of the carrier stage 7 along the first direction X and the second direction Y can be adjusted, or the position of the carrier stage 7 along other directions can also be adjusted.
[0057] Before the edge detection module detects the object to be measured 8, it further includes: determining the defocus condition of the object to be measured 8 in the z direction according to the detection result of the third distance measurement sensor 3, and adjusting the distance between the third distance measurement sensor 3 and the object to be measured 8 along the z direction to make the third distance measurement sensor 3 in focus.
[0058] In this embodiment, the detection device further includes: a first driving component for driving the carrier stage 7 and the edge detection module to rotate relative to each other.
[0059] In this embodiment, the detection device further includes: a second driving component for driving the carrier stage 7 to move along the first direction X according to the first distance, and / or driving the carrier stage 7 to move along the second direction Y according to the second distance.
[0060] In this embodiment, during the rotation of the object under test driven by the first driving component, the edge detection module detects the object under test; during the detection process, the edge detection module needs to focus on the edge of the object under test. If the center of the object under test deviates from the rotation axis of the first driving component, the distance between the point to be detected on the object under test and the edge detection module will change continuously during the rotation. To ensure that the edge detection module is always in focus during the rotation of the object under test, it is necessary to drive the object under test to move in the first direction and / or the second direction by the second driving component during the rotation.
[0061] Obviously, the above embodiments are merely examples for clear illustration and not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the present invention.
Claims
1. A detection device, characterized in that: include: A carrier table, used to support the object to be tested; a first ranging sensor and a second ranging sensor; The first distance measuring sensor is used to detect a first distance between a side wall of the object to be measured and a first reference plane along a first direction, and the second distance measuring sensor is used to detect a second distance between a side wall of the object to be measured and a second reference plane along a second direction, the second direction intersects the first direction, and the second direction and the first direction are both parallel to the supporting surface of the supporting platform; A processing system is used to determine the offset of the object to be measured according to the first distance and the second distance.
2. The detection device according to claim 1, characterized in that: The first direction and the second direction are perpendicular.
3. The detection device according to claim 1, characterized in that: The first ranging sensor is a combination of one or more of a laser ranging module, a triangulation measurement module, a dispersive confocal module and an interferometer, and the second ranging sensor is a combination of one or more of a laser ranging module, a triangulation measurement module, a dispersive confocal module and an interferometer.
4. The detection device according to claim 1, characterized in that: It also includes: a third distance measuring sensor, which is located at one side of the supporting surface of the supporting platform, and the third distance measuring sensor is used to detect the height of the object to be measured along the vertical direction of the supporting surface.
5. The detection device according to claim 4, characterized in that: The third distance measurement sensor is a combination of one or more of a laser distance measurement module, a triangulation measurement module, a dispersive confocal module and an interferometer.
6. The detection device according to claim 3 or 5, characterized in that: The laser distance measurement module is a reflective distance sensor.
7. The detection device according to claim 1, characterized in that: Also includes: An edge detection module, the edge detection module comprising: one or more combinations of a first edge detection module, a second edge detection module and a third edge detection module; The first edge detection module is used to obtain a side wall image of the object to be measured along a third direction, and the third direction is parallel to the supporting surface of the supporting platform; The second edge detection module is used to detect the side wall of the object to be detected along a fourth direction, and the fourth direction has an inclined angle with the supporting surface of the supporting platform; The third edge detection module is used to detect the side wall of the object to be detected along a fifth direction, and the fifth direction has an inclined angle with the supporting surface of the supporting platform; The third edge detection module and the second edge detection module are located on both sides of the first edge detection module along a direction perpendicular to the supporting surface.
8. The detection device according to claim 1, characterized in that: Also includes: The first driving assembly is used to drive the supporting platform and the edge detection module to rotate relative to each other.
9. The detection device according to claim 1, characterized in that: The first distance measuring sensor is used to obtain the coordinates of a first point in the side wall of the object to be measured along the first direction according to the first distance, and the second distance measuring sensor is used to obtain the coordinates of a second point in the side wall of the object to be measured along the second direction according to the second distance; the object to be measured is circular; The processing system comprises: a center position acquisition unit and an offset acquisition unit; the center position acquisition unit is used to acquire the coordinates of the center or edge of the object to be measured along the first direction and the second direction according to the coordinates of the first point along the first direction, the coordinates of the second point along the second direction and the radius of the object to be measured; the offset acquisition unit is used to acquire the offset between the position of the object to be measured at the processing time and the preset position according to the coordinates of the object to be measured along the first direction and the second direction at the processing time when the object to be measured rotates around the central axis of the object to be measured; The carrier is used to adjust the position of the carrier at a corresponding processing moment according to the offset.
10. The detection device according to claim 1, characterized in that: Also includes: The second driving component is used to drive the supporting platform to move along the first direction according to the first distance, and / or to drive the supporting platform to move along the second direction according to the second distance.