Flow resistance detection equipment

Abstract

The utility model discloses flow resistance detection equipment, which is used for detecting the flow resistance of a spraying plate and comprises an air supply device, an air path, a detection device, a throttle valve and a flow resistance detection assembly, one end of the gas circuit is connected to the gas supply device, the other end of the gas circuit is branched to form a first gas circuit and a second gas circuit, and a differential pressure gauge is connected in parallel between the first gas circuit and the second gas circuit; the detection device is connected with the first gas path, the spraying plate is mounted on the detection device, and gas conveyed by the first gas path passes through the spraying plate in the detection device; the throttle valve is arranged on the second gas path; the flow resistance detection assembly is arranged on the second gas path and used for detecting the flow resistance of the second gas path. According to the utility model, the opening degree of the throttle valve is adjusted to eliminate the pressure difference between the first gas path and the second gas path, and then the flow resistance of the second gas path is obtained to equivalently obtain the flow resistance of the spraying plate, so that the structure and the method for detecting the flow resistance of the spraying plate are effectively simplified, and the device has the advantages of short detection time and high accuracy.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a flow resistance detection device. Background Art

[0002] In the deposition reaction process of semiconductor equipment, the shower plate is an important structural component affecting the process effect. The reaction gas will pass through the shower plate and reach the process chamber for deposition reaction. However, during the factory inspection of the shower plate by the manufacturer, there will be inspection deviations. Therefore, after the reaction gas passes through the shower head and reaches the process chamber, the aperture size and depth error of different shower heads will affect the repeatability and stability of the chamber deposition process, and further affect the product quality. In actual production, in some semiconductor equipment, usually two chambers share a set of vacuum systems. Therefore, the shower head is the determining factor affecting the difference in deposition processes between chambers under the same vacuum environment. Therefore, there is an urgent need for a device for detecting the flow resistance of the shower plate to eliminate this process difference.

[0003] The existing patent solution with the patent number CN114813023A records a device for detecting the flow resistance of a shower plate. However, the detection structure of this device is complex and the detection process is cumbersome. There is still an urgent need for a simpler and more convenient device for detecting the flow resistance of a shower plate to eliminate this process difference. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a flow resistance detection device, aiming to solve the problem that the existing shower plate flow resistance detection solution is not simple and convenient enough.

[0005] To solve the above technical problems, the purpose of the utility model is achieved through the following technical solutions: providing a flow resistance detection device for detecting the flow resistance of a shower plate, including: a gas supply device, a gas path, a detection device, a throttle valve, and a flow resistance detection component; one end of the gas path is connected to the gas supply device, the other end of the gas path branches to form a first gas path and a second gas path, and a differential pressure gauge is connected in parallel between the first gas path and the second gas path; the detection device is connected to the first gas path, the shower plate is installed on the detection device, and the gas transported by the first gas path passes through the shower plate in the detection device; the throttle valve is arranged on the second gas path; the flow resistance detection component is arranged on the second gas path and is used for detecting the flow resistance of the second gas path.

[0006] Further, the flow resistance detection component includes: two pressure sensors and a flow meter; the two pressure sensors are respectively arranged on the second gas path and located at both ends of the throttle valve; the flow meter is arranged on the second gas path and located between the differential pressure gauge and the throttle valve.

[0007] Further, an air inlet penetrating through to the other side is provided on one side of the detection device, a spray port penetrating through to the other side is provided on one side of the spray plate, and one side of the spray plate is connected to the other side of the detection device and a flow resistance chamber is formed at the connection.

[0008] Further, all the spray holes on the spray plate correspond to the flow resistance chamber.

[0009] Further, some of the spray holes on the spray plate correspond to the flow resistance chamber.

[0010] Further, a single spray hole on the spray plate corresponds to the flow resistance chamber.

[0011] Further, the end face on the other side of the detection device is concave, and the other side of the detection device is connected to one side of the spray plate to form the flow resistance chamber.

[0012] Further, an adsorption type suction cup is provided on the other side of the detection device, and the detection device is adsorbed and connected to the spray plate through the adsorption type suction cup; the adsorption type suction cup is connected to one side of the spray plate to form the flow resistance chamber.

[0013] Further, the distance from the starting point of the first air path to the throttle valve is equal to the distance from the starting point of the second air path to the detection device; the distance from the starting point of the first air path to the differential pressure gauge is equal to the distance from the starting point of the second air path to the differential pressure gauge; the inner diameters of the first air path and the second air path are equal.

[0014] Further, a flow controller is provided between the air supply device and the air path.

[0015] The beneficial effects of the embodiments of the present utility model are as follows: First, the pressure difference between the first air path and the second air path is eliminated by adjusting the opening degree of the throttle valve, and then only the flow resistance on the second air path needs to be detected, which is equivalent to equivalently detecting the flow resistance of the first air path, that is, equivalently detecting the flow resistance of the spray plate; thus effectively simplifying the structure and method for detecting the flow resistance of the spray plate, and having the advantages of short detection time and high accuracy. Description of the Drawings

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0017] Figure 1 It is a schematic structural diagram of the flow resistance detection device provided by the embodiments of the present utility model.

[0018] Figure 2 It is a schematic structural diagram of a detection device provided by an embodiment of the present utility model.

[0019] Figure 3 It is a schematic structural diagram of another detection device provided by an embodiment of the present utility model.

[0020] Figure 4 It is a schematic structural diagram of yet another detection device provided by an embodiment of the present utility model.

[0021] Figure 5 It is a schematic flowchart of a flow resistance detection method provided by an embodiment of the present utility model.

[0022] Figure 6 It is a schematic sub - flowchart of a flow resistance detection method provided by an embodiment of the present utility model.

[0023] Explanation of the markings in the figure:

[0024] 1. Air supply device; 2. Flow controller; 3. Differential pressure gauge; 4. Second gas path; 5. Flowmeter; 6. First pressure sensor; 7. Throttle valve; 8. Second pressure sensor; 9. Spray plate; 10. Detection device; 101. Air inlet; 102. Flow resistance chamber; 103. Air extraction port; 11. First gas path. Specific implementation manners

[0025] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0026] It should be understood that when used in this specification and the appended claims, the terms "comprises" and "comprising" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0027] It should also be understood that the terms used in this specification of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. As used in this specification of the present utility model and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms.

[0028] It should be further understood that the term "and / or" used in the specification and appended claims of the present utility model refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0029] Please refer to Figure 1 The structural schematic diagram of the provided flow resistance detection device. An embodiment of the present utility model provides a flow resistance detection device for detecting the flow resistance of a spray plate 9, including: a gas supply device 1, a gas path, a detection device 10, a throttle valve 7, and a flow resistance detection component; one end of the gas path is connected to the gas supply device 1, the other end of the gas path branches to form a first gas path 11 and a second gas path 4, and a differential pressure gauge 3 is connected in parallel between the first gas path 11 and the second gas path 4; the detection device 10 is connected to the first gas path 11, the spray plate 9 is installed on the detection device 10, and the gas transported by the first gas path 11 passes through the spray plate 9 in the detection device 10; the throttle valve 7 is arranged in the second gas path 4; the flow resistance detection component is arranged in the second gas path 4 and is used for detecting the flow resistance of the second gas path 4.

[0030] In this embodiment, the gas supply device 1 provides the gas for flow resistance detection, and the gas can be N2 or other inert gases. The gas path is a pipeline for transporting gas, and a circular pipeline is preferably used. The detection device 10 is the gas transportation terminal of the first gas path 11. After the gas of the first gas path 11 reaches the detection device 10, it will pass through the spray plate 9. Under the condition that there is no pressure difference between the first gas path 11 and the second gas path 4, the gas of the first gas path 11 passes through the flow resistance of the spray plate 9, that is, the gas of the second gas path 4 passes through the flow resistance of the throttle valve 7. Therefore, the flow resistance of the spray plate 9 can be equivalently simulated by adjusting the opening degree of the throttle valve 7.

[0031] The specific working process is as follows: First, adjust the opening degree of the throttle valve 7 to eliminate the pressure difference between the first gas path 11 and the second gas path 4. After the differential pressure gauge 3 detects that the pressure difference is zero, only need to detect the flow resistance on the second gas path 4 through the flow resistance detection component, which is equivalent to equivalently detecting the flow resistance of the first gas path 11, that is, equivalently detecting the flow resistance of the spray plate 9; this detection method effectively simplifies the structure and method for detecting the flow resistance of the spray plate 9, and has the advantages of short detection time and high accuracy.

[0032] It should be noted that during the process of adjusting the opening degree of the throttle valve 7 to eliminate the pressure difference between the first gas path 11 and the second gas path 4, the pressure difference value read by the differential pressure gauge 3 in real time may fluctuate. The pressure difference value of zero is only the most ideal state. In practical applications, when the difference between the pressure difference value read by the differential pressure gauge 3 and zero is within a preset range, it can be regarded that there is no pressure difference between the first gas path 11 and the second gas path 4.

[0033] In one embodiment, the flow resistance detection component includes: two pressure sensors (the first pressure sensor 6 and the second pressure sensor 8) and a flowmeter 5; the two pressure sensors are respectively arranged on the second gas path 4 and are located at both ends of the throttle valve 7; the flowmeter 5 is arranged on the second gas path 4 and is located between the differential pressure gauge 3 and the throttle valve 7.

[0034] In this embodiment, the flow resistance of the spray plate 9 refers to the ratio of the pressure difference between the front and rear ends of the spray holes to the gas flow rate when a stable gas flow passes through the spray holes on the spray plate 9; when using the throttle valve 7 to equivalently simulate the spray plate 9 in this embodiment, it is equivalent to obtaining the ratio of the pressure difference between the front and rear ends of the throttle valve 7 to the gas flow rate; based on this, two pressure sensors are arranged at the positions at both ends of the throttle valve 7 on the second gas path 4, and a flowmeter 5 is arranged at the position on the second gas path 4 and between the differential pressure gauge 3 and the throttle valve 7; by detecting the pressure difference between the two ends of the throttle valve 7 through the two pressure sensors and detecting the gas flow rate through the flowmeter 5, the flow resistance of the throttle valve 7 can be calculated and used as the flow resistance of the equivalently simulated spray plate 9. Thus, the advantages of simple detection method and accurate flow resistance value are achieved.

[0035] Combined with Figure 2 As shown, in one embodiment, an air inlet 101 penetrating from one side to the other side is provided on one side of the detection device 10, and a spray port penetrating from one side to the other side is provided on one side of the spray plate 9. One side of the spray plate 9 is connected to the other side of the detection device 10, and a flow resistance chamber 102 is formed at the connection.

[0036] In this embodiment, to ensure that the gas in the first gas path 11 can pass through the spray plate 9 well after reaching the detection device 10, the detection device 10 can be designed as a cover-like structure, and the end face on the other side of the detection device 10 can be concave, so that after the other side of the detection device 10 is connected to one side of the spray plate 9, a flow resistance chamber 102 is formed at the connection, and the gas in the first gas path 11 can stably pass through the spray holes of the spray plate 9 after reaching the flow resistance chamber 102.

[0037] It should be understood that one side of the spray plate 9 and the other side of the detection device 10 are hermetically connected to prevent gas from overflowing from the connection and ensure that the gas only passes through the spray holes of the spray plate 9.

[0038] In one embodiment, to ensure the detection accuracy of the equivalent simulation of the flow resistance of the spray plate 9 by the opening degree of the throttle valve 7, it is necessary to ensure that the throttle valve 7 and the spray plate 9 are under the same detection conditions. Therefore, the distance from the starting point of the first gas path 11 to the throttle valve 7 is set equal to the distance from the starting point of the second gas path 4 to the detection device 10; the distance from the starting point of the first gas path 11 to the differential pressure gauge 3 is set equal to the distance from the starting point of the second gas path 4 to the differential pressure gauge 3; the inner diameters of the first gas path 11 and the second gas path 4 are set equal. In this way, the detection accuracy of the equivalent simulation can be ensured.

[0039] In one embodiment, a flow controller 2 is provided between the gas supply device 1 and the gas path. For example, the MFC flow controller 2 is an instrument for accurately measuring the gas flow rate. Its measured value is not distorted by fluctuations in temperature or pressure and does not require temperature and pressure compensation. The MFC flow controller 2 not only has the function of a mass flow meter 5, but more importantly, it can automatically control the gas flow rate. That is, after setting the flow rate as needed, the MFC flow controller 2 automatically keeps the flow rate constant at the set value. Even if the pressure of the gas supply device 1 fluctuates or the ambient temperature changes, it will not deviate from the set value.

[0040] The detection device 10 of the present application will be specifically introduced below. The present application has improved the structure of the detection device 10 to improve the applicability of the existing spray plate flow resistance detection equipment.

[0041] As Figure 2 shown, in an embodiment of a detection device 10, the outer diameter dimension of the other side of the detection device 10 is designed to be basically equal to the outer diameter dimension of the spray plate 9. The edge of the other side of the detection device 10 is hermetically connected to the edge of the spray plate 9. The formed flow resistance chamber 102 can cover all the spray holes, that is, all the spray holes on the spray plate 9 are in communication with the flow resistance chamber 102 correspondingly. That is, the gas in the flow resistance chamber 102 will pass through all the spray holes, thereby realizing the integral plate flow resistance detection of the spray plate 9.

[0042] As Figure 3 shown, in another embodiment of the detection device 10, among all the spray holes on the spray plate 9, a partial area formed by some spray holes is used as the flow resistance detection area. The other side of the detection device 10 can be set as an adsorption type suction cup corresponding to the shape of this partial area. After adsorbing to this partial area through the adsorption type suction cup, a local flow resistance chamber 102 is formed. This local flow resistance chamber 102 is only in communication with the corresponding partial spray holes, thereby realizing the flow resistance detection of any partial area on the spray plate 9.

[0043] As Figure 4 shown, in yet another embodiment of the detection device 10, that is, the other side of the detection device 10 can be only an adsorption type suction cup connected to a single spray hole, thereby realizing the flow resistance detection of any one spray hole on the spray plate 9.

[0044] It should be noted that in the adsorption type suction cup structure on the other side of the detection device 10, the position with adsorption force is the edge position of the suction cup. That is, an air sandwich can be arranged inside the adsorption type suction cup. After pumping air inside the air sandwich through the air extraction port 103 on the outside of the adsorption type suction cup, the suction cup edge of the adsorption type suction cup can be stably adsorbed on the spray plate 9.

[0045] Please refer to Figure 5, The embodiment of the present utility model also provides a flow resistance detection method, which is applied to the above flow resistance detection device, and includes:

[0046] S501, Input gas into the gas path through the gas supply device 1 and shunt it to the first gas path 11 and the second gas path 4;

[0047] S502, Adjust the opening degree of the throttle valve 7 and read the first pressure difference value between the first gas path 11 and the second gas path 4 through the differential pressure gauge 3;

[0048] S503, When the difference between the first pressure difference value and zero reaches the preset range, complete the opening degree adjustment of the throttle valve 7;

[0049] S504, Detect the flow resistance of the second gas path 4 through the flow resistance detection component and use it as the flow resistance of the spray plate 9 currently installed in the gas supply device 1.

[0050] In this embodiment, by adjusting the opening degree of the throttle valve 7 to eliminate the pressure difference between the first gas path 11 and the second gas path 4, after the differential pressure gauge 3 detects that the pressure difference is zero, only by detecting the flow resistance on the second gas path 4 through the flow resistance detection component is equivalent to detecting the flow resistance of the first gas path 11, that is, equivalent to detecting the flow resistance of the spray plate 9; thus effectively simplifying the structure and method for detecting the flow resistance of the spray plate 9, and having the advantages of short detection time and high accuracy.

[0051] In one embodiment, as Figure 6 shown, step S504 includes:

[0052] S601, Obtain the pressure difference at both ends of the throttle valve 7 through two pressure sensors and obtain the second pressure difference value;

[0053] S602, Read the gas flow rate on the second gas path 4 between the differential pressure gauge 3 and the throttle valve 7 through the flow meter 5;

[0054] S603, Calculate the flow resistance of the second gas path 4 according to the second pressure difference value, the gas flow rate and the inner diameter of the second gas path 4, and use it as the flow resistance of the spray plate 9 currently installed in the gas supply device 1.

[0055] In this embodiment, based on steps S601 and S602, the second pressure difference value and the gas flow rate are obtained, and after obtaining the inner diameter of the second gas path 4, the flow resistance R of the second gas path 4 can be calculated and obtained by using the formula: R = (ΔP * π * D2) / 4Q; where, ΔP represents the second pressure difference value, D represents the inner diameter of the second gas path 4, and Q represents the gas flow rate.

[0056] Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working process of the method embodiment described above can refer to the corresponding process in the foregoing device embodiment, and will not be elaborated in detail here.

[0057] As described above, it is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A flow resistance detection device for detecting the flow resistance of a shower plate, characterized in that: include: Gas supply device; An air circuit, one end of which is connected to the air supply device, and the other end of which is branched to form a first air circuit and a second air circuit, wherein a differential pressure gauge is connected in parallel between the first air circuit and the second air circuit; A detection device connected to the first gas path, the spray plate being mounted on the detection device, and the gas transported by the first gas path passing through the spray plate in the detection device; a throttle valve, arranged on the second gas path; The flow resistance detection component is arranged in the second gas path and is used to detect the flow resistance of the second gas path.

2. The flow resistance detection device according to claim 1, characterized in that: The flow resistance detection component comprises: Two pressure sensors, respectively arranged in the second gas path and located at two ends of the throttle valve; The flow meter is arranged on the second gas path and is located between the differential pressure meter and the throttle valve.

3. The flow resistance detection device according to claim 1, characterized in that: One side of the detection device is provided with an air inlet extending to the other side, and one side of the spray plate is provided with a spray port extending to the other side. One side of the spray plate is connected to the other side of the detection device and a flow resistance chamber is formed at the connection.

4. The flow resistance detection device according to claim 3, characterized in that: All the spray holes on the spray plate correspond to the flow resistance chamber.

5. The flow resistance detection device according to claim 3, characterized in that: Some of the spray holes on the spray plate correspond to the flow resistance chamber.

6. The flow resistance detection device according to claim 3, characterized in that: The single spray hole on the spray plate corresponds to the flow resistance chamber.

7. The flow resistance detection device according to claim 3, characterized in that: The other end surface of the detection device is concave, and the other side of the detection device is connected to one side of the shower plate to form the flow resistance chamber.

8. The flow resistance detection device according to claim 3, characterized in that: An adsorption suction cup is provided on the other side of the detection device, and the detection device is adsorbed and connected to the spray plate through the adsorption suction cup; the adsorption suction cup is connected to one side of the spray plate to form the flow resistance chamber.

9. The flow resistance detection device according to claim 1, characterized in that: The distance from the starting point of the first gas path to the throttle valve is equal to the distance from the starting point of the second gas path to the detection device; The distance from the starting point of the first gas path to the differential pressure gauge is equal to the distance from the starting point of the second gas path to the differential pressure gauge; The inner diameters of the first gas path and the second gas path are equal.

10. The flow resistance detection device according to claim 1, characterized in that: A flow controller is provided between the air supply device and the air path.

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