Shading plate correction mechanism and exposure machine

Abstract

The utility model relates to the technical field of manufacturing of display devices, and discloses a shading plate correction mechanism and an exposure machine, the shading plate correction mechanism comprises a shading plate, a correction plate, a rotating component and a first driving device, the correction plate is positioned on one side of the shading plate along the thickness direction, and is arranged at the end part of the shading plate along the X direction; the edge of one end of the correction plate in the X direction exceeds the edge of the end of the shading plate; the correction plate is connected with the shading plate through a rotating assembly; the first driving device is connected with the correction plate and can drive the correction plate to rotate relative to the shading plate. According to the utility model, the correction plate is rotationally arranged on the shading plate, and the end edge of the correction plate in the X direction is designed to exceed the end edge of the shading plate, so that when the shading plate obliquely deflects, the non-exposure area of the part to be shielded is not shielded; and the first driving device can drive the correction plate to rotate relative to the light shielding plate under the action of the rotating assembly, so that the non-exposure area is shielded, and the exposure range is corrected and adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of display device manufacturing, in particular to a light-shielding plate correction mechanism and an exposure machine including the light-shielding plate correction mechanism. Background Art

[0002] The exposure machine is one of the most critical processes in the printed circuit board manufacturing process, and is used to transfer the graphic circuit to the substrate. Before the substrate is exposed, a light-shielding plate is required to cover the non-exposed area of the substrate. As Figure 1 shown, a connecting seat 2' is fixedly provided on the light-shielding plate 1'. The connecting seat 2' is connected to a driving device 3'. The driving device 3' is installed at the bottom of the fixing plate 4' of the exposure machine. According to the parameter setting of the exposure area, the driving device 3' can drive the light-shielding plate 1' to move along the X direction to a suitable position, so as to adjust the exposure range of the substrate.

[0003] The prior art has the following deficiencies: The driving device 3' can only drive the light-shielding plate 1' to move in a single direction. When the light-shielding plate 1' is obliquely deflected, the exposure range may be inaccurate, and it is difficult to correct the obliquely deflected light-shielding plate 1'. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a light-shielding plate correction mechanism and an exposure machine, which can correct the obliquely deflected light-shielding plate.

[0005] To achieve the above object, the utility model adopts the following technical solutions:

[0006] A light-shielding plate correction mechanism is provided, including a light-shielding plate, and further including:

[0007] A correction plate, the correction plate is located on one side of the light-shielding plate along the thickness direction, the correction plate is arranged at the end of the light-shielding plate along the X direction, and one end edge of the correction plate along the X direction extends beyond the end edge of the light-shielding plate;

[0008] A rotating assembly, the correction plate is connected to the light-shielding plate through the rotating assembly;

[0009] A first driving device, the first driving device is connected to the correction plate, and the first driving device can drive the correction plate to rotate relative to the light-shielding plate.

[0010] As a further solution of the light-shielding plate correction mechanism, the rotating assembly includes a rotating shaft, the rotating shaft is located at the central position of the correction plate along the Y direction, and the correction plate is rotatably connected to the light-shielding plate through the rotating shaft; the Y direction is perpendicular to the X direction.

[0011] As a further solution of the light-shielding plate correction mechanism, the rotating assembly includes a rotating shaft located at the midpoint of the correction plate along the Y direction, and the correction plate is rotatably connected to the light-shielding plate through the rotating shaft.

[0012] As a further solution of the light-shielding plate correction mechanism, the rotating assembly includes at least one set of limiting structures, and each limiting structure includes a limiting rod and a limiting groove. The limiting groove is an arc-shaped structure, and the center of the limiting groove coincides with the axis of the rotating shaft. The limiting rod is fixed to one of the light-shielding plate and the correction plate, and the limiting groove is provided on the other of the light-shielding plate and the correction plate. The limiting rod is inserted and matched with the limiting groove.

[0013] As a further solution of the light-shielding plate correction mechanism, the first driving device includes a first motor, a first gear, a first rack and a connecting plate. The connecting plate is fixedly connected to the correction plate. The first rack is fixed to the connecting plate, and the length of the first rack extends along the X direction. The first motor is fixed to the light-shielding plate, and the first motor is in transmission connection with the first gear, and the first gear meshes with the first rack.

[0014] As a further solution of the light-shielding plate correction mechanism, the first driving device further includes a first mounting seat. The first mounting seat includes a first base and a first side plate. The first motor is fixed to the first base, and the first output shaft of the first motor passes through the first side plate and is connected to the first gear. The first output shaft can rotate relative to the first side plate.

[0015] As a further solution of the light-shielding plate correction mechanism, the two sides of the first side plate along the X direction and the side of the first side plate facing the connecting plate adopt a chamfered transition.

[0016] As a further solution of the light-shielding plate correction mechanism, along the X direction, when the end edge of the correction plate is parallel to the end edge of the light-shielding plate, the length by which the end edge of the correction plate exceeds the end edge of the light-shielding plate is 2 mm - 6 mm.

[0017] On the other hand, an exposure machine is provided, which includes a fixed seat and a second driving device. The second driving device is installed on the fixed seat, and further includes the above-mentioned light-shielding plate correction mechanism. The second driving device is connected to the light-shielding plate of the light-shielding plate correction mechanism, and the second driving device can drive the light-shielding plate to move along the X direction.

[0018] As a further solution for the exposure machine, the second driving device includes a second motor, a second gear and a second rack. The second motor is installed on the fixed seat, the second motor is connected to the second gear, the second rack is arranged on the light-shielding plate, the second gear meshes with the second rack, the length of the second rack extends along the X direction, and the second motor can drive the light-shielding plate to move along the X direction through the second gear.

[0019] As a further solution for the exposure machine, the exposure machine further includes a first guiding structure for guiding along the X direction. The first guiding structure is fixed on one side of the fixed seat facing the light-shielding plate, and a second guiding structure cooperating with the first guiding structure is arranged on the light-shielding plate.

[0020] Advantages of the present utility model compared with the prior art:

[0021] In the present utility model, a rotatable correction plate is arranged at the end of the light-shielding plate in the X direction, and the end edge of the correction plate along the X direction extends beyond the end edge of the light-shielding plate. When the light-shielding plate deflects obliquely, a part of the non-exposed area that should have been blocked is not blocked. The first driving device can drive the correction plate to rotate relative to the light-shielding plate under the action of the rotating assembly, so as to block this part of the non-exposed area and realize the correction adjustment of the exposure range. Description of the drawings

[0022] The following further describes the present utility model in detail according to the drawings and embodiments.

[0023] Figure 1 It is an assembly schematic diagram of the light-shielding plate and the driving device in the prior art.

[0024] Figure 2 It is a top view schematic diagram of the light-shielding plate correction mechanism and the fixed seat of the embodiment of the present utility model before deflection after assembly.

[0025] Figure 3 It is Figure 2 The partial enlarged view of part A in

[0026] Figure 4 It is Figure 2 The partial enlarged view of part B in

[0027] Figure 5 It is a top view schematic diagram of the light-shielding plate after correction by the correction plate after the light-shielding plate of the embodiment of the present utility model deflects to the right.

[0028] Figure 6 It is a top view schematic diagram of the light-shielding plate after correction by the correction plate after the light-shielding plate of the embodiment of the present utility model deflects to the left.

[0029] Figure 7The figure is a schematic cross-sectional view after the first fixing plate, the guiding structure and the light-shielding plate of the embodiment of the present utility model are assembled.

[0030] Figure 1 Among them:

[0031] 1', light-shielding plate; 2', connecting seat; 3', driving device; 4', fixing plate.

[0032] Figures 2 to 7 Among them:

[0033] 1, light-shielding plate; 11, second guiding structure; 2, correction plate; 3, rotating assembly; 31, rotating shaft; 32, nut; 33, limiting structure; 331, limiting rod; 332, limiting groove; 4, first driving device; 41, first motor; 411, first output shaft; 42, first gear; 43, first rack; 44, connecting plate; 45, first mounting seat; 451, first base; 452, first side plate; 5, fixing seat; 51, first fixing plate; 52, second fixing plate; 6, second driving device; 61, second motor; 611, second output shaft; 62, second gear; 63, second rack; 64, second mounting seat; 641, second base; 642, second side plate; 7, first guiding structure; 71, slider; 711, upper connecting part; 712, middle connecting part; 713, lower connecting part; 72, middle connecting plate; 721, mounting groove. Detailed implementation manners

[0034] Referring to the embodiments described in detail below in conjunction with the accompanying drawings, the advantages and features of the present utility model and the methods for realizing them will become apparent. However, the present utility model is not limited to the embodiments disclosed below, but can be implemented in various different forms. The provision of this embodiment is only for the purpose of completing the disclosure of the present utility model and enabling those skilled in the art to fully understand the scope of the present utility model, and the present utility model is only defined by the scope of the claims. The same reference numerals denote the same components throughout the specification.

[0035] Hereinafter, the present utility model will be described in detail with reference to the drawings.

[0036] As Figures 2 to 7 shown, the light-shielding plate correction mechanism of this embodiment includes a light-shielding plate 1, a correction plate 2, a rotating assembly 3 and a first driving device 4.

[0037] Among them, the correction plate 2 is located on one side of the light-shielding plate 1 in the thickness direction. The correction plate 2 is provided at an end of the light-shielding plate 1 in the X direction, and an end edge of the correction plate 2 in the X direction extends beyond the end edge of the light-shielding plate 1; the correction plate 2 is connected to the light-shielding plate 1 through the rotating assembly 3; the first driving device 4 is connected to the correction plate 2, and the first driving device 4 can drive the correction plate 2 to rotate relative to the light-shielding plate 1.

[0038] In this embodiment, the term "end portion" includes the end face and the side face close to the end face, and the term "end edge" refers to the end face.

[0039] When the light-shielding plate 1 deflects obliquely, the correction plate 2 will deflect obliquely synchronously. The first driving device 4 drives the correction plate 2 to rotate relative to the light-shielding plate 1 under the action of the rotating assembly 3, so that the end edge of the correction plate 2 is inclined relative to the end edge of the light-shielding plate 1 and is in the straightening position. Specifically, when the light-shielding plate 1 deflects to the right (i.e., in the clockwise direction, refer to Figure 5 ), the first driving device 4 drives the correction plate 2 to rotate to the left (i.e., in the counterclockwise direction) to correct and adjust the exposure range; conversely, when the light-shielding plate 1 deflects to the left (refer to Figure 6 ), the first driving device 4 drives the correction plate 2 to rotate to the right to correct and adjust the exposure range.

[0040] Refer to Figure 5 and Figure 6 . When the light-shielding plate 1 deflects obliquely, there is a part of the non-exposed area that needs to be blocked that is not blocked by the light-shielding plate 1. In this embodiment, the end edge of the correction plate 2 along the X direction is designed to extend beyond the end edge of the light-shielding plate 1. When the first driving device 4 drives the correction plate 2 to rotate, the correction plate 2 can cover this part of the non-exposed area that is not blocked by the light-shielding plate 1, so as to realize the correction of the obliquely deflected light-shielding plate 1.

[0041] Optionally, along the X direction, when the end edge of the correction plate 2 is parallel to the end edge of the light-shielding plate 1, the length by which the end edge of the correction plate 2 extends beyond the end edge of the light-shielding plate 1 is 2 mm - 6 mm. The specific length dimensions include but are not limited to: 2 mm, 2.2 mm, 2.5 mm, 2.8 mm, 3 mm, 3.2 mm, 3.5 mm, 4 mm, 4.5 mm, 5 mm, 5.5 mm, 6 mm, etc., which can enable the correction plate 2 to have a suitable correction range.

[0042] In this embodiment, the light-shielding plate 1 has a T-shaped structure. In other embodiments, it can also be designed as a rectangular structure or the like.

[0043] Furthermore, the rotating assembly 3 includes a rotating shaft 31. The rotating shaft 31 is located at the midpoint of the correction plate 2 along the Y direction. The correction plate 2 is rotationally connected to the light-shielding plate 1 through the rotating shaft 31; the Y direction is perpendicular to the X direction.

[0044] Optionally, the rotating shaft 31 is fixed on the light-shielding plate 1 and penetrates through the correction plate 2, and the correction plate 2 can rotate around the rotating shaft 31. In other embodiments, the rotating shaft 31 can also be fixed on the correction plate 2 and penetrate through the light-shielding plate 1, and the correction plate 2 and the rotating shaft 31 rotate relative to the light-shielding plate 1 together around the axis of the rotating shaft 31. Alternatively, the rotating shaft 31 can also be a bolt. For example, the bolt passes through the correction plate 2 and the light-shielding plate 1, and a nut 32 is screwed on for limit to prevent the bolt from separating from the light-shielding plate 1 and the correction plate 2.

[0045] The rotating shaft 31 is located at the midpoint of the correction plate 2 in the Y direction, which can make the correction areas the same when the correction plate 2 rotates left or right.

[0046] Specifically, the correction plate 2 is of a rectangular structure, and the length of the correction plate 2 extends along the Y direction shown in the figure. When the light-shielding plate 1 deflects obliquely, by rotating the correction plate 2, the correction plate 2 can completely cover the non-exposed area that the light-shielding plate 1 cannot cover.

[0047] Optionally, the rotating assembly 3 includes a set of limiting structures 33. The limiting structures 33 include a limiting rod 331 and a limiting groove 332. The limiting groove 332 is of an arc-shaped structure, and the center of the limiting groove 332 coincides with the axis of the rotating shaft 31. The limiting rod 331 is fixed on the light-shielding plate 1, the limiting groove 332 is arranged on the correction plate 2, and the limiting rod 331 is inserted and matched with the limiting groove 332. The first driving device 4 drives the correction plate 2 to rotate around the rotating shaft 31, and the limiting groove 332 also moves relative to the limiting rod 331, and the limiting structure 33 is used to limit the range of the rotation angle of the correction plate 2 relative to the light-shielding plate 1.

[0048] Specifically, two sets of limiting structures 33 are arranged on the correction plate 2 at intervals, and the two sets of limiting structures 33 are respectively arranged at positions close to the ends of the correction plate 2 along its length direction.

[0049] Of course, in other embodiments, the limiting rod 331 can also be fixed on the correction plate 2, the limiting groove 332 is arranged on the light-shielding plate 1, and the limiting rod 331 is inserted and matched with the limiting groove 332, which can also limit the rotation range of the correction plate 2.

[0050] As Figure 3 shown, the first driving device 4 includes a first motor 41, a first gear 42, a first rack 43 and a connecting plate 44. The connecting plate 44 is fixedly connected with the correction plate 2. The first rack 43 is fixed on the connecting plate 44, and the length of the first rack 43 extends along the X direction. The first motor 41 is fixed on the light-shielding plate 1, the first motor 41 is in transmission connection with the first gear 42, and the first gear 42 meshes with the first rack 43.

[0051] The first motor 41 drives the first gear 42 to rotate in the forward and reverse directions, so as to drive the correction plate 2 to rotate around the rotating shaft 31 in the clockwise or counterclockwise direction. Since the oblique deflection angle of the light-shielding plate 1 is usually not very large, generally 0.2°-0.6°, when the linear first rack 43 is adopted in this embodiment, the rotation of the connecting plate 44 and the correction plate 2 by 0.2°-0.6° will not affect the meshing of the first gear 42 and the first rack 43, nor will it get stuck and unable to rotate. Of course, in other embodiments, the first rack 43 can also be designed as an arc-shaped structure according to the rotation amplitude of the connecting plate 44.

[0052] Furthermore, the first driving device 4 further includes a first mounting seat 45. The first mounting seat 45 includes a first base 451 and a first side plate 452. The first motor 41 is fixed on the first base 451. The first output shaft 411 of the first motor 41 passes through the first side plate 452 and is connected to the first gear 42. The first output shaft 411 can rotate relative to the first side plate 452.

[0053] Among them, the connecting plate 44 is arranged on the side adjacent to the light-shielding plate 1 along the Y direction.

[0054] In order to prevent the first motor 41 from hindering the rotation of the connecting plate 44, a certain distance needs to be provided between the first motor 41 and the connecting plate 44. At this time, the length of the first output shaft 411 is relatively long, and certain vibrations may occur when the first output shaft 411 rotates, affecting the meshing effect of the first gear 42 and the first rack 43. Therefore, in this embodiment, the first side plate 452 is arranged on the side of the first base 451 close to the connecting plate 44, and the first output shaft 411 passes through the first side plate 452 and is connected to the first gear 42, which can improve the rotation stability of the first output shaft 411.

[0055] Furthermore, the two sides of the first side plate 452 along the X direction and the side of the first side plate 452 facing the connecting plate 44 adopt a chamfered transition. The chamfered design can further prevent the first side plate 452 from affecting the rotation of the connecting plate 44.

[0056] This embodiment also provides an exposure machine, which includes a light-shielding plate correction mechanism, a fixed seat 5 and a second driving device 6. The second driving device 6 is installed on the fixed seat 5. The second driving device 6 is connected to the light-shielding plate 1 of the light-shielding plate correction mechanism. The second driving device 6 can drive the light-shielding plate 1 to move along the X direction.

[0057] After the light-shielding plate 1 undergoes an oblique deflection, a part of the non-exposed area of the substrate that should have been blocked is not blocked, resulting in possible phenomena such as residual film or loss defects on the substrate after exposure and development. After the oblique deflection correction by the light-shielding plate correction mechanism, the accuracy of the exposure range can be effectively improved.

[0058] In this embodiment, as Figure 2and Figure 4 As shown in Figure 4 , the second driving device 6 includes a second motor 61, a second gear 62 and a second rack 63. The second motor 61 is installed on the fixed seat 5. The second motor 61 is connected to the second gear 62. The second gear 62 meshes with the second rack 63. The length of the second rack 63 extends along the X direction. The second motor 61 can drive the light shielding plate 1 to move along the X direction through the second gear 62. The second motor 61 is fixedly installed on the fixed seat 5. When the second motor 61 drives the second gear 62 to rotate through its second output shaft 611, the second gear 62 drives the second rack 63 to drive the entire light shielding plate correction mechanism to move along the X direction.

[0059] Of course, the second driving device 6 of this embodiment is not limited to the motor driving structure. In other embodiments, it can also be a driving structure such as a cylinder or a hydraulic cylinder, which can all realize the movement of the light shielding plate correction mechanism.

[0060] Furthermore, the exposure machine further includes a first guiding structure 7 that guides along the X direction. The first guiding structure 7 is fixed on the side of the fixed seat 5 facing the light shielding plate 1. The light shielding plate 1 is provided with a second guiding structure 11 that cooperates with the first guiding structure 7. By setting the cooperation of the first guiding structure 7 and the second guiding structure 11, the movement of the second driving device 6 driving the light shielding plate 1 along the X direction can be made more stable.

[0061] Optionally, the first guiding structure 7 includes two sliders 71 arranged at intervals. The sliders 71 are fixed to the bottom of the fixed seat 5. Correspondingly, the second guiding structure 11 includes two guiding grooves provided on the light shielding plate 1, and the second rack 63 is located between the two guiding grooves. The sliders 71 and the guiding grooves are in one-to-one correspondence and guiding cooperation. Of course, in other embodiments, the sliders 71 can also be provided on the light shielding plate 1, and the guiding grooves can be provided on the bottom of the fixed seat 5, which will not be elaborated here.

[0062] Specifically, as Figure 4 and Figure 7 shown, the fixed seat 5 includes two first fixing plates 51 with lengths extending along the X direction and two second fixing plates 52 with lengths extending along the Y direction. The two first fixing plates 51 and the two second fixing plates 52 form a rectangular frame structure. The sliders 71 are fixed to the bottom of the first fixing plates 51. The second driving device 6 further includes a second mounting seat 64. The second mounting seat 64 is located inside the rectangular frame structure. The second mounting seat 64 includes a second base 641 and a second side plate 642. The second base 641 is fixedly connected to the two second fixing plates 52. The second side plate 642 is fixed to the side of the second base 641 close to the first rack 43. The second motor 61 is fixed on the second base 641. The second output shaft 611 of the second motor 61 passes through the second side plate 642 and is fixedly connected to the second gear 62.

[0063] In this embodiment, the first guide structure 7 further includes an intermediate connecting plate 72, and an intermediate connecting plate 72 is respectively provided between the first fixed plate 51 and the slider 71. Specifically, the intermediate connecting plate 72 is respectively fixedly connected to the fixed seat 5 and the slider 71, and the slider 71 is composed of an upper connecting portion 711, an intermediate connecting portion 712 and a lower connecting portion 713 to form an I-shaped structure. The bottom of the intermediate connecting plate 72 has a mounting groove 721 recessed toward the first fixed plate 51, and the length of the mounting groove 721 extends along the X direction. The upper connecting portion 711 of the slider 71 is located in the mounting groove 721, and the upper connecting portion 711 can be fixed in the mounting groove 721 by screws from both sides of the mounting groove 721 in the Y direction. The structure of the guide groove matches the intermediate connecting portion 712 and the lower connecting portion 713.

[0064] In other embodiments, in order to prevent the shading plate 1 from being too thick, a second guide structure 11 can be directly installed on the shading plate 1. The second guide structure 11 includes two guide plates (not shown in the figure) corresponding one to one with the first guide structure 7. The guide plates are provided with guide grooves matching the first guide structure 7.

[0065] In this embodiment, the structures of the first guide structure 7 and the second guide structure 11 are not limited thereto. In other embodiments, the slider 71 included in the first guide structure 7 and the guide groove included in the second guide structure 11 may also be a trapezoidal structure. Alternatively, the first guide structure 7 may adopt a roller structure, and the roller structure and the guide groove may be rolled together, and so on.

[0066] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. A shading plate correction mechanism, comprising a shading plate, characterized in that: The shading plate correction mechanism also includes: A correction plate, the correction plate is located on one side of the shading plate in the thickness direction, the correction plate is arranged at the end of the shading plate in the X direction, and one end edge of the correction plate in the X direction exceeds the end edge of the shading plate; A rotating assembly, wherein the correction plate is connected to the shading plate through the rotating assembly; A first driving device is connected to the correction plate, and the first driving device can drive the correction plate to rotate relative to the shading plate.

2. The visor correction mechanism according to claim 1, characterized in that: The rotating assembly includes a rotating shaft, the rotating shaft is located at the midpoint of the correction plate along the Y direction, the correction plate is rotatably connected to the shading plate through the rotating shaft; the Y direction is perpendicular to the X direction.

3. The visor correction mechanism according to claim 2, characterized in that: The rotating assembly includes at least one set of limiting structures, and the limiting structure includes a limiting rod and a limiting groove. The limiting groove is an arc-shaped structure, and the center of the limiting groove coincides with the axis of the rotating shaft. The limiting rod is fixed on one of the shading plate and the correcting plate, and the limiting groove is provided on the other of the shading plate and the correcting plate. The limiting rod is plugged into and matched with the limiting groove.

4. The visor correction mechanism according to claim 1, characterized in that: The first driving device includes a first motor, a first gear, a first rack and a connecting plate, the connecting plate is fixedly connected to the correction plate, the first rack is fixed to the connecting plate, and the length of the first rack extends along the X direction, the first motor is fixed to the shading plate, the first motor is transmission-connected to the first gear, and the first gear is meshed with the first rack.

5. The visor correction mechanism according to claim 4, characterized in that: The first driving device also includes a first mounting seat, which includes a first base and a first side plate. The first motor is fixed on the first base. The first output shaft of the first motor passes through the first side plate and is connected to the first gear. The first output shaft can rotate relative to the first side plate.

6. The visor correction mechanism according to claim 5, characterized in that: Two side surfaces of the first side plate along the X direction and the side surface of the first side plate facing the connecting plate adopt an inclined transition.

7. The visor correction mechanism according to any one of claims 1 to 6, characterized in that: Along the X direction, when the end edge of the correction plate is parallel to the end edge of the shading plate, the length of the end edge of the correction plate exceeding the end edge of the shading plate is 2 mm-6 mm.

8. An exposure machine, comprising a fixing seat and a second driving device, wherein the second driving device is mounted on the fixing seat, characterized in that: It also includes the shading plate correction mechanism according to any one of claims 1 to 7, wherein the second driving device is connected to the shading plate of the shading plate correction mechanism, and the second driving device can drive the shading plate to move along the X direction.

9. The exposure machine according to claim 8, characterized in that: The second driving device includes a second motor, a second gear and a second rack. The second motor is installed on the fixed seat. The second motor is connected to the second gear. The second rack is arranged on the light shielding plate. The second gear is meshed with the second rack. The length of the second rack extends along the X direction. The second motor can drive the light shielding plate to move along the X direction through the second gear.

10. The exposure machine according to claim 9, characterized in that: The exposure machine further comprises a first guide structure for guiding along the X direction, the first guide structure is fixed on a side of the fixing seat facing the shading plate, and a second guide structure cooperating with the first guide structure is provided on the shading plate.

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