Split type CVD furnace entering and exiting carrier

Abstract

The utility model provides a split type CVD furnace entering and exiting carrier which comprises a carrier cylinder, one end of the carrier cylinder is in threaded connection with a first sealing end cover, a second sealing end cover is arranged on the side wall of the first sealing end cover, a sliding plate is slidably connected into the first sealing end cover, a connecting rod is rotatably connected to the sliding plate, and a first sealing plate is arranged on the side wall of the second sealing end cover. A connecting plate is fixedly connected to one end of the connecting rod, a carrying plate is fixedly connected to one end of the connecting plate, the carrying plate is slidably connected with the carrying cylinder, a screw is rotatably connected to the second sealing end cover, a moving ring is in threaded connection with the screw, a pushing plate is hinged to the outer wall of the moving ring, and an auxiliary plate is hinged to the other end of the pushing plate; an insertion block is fixedly mounted at one end of the auxiliary plate; when the carrier is used, the end cover can be quickly taken down and mounted, and the end cover can directly drive materials to move out while the end cover is taken down, so that the materials subjected to chemical vapor deposition can be conveniently taken out, and a worker does not need to stretch an arm into the carrier to take the materials.

Description

Technical Field

[0001] The utility model relates to the field of CVD processing, and more specifically, to a split-type CVD furnace loading and unloading carrier. Background Art

[0002] Chemical vapor deposition, abbreviated as CVD, is a chemical engineering technology. This technology mainly uses one or several gaseous compounds or elements containing thin film elements to carry out chemical reactions on the surface of a substrate to form a thin film. Chemical vapor deposition is a new technology for preparing inorganic materials developed in recent decades. The chemical vapor deposition method has been widely used for purifying substances, developing new crystals, depositing various single crystals, polycrystals or glassy inorganic thin film materials. During the CVD deposition operation process, materials need to be placed on the furnace loading and unloading carrier and then deposited.

[0003] In the existing technology, after chemical vapor deposition, due to the long length of the carrier, it is necessary for workers to stretch their arms into the carrier to take the materials, so it is inconvenient to take out the materials in the carrier. In addition, the end cover of the carrier is usually fixed with screws, which is inconvenient to remove the end cover and is not conducive to improving work efficiency.

[0004] Therefore, we make improvements on this and propose a split-type CVD furnace loading and unloading carrier. Content of the Utility Model

[0005] The purpose of the utility model is to address the current situation that after chemical vapor deposition, due to the long length of the carrier, it is necessary for workers to stretch their arms into the carrier to take the materials, so it is inconvenient to take out the materials in the carrier. In addition, the end cover of the carrier is usually fixed with screws, which is inconvenient to remove the end cover and is not conducive to improving work efficiency.

[0006] In order to achieve the above-mentioned utility model purpose, the utility model provides the following technical solutions:

[0007] A split-type CVD furnace loading and unloading carrier is provided to improve the above problems.

[0008] Specifically, this application is as follows:

[0009] It includes a carrier cylinder, one end of the carrier cylinder is threadedly connected with a first sealing end cover, a second sealing end cover is arranged on the side wall of the first sealing end cover, a sliding plate is slidably connected inside the first sealing end cover, a connecting rod is rotatably connected to the sliding plate, one end of the connecting rod is fixedly connected with a connecting plate, one end of the connecting plate is fixedly connected with a loading plate, the loading plate is slidably connected with the carrier cylinder, a screw rod is rotatably connected to the second sealing end cover, a moving ring is threadedly connected to the screw rod, a pushing plate is hinged to the outer wall of the moving ring, an auxiliary plate is hinged to the other end of the pushing plate, and a plug is fixedly installed at one end of the auxiliary plate.

[0010] As a preferred technical solution of the present application, a slot matching with the insertion block is provided on the first sealing end cover, and a locking groove is provided in the inner cavity of the slot.

[0011] As a preferred technical solution of the present application, the auxiliary plate is slidably connected to the second sealing end cover, a limiting plate is fixedly installed on the auxiliary plate, and the limiting plate fits with the second sealing end cover.

[0012] As a preferred technical solution of the present application, a slide rail is fixedly installed in the carrier cylinder.

[0013] As a preferred technical solution of the present application, slide bars are fixedly installed at both ends of the carrier plate, and the slide bars cooperate with the slide rail.

[0014] As a preferred technical solution of the present application, a driving block is fixedly installed at one end of the screw rod away from the second sealing end cover.

[0015] As a preferred technical solution of the present application, a flange is provided at the right end of the cylinder.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] In the solution of the present application:

[0018] 1. By pulling the first sealing end cover, the first sealing end cover drives the sliding plate, the sliding plate drives the connecting rod, the connecting rod drives the connecting plate to move, the connecting plate drives the carrier plate to move, and the carrier plate drives the slide bar to slide along the slide rail, so that the carrier plate can be moved out. It realizes that when the end cover is removed, the end cover can directly drive the material to move out, which is convenient for taking the material on the carrier plate, and solves the problem in the prior art that due to the long carrier, the staff needs to stretch their arms into the carrier to take the material, and it is not convenient to take out the material in the carrier.

[0019] 2. By driving the screw rod to rotate through the driving block, the rotation of the screw rod drives the moving ring to move, the movement of the moving ring drives the pushing plate, the pushing plate drives the auxiliary plate to move, and the auxiliary plate drives the insertion block to move from the locking groove to the slot. At this time, the second sealing end cover can be removed, which realizes that the end cover can be quickly removed, and solves the problem in the prior art that the carrier end cover is usually fixed with screws, which is not convenient to remove the end cover and is not conducive to improving work efficiency. Description of the Drawings

[0020] Figure 1 It is a schematic structural diagram of the split CVD furnace loading and unloading carrier provided by the present application;

[0021] Figure 2 It is a schematic internal structure diagram of the split CVD furnace loading and unloading carrier provided by the present application;

[0022] Figure 3Schematic diagram of the second sealing end cover structure of the split CVD furnace loading and unloading carrier provided by this application;

[0023] Figure 4 Schematic diagram of the second sealing end cover structure of the split CVD furnace loading and unloading carrier provided by this application;

[0024] Figure 5 Schematic diagram of the insert block structure of the split CVD furnace loading and unloading carrier provided by this application;

[0025] Figure 6 Schematic diagram of the slot and locking block structure of the split CVD furnace loading and unloading carrier provided by this application;

[0026] Figure 7 Schematic diagram of the slide rail structure of the split CVD furnace loading and unloading carrier provided by this application;

[0027] Figure 8 Schematic diagram of the slide bar structure of the split CVD furnace loading and unloading carrier provided by this application.

[0028] Labels in the figure:

[0029] 1. Carrier cylinder; 2. First sealing end cover; 3. Second sealing end cover; 4. Sliding plate; 5. Connecting rod; 6. Connecting plate; 7. Loading plate; 8. Screw; 9. Moving ring; 10. Pushing plate; 11. Auxiliary plate; 12. Insert block; 13. Slot; 14. Locking groove; 15. Limiting plate; 16. Driving block; 17. Slide rail; 18. Flange; 19. Slide bar. Detailed implementation manners

[0030] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model.

[0031] Therefore, the following detailed description of the embodiments of the present utility model is not intended to limit the scope of the present utility model claimed, but merely represents some embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0032] It should be noted that, without conflict, the embodiments in the present utility model and the features and technical solutions in the embodiments may be combined with each other.

[0033] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0034] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "upper" and "lower" is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the invention product is usually placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. Such terms are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, terms such as "first" and "second" are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0035] Embodiment:

[0036] As Figures 1-8 shown, this embodiment proposes a split CVD furnace loading and unloading carrier, including a carrier cylinder 1. One end of the carrier cylinder 1 is threadedly connected with a first sealing end cover 2. A second sealing end cover 3 is arranged on the side wall of the first sealing end cover 2. A sliding plate 4 is slidably connected inside the first sealing end cover 2. Pull the first sealing end cover 2, the first sealing end cover 2 drives the sliding plate 4, a connecting rod 5 is rotatably connected to the sliding plate 4, the sliding plate 4 drives the connecting rod 5, one end of the connecting rod 5 is fixedly connected with a connecting plate 6, the connecting rod 5 drives the connecting plate 6 to move, one end of the connecting plate 6 is fixedly connected with a loading plate 7, the connecting plate 6 drives the loading plate 7 to move, and then the loading plate 7 can be moved out to facilitate taking the materials on the loading plate 7; a screw rod 8 is rotatably connected to the second sealing end cover 3, a moving ring 9 is threadedly connected to the screw rod 8, the rotation of the screw rod 8 drives the moving ring 9 to move, a pushing plate 10 is hinged to the outer wall of the moving ring 9, the movement of the moving ring 9 drives the pushing plate 10, the other end of the pushing plate 10 is hinged to an auxiliary plate 11, the pushing plate 10 drives the auxiliary plate 11 to move, and one end of the auxiliary plate 11 is fixedly installed with a plug 12, and the auxiliary plate 11 drives the plug 12.

[0037] In order to facilitate the removal of the end cover, a slot 13 matching the plug 12 is opened on the first sealing end cover 2, and a locking slot 14 is opened in the inner cavity of the slot 13. The auxiliary plate 11 drives the plug 12 to move from the locking slot 14 to the slot 13, and at this time, the second sealing end cover 3 can be removed.

[0038] In order to cooperate with the stable sliding of the auxiliary plate 11, the auxiliary plate 11 is slidably connected with the second sealing end cover 3, and a limiting plate 15 is fixedly installed on the auxiliary plate 11, and the limiting plate 15 fits with the second sealing end cover 3.

[0039] In order to cooperate with the movement of the loading plate 7, a slide rail 17 is fixedly installed in the carrier cylinder 1, and slide bars 19 are fixedly installed at both ends of the loading plate 7. The slide bars 19 cooperate with the slide rail 17, and the loading plate 7 drives the slide bars 19 to slide along the slide rail 17.

[0040] A driving block 16 is fixedly installed at one end of the screw rod 8 away from the second sealing end cover 3, and the driving block 16 drives the screw rod 8 to rotate.

[0041] A flange 18 is provided at the right end of the carrier cylinder 1.

[0042] Specifically, for this split CVD loading and unloading carrier: after chemical vapor deposition is completed, rotate the driving block 16, the driving block 16 drives the screw rod 8 to rotate, the rotation of the screw rod 8 drives the moving ring 9 to move, the movement of the moving ring 9 drives the pushing plate 10, the pushing plate 10 drives the auxiliary plate 11 to move, and the auxiliary plate 11 drives the insertion block 12 to move from the locking groove 14 to the slot 13. At this time, the second sealing end cover 3 can be removed. Then rotate the first sealing end cover 2 to separate it from the carrier cylinder 1. Then pull the first sealing end cover 2, the first sealing end cover 2 drives the sliding plate 4, the sliding plate 4 drives the connecting rod 5, the connecting rod 5 drives the connecting plate 6 to move, the connecting plate 6 drives the loading plate 7 to move, and the loading plate 7 drives the sliding strip 19 to slide along the slide rail 17, so as to move the loading plate 7 out, which is convenient for taking the materials on the loading plate 7; when this carrier is in use, not only can the end cover be quickly removed and installed, but also when the end cover is removed, the end cover can directly drive the materials to move out, which is convenient for taking out the materials after chemical vapor deposition, and there is no need for the staff to stretch their arms into the carrier to take them.

[0043] All technical features in this embodiment can be freely combined according to actual needs.

[0044] The above embodiment is a preferred implementation scheme of the present invention. In addition, the present invention can also be implemented in other ways. Any obvious replacement without departing from the concept of the technical solution is within the protection scope of the present invention.

Claims

1. A split type CVD in-and-out furnace carrier, comprising a carrier tube (1), characterized in that: One end of the carrier tube (1) is threadedly connected to a first sealing end cover (2), and a second sealing end cover (3) is arranged on a side wall of the first sealing end cover (2). A sliding plate (4) is slidably connected inside the first sealing end cover (2), and a connecting rod (5) is rotatably connected to the sliding plate (4). One end of the connecting rod (5) is fixedly connected to a connecting plate (6), and one end of the connecting plate (6) is fixedly connected to a carrier plate (7). The carrier plate (7) is slidably connected to the carrier tube (1). The second sealing end cover (3) is rotatably connected to a screw rod (8), and a moving ring (9) is threadedly connected to the screw rod (8). The outer wall of the moving ring (9) is hinged with a push plate (10), and the other end of the push plate (10) is hinged with an auxiliary plate (11), and one end of the auxiliary plate (11) is fixedly installed with an insert block (12).

2. A split type CVD furnace loading and unloading carrier according to claim 1, characterized in that: The first sealing end cover (2) is provided with a slot (13) matched with the insert block (12), and the inner cavity of the slot (13) is provided with a locking groove (14).

3. A split type CVD furnace loading and unloading carrier according to claim 1, characterized in that: The auxiliary plate (11) is slidably connected to the second sealing end cover (3), a limiting plate (15) is fixedly mounted on the auxiliary plate (11), and the limiting plate (15) is in contact with the second sealing end cover (3).

4. The split-type CVD furnace loading and unloading carrier according to claim 1, characterized in that: A slide rail (17) is fixedly installed inside the carrier tube (1).

5. The split-type CVD furnace loading and unloading carrier according to claim 1, characterized in that: Slide bars (19) are fixedly mounted on both ends of the object carrying plate (7), and the slide bars (19) match the slide rails (17).

6. The split-type CVD furnace loading and unloading carrier according to claim 1, characterized in that: A driving block (16) is fixedly mounted on one end of the screw rod (8) away from the second sealing end cover (3).

7. The split-type CVD furnace loading and unloading carrier according to claim 4, characterized in that: The right end of the carrier tube (1) is provided with a flange (18).

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