Novel probe card using gray adhesive tape to replace release agent

Abstract

The utility model discloses a novel probe card utilizing a gray adhesive tape to replace a release agent, which comprises a ring body, epoxy resin is arranged at the bottom of the ring body, probes are arranged in the epoxy resin in an array manner, a jig is arranged at the bottom of the epoxy resin, and the gray adhesive tape is arranged at the bottom of the epoxy resin. When the probe is manufactured, the special grey adhesive tape is pasted on the jig, the outline range of the probe can be accurately engraved on the grey adhesive tape through the blade, the beam length accuracy of the probe can be ensured, then epoxy resin is accurately smeared on the grey adhesive tape according to the outline line of the grey adhesive tape, and the probe can be manufactured. The gray adhesive tape is soft in texture, the blade can be easily inserted between the epoxy resin and the gray adhesive tape, the probe can be easily and stably separated from the jig when the blade is slightly warped with force, any damage to the probe or the jig cannot be caused, and the phenomenon that the probe tip is bent or the poor level of the probe cannot be affected is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field related to semiconductors, and particularly relates to a novel probe card that uses gray tape instead of a release agent. Background Art

[0002] A probe card is a device used for semiconductor testing, mainly for testing the electrical performance of integrated circuit chips. It contacts the test points of the chip through multiple fine probes to conduct various electrical tests and measurements. The probe card is usually used in the wafer testing stage, that is, the testing before the chip is cut and packaged.

[0003] However, when manufacturing a probe card, usually, before applying epoxy resin to the fixture, a layer of release agent is first applied to the fixture. After the epoxy resin of the probe card is completely cured, the release agent can effectively prevent the probe card from being unable to be separated from the fixture. Since the release agent is colorless, it is very difficult to evenly apply the release agent to the surface of the fixture during the application process. If too much release agent is locally applied, the excess release agent may penetrate between the polyester film and the double-sided tape, which may cause local detachment of the polyester film, affecting the flatness of the polyester film. Or during the manufacturing process of the probe card, if the epoxy resin is separated from the fixture, it will affect the flatness of the probe card and cause defects. If too little release agent is locally applied, the epoxy resin and the fixture will be more firmly bonded, and it is very difficult to insert the blade, which will affect the release force of the probe card too much. During the separation process, it is very likely to cause local damage to the probe card or the fixture. For example, the phenomenon of the tip of the probe card being bent or horizontally deviated during the separation process often occurs. The horizontal defect and tip bending of the probe card are unacceptable. Therefore, how much release agent is applied is very important for the operator to master, but it requires the long-term experience accumulation of the operator to achieve. Since the release agent is colorless, the application range of the release agent is often much larger than the range that actually needs to be applied. And when applying epoxy resin, without a position reference, only a marker pen can be used to draw a rough position contour on the fixture. The lines drawn by the marker pen have a certain width, which is not precise enough for the precision of manufacturing the probe card. It is relatively difficult to ensure the beam length precision of the probe card by applying epoxy resin at the position under the microscope. The beam length precision is one of the important factors for the manufacturing quality requirements of the probe card. At the same time, for the manufacturing of a probe card with a small first-layer pitch, when inserting the pins, the pin body is very easy to touch the release agent on the fixture. If the pin body is stained with the release agent, after applying epoxy resin, even after the epoxy resin is cured, the epoxy resin has very poor wrapping property on the pin body. When the tip or the tail of the pin is stressed, the pin will rotate or displace in the probe card, resulting in the occurrence of the phenomenon of unqualified pin positions. And it is very difficult to discover and repair such unqualified phenomena to be qualified at one time, which will cause serious waste of production costs. Summary of the Utility Model

[0004] The purpose of the present utility model is to provide a novel probe card that uses gray tape instead of a release agent, so as to solve the problems proposed in the above background technology that it is very difficult to evenly apply the release agent to the surface of the jig during the application process, which is quite difficult for the operator. At the same time, if the release agent adheres to the needle body, after applying epoxy resin, even after the epoxy resin cures, the epoxy resin has very poor wrapping around the needle body.

[0005] To achieve the above purpose, the present utility model provides the following technical solution: A novel probe card that uses gray tape instead of a release agent, including a ring body;

[0006] Epoxy resin is provided at the bottom position of the ring body, probes are arranged in an array at the internal position of the epoxy resin, and a jig is provided at the bottom position of the epoxy resin;

[0007] Gray tape is provided at the bottom position of the epoxy resin, and a blade socket is provided at the right side position of the gray tape.

[0008] Preferably, the gray tape corresponds to the blade socket and the epoxy resin, and the gray tape is adhesively connected to the blade socket and the epoxy resin.

[0009] Preferably, double-sided tape is provided at the upper left position of the jig, and a polyester film is provided at the upper position of the double-sided tape.

[0010] Preferably, a cross bar is provided at the inner side position of the probe, a positioning opening is provided at the internal position of the jig, and the positioning opening is snap-connected to the probe.

[0011] Preferably, the cross bar is fixedly connected to the jig, and the inner arc of the probe corresponds to the cross bar.

[0012] Preferably, the ring body is adhesively connected to the epoxy resin, and the bottom of the ring body is a flat circular ring structure.

[0013] Compared with the prior art, the present utility model provides a novel probe card that uses gray tape instead of a release agent, and has the following beneficial effects:

[0014] The setting of the grey tape and the blade socket. When manufacturing the probe, a special grey tape is pasted on the fixture. The contour range of the probe can be accurately engraved on the grey tape with a blade, which can ensure the beam length accuracy of the probe. Then, epoxy resin is accurately applied on the grey tape according to the contour line of the grey tape. During the probe manufacturing process, the grey tape has no impact on the partial detachment of the polyester film from the fixture at all. Moreover, the uniform adhesion of the grey tape will not affect the partial detachment of the epoxy resin from the fixture, so it will not cause horizontal defects of the probe due to the grey tape factor, nor will there be any release agent sticking to the needle body and affecting the wrapping of the needle body, resulting in unqualified needle positions. After the probe manufacturing is completed and the epoxy resin is completely cured, since the grey tape can evenly and effectively isolate the resin and the fixture surface, and the texture of the grey tape is soft, the blade can be easily inserted between the epoxy resin and the grey tape. With a slight force on the blade to pry, the probe can be easily and stably detached from the fixture without causing any damage to the probe or the fixture, nor will it cause the tip of the needle to bend or affect the horizontal defects of the probe. Description of the Drawings

[0015] Figure 1 is a schematic structural view of the present invention.

[0016] Figure 2 is a schematic structural view of the epoxy resin in the present invention.

[0017] In the figure: 1, ring body; 2, epoxy resin; 3, cross bar; 4, polyester film; 5, double-sided tape; 6, positioning port; 7, fixture; 8, grey tape; 9, blade socket; 10, probe. Detailed Embodiment

[0018] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0019] The present invention provides a novel probe card using grey tape instead of release agent as shown in Figure 1 which includes a ring body 1;

[0020] At the bottom position of the ring body 1, there is an epoxy resin 2. Inside the epoxy resin 2, probes 10 are arranged in an array. At the bottom position of the epoxy resin 2, there is a fixture 7;

[0021] At the bottom position of the epoxy resin 2, there is a grey tape 8. At the right side position of the grey tape 8, there is a blade socket 9.

[0022] The gray tape 8 corresponds to the blade socket 9 and the epoxy resin 2, and the gray tape 8 is adhesively connected to the blade socket 9 and the epoxy resin 2.

[0023] At the upper left position of the jig 7, a double-sided tape 5 is provided, and at the upper position of the double-sided tape 5, a polyester film 4 is provided.

[0024] At the inner position of the probe 10, a cross bar 3 is provided, and at the inner position of the jig 7, a positioning port 6 is formed. The positioning port 6 is snap-connected to the probe 10.

[0025] The cross bar 3 is fixedly connected to the jig 7, and the inner arc of the probe 10 corresponds to the cross bar 3.

[0026] The ring body 1 is adhesively connected to the epoxy resin 2, and the bottom of the ring body 1 is a flat circular ring structure.

[0027] In this embodiment, the specific implementation steps of a new type of probe card using gray tape instead of a release agent are as follows: clean the jig, paste the perforated polyester film 4 onto the jig 7 with the double-sided tape 5, stick the gray tape 8 onto the jig 7, cut off the excess gray tape 8 with a blade according to the size requirements of the drawing, place the cross bar according to the drawing requirements and then insert the probe 10, and ensure that the level and clearance of the probe 10 meet the requirements. Apply an appropriate thickness of epoxy resin 2 along the contour edge of the gray tape 8, and place it in an oven for heating and baking until the epoxy resin 2 is preliminarily cured. Apply an appropriate thickness of epoxy resin 2, cover the ring body 1, ensure that the epoxy resin 2 is appropriate and the overall level is correct, then put it into the oven for baking. After the epoxy resin 2 is completely cured, take out the product, insert a blade between the gray tape 8 and the epoxy resin 2 to pry out the probe 10, check the quality of the probe 10, and end the production of the probe 10.

[0028] As Figure 1-2 shown, at the bottom position of the epoxy resin 2, there is a gray tape 8. At the right position of the gray tape 8, there is a blade socket 9. The gray tape 8 corresponds to the blade socket 9 and the epoxy resin 2, and the gray tape 8 is adhesively connected to the blade socket 9 and the epoxy resin 2.

[0029] Preferably, when manufacturing the probe 10, a special gray tape 8 is attached to the fixture. The contour range of the probe 10 can be precisely engraved on the gray tape 8 with a blade, which can ensure the beam length accuracy of the probe 10. Then, epoxy resin is precisely applied on the gray tape 8 according to the contour lines of the gray tape 8. During the manufacturing process of the probe 10, the gray tape 8 does not affect the partial detachment of the polyester film 4 from the fixture 7 at all, and the uniform stickiness of the gray tape 8 does not affect the partial detachment of the epoxy resin 2 from the fixture 7 either. Therefore, the horizontal quality of the probe 10 will not be affected by the gray tape 8, and no mold release agent will adhere to the needle body to affect the wrapping of the needle body, resulting in unqualified needle positions. After the manufacturing of the probe 10 is completed and the epoxy resin 2 is completely cured, since the gray tape 8 can evenly and effectively isolate the resin and the surface of the fixture 7, and the texture of the gray tape 8 is soft, the blade can be easily inserted between the epoxy resin and the gray tape 8. With a slight lift on the blade, the probe 10 can be easily and stably detached from the fixture 7 without causing any damage to the probe 10 or the fixture, nor will it cause the tip of the needle to bend or affect the horizontal quality of the probe 10.

[0030] As Figure 1-2 shown, a double-sided tape 5 is provided at the upper left position of the fixture 7, a polyester film 4 is provided above the double-sided tape 5, a cross bar 3 is provided at the inner side position of the probe 10, and a positioning opening 6 is formed inside the fixture 7. The positioning opening 6 is snap-connected to the probe 10.

[0031] Optionally, the double-sided tape 5 provides good adhesion and can firmly fix the polyester film 4 on the fixture 7 to prevent displacement or detachment during the test. The polyester film 4 has excellent insulation and protection properties, which can prevent the influence of electrostatic discharge and other environmental factors on the probe card, thereby improving the reliability of the test. The cross bar 3 inside the probe 10 can provide additional support, making the probe 10 more stable during the test, reducing the movement or deviation of the probe 10 caused by vibration or pressure changes. By providing additional structural support, the cross bar 3 can help maintain a consistent contact between the probe and the test point, improving the accuracy and repeatability of the test. The positioning opening 6 inside the fixture 7 is snap-connected to the probe 10, which can ensure the precise position of the probe during installation, which is crucial for high-precision testing. The positioning opening 6 simplifies the installation and replacement process of the probe, reduces the time and complexity of manual adjustment, and improves the production and test efficiency.

[0032] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A novel probe card using gray tape instead of a release agent, comprising a ring body (1); An epoxy resin (2) is arranged at the bottom of the ring body (1), probes (10) are arranged in an array at the inside of the epoxy resin (2), and a jig (7) is arranged at the bottom of the epoxy resin (2); Features: A gray tape (8) is arranged at the bottom of the epoxy resin (2), and a blade insertion opening (9) is arranged at the right side of the gray tape (8).

2. A novel probe card using gray tape instead of release agent according to claim 1, characterized in that: The gray tape (8) corresponds to the blade socket (9) and the epoxy resin (2), and the gray tape (8) is bonded and connected to the blade socket (9) and the epoxy resin (2).

3. A novel probe card using gray tape instead of release agent according to claim 2, characterized in that: A double-sided adhesive tape (5) is arranged at the upper left side of the jig (7), and a polyester film (4) is arranged at the upper side of the double-sided adhesive tape (5).

4. The novel probe card using gray tape instead of release agent according to claim 1, characterized in that: A crossbar (3) is provided at an inner position of the probe (10), a positioning opening (6) is provided at an inner position of the fixture (7), and the positioning opening (6) is snap-connected to the probe (10).

5. A novel probe card using gray tape instead of release agent according to claim 4, characterized in that: The cross bar (3) and the fixture (7) are fixedly connected, and the inner curvature of the probe (10) corresponds to the cross bar (3).

6. The novel probe card using gray tape instead of release agent according to claim 1, characterized in that: The ring body (1) and the epoxy resin (2) are connected by adhesive bonding, and the bottom of the ring body (1) is a flat circular ring structure.

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