Automatic tray detection machine

Abstract

The utility model discloses a tray automatic detection machine, which comprises a machine table, and further comprises a tray feeding mechanism, a tray detection mechanism, a tray detection mechanism, a tray detection mechanism, a tray detection mechanism, a tray detection mechanism and a tray detection mechanism, the front side detection mechanism is used for carrying out photographing detection on the front side of the tray, and the front side detection mechanism is arranged on the machine table; the front surface detection mechanism is used for carrying out photographing detection on the back surface of the tray, and the back surface detection mechanism is arranged on the machine table; the tray material receiving mechanism is arranged on the machine table, and the tray material receiving mechanism is arranged on the machine table; the linear material conveying mechanisms are used for conveying the tray, and the number of the linear material conveying mechanisms is two; according to the tray detection device, the front surface and the back surface of the tray can be conveniently and automatically detected, the tray can be efficiently and comprehensively detected, and trays which cannot be continuously used can be conveniently sorted out.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, and particularly relates to an automatic tray inspection machine. Background Art

[0002] For semi-finished or finished chips in the semiconductor industry, due to the huge output, the process turnover during production or the shipment of finished products basically adopts the standard tray method. It can be stacked layer by layer, which is very convenient for both direct input into the production line during process turnover and packaging and shipment. It belongs to a reusable turnover carrier. However, during use, the tray is inevitably deformed, damaged or even broken. Before the tray is put into use, it must be fully inspected. The current method is manual visual inspection. Each tray is picked up and checked on a platform under the light to sort out the trays that cannot be used continuously. Due to the low efficiency of manual inspection and the subjective factors of manual visual inspection, it is easy to miss inspection. Defective trays often affect the normal turnover of products and even cause product damage. Therefore, the industry urgently needs an automatic tray inspection device to efficiently complete this inspection work. Summary of the Utility Model

[0003] The purpose of the utility model is to provide an automatic tray inspection machine to solve the problems raised in the above background art.

[0004] To solve the above technical problems, the utility model provides the following technical solution: an automatic tray inspection machine, including a machine table, and further including:

[0005] A tray loading mechanism for loading trays.

[0006] A front inspection mechanism for taking pictures and inspecting the front of the tray, and the front inspection mechanism is arranged on the machine table.

[0007] A back inspection mechanism for taking pictures and inspecting the back of the tray, and the front inspection mechanism is arranged on the machine table.

[0008] A tray unloading mechanism arranged on the machine table.

[0009] A linear feeding mechanism for conveying trays, and there are two linear feeding mechanisms; both of the two linear feeding mechanisms are arranged on the machine table, and the two linear feeding mechanisms are respectively located on one side of the tray loading mechanism and the tray unloading mechanism.

[0010] Tray tray flipping and translation mechanism, the tray tray flipping and translation mechanism is arranged on the machine table;

[0011] Among them, the tray loading mechanism is used to push the trays to the linear feeding mechanism on one side of it one by one, and the tray flipping and translation mechanism is used to flip the trays on the linear feeding mechanism on one side of the tray loading mechanism and place the flipped trays on the linear feeding mechanism on one side of the tray receiving mechanism.

[0012] Further, the two linear feeding mechanisms are respectively corresponding to the front detection mechanism and the back detection mechanism in position;

[0013] The linear feeding mechanism on one side of the tray loading mechanism is used to drive the front of the tray to pass through the detection of the front detection mechanism;

[0014] The linear feeding mechanism on one side of the tray unloading mechanism is used to drive the back of the tray to pass through the detection of the back detection mechanism.

[0015] Further, the front detection mechanism includes a vision detection device.

[0016] Further, the back detection mechanism includes a vision detection device.

[0017] Further, the tray flipping and translation mechanism includes:

[0018] A flipping device, the flipping device is used to clamp and flip the trays on the linear feeding mechanism on one side of the tray loading mechanism;

[0019] A translation device, the translation device is arranged on the machine table, the translation device is connected to the flipping device, and the parallel device is used to carry the flipped trays.

[0020] Further, the tray receiving mechanism includes:

[0021] A qualified product tray placement area, the qualified product tray placement area is used to place the trays that pass the inspection;

[0022] An NG placement area, the NG placement area is used to place the trays that fail the inspection.

[0023] Compared with the prior art, the beneficial effects achieved by the present utility model are as follows: The flipping of the trays can be realized through the tray flipping and translation mechanism. Cooperating with the front detection mechanism and the back detection mechanism, it is convenient to automatically detect the front and back sides of the trays, and at the same time, the trays can be detected efficiently and comprehensively, so as to sort out the trays that cannot be used continuously. Brief Description of the Drawings

[0024] The drawings are used to provide a further understanding of the present utility model and constitute a part of the specification. Together with the embodiments of the present utility model, they are used to explain the present utility model and do not constitute a limitation to the present utility model.

[0025] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0026] Figure 2 It is a schematic diagram of the overall structure of the present utility model from another angle.

[0027] Figure 3 It is a schematic diagram of the overall side view structure of the present utility model.

[0028] In the figure: 1, machine platform; 2, tray feeding mechanism; 3, front detection mechanism; 4, linear feeding mechanism; 5, tray flipping and translation mechanism; 51, flipping device; 52, translation device; 6, back detection mechanism; 7, tray receiving mechanism; 71, good product tray placement area; 72, NG placement area; 8, vision detection device. Detailed Embodiment

[0029] In order to make the above objects, features and advantages of the present application more obvious and understandable, the following will give a detailed description of the specific embodiments of the present application in conjunction with the drawings, that is, clearly and completely describe the technical solutions in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0030] Embodiment 1

[0031] Please refer to Figure 1 - Figure 2, the present utility model provides a technical solution: an automatic tray inspection machine, including a machine platform 1, on which a tray loading mechanism 2 is provided, and the tray loading mechanism 2 is used for loading trays; on one side of the tray loading, a linear feeding mechanism 4 is provided, and the tray loading mechanism 2 is used to push the trays temporarily stored face up on the tray loading mechanism 2 one by one to the linear feeding mechanism 4 on one side of the tray loading mechanism 2. The tray loading mechanism 2 can adopt the existing technology and will not be elaborated here; the linear feeding mechanism 4 is used for transporting the trays; a tray receiving mechanism 7 is also provided on the machine platform 1, and a linear feeding mechanism 4 is also provided on one side of the tray loading mechanism 2, and the two linear feeding mechanisms 4 are arranged in parallel; at the same time, a tray flipping and translating mechanism 5 is provided on the machine platform 1, and the tray flipping and translating mechanism 5 is used to flip the trays on the linear feeding mechanism 4 on one side of the tray loading mechanism 2 and place the flipped trays on the linear feeding mechanism 4 on one side of the tray receiving mechanism 7.

[0032] In addition, a front detection mechanism 3 and a back detection mechanism 6 are also provided on the machine platform 1. The front detection mechanism 3 and the back detection mechanism 6 are respectively corresponding to the positions of the two linear feeding mechanisms 4. The front detection mechanism 3 is used for taking pictures and detecting the front of the tray, and the back detection mechanism 6 is used for taking pictures and detecting the back of the tray.

[0033] The linear feeding mechanism 4 can adopt a screw motor module, and a support plate for placing the trap tray is installed on the screw motor module; the linear feeding mechanism 4 can also adopt conveying devices such as belts and chain plates to realize the transportation of the trap tray.

[0034] The tray flipping and translating mechanism 5 includes a flipping device 51 and a translating device 52; the flipping device 51 is used to clamp the tray on the linear feeding mechanism 4 on one side of the tray loading mechanism 2 and flip it 180 degrees; specifically, the flipping device 51 can be composed of a clamping jaw, a driving cylinder for driving the clamping jaw to open and close, and a flipping motor for flipping, which is used to realize the clamping and flipping of the trap. In addition, other existing technologies can also be adopted and will not be elaborated here; the translating device 52 can adopt a screw motor module, which is installed on the machine platform 1, and the screw motor module is connected to the flipping device 51 to drive the tray clamped by the flipping device 51 to move, and transport the tray on the flipping device 51 to correspond to the linear feeding mechanism 4 on one side of the tray receiving mechanism 7. By loosening the trap tray by the flipping device 51, the trap tray can be transported to the linear feeding mechanism 4 on one side of the tray receiving mechanism 7.

[0035] The tray receiving mechanism 7 is used for tray receiving and sorting. The tray receiving mechanism 7 includes a qualified tray placement area 71 and an NG placement area 72. The tray receiving mechanism 7 is used to neatly stack the trays that pass the inspection on the tray placement area, and neatly stack the trays that fail the inspection on the NG placement area 72.

[0036] In this embodiment, feeding is performed by the tray feeding mechanism 2. At the same time, the tray feeding mechanism 2 pushes the trap trays with the front side facing up one by one onto the linear feeding mechanism 4 on one side of the tray feeding mechanism 2. The linear feeding mechanism 4 on one side of the tray feeding mechanism 2 conveys the trap trays through the photographing inspection of the front inspection mechanism 3, and conveys the trays that have passed the photographing inspection of the front inspection mechanism 3 to near the tray flipping and translation mechanism 5. At the same time, the tray flipping and translation mechanism 5 flips the tray 180 degrees and transports the tray to another linear feeding mechanism 4. This linear feeding mechanism 4 conveys the trap trays through the photographing inspection of the back inspection mechanism 6, and conveys the trays that have passed the photographing inspection of the back inspection mechanism 6 to near the tray receiving mechanism 7. The tray receiving mechanism 7 neatly stacks the trays that pass the inspection on the tray placement area, and neatly stacks the trays that fail the inspection on the NG placement area 72, so as to sort out the trays that cannot be used continuously.

[0037] In this embodiment, the tray flipping and translation mechanism 5 can realize the flipping of the tray. Cooperating with the front inspection mechanism 3 and the back inspection mechanism 6, it is convenient to realize the automatic inspection of the front and back sides of the tray, and realize the efficient and comprehensive inspection of the tray.

[0038] Embodiment 2

[0039] Please refer to Figure 1 - Figure 3 , based on Embodiment 1, both the front inspection mechanism 3 and the back inspection mechanism 6 include a visual inspection device. The visual inspection device 8 includes a CCD camera. The CCD camera is arranged on the linear feeding mechanism 4 and is used for photographing and inspecting the tray passing below it.

[0040] It should be noted that, in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variation thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0041] Finally, it should be noted that the above are only preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. An automatic tray inspection machine, comprising a machine platform (1), characterized in that: Also includes: A tray loading mechanism (2), wherein the tray loading mechanism (2) is used for loading materials onto the tray; A front detection mechanism (3), the front detection mechanism (3) is used to take a photo of the front of the tray for detection, and the front detection mechanism (3) is arranged on the machine platform (1); A back detection mechanism (6), wherein the front detection mechanism (3) is used to take photos of the back of the tray for detection, and the back detection mechanism (6) is arranged on the machine platform (1); A tray receiving mechanism (7), the tray receiving mechanism (7) is used for sorting trays, and the tray receiving mechanism (7) is arranged on the machine platform (1); A linear material conveying mechanism (4), the linear material conveying mechanism (4) being used for conveying a tray, and the linear material conveying mechanism (4) being provided with two; the two linear material conveying mechanisms (4) are both arranged on the machine platform (1), and the two linear material conveying mechanisms (4) are respectively located on one side of the tray loading mechanism (2) and the tray receiving mechanism (7); A tray flipping and translating mechanism (5), wherein the tray flipping and translating mechanism (5) is arranged on the machine platform (1); The tray loading mechanism (2) is used to push the trays one by one onto the linear feed mechanism (4) on one side thereof, and the tray flipping and translating mechanism (5) is used to flip the trays on the linear feed mechanism (4) on one side of the tray loading mechanism (2), and place the flipped trays on the linear feed mechanism (4) on one side of the tray receiving mechanism (7).

2. The automatic tray inspection machine according to claim 1, characterized in that: The two linear feeding mechanisms (4) correspond to the positions of the front detection mechanism (3) and the back detection mechanism (6) respectively; A linear feeding mechanism (4) on one side of the tray loading mechanism (2) is used to drive the front side of the tray to pass the detection of the front detection mechanism (3); The linear feeding mechanism (4) on one side of the tray unloading mechanism is used to drive the back side of the tray to pass the detection of the back side detection mechanism (6).

3. The automatic tray inspection machine according to claim 2, characterized in that: The front detection mechanism (3) comprises a visual detection device (8).

4. The automatic tray inspection machine according to claim 2, characterized in that: The back detection mechanism (6) comprises a visual detection device (8).

5. The automatic tray inspection machine according to claim 1, characterized in that: The tray flipping and translation mechanism (5) comprises: A turning device (51), the turning device (51) is used to clamp the tray on the linear feeding mechanism (4) on one side of the tray feeding mechanism (2) and turn it over; A translation device (52), wherein the translation device (52) is arranged on the machine platform (1), the translation device (52) is connected to the flipping device (51), and the translation device is used to carry the flipped tray.

6. The automatic tray inspection machine according to claim 1, characterized in that: The tray material receiving mechanism (7) comprises: A good product tray placement area (71), wherein the good product tray placement area (71) is used to place trays that have passed the inspection; The NG placement area (72) is used to place trays that fail the inspection.

Images