Small low-temperature gas purification and pressure control device

Abstract

The utility model relates to a small-sized low-temperature gas purification and pressure control device which comprises a particulate matter filter, a pressure buffer tank, a pressure controller, a purifier and a parallel gas conveying pipeline, the parallel gas conveying pipeline is divided into a gas inlet channel, a flow dividing channel, a purifying channel, a connecting channel, a refrigerating channel and a gas outlet channel through valve assemblies. According to the utility model, unnecessary parts are omitted, and only the particulate matter filter, the pressure buffer tank, the pressure controller, the purifier and the parallel gas conveying pipeline are reserved, so that the volume of the equipment is effectively reduced while the gas purity and the pressure stability are ensured, and the whole structure is more compact; and three different lines are arranged to carry out pipeline purging, gas leakage detection and gas conveying work respectively, so that normal operation of the refrigerating machine is guaranteed, the service life of a product is greatly prolonged, and the reliability of the product is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of Joule-Thomson cooler test equipment, and in particular to a small-scale low-temperature gas purification and pressure control device. Background Technique

[0002] The Joule-Thomson cooler is a micro cooler directly using the Joule-Thomson refrigeration effect. For example, if the refrigeration working substance is high-pressure nitrogen, its conversion temperature is higher than room temperature. When the high-pressure nitrogen enters the heat exchanger from the inlet, it throttles and expands through the throttling component to generate temperature reduction. The cooled nitrogen exchanges heat with the high-pressure nitrogen in the heat exchanger through the circuit and then is discharged from the exhaust port. In this way, the high-pressure nitrogen throttles at a lower temperature than before, and the temperature of the throttled nitrogen becomes lower than before. This process continues, making the throttled temperature lower and lower until a part of the nitrogen liquefies to obtain a minimum low temperature of 77K. The Joule-Thomson effect cooler is very ideal for unit detectors with small cooling capacity and short usage time. It has a simple structure, light weight, low price, fast refrigeration speed, and does not require power, and is widely used in air-to-air missiles. However, its disadvantages are low efficiency, high working pressure (70 - 500 kg / cm 2 ) and high requirement for gas purity (>99.99%).

[0003] Qi Limin et al. studied the cooling characteristics of a nitrogen micromachined Joule-Thomson cooler in the temperature range of 88.5K to 295K (doi.org / 10.1016 / j.applthermaleng.2023.120361) and introduced the composition of the test system for a micromachined Joule-Thomson throttling refrigeration chip (MJT), which includes a high-pressure gas pipeline, a refrigerator (with MJT installed inside), and a low-pressure gas pipeline. Among them, the high-pressure gas pipeline part includes a pressure controller, a purifier, a particulate filter, valves, etc. This technology meets the needs of MJT performance testing. For further application of MJT in actual use, the needs of miniaturization in actual applications need to be met. However, there are also problems such as large overall floor area of the gas circuit part and limited product life.

[0004] This is because semiconductor devices often need to be small and portable in practical applications. However, the above-mentioned MJT contains components that are unnecessary in practical applications (such as low-pressure gas pipelines, which are only required during the product testing stage and not during product application), and lacks an overall integrated layout design. Also, since the connection between the high-pressure gas pipeline and the refrigerator is a rigid stainless steel pipe, and semiconductor devices may need to work in a narrow space in practical applications, for example, for detection in a spectrometer, it is particularly important to reasonably plan and compress the volume of the gas circuit part.

[0005] In addition, there is only one gas flow direction in the above-mentioned MJT, and the gas passes through the high-pressure gas pipeline, the refrigerator, and the low-pressure gas pipeline in sequence. This may lead to problems restricting the product life. There are two main reasons: 1) In practical applications, the MJT may need to be reinstalled repeatedly. During this process, gas may leak out of the pipeline due to improper installation. In this case, the flow rate is relatively larger than the normal working condition and exceeds the maximum tolerable flow rate of the purifier component, which may cause damage to the purifier component; 2) In practical applications, if the device needs to be transported over a long distance or does not work for a long time due to other reasons, the high-pressure gas pipeline may admit air or particulate impurities. In this case, when the device is started for the first time after a long time, the air and other impurities in the pipeline will enter the MJT inside the refrigerator, which may cause water vapor to freeze or particulate matter to block the microchannel, thus damaging the MJT. Summary of the Invention

[0006] The problem to be solved by the present invention is to provide a small-sized low-temperature gas purification and pressure control device in view of the above deficiencies in the prior art. Through reasonable spatial layout, the volume of the device is reduced, and by setting three lines to perform pipeline purging, leak detection, and gas transportation work respectively, it has the advantages of a compact structure and being conducive to extending the service life of the refrigerator.

[0007] The above-mentioned invention object of the present invention is achieved through the following technical solutions:

[0008] A small-scale low-temperature gas purification and pressure control device, comprising a particulate filter, a pressure buffer tank, a pressure controller, a purifier, and a parallel gas transmission pipeline. The parallel gas transmission pipeline is divided into an intake channel, a shunt channel, a purification channel, a connection channel, a refrigeration channel, and an outlet channel through a valve assembly. Among them, the particulate filter, the pressure buffer tank, and the pressure controller are sequentially arranged on the intake channel along the intake direction, the purifier is arranged on the purification channel, the outlet end of the intake channel is selectively communicated with the intake ends of the shunt channel and the purification channel, and the outlet end of the shunt channel, one end of the connection channel, and the intake end of the refrigeration channel are selectively communicated with each other, and the outlet end of the purification channel, the other end of the connection channel, and the intake end of the outlet channel are selectively communicated with each other.

[0009] By adopting the above technical solution, the particulate filter, the pressure buffer tank, the pressure controller, and the purifier are respectively used to remove particulate matter in the gas, stabilize the gas pressure, regulate the gas pressure, and purify the gas, ensuring that the gas entering the refrigerator is pure and has a stable pressure. At the same time, the parallel gas transmission pipeline can realize three-channel arrangements, namely: a pipeline purging channel composed of the intake channel, the shunt channel, the connection channel, and the outlet channel; a leak detection channel composed of the intake channel, the shunt channel, and the refrigeration channel; and a gas transmission channel composed of the intake channel, the purification channel, the connection channel, and the refrigeration channel. During operation, first connect the pipeline purging channel to purge the pipeline to ensure that the residual atmosphere and particulate matter in the pipeline are removed. Then connect the leak detection channel, and the gas is introduced into the refrigerator for a leak test. After ensuring that the pipeline is leak-free, connect the gas transmission channel to start the formal operation. In this process, unnecessary components are removed from this device, and only the particulate filter, the pressure buffer tank, the pressure controller, the purifier, and the parallel gas transmission pipeline are retained, which can effectively reduce the equipment volume while ensuring the gas purity and pressure stability, making the overall structure more compact. By setting three different lines to perform pipeline purging, leak detection, and gas transmission work respectively, this device not only ensures the normal operation of the refrigerator but also greatly improves the service life and reliability of the product.

[0010] The present utility model is further configured such that the outlet end of the intake channel is bent multiple times along a first direction and a second direction and then connected to the shunt channel and the purification channel. The outlet sections of the shunt channel, the purification channel, the refrigeration channel, and the outlet channel are respectively parallel to the first direction, and the intake section of the purification channel and the connection channel are respectively parallel to the second direction, and an included angle is formed between the first direction and the second direction.

[0011] By adopting the above technical solution, the parallel gas transmission pipeline is designed in a folded shape to achieve an overall compact layout, reducing the floor area by more than 50%.

[0012] The present utility model is further configured such that: the included angle between the first direction and the second direction is 90°.

[0013] By adopting the above technical solution, the structure is relatively compact.

[0014] The present utility model is further configured such that: the valve assembly includes a first one-way valve disposed on the shunt channel, a second one-way valve and a third one-way valve disposed on the purification channel, a fourth one-way valve disposed on the refrigeration channel, and a fifth one-way valve disposed on the air outlet channel, and the purifier is arranged between the second one-way valve and the third one-way valve.

[0015] By adopting the above technical solution, with the design of the one-way valve, not only the singleness of gas flow is ensured, the backflow of gas is avoided, but also the operation process is simplified, making the whole system more stable and reliable; especially when the gas enters from the intake channel and flows into the shunt channel through the first one-way valve, due to the blockage of the one-way valve, the gas will not flow reversely into the intake channel, ensuring the unidirectionality of the air flow. Similarly, when the gas enters the purification channel, it is purified by the purifier between the second one-way valve and the third one-way valve, then passes through the connection channel and the refrigeration channel, and finally flows out through the fifth one-way valve. The flow direction of the gas is strictly controlled throughout the process, avoiding unnecessary chaos and losses.

[0016] The present utility model is further configured such that: the valve assembly includes a first reversing valve, a second reversing valve, and a third reversing valve. The first reversing valve is disposed between the air outlet end of the shunt channel, the intake end of the shunt channel, and the intake end of the purification channel. The second reversing valve is disposed between the air outlet end of the shunt channel, one end of the connection channel, and the intake end of the refrigeration channel. The third reversing valve is disposed between the air outlet end of the purification channel, the other end of the connection channel, and the intake end of the air outlet channel.

[0017] By adopting the above technical solution, the introduction of the first reversing valve, the second reversing valve, and the third reversing valve makes the switching between the three working modes of pipeline purging, air leakage detection, and gas transportation more convenient and efficient; when pipeline purging is required, by adjusting the connection state of the reversing valve, the system can be quickly switched to the pipeline purging mode to ensure that the residual atmosphere and particulate matter in the pipeline are completely removed; similarly, when air leakage detection or gas transportation is required, it can also be easily achieved by adjusting the state of the reversing valve; this design not only improves the work efficiency but also enhances the stability and reliability of the system.

[0018] The present utility model is further configured such that: the valves of the valve assembly are pneumatic valves or electric valves.

[0019] By adopting the above technical solution, the introduction of pneumatic valves or electric valves provides a more flexible and precise control method for the entire system. The pneumatic valve is driven by air pressure and has the characteristics of fast response speed, simple structure, and easy maintenance, and is especially suitable for occasions that require quick response. The electric valve is driven by a motor and has the advantages of high control precision, convenient operation, and easy implementation of remote monitoring, and is suitable for occasions with high requirements for control precision. By selecting a pneumatic valve or an electric valve as the valve component, the present utility model can be flexibly configured according to specific application requirements to achieve the best performance and benefits.

[0020] The present utility model is further configured as: further including a box body enclosure, a pair of box body covers respectively covering both ends of the box body enclosure, and a plurality of lock catches arranged between the box body enclosure and the box body covers, wherein the particulate filter, the pressure buffer tank, the pressure controller, the purifier, and the parallel gas transmission pipeline are arranged on one of the box body covers.

[0021] By adopting the above technical solution, the refrigeration machine part is isolated from the rest part (i.e., this device), and the rest part is integrated in a box body to achieve the functions of compactness and portability.

[0022] The present utility model is further configured as: the intake end and two outlet ends of the parallel gas transmission pipeline are respectively detachably connected with spiral capillary tubes through gas pipe joints.

[0023] By adopting the above technical solution, the refrigeration machine is connected to the refrigeration channel through a flexible spiral capillary tube, realizing the functions that the refrigeration machine can move freely and be matched with various application scenarios.

[0024] The present utility model is further configured as: further including a plurality of through openings formed in the box body enclosure.

[0025] By adopting the above technical solution, it is convenient for the threading of spiral capillary tubes, cables, etc.

[0026] The present utility model is further configured as: further including a handle arranged on the box body enclosure.

[0027] By adopting the above technical solution, it is convenient for the user to grasp and apply force.

[0028] In summary, the beneficial technical effects of the present utility model are as follows: By subtracting unnecessary components and only retaining the particulate filter, pressure buffer tank, pressure controller, purifier, and parallel gas transmission pipeline, it is possible to effectively reduce the volume of the equipment while ensuring gas purity and pressure stability, making the overall structure more compact. And by setting three different lines to perform pipeline purging, leak detection, and gas transmission work respectively, while ensuring the normal operation of the refrigerator, the service life and reliability of the product are greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a schematic structural diagram of a small-scale low-temperature gas purification and pressure control device according to Embodiment 1 of the present utility model.

[0030] Figure 2 is a schematic structural diagram of a small-scale low-temperature gas purification and pressure control device according to Embodiment 2 of the present utility model.

[0031] Figure 3 is a schematic structural diagram of a small-scale low-temperature gas purification and pressure control device according to Embodiment 3 of the present utility model.

[0032] In the figure, 1 is a particulate filter; 2 is a pressure buffer tank; 3 is a pressure controller; 4 is a purifier; 5 is a parallel gas transmission pipeline; 51 is an intake channel; 52 is a shunt channel; 53 is a purification channel; 54 is a connection channel; 55 is a refrigeration channel; 56 is an outlet channel; 6 is a bourdon capillary; 7 is a valve assembly; 71 is a first one-way valve; 72 is a second one-way valve; 73 is a third one-way valve; 74 is a fourth one-way valve; 75 is a fifth one-way valve; 76 is a first reversing valve; 77 is a second reversing valve; 78 is a third reversing valve; 81 is a box enclosure panel; 82 is a box cover plate; 83 is a lock; 84 is a through hole; 85 is a handle. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] In order to make the technical means, creative features, achieved purposes, and functions of the present utility model clearer and easier to understand, the present utility model will be further described below in conjunction with the drawings and specific embodiments.

[0034] Embodiment 1: Refer to Figure 1 , a small-scale low-temperature gas purification and pressure control device disclosed by the present utility model, includes a particulate filter 1, a pressure buffer tank 2, a pressure controller 3, a purifier 4, a parallel gas transmission pipeline 5, and three bourdon capillaries 6. Among them, the intake end of the parallel gas transmission pipeline 5 is arranged opposite to the gas storage tank, the outlet end of the parallel gas transmission pipeline 5 is provided with two, and one of them is arranged opposite to the refrigerator. These three bourdon capillaries 6 are detachably connected to the intake end and the two outlet ends of the parallel gas transmission pipeline 5 through gas pipe joints.

[0035] The parallel gas transmission pipeline 5 is separated into an intake channel 51, a shunt channel 52, a purification channel 53, a connection channel 54, a refrigeration channel 55, and an outlet channel 56 by a valve assembly 7. Among them, the outlet end of the intake channel 51 is bent multiple times along the first direction and the second direction respectively, and then connected to the shunt channel 52 and the purification channel 53. The outlet sections of the shunt channel 52, the purification channel 53, the refrigeration channel 55, and the outlet channel 56 are parallel to the first direction respectively. The intake section of the purification channel 53 and the connection channel 54 are parallel to the second direction respectively. A 90° angle is formed between the first direction and the second direction. The parallel gas transmission pipeline 5 is designed in a folded shape to achieve an overall compact layout, reducing the floor area by more than 50%.

[0036] The particulate filter 1, the pressure buffer tank 2, and the pressure controller 3 are sequentially arranged on the intake channel 51 along the intake direction. The purifier 4 is arranged on the purification channel 53. The outlet end of the intake channel 51 is selectively connected to the intake ends of the shunt channel 52 and the purification channel 53. There is a selective connection between the outlet end of the shunt channel 52, one end of the connection channel 54, and the intake end of the refrigeration channel 55. There is a selective connection between the outlet end of the purification channel 53, the other end of the connection channel 54, and the intake end of the outlet channel 56.

[0037] The particulate filter 1, the pressure buffer tank 2, the pressure controller 3, and the purifier 4 are respectively used to remove particulate matter in the gas, stabilize the gas pressure, regulate the gas pressure, and purify the gas, ensuring that the gas entering the refrigerator is pure and the pressure is stable. At the same time, the parallel gas transmission pipeline 5 can realize three channel arrangements, namely: a pipeline purging channel composed of the intake channel 51, the shunt channel 52, the connection channel 54, and the outlet channel 56; a leak detection channel composed of the intake channel 51, the shunt channel 52, and the refrigeration channel 55; a gas transmission channel composed of the intake channel 51, the purification channel 53, the connection channel 54, and the refrigeration channel 55. During operation, first connect the pipeline purging channel to purge the pipeline to ensure that the residual atmosphere and particulate matter in the pipeline are removed. Then connect the leak detection channel, and the gas is introduced into the refrigerator for a leak test. After ensuring that the pipeline is leak-free, connect the gas transmission channel to start formal operation.

[0038] To achieve selective connection between each channel in the parallel gas transmission pipeline 5, the valves of the valve assembly 7 are set as pneumatic valves. The valve assembly 7 includes a first one-way valve 71 arranged on the shunt channel 52, a second one-way valve 72 and a third one-way valve 73 arranged on the purification channel 53, a fourth one-way valve 74 arranged on the refrigeration channel 55, and a fifth one-way valve 75 arranged on the outlet channel 56. The purifier 4 is arranged between the second one-way valve 72 and the third one-way valve 73.

[0039] With the design of the one-way valve, not only is the singularity of gas flow ensured, preventing gas backflow, but also the operation process is simplified, making the entire system more stable and reliable. Especially when gas enters from the intake channel 51 and flows into the shunt channel 52 through the first one-way valve 71, due to the blockage of the one-way valve, the gas will not flow back into the intake channel 51, ensuring the unidirectionality of the gas flow. Similarly, when the gas enters the purification channel 53, it undergoes purification treatment by the purifier 4 between the second one-way valve 72 and the third one-way valve 73, and then flows out through the connection channel 54 and the refrigeration channel 55 and finally through the fifth one-way valve 75. The gas flow direction is strictly controlled throughout the process, avoiding unnecessary chaos and losses.

[0040] Embodiment 2: Refer to Figure 2 , a small-scale cryogenic gas purification and pressure control device disclosed by the present utility model. The difference from Embodiment 1 lies in that it further includes a box body enclosure 81, a pair of box body covers 82 respectively covering both ends of the box body enclosure 81, a plurality of latches 83 arranged between the box body enclosure 81 and the box body covers 82, a plurality of through holes 84 opened on the box body enclosure 81, and a handle 85 arranged on the box body enclosure 81. Among them, the particulate filter 1, the pressure buffer tank 2, the pressure controller 3, the purifier 4, and the parallel gas transmission pipeline 5 are arranged on one of the box body covers 82.

[0041] Embodiment 3: Refer to Figure 3 , a small-scale cryogenic gas purification and pressure control device disclosed by the present utility model. The difference from Embodiment 1 lies in that the valve assembly 7 includes a first reversing valve 76, a second reversing valve 77, and a third reversing valve 78. The first reversing valve 76 is arranged between the outlet end of the shunt channel 52, the inlet end of the shunt channel 52, and the inlet end of the purification channel 53. The second reversing valve 77 is arranged between the outlet end of the shunt channel 52, one end of the connection channel 54, and the inlet end of the refrigeration channel 55. The third reversing valve 78 is arranged between the outlet end of the purification channel 53, the other end of the connection channel 54, and the inlet end of the outlet channel 56.

[0042] The introduction of the first reversing valve 76, the second reversing valve 77, and the third reversing valve 78 makes the switching between the three working modes of pipeline purging, leak detection, and gas transmission more convenient and efficient. When pipeline purging is required, by adjusting the connection state of the reversing valve, the system can be quickly switched to the pipeline purging mode to ensure that the residual atmosphere and particulate matter in the pipeline are completely removed. Similarly, when leak detection or gas transmission is required, it can also be easily achieved by adjusting the state of the reversing valve. This design not only improves work efficiency but also enhances the stability and reliability of the system.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A small cryogenic gas purification and pressure control device, characterized in that: The invention comprises a particle filter (1), a pressure buffer tank (2), a pressure controller (3), a purifier (4), and a parallel gas transmission pipeline (5), wherein the parallel gas transmission pipeline (5) is divided into an intake channel (51), a flow distribution channel (52), a purification channel (53), a connection channel (54), a refrigeration channel (55), and an outlet channel (56) by a valve assembly (7); wherein the particle filter (1), the pressure buffer tank (2), and the pressure controller (3) are sequentially arranged on the intake channel along the intake direction. (51), the purifier (4) is arranged on the purification channel (53), the outlet end of the air inlet channel (51) is selectively connected to the air inlet ends of the diverter channel (52) and the purification channel (53), the outlet end of the diverter channel (52), one end of the connecting channel (54), and the air inlet end of the refrigeration channel (55) are selectively connected, and the outlet end of the purification channel (53), the other end of the connecting channel (54), and the air inlet end of the air outlet channel (56) are selectively connected.

2. A small-scale low-temperature gas purification and pressure control device according to claim 1, characterized in that: The air outlet end of the air inlet channel (51) is connected to the diverter channel (52) and the purification channel (53) after being bent multiple times along the first direction and the second direction, respectively; the air outlet section of the diverter channel (52), the purification channel (53), the refrigeration channel (55), and the air outlet channel (56) are respectively parallel to the first direction; the air inlet section of the purification channel (53) and the connecting channel (54) are respectively parallel to the second direction; and an angle is formed between the first direction and the second direction.

3. A small-scale low-temperature gas purification and pressure control device according to claim 2, characterized in that: The angle between the first direction and the second direction is 90°.

4. A small-scale low-temperature gas purification and pressure control device according to claim 1, characterized in that: The valve assembly (7) comprises a first one-way valve (71) arranged on the diversion channel (52), a second one-way valve (72) and a third one-way valve (73) arranged on the purification channel (53), a fourth one-way valve (74) arranged on the refrigeration channel (55), and a fifth one-way valve (75) arranged on the outlet channel (56), and the purifier (4) is arranged between the second one-way valve (72) and the third one-way valve (73).

5. A small-scale low-temperature gas purification and pressure control device according to claim 1, characterized in that: The valve assembly (7) comprises a first reversing valve (76), a second reversing valve (77), and a third reversing valve (78); the first reversing valve (76) is arranged between the gas outlet end of the diverting channel (52), the gas inlet end of the diverting channel (52), and the gas inlet end of the purification channel (53); the second reversing valve (77) is arranged between the gas outlet end of the diverting channel (52), one end of the connecting channel (54), and the gas inlet end of the refrigeration channel (55); and the third reversing valve (78) is arranged between the gas outlet end of the purification channel (53), the other end of the connecting channel (54), and the gas inlet end of the gas outlet channel (56).

6. A small-scale low-temperature gas purification and pressure control device according to claim 1, characterized in that: The valve of the valve assembly (7) is configured as a pneumatic valve or an electric valve.

7. A small-scale low-temperature gas purification and pressure control device according to claim 1, characterized in that: The invention also comprises a box body panel (81), a pair of box body covers (82) respectively covered at two ends of the box body panel (81), and a plurality of locks (83) arranged between the box body panel (81) and the box body cover (82); the particulate filter (1), the pressure buffer tank (2), the pressure controller (3), the purifier (4), and the parallel gas transmission pipeline (5) are arranged on one of the box body covers (82).

8. A small-scale low-temperature gas purification and pressure control device according to claim 7, characterized in that: The air inlet end and two air outlet ends of the parallel air delivery pipeline (5) are detachably connected to spring tube capillaries (6) via air pipe joints.

9. A small-scale low-temperature gas purification and pressure control device according to claim 8, characterized in that: It also includes a plurality of penetration openings (84) opened on the box body enclosure (81).

10. A small-scale low-temperature gas purification and pressure control device according to claim 7, characterized in that: It also includes a handle (85) arranged on the box body enclosure (81).

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