Sampling device for electronic chemical liquid products

Abstract

The utility model discloses a sampling device of an electronic chemical liquid product, the sampling device comprises a box body and at least one sampling container, the box body comprises a box body main body and a movable door which is arranged on one side in front of the box body main body and is rotatably connected with the box body main body, the switch assembly is used for opening and closing the movable door; when the movable door is in an open state, the operator puts in or takes out the sampling container; when the movable door is in a closed state, the movable door and the box main body are in airtight sealing connection; the left side wall and the right side wall of the box body are each provided with an opening, and the periphery of the left opening and the periphery of the right opening are fixedly connected with a left operation glove and a right operation glove which extend towards the inner space of the box body respectively. The sampling device disclosed by the utility model can realize on-site on-line sampling of electronic chemical liquid products and reduce the pollution of a sampling environment to a sample.

Description

Technical Field

[0001] The utility model relates to a sampling device for electronic chemical liquid products, belonging to the technical field of laboratory analysis devices. Background Art

[0002] Electronic chemical liquid products are chemical products specially used in the electronic industry, such as electronic-grade water, electronic-grade acids, electronic-grade alkalis, photoresists, etching solutions, etc., to support the manufacturing processes of semiconductors, circuit boards and other electronic products, and are used in steps such as cleaning, etching, photolithography and doping, playing an important role in the manufacturing processes of integrated circuits, liquid crystal displays, solar cells, LEDs and other electronic components.

[0003] Electronic chemical liquid products usually have very high purity requirements, usually requiring a purity greater than 99.99%, and the impurity ions and particle counts meet strict requirements to ensure the quality of products such as integrated circuits produced.

[0004] Therefore, it is necessary to regularly detect electronic chemical liquid products, and the detection indicators include cations (such as metal cations), anions, TOC (total organic carbon), conductivity, total number of bacteria, etc.

[0005] However, existing sampling devices all have non-standard problems. For example, CN214277523U provides an ultrapure water sampling and detection device, which uses a threaded connection method to prevent ultrapure water from contacting carbon dioxide during the sampling process and improve the detection accuracy. However, the sampling container cannot be effectively cleaned during sampling, and the original air and substances inside the sampling container will contaminate the sampling container, thereby causing sample contamination and inaccurate detection results.

[0006] Therefore, those skilled in the art hope to develop a sampling device for electronic chemical liquid products that can flush the sampling container online, prevent air pollution and facilitate the operator to operate in a standardized manner. Summary of the Utility Model

[0007] The utility model provides a sampling device for electronic chemical liquid products, and the sampling device includes a box body and at least one sampling container, wherein,

[0008] The box body includes a box body main body, a movable door arranged on one side of the front of the box body main body and rotatably connected to the box body main body, and a switch assembly for opening and closing the movable door;

[0009] When the movable door is in the open state, the operator puts in or takes out the sampling container; when the movable door is in the closed state, the movable door is hermetically connected to the box body main body in terms of airtightness;

[0010] On each of the left and right side walls of the box body main body, there is an opening, and the peripheries of the left and right openings are respectively fixedly connected to the left and right operating gloves extending into the inner space of the box body main body; the inner spaces of the left and right operating gloves are air-isolated from the inner space of the box body main body;

[0011] On the top of the box body main body, there are a sample interface and its valve, on one of the side walls of the box body main body, there is a nitrogen interface and its valve, and on the bottom wall of the box body main body or at a position near the bottom wall on one of the side walls, there is a discharge interface and its valve for discharging liquid and gas.

[0012] In an embodiment of the present utility model, a tray for placing the sampling container is provided inside the box body main body, and the distance between the tray and the inner bottom wall of the box body main body is 3 - 8 cm; several leakage holes are provided on the tray.

[0013] In an embodiment of the present utility model, the diameter of the leakage holes is 10 - 20 mm, and the total area of the leakage holes accounts for 45% - 65% of the total area of the tray.

[0014] In an embodiment of the present utility model, the discharge interface is provided on one of the side walls of the box body main body and is located below the tray.

[0015] In an embodiment of the present utility model, the discharge aperture of the discharge interface is 16 - 26 mm.

[0016] In an embodiment of the present utility model, the movable door is rotatably connected to one side of the box body main body through a hinge; the movable door is rotatably connected to the left side edge or the right side edge or the upper side edge or the lower side edge of the box body main body.

[0017] In an embodiment of the present utility model, the switch assembly adopts a lock assembly.

[0018] Preferably, the lock assembly includes a hook and a buckle body that cooperate with each other. One side of the movable door is fixedly connected to the hook, and the buckle body is fixedly installed on the corresponding side of the box body main body; or one side of the movable door is fixedly connected to the buckle body, and the hook is fixedly installed on the corresponding side of the box body main body.

[0019] In an embodiment of the present utility model, the sample interface, the nitrogen interface, and the discharge interface all adopt PFA interfaces.

[0020] In an embodiment of the present utility model, a transparent viewing window is provided on the top of the box body main body.

[0021] In an embodiment of the present utility model, the top plate and side wall plates of the box body main body, and the movable door, all adopt transparent acrylic plates.

[0022] The sampling device for electronic chemical liquid products provided by the present utility model can realize on-site online sampling of electronic chemical liquid products, such as electronic-grade water, electronic-grade acid, electronic-grade base, photoresist, etching solution, etc., and reduce the pollution of the sample by the sampling environment. Description of the Drawings

[0023] The present utility model will be further described below with reference to the accompanying drawings.

[0024] Figure 1 Schematic diagram of the overall structure of the sampling device according to Embodiment 1 of the present utility model Figure 1 ;

[0025] Figure 2 Schematic diagram of the overall structure of the sampling device according to Embodiment 1 of the present utility model Figure 2 ;

[0026] Figure 3 is Figure 1 Partial enlarged view at position A in

[0027] Figure 4 Schematic diagram of the open state of the sampling device according to Embodiment 1 of the present utility model

[0028] Figure 5 Schematic diagram of the connection structure of some parts of the sampling device according to Embodiment 1 of the present utility model

[0029] Figure 6 Schematic diagram of the sampling device according to Embodiment 1 of the present utility model after placing a sampling container in the open state.

[0030] In the figure:

[0031] 1. Main body of the box, 2. Sample interface and its valve, 3. Movable door, 4. Hinge, 5. Discharge interface and its valve, 6. Operating glove, 7. Nitrogen interface and its valve, 8. Switch assembly (lock assembly), 81. Hook, 82. Buckle body, 9. Support seat, 10. Tray, 11. Leak hole, 12. Support column, 13. Opening (right opening). Detailed Embodiments

[0032] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0033] See Figures 1 to 6, Embodiment 1 of the present utility model provides a sampling device for an electro-chemical liquid product. The sampling device includes a box body and at least one sampling container (not labeled in the figure).

[0034] See Figures 1 to 6 , the box body includes a box body main body 1, a movable door 3 provided on one side of the front of the box body main body 1 and rotatably connected to the box body main body 1, and a switch assembly 8 for opening and closing the movable door 3;

[0035] When the movable door 3 is in the open state, the operator puts in or takes out the sampling container; when the movable door 3 is in the closed state, the movable door 3 is hermetically connected to the box body main body 1.

[0036] Regarding the airtight connection between the movable door 3 and the box body main body 1, it can be achieved by using conventional methods of the prior art. For example, airtight rubber gaskets can be provided on the contact surfaces between the movable door 3 and the box body main body 1. When the movable door 3 is closed, air pollution from the external environment can be excluded.

[0037] In specific applications, the movable door 3 cannot be opened at the sampling site. The internal space of the box body main body 1 is cleaned and pre-treated before sampling. After sampling is completed, it is only allowed to be opened when returning to a clean environment, so as to ensure that the sampling container will not be contaminated by the external environment during the entire sampling process and transportation process.

[0038] In a specific embodiment of the present utility model, the movable door 3 is rotatably connected to one side of the box body main body 1 through a hinge 4; the movable door 3 is rotatably connected to the left edge or right edge or upper edge or lower edge of the box body main body 1.

[0039] Specifically in this embodiment, the movable door 3 is rotatably connected to the left edge of the box body main body 1.

[0040] In a specific embodiment of the present utility model, the switch assembly uses a lock assembly 8. Preferably, the lock assembly includes a hook 81 and a buckle body 82 that cooperate with each other. One side of the movable door 3 is fixedly connected to the hook 81, and the buckle body 82 is fixedly installed on the corresponding side of the box body main body 1; or one side of the movable door 3 is fixedly connected to the buckle body 82, and the hook 81 is fixedly installed on the corresponding side of the box body main body 1.

[0041] Specifically in this embodiment, one side (the freely opening and closing side) of the movable door 3 is fixedly connected to the hook 81, and the buckle body 82 is fixedly installed on the corresponding side of the box body main body 1. The movable door 3 is closed or opened by the engaging member on the buckle body 82 being inserted into or disengaged from the hook 81.

[0042] SeeFigures 1 to 6 On both the left and right side walls of the box body main body 1, there is an opening 13 respectively. The peripheries of the left and right openings 13 are fixedly connected to the left and right operating gloves 6 extending into the inner space of the box body main body 1; the inner spaces of the left and right operating gloves 6 are gas-isolated from the inner space of the box body main body 1.

[0043] In the sampling device of the present utility model, the left and right operating gloves 6 are fixedly installed at the openings 13 on both side walls of the box body main body 1. Although the left and right operating gloves 6 extend into the inner space of the box body main body 1, the inner spaces of the left and right operating gloves 6 are gas-isolated from the inner space of the box body main body 1. Such a structure enables the operator to directly reach into the left and right operating gloves 6 and control the sampling container located inside the box body main body 1 through the operating gloves. However, during the entire sampling process, the gas environment inside the box body main body 1 will not be intervened, affected, or polluted.

[0044] In the prior art, those skilled in the art have attempted to install "detachable" operating gloves on both sides of the box body of the sampling device. The operating gloves are disassembled, and the operator puts in or takes out the sampling container; after the operating gloves are fixedly connected, the sampling operation is carried out. However, the inventor of the present utility model has found that such a structure is very difficult to implement in specific applications, and it is very difficult to achieve gas tightness between the operating gloves and the inner space of the box body main body.

[0045] In a specific embodiment of the present utility model, a transparent viewing window is provided on the top of the box body main body 1, facilitating the operator to control the sampling container located inside the box body main body 1 through the left and right operating gloves 6.

[0046] Preferably, in this embodiment, the top plate, side wall plates of the box body main body 1, and the movable door 3 are all made of transparent acrylic plates.

[0047] In specific practice, the total weight of the box body is generally controlled within 4 kg, which is convenient for carrying.

[0048] See Figures 1 to 6 On the top of the box body main body 1, there is a sample interface and its valve 2. On one of the side walls of the box body main body 1, there is a nitrogen interface and its valve 7. On the bottom wall of the box body main body 1 or at a position near the bottom wall on one of the side walls, there is a discharge interface and its valve 5 for discharging liquid and gas.

[0049] Preferably, specifically in this embodiment, the sample interface 2, the nitrogen interface 7, and the discharge interface 5 all adopt PFA interfaces. All the interfaces and pipelines are made of PFA material to minimize the possible pollution caused by the contact materials. The sizes of the sample interface 2, the nitrogen interface 7, and the discharge interface 5 can adopt conventional specifications, such as 1 / 4 inch, 1 / 2 inch, 3 / 8 inch, etc.

[0050] The sample interface and its valve 2 provided at the top of the box body main body 1 are connected to a sample pipeline (for example, a sample pipeline made of PFA material). For example, after opening the valves at the upstream and downstream of the sample pipeline, the operator opens the sampling container located in the internal space of the box body main body 1 through the left and right operating gloves 6, and uses the sample to be tested (for example, electronic grade pure water) to clean the sampling container 1-5 times (usually 2-3 times). After cleaning, fill all the sampling containers in sequence. Generally, fill them until they overflow, and then tighten the lids of the sampling containers.

[0051] One side wall of the box body main body 1 is provided with a nitrogen interface and its valve 7, which is connected to a nitrogen pipeline (for example, a nitrogen pipeline made of PFA material) or a nitrogen gas bag. Generally, the nitrogen interface and its valve 7 are set to be compatible with the interfaces and valves of conventional nitrogen pipelines and gas bags to facilitate on-site operation. For example, before the sampling operation, after opening the valves at the upstream and downstream of the nitrogen pipeline or the nitrogen gas bag, use nitrogen (high-purity nitrogen) to purge the internal space of the box body main body 1, so that the internal space of the box body main body 1 is filled with high-purity nitrogen to exclude air pollution.

[0052] A discharge interface and its valve 5 for discharging liquid and gas are provided on the bottom wall of the box body main body 1 or at a position close to the bottom wall on one side wall thereof. As described above, when cleaning and filling the sampling container with the sample to be tested (for example, electronic grade pure water), open the discharge interface and its valve 5 to discharge the liquid inside the box body main body 1. As described above, when purging the internal space of the box body main body 1 with nitrogen, open the discharge interface and its valve 5 to discharge the original gas inside the box body main body 1.

[0053] See Figures 4 to 6 , a tray 10 for placing the sampling container is provided inside the box body main body 1, and the distance between the tray 10 and the inner bottom wall of the box body main body 1 is 3-8 cm. For example, specifically, it can be 3 cm, 4 cm, 5 cm, 6 cm, 7 cm, 8 cm. Specifically in this embodiment, the specification of the internal space of the box body main body 1 is (the bottom of the box is 25 cm * 45 cm, and the height of the box is 35 cm), and the distance between the tray 10 and the inner bottom wall of the box body main body 1 is preferably 5 cm.

[0054] Specifically in this embodiment, the discharge interface is provided on one side wall of the box body main body 1 and is located below the tray 10.

[0055] In a specific implementation of the present invention, the discharge aperture of the discharge interface 5 is 16-26 mm. Specifically in this embodiment, the specification of the internal space of the box body main body 1 is (the bottom of the box is 25 cm * 45 cm, and the height of the box is 35 cm), the distance between the tray 10 and the inner bottom wall of the box body main body 1 is preferably 5 cm, and the discharge aperture of the discharge interface 5 is preferably 21 mm.

[0056] See Figure 4 and Figure 6 On the pallet 10, there are several leakage holes 11. The cleaning or overflowing liquid samples to be tested directly flow through the leakage holes 11 to the lower part of the pallet 10 (and then are discharged through the discharge interface and its valve 5), avoiding contaminating the sampling container.

[0057] In a specific embodiment of the present utility model, the diameter of the leakage holes 11 is 10 - 20 mm, and the total area of the leakage holes 11 accounts for 45% - 65% of the total area of the pallet 10.

[0058] The sampling container is generally a sampling bottle or a sampling bag (also known as a sampling bottle, a sampling bag or a collection bag). The selection of the sampling container and the number of sampling containers depend on the detection purpose / object detection index of the operator; for example, when detecting indicators such as cations (such as metal cations), anions, and conductivity in electronic-grade water or ultrapure water, a conventional sampling bottle made of PFA material can be used. See Figure 6 as shown; for example, when detecting the TOC index, a conventional brown glass bottle that can be stored away from light can be used; for example, when detecting the total number of bacteria, a conventional sampling bag made of PFA material can be used. Labels corresponding to the detection indicators can be pasted on the surface of the sampling container.

[0059] The specifications of the sampling container are generally 25 mL, 50 mL, 100 mL, 250 mL, etc. Generally speaking, the internal space of the box body main body 1 needs to accommodate 5 - 12 sampling containers.

[0060] The operation process of the sampling device of the present utility model is as follows:

[0061] 1) Unlock the lock assembly 8 of the sampling device and open the movable door 3;

[0062] 2) Place the cleaned sampling container (sampling bottle / sampling bag, one or more) on the pallet 10 of the box body main body 1, close the movable door 3, and lock the lock assembly 8 to make the movable door 3 airtight with the box body main body 1, and the internal space of the box body main body 1 forms an airtight cavity;

[0063] 3) Close the nitrogen interface and its valve 7, close the sample interface and its valve 2, and close the discharge interface and its valve 5;

[0064] 4) Transport the sampling device to the sampling site, connect the nitrogen pipeline or gas bag of high-purity nitrogen to the nitrogen interface and its valve 7, open the nitrogen interface and its valve 7, open the discharge interface and its valve 5, and purge so that the original gas inside the box body main body 1 is completely discharged through the discharge interface and its valve 5;

[0065] 5) Close the nitrogen interface and its valve 7, and close the discharge interface and its valve 5;

[0066] 6) Connect the liquid sample to be tested to the sample interface and its valve 2 through a PFA pipeline, and open the sample interface and its valve 2;

[0067] 7) Through the left and right operating gloves 6, open the sampling containers placed inside, and wash them 2 - 3 times with the liquid sample to be tested;

[0068] 8) Fill all the sampling containers in sequence with the liquid sample to be tested until overflowing, and tighten the lids of the sampling containers;

[0069] 9) Close the sample interface and its valve 2, open the discharge interface and its valve 5, drain the liquid product inside the main body 1 of the box (flowing under the pallet 10), and then close the discharge interface and its valve 5;

[0070] 10) Disconnect the connection of high - purity nitrogen, and transport the sampling device to a clean laboratory;

[0071] 11) In the clean laboratory, unlock the locking component 8, open the movable door 3, take out all the sampling bottles inside, and wash the inside and outside of the entire sampling device with ultrapure water, and air - dry it naturally in a clean environment for standby.

[0072] The above has described a detailed embodiment of the present utility model, but the content described is only a preferred embodiment of the present utility model and cannot be considered as limiting the scope of implementation of the present utility model. All equivalent changes and improvements made according to the scope of the application of the present utility model shall still fall within the scope covered by the patent of the present utility model.

[0073] It should be noted that the "first", "second" and similar terms used in the present utility model do not indicate any order, quantity or importance, but are only used to distinguish different components. The descriptions of directions such as "left", "right", "left side", "right side", "upper part", "lower part", "top", "bottom", etc. in the present utility model with respect to the bottle mouth are all defined based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the described structure must be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation to the present utility model. In the description of the present utility model, the meaning of "a plurality" is more than two, unless otherwise specifically defined.

[0074] In the description of the present utility model, unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

Claims

1. A sampling device for electronic chemical liquid products, comprising a housing and at least one sampling container, characterized in that: The box body comprises a box body body, a movable door arranged on the front side of the box body body and rotatably connected to the box body body, and a switch assembly for opening and closing the movable door; When the movable door is in an open state, the operator puts in or takes out the sampling container; when the movable door is in a closed state, the movable door is airtightly connected to the box body; The left and right side walls of the box body are each provided with an opening, and the peripheries of the left and right openings are respectively fixedly connected to left and right operating gloves extending into the internal space of the box body; the internal space of the left and right operating gloves is air-isolated from the internal space of the box body; A sample interface and a valve thereof are provided on the top of the box body, a nitrogen interface and a valve thereof are provided on one side wall of the box body, and a discharge interface and a valve thereof for discharging liquid and gas are provided on the bottom wall of the box body or at a position close to the bottom wall of one side wall.

2. The sampling device according to claim 1, characterized in that: A support plate for placing the sampling container is provided inside the box body, and the distance between the support plate and the inner bottom wall of the box body is 3-8 cm; and a plurality of leakage holes are provided on the support plate.

3. The sampling device according to claim 2, characterized in that: The diameter of the leakage holes is 10-20 mm, and the total area of ​​the leakage holes accounts for 45%-65% of the total area of ​​the support plate.

4. The sampling device according to claim 2, characterized in that: The discharge interface is arranged on one of the side walls of the box body and is located below the support plate.

5. The sampling device according to claim 4, characterized in that: The discharge aperture of the discharge interface is 16-26 mm.

6. The sampling device according to any one of claims 1 to 5, characterized in that: The movable door is rotatably connected to one side of the box body through a hinge; the movable door is rotatably connected to the left edge or the right edge or the upper edge or the lower edge of the box body.

7. The sampling device according to claim 6, characterized in that: The switch assembly adopts a lock assembly.

8. The sampling device according to any one of claims 1 to 5, characterized in that: The sample interface, the nitrogen interface and the exhaust interface all adopt PFA interfaces.

9. The sampling device according to any one of claims 1 to 5, characterized in that: A transparent window is arranged on the top of the box body.

10. The sampling device according to claim 9, characterized in that: The top plate and side wall plates of the box body, and the movable door are all made of transparent acrylic plates.

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