Carbon dioxide injection system

Abstract

The utility model discloses a carbon dioxide injection system which comprises a liquid injection pipe, a carbon dioxide injection module and a liquid outflow pipe, the carbon dioxide injection module comprises an outer shell and a membrane assembly arranged in the outer shell, a cavity is formed between the outer shell and the membrane assembly, and the cavity is filled with carbon dioxide; a water inlet, a water outlet, an air inlet and a leakage opening are formed in the outer shell; the water inlet end of the membrane assembly is connected with the first outlet of the liquid injection pipe through the water inlet, and the water outlet end of the membrane assembly is connected with the liquid outflow pipe through the water outlet; during use, two tenths of the total flow of the liquid is fed into the carbon dioxide injection module, eight tenths of the total flow of the liquid is fed into the water outlet pipe, the liquid and carbon dioxide in the cavity are mutually permeated and dissolved in the membrane assembly, the non-resistance value of the liquid can be reduced to 0.02 M omega.cm, and the non-resistance value of the liquid can be reduced to 0.02 M omega.cm. Therefore, the method has higher capability of reducing the non-resistance value of the liquid.

Description

Technical Field

[0001] The present application relates to the technical field of liquid treatment equipment, and particularly to a carbon dioxide injection system capable of injecting carbon dioxide gas into a liquid, which can reduce the non-resistance value of the liquid without deteriorating the water quality of the liquid. Background Art

[0002] Carbon dioxide has a low volume proportion in the atmospheric state and is easily soluble in water. It can reduce the non-resistance value without deteriorating the water quality of the liquid. Reducing the non-resistance value of the liquid can ensure that its quality and performance can meet the usage requirements in specific applications. The non-resistance value usually refers to the conductivity, that is, the electrical conductivity of water. Many fields such as scientific experiments, industrial production, and semiconductor manufacturing require the use of very pure water to clean, dissolve, and prepare sensitive materials or equipment. High conductivity may mean the presence of impurities or ions in the water, and these ions may have a negative impact on the experimental results or product quality, or contaminate the clean surface. Therefore, removing ions and impurities in the liquid can ensure that the liquid can provide high stability and consistency during use and will not have a negative impact on the applications it is used for.

[0003] In traditional carbon dioxide injection systems, the area of the membrane used to process the gas is small, the use pressure of carbon dioxide gas is low, and the maximum allowable pressure of carbon dioxide gas pressure is low, basically ranging from 50KPa to 150KPa. Therefore, the non-resistance setting range of traditional carbon dioxide injection systems is between 0.06MΩ.cm and 18.0MΩ.cm, and the non-resistance value cannot be lower than 0.06MΩ.cm.

[0004] It can be seen that the ability of traditional carbon dioxide injection systems to reduce the non-resistance value of liquids is limited and it is difficult to meet the application requirements for lower non-resistance values in practice. Therefore, it is necessary to propose a new technical solution to solve the problems existing in the prior art. Summary of the Utility Model

[0005] The present application provides a carbon dioxide injection system to solve the problem that the ability of traditional carbon dioxide injection systems to reduce the non-resistance value of liquids is limited and it is difficult to meet the application requirements for lower non-resistance values in practice.

[0006] To achieve the above object, the present application provides the following technical solutions:

[0007] The present application provides a carbon dioxide injection system, which includes a liquid injection pipe, a carbon dioxide injection module, and a liquid outflow pipe. Among them, the carbon dioxide injection module includes an outer casing and a membrane assembly disposed in the outer casing. A chamber is formed between the outer casing and the membrane assembly. An inlet for water, an outlet for water, an inlet for gas, and a leakage port are provided on the outer casing; the water inlet end of the membrane assembly is connected to the first outlet of the liquid injection pipe through the water inlet, the water outlet end of the membrane assembly is connected to the liquid outflow pipe through the water outlet, the gas inlet is connected to the carbon dioxide delivery pipe, and the leakage port is connected to a leakage control valve; the second outlet of the liquid injection pipe is connected to the liquid outflow pipe.

[0008] In the above technical solution, further, the membrane assembly includes a plurality of polyolefin fiber tubes arranged in parallel. One end of the polyolefin fiber tube is in liquid communication with the gas inlet on the outer casing, and the other end of the polyolefin fiber tube is in liquid communication with the gas outlet on the outer casing.

[0009] Further, the carbon dioxide delivery pipe is connected to a carbon dioxide storage tank. The carbon dioxide delivery pipe is used to fill carbon dioxide into the chamber in the outer casing. The water molecules permeating out of the polyolefin fiber tube can dissolve the carbon dioxide gas in the chamber, and the condensed water droplets in the chamber are discharged from the leakage control valve; the carbon dioxide in the chamber can permeate into the polyolefin fiber tube and be dissolved by the liquid in the tube.

[0010] Further, the liquid injection pipe includes a water inlet main pipe and a tee connected to the outlet end of the water inlet main pipe. The water inlet main pipe is connected to a first water inlet branch pipe and a second water inlet branch pipe through the tee. The outlet end of the first water inlet branch pipe forms the first outlet of the water inlet main pipe, and the outlet end of the second water inlet branch pipe forms the second outlet of the water inlet main pipe; the flow rate of the water flowing out through the first outlet is two-tenths of the total flow rate of the liquid injection pipe, and the flow rate of the water flowing out through the second outlet is eight-tenths of the total flow rate of the liquid injection pipe.

[0011] Further, a flow control valve is provided on the first water inlet branch pipe.

[0012] Further, an inlet control valve and a pressure control valve are provided on the carbon dioxide delivery pipe.

[0013] Further, the leakage port is connected to a leakage pipe, the leakage control valve is installed on the leakage pipe, and an outlet valve is further provided on the leakage pipe.

[0014] Further, a flow meter is provided on the liquid outflow pipe.

[0015] Further, the liquid outflow pipe is connected to a resistivity tester, and the resistivity tester is used to measure the resistivity of the water discharged from the liquid outflow pipe.

[0016] Compared with the prior art, the present application has at least the following beneficial effects:

[0017] This application is based on further analysis and research of existing technical problems, and it is recognized that the membrane of the traditional carbon dioxide injection system for treating gas has a small area, the use pressure of carbon dioxide gas is low, and the maximum allowable pressure of carbon dioxide gas pressure is low. Therefore, its ability to reduce the non-resistance value of liquid is limited and it is difficult to meet the application requirements. For this reason, this application provides a new type of carbon dioxide injection system. When in use, two-tenths of the total liquid flow is sent into the carbon dioxide injection module, and eight-tenths of the total liquid flow is sent into the water outlet pipe. A membrane component is arranged in the outer shell of the carbon dioxide injection module. The liquid and carbon dioxide in the chamber of the outer shell penetrate and dissolve each other in the membrane component, and the non-resistance value of the liquid can be reduced to 0.02 MΩ·cm. The non-resistance value of the liquid flowing directly to the water outlet pipe is 18 MΩ·cm. Therefore, this application can adjust the non-resistance value of the finally mixed and outflowing liquid by adjusting the amount of liquid sent into the carbon dioxide injection module, or can also control the non-resistance value of the finally mixed and outflowing liquid by controlling the total amount of carbon dioxide gas sent into the chamber of the carbon dioxide injection module. Through internal experiments, it is measured that this application can reduce the non-resistance value of the liquid to 0.03 MΩ·cm to 0.06 MΩ·cm. Compared with the traditional carbon dioxide injection system, this application has a stronger ability to reduce the non-resistance value of liquid and can meet the production application requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of this application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts. It should be understood that the specific shapes and structures shown in the drawings generally should not be regarded as limiting conditions when implementing this application; for example, those skilled in the art are capable of making routine adjustments or further optimizations to the addition / deletion / attribution division of certain units (components), specific shapes, positional relationships, connection methods, dimensional proportional relationships, etc. based on the technical concepts disclosed in this application and the exemplary drawings.

[0019] Figure 1 It is a structural schematic diagram of the carbon dioxide injection system provided by this application in an embodiment;

[0020] Description of the reference numerals:

[0021] 1. Main water inlet pipe; 11. First water inlet branch pipe; 12. Second water inlet branch pipe; 13. Flow regulating valve;

[0022] 2. Carbon dioxide injection module; 21. Outer housing; 22. Water inlet; 23. Water outlet; 24. Gas inlet; 25. Leakage port; 26. Membrane module; 27. Polyolefin fiber tube; 28. Chamber; 29. Leakage control valve; 210. Carbon dioxide supply pipe; 211. Inlet control valve; 212. Pressure control valve;

[0023] 3. Liquid outflow pipe. Detailed implementation manners

[0024] The present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] In the description of the present application: Unless otherwise specified, the meaning of "a plurality of" is two or more. Terms such as "first" and "second" in the present application are intended to distinguish the objects being referred to, and do not have special meanings in terms of technical connotations (for example, they should not be understood as emphasizing the importance or order, etc.). Expressions such as "including", "comprising", and "having" also mean "not limited to" (certain units, components, materials, steps, etc.).

[0026] The non-resistance setting range of the traditional carbon dioxide injection system is 0.06 - 18.0 MΩ·cm, the non-resistance value of the treated liquid cannot be lower than 0.06 MΩ·cm, and the carbon dioxide pressure range is 0.05 - 0.15 MPa. Assume that the membrane area of the traditional carbon dioxide injection system is 10 m 2 , if the non-resistance value is to be lower than 0.06 MΩ·cm, as calculated by the inventor, the membrane area needs to be increased to 30 m 2 , and the carbon dioxide gas pressure also needs to be 160 KPa to 200 KPa. Therefore, if the non-resistance value is to be lower than 0.06 MΩ·cm, a higher gas pressure and a wider membrane area are required. For this reason, the present application provides a new type of carbon dioxide injection system, which adopts an inner tube flow type module, with internal liquid flowing and gas injected between the external thin films. It is an antistatic device that controls the static electricity of the liquid by injecting carbonic acid gas into the middle air-permeable membrane. It can control the non-resistance value of the liquid from 18 MΩ·cm to 0.02 MΩ·cm - 0.06 MΩ·cm. The present application uses a gas diaphragm to saturate the carbonic acid gas in the liquid, suppress static electricity, and reduce unnecessary gas waste, and is very suitable for application in semiconductor cleaning processes.

[0027] See Figure 1 , a carbon dioxide injection system provided by the present application mainly includes: a liquid injection pipe, a carbon dioxide injection module 2, a liquid outflow pipe 3, and pipeline connection accessories. The pipeline connection accessories are not limited to pipeline fittings such as tees, valves, and flow meters.

[0028] The carbon dioxide injection module 2 in this application is a relatively critical functional component in the entire system. Its hardware structure includes a housing 21 and a membrane module 26 installed in the housing 21. The membrane module 26 includes a number of polyolefin fiber tubes 27 arranged in parallel. Connectors are provided at both ends of the membrane module 26. Both ends of each polyolefin fiber tube 27 are connected and fixed to the connectors and are in liquid communication with the connectors. An inlet 22, an outlet 23, an air inlet 24, and a leakage port 25 are provided on the housing 21. The inlet 22 and the outlet 23 are respectively connected and fixed to the connectors at both ends of the membrane module 26. One end of each polyolefin fiber tube 27 is connected and in communication with the inlet 22, and the other end of each polyolefin fiber tube 27 is connected and in communication with the outlet 23. Therefore, the liquid can flow into each polyolefin fiber tube 27 from the inlet 22 and then flow out from the outlet 23. The surface area of the number of polyolefin fiber tubes 27 that make up the membrane module 26 in this application is the membrane area of the carbon dioxide injection module 2 in this application. The carbon dioxide injection system provided in this application increases the membrane area of the carbon dioxide injection module 2, improves the dissolution efficiency, and increases the consumption and durability of carbon dioxide gas. Compared with the membrane area of the traditional carbon dioxide injection system, the membrane area in the carbon dioxide injection module 2 in this application has increased by 3 times, the carbon dioxide gas saturation amount is 5 times that of the traditional carbon dioxide injection system, and the maximum allowable pressure of the carbon dioxide gas pressure has been increased to 200 Kpa.

[0029] In this application, a chamber 28 is formed between the outer casing 21 and the membrane module 26. Carbon dioxide can be fed into the chamber 28 through the air inlet 24 on the outer casing 21. Connect the air inlet 24 to the carbon dioxide supply pipe 210, and the carbon dioxide supply pipe 210 is connected to the carbon dioxide storage tank. The carbon dioxide supply pipe 210 is used to fill the chamber 28 in the outer casing 21 with carbon dioxide. The water molecules permeating out of the polyolefin fiber tube 27 can dissolve the carbon dioxide gas in the chamber 28. The condensed water droplets in the chamber 28 are discharged from the leakage control valve 29 installed at the leakage port 25; the carbon dioxide in the chamber 28 can permeate into the polyolefin fiber tube 27 and be dissolved by the liquid inside the tube. Specifically, in this application, the membrane module 26 in the carbon dioxide injection module 2 includes a number of polyolefin fiber tubes 27 arranged side by side. The membrane module 26 can dissolve the carbonic acid gas in the water flowing inside the polyolefin fiber tube 27. The water inside the polyolefin fiber tube 27 will not flow out to the outside of the tube, but water vapor will permeate through the tube wall and then penetrate into the chamber 28 filled with carbonic acid gas. In order to make the water inside the polyolefin fiber tube 27 flow, the carbonic acid gas will permeate through the tube wall into the inside of the tube with a lower partial pressure and dissolve into the liquid (the liquid can be ultrapure water) inside the tube, thereby reducing the non-resistance value of the liquid inside the tube. Since the water inside the polyolefin fiber tube 27 does not flow out of the tube, but the water vapor permeates through, therefore, the water vapor outside the polyolefin fiber tube 27 condenses into condensed water in the chamber 28 of the carbon dioxide injection module 2. As the usage time increases, the amount of condensation will accumulate. The accumulated water can be discharged by opening the blowing valve for blowing, or slowly leaked through the leakage control valve 29.

[0030] It can be seen that the carbon dioxide injection system provided in this application is not a "direct injection method" that directly exposes the gas to the liquid in the "membrane" manner to reduce the non-resistance value, but uses the permeation method of passing liquid inside the membrane and injecting carbon dioxide gas outside to promote the dissolution of carbonic acid gas, thereby reducing the non-resistance value of the liquid.

[0031] In this application, an intake regulating valve 211 and a pressure regulating valve 212 can also be provided on the above-mentioned carbon dioxide supply pipe 210. During the use process, the flow rate and pressure of the carbon dioxide fed into the chamber 28 can be adjusted through the valves.

[0032] In this application, the structural connection relationship between the liquid injection pipe and the carbon dioxide injection module 2 is as follows: The liquid injection pipe includes a main water inlet pipe 1 and a tee connected to the outlet end of the main water inlet pipe 1. The main water inlet pipe 1 is connected to a first water inlet branch pipe 11 and a second water inlet branch pipe 12 through the tee. The outlet end of the first water inlet branch pipe 11 forms the first outlet of the main water inlet pipe 1, and the outlet end of the second water inlet branch pipe 12 forms the second outlet of the main water inlet pipe 1. The water inlet end of the membrane module 26 is connected to the first outlet of the liquid injection pipe through the water inlet 22, the water outlet end of the membrane module 26 is connected to the liquid outflow pipe 3 through the water outlet 23, and the second outlet of the liquid injection pipe is connected to the liquid outflow pipe 3.

[0033] A flow regulating valve 13 can be provided on the first water inlet branch pipe 11 to control the flow distribution through the flow regulating valve 13. In a specific embodiment, the flow rate of the first water inlet branch pipe 11 can be two-tenths of the flow rate of the main water inlet pipe 1, and the flow rate of the second water inlet branch pipe 12 can be eight-tenths of the flow rate of the main water inlet pipe 1.

[0034] In this application, the liquid outflow pipe 3 can be connected to a resistivity tester, which is used to measure the resistivity of the water discharged from the liquid outflow pipe 3. A flow meter can also be provided on the liquid outflow pipe 3 to measure and control the amount of liquid discarded after non-resistance measurement.

[0035] The carbon dioxide injection system provided in this application can adjust the non-resistance value of the finally mixed outflowing liquid by adjusting the amount of liquid fed into the carbon dioxide injection module, or can also regulate the non-resistance value of the finally mixed outflowing liquid by controlling the total amount of carbon dioxide gas fed into the chamber of the carbon dioxide injection module. It can control the non-resistance value of the liquid to 0.02 MΩ·cm (pH 3.90) to 0.06 MΩ·cm (pH 4.4) (in the case of valve removal). If a valve is used, more precise regulation can be carried out. Therefore, compared with the traditional carbon dioxide injection system, this application has a stronger ability to reduce the non-resistance value of the liquid and can meet the production application requirements.

[0036] The technical features of the above embodiments can be combined arbitrarily (as long as there is no contradiction in the combination of these technical features). For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described; these embodiments that are not explicitly written out should also be considered to be within the scope described in this specification.

[0037] In the above, this application has been described in a relatively specific and detailed manner through general descriptions and specific embodiments. It should be understood that based on the technical concept of this application, several conventional adjustments or further innovations can be made to these specific embodiments; but as long as they do not depart from the technical concept of this application, the technical solutions obtained by these conventional adjustments or further innovations also fall within the protection scope of the claims of this application.

Claims

1. A carbon dioxide injection system, characterized in that, It includes a liquid injection pipe, a carbon dioxide injection module, and a liquid outflow pipe. Among them, the carbon dioxide injection module includes an outer casing and a membrane assembly disposed in the outer casing. A chamber is formed between the outer casing and the membrane assembly. An inlet for water, an outlet for water, an inlet for gas, and a leakage port are provided on the outer casing. The water inlet end of the membrane assembly is connected to the first outlet of the liquid injection pipe through the water inlet, the water outlet end of the membrane assembly is connected to the liquid outflow pipe through the water outlet, the gas inlet is connected to a carbon dioxide supply pipe, and the leakage port is connected to a leakage control valve. The second outlet of the liquid injection pipe is connected to the liquid outflow pipe.

2. The carbon dioxide injection system according to claim 1, wherein The membrane assembly includes a plurality of polyolefin fiber tubes arranged in parallel. One end of the polyolefin fiber tube is in liquid communication with the gas inlet on the outer casing, and the other end of the polyolefin fiber tube is in liquid communication with the gas outlet on the outer casing.

3. The carbon dioxide injection system according to claim 2, characterized in that, The carbon dioxide supply pipe is connected to a carbon dioxide storage tank. The carbon dioxide supply pipe is used to fill carbon dioxide into the chamber in the outer casing. The water molecules permeating out of the polyolefin fiber tube can dissolve the carbon dioxide gas in the chamber. The condensed water droplets in the chamber are discharged from the leakage control valve. The carbon dioxide in the chamber can permeate into the polyolefin fiber tube and be dissolved by the liquid in the tube.

4. The carbon dioxide injection system according to claim 1, wherein The liquid injection pipe includes a water inlet main pipe and a tee connected to the outlet end of the water inlet main pipe. The water inlet main pipe is connected to a first water inlet branch pipe and a second water inlet branch pipe through the tee. The outlet end of the first water inlet branch pipe forms the first outlet of the water inlet main pipe, and the outlet end of the second water inlet branch pipe forms the second outlet of the water inlet main pipe. The flow rate of the water flowing out through the first outlet is two-tenths of the total flow rate of the liquid injection pipe, and the flow rate of the water flowing out through the second outlet is eight-tenths of the total flow rate of the liquid injection pipe.

5. The carbon dioxide injection system according to claim 4, characterized in that, A flow control valve is provided on the first water inlet branch pipe.

6. The carbon dioxide injection system according to claim 1, characterized in that, An inlet control valve and a pressure control valve are provided on the carbon dioxide supply pipe.

7. The carbon dioxide injection system according to claim 1 or 6, characterized in that, The leakage port is connected to a leakage pipe. The leakage control valve is installed on the leakage pipe, and an outlet valve is also provided on the leakage pipe.

8. The carbon dioxide injection system according to claim 1, characterized in that, A flow meter is provided on the liquid outflow pipe.

9. The carbon dioxide injection system according to claim 1 or 8, characterized in that, The liquid outflow pipe is connected to a resistivity tester. The resistivity tester is used to measure the resistivity of the liquid discharged from the liquid outflow pipe.

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