Spraying plate dismounting tool

Abstract

The utility model discloses a spraying plate dismounting tool which comprises a supporting arm, a first screw joint column, a second screw joint column, a first connecting rod and a second connecting rod. The rotating hand wheel is provided with a second screw joint column; the upper pressing plate is provided with an upper inserting part; the lower pressing plate is provided with a lower inserting part; wherein the first threaded connection column and the second threaded connection column are in threaded connection in the upward direction of a rotating shaft of the rotating hand wheel, the upper pressing plate is connected to the rotating hand wheel, the lower pressing plate is connected to the supporting arm, the upper inserting part and the lower inserting part jointly form a disassembling inserting part, and the rotating hand wheel is rotated to drive the rotating hand wheel and the supporting arm to extend in the upward direction of the rotating shaft. And the upper pressing plate and the lower pressing plate are synchronously driven to be away from each other, so that the upper inserting part and the lower inserting part are reversely separated from each other. The screw joint extension mode between the supporting arm and the rotating hand wheel synchronously drives the separation process of the upper pressing plate and the lower pressing plate to be uniform in speed and uniform in force, the operation convenience can be improved, the operation force can be controlled, and therefore the spraying plate and the ceramic ring can be separated in a lossless mode.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment maintenance auxiliary tools, in particular to a spray plate disassembly tooling. Background Art

[0002] During the cavity opening process of semiconductor equipment, the spray plate and the ceramic ring below it are sealed with a sealing ring. Due to the long-term temperature change of the machine table, the sealing ring deforms, resulting in the adhesion of the spray plate and the ceramic ring below. Currently, the method of separating the spray plate and the ceramic ring mostly uses tools such as screwdrivers to insert into the gap between the two for separation. This method cannot control the separation force and is easy to damage the adhered components, and cannot be used for a long time. Summary of the Utility Model

[0003] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a spray plate disassembly tooling to solve the technical problem of the inconvenient manual separation of the existing spray plate and the ceramic ring.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions:

[0005] An embodiment of the utility model provides a spray plate disassembly tooling, which includes:

[0006] A support arm, the support arm having a first screw connection post;

[0007] A rotating handwheel, the rotating handwheel having a second screw connection post;

[0008] An upper pressure plate, the upper pressure plate having an upper insertion part; and

[0009] A lower pressure plate, the lower pressure plate having a lower insertion part;

[0010] Wherein, the first screw connection post and the second screw connection post are screwed together axially along the rotation axis of the rotating handwheel. The upper pressure plate is connected to the rotating handwheel, the lower pressure plate is connected to the support arm, and the upper insertion part and the lower insertion part together form a disassembly insertion part. By rotating the rotating handwheel, the rotating handwheel and the support arm are driven to elongate axially along the rotation axis, and simultaneously the upper pressure plate and the lower pressure plate are driven to move away from each other, so that the upper insertion part and the lower insertion part are separated in opposite directions.

[0011] Wherein, a through hole is provided on the upper pressure plate, the second screw connection post passes through the through hole, and a limiting member is further provided on the second screw connection post, and the limiting member is located below the upper pressure plate.

[0012] Wherein, the limiting member is a nut screwed on the second screw connection post.

[0013] Among them, threaded holes are provided on the lower pressing plate, and the first screwing post is screwed into the threaded holes.

[0014] Among them, an internal threaded hole is provided on the first screwing post, and an external thread structure is provided on the second screwing post, or an internal threaded hole is provided on the second screwing post, and an external thread structure is provided on the first screwing post; the external thread structure is screwed into the internal threaded hole.

[0015] Among them, the support arm further includes a support plate connected to the lower end of the first screwing post, and the support plate is perpendicularly arranged with the first screwing post.

[0016] Among them, the rotating handwheel further includes a handwheel disc connected to the top end of the second screwing post, and the second screwing post is perpendicularly arranged with the disc surface of the handwheel disc.

[0017] Among them, the upper pressing plate includes an upper pressing plate portion, and the upper inserting portion extending downward and bending from the edge of the upper pressing plate portion, and the upper pressing plate portion passes through the second screwing post.

[0018] Among them, the lower pressing plate includes a lower pressing plate portion, and the lower inserting portion extending upward and bending from the edge of the lower pressing plate portion, and the lower pressing plate portion is connected to the first screwing post.

[0019] Among them, at least part of the front ends of the upper inserting portion and the lower inserting portion are plate bodies with equal thickness.

[0020] For the spray plate disassembly tooling of the present utility model, through the mutual screwing connection mode of the support arm and the rotating handwheel, the upper pressing plate and the lower pressing plate are synchronously driven to move away from each other in the opposite direction. The upper pressing plate and the lower pressing plate act on the spray plate and the ceramic ring respectively. In the screwing elongation mode between the support arm and the rotating handwheel, the process of synchronously driving the upper pressing plate and the lower pressing plate to separate is uniform in speed and uniform in force, which can not only improve the operation convenience, but also control the operation force, so that the spray plate and the ceramic ring can be separated without damage.

[0021] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present utility model more obvious and understandable, the following specific preferred embodiments are given and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 and Figure 2 are schematic structural diagrams of different perspectives of the overall spray plate disassembly tooling according to the embodiment of the present utility model.

[0023] Figure 3 is an exploded view of the spray plate disassembly tooling according to the embodiment of the present utility model.

[0024] Figure 4 Schematic structural diagram of the support arm part of the spray plate disassembly tooling according to an embodiment of the present utility model.

[0025] Figure 5 is Figure 4 Schematic enlarged structural diagram of the partial B in

[0026] Figure 6 Schematic structural diagram of the rotating handwheel part of the spray plate disassembly tooling according to an embodiment of the present utility model.

[0027] Figure 7 Schematic structural diagram of the upper pressure plate part of the spray plate disassembly tooling according to an embodiment of the present utility model.

[0028] Figure 8 Schematic structural diagram of the lower pressure plate part of the spray plate disassembly tooling according to an embodiment of the present utility model.

[0029] Figure 9 is Figure 2 Schematic enlarged structural diagram of the partial A in

[0030] Explanation of the reference numerals:

[0031] Spray plate disassembly tooling 100, support arm 1, rotating handwheel 2, upper pressure plate 3, lower pressure plate 4, limiting member 5, support plate 11, first screw connection column 12, internal thread hole 121, external thread 122, handwheel disc 21, second screw connection column 22, external thread structure 221, upper pressure plate portion 311, through hole 312, upper insertion portion 313, lower pressure plate portion 411, threaded hole 412, lower insertion portion 413. Detailed implementation manners

[0032] In order to make the purpose, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with the drawings and specific implementation manners.

[0033] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present utility model.

[0034] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "resin", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is the orientation or positional relationship based on the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0035] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality" means two or more, unless otherwise specifically defined.

[0036] In the present utility model, unless otherwise clearly defined and limited, terms such as "installation", "connection", "attachment", "fixation", etc. should be understood in a broad sense. For example, it can be a connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0037] In the present utility model, unless otherwise clearly defined and limited, the fact that the first feature is "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0038] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0039] During the cavity opening process of the semiconductor device, the spray plate and the ceramic ring below it are sealed with a sealing ring. Due to the long-term temperature change of the machine table, the sealing ring deforms, resulting in the adhesion of the spray plate and the ceramic ring below. Currently, the method of separating the spray plate and the ceramic ring mostly uses tools such as screwdrivers to insert into the gap between the two for separation. This method cannot control the separation force and is likely to cause damage to the adhered components and cannot be used for a long time. Therefore, based on the above requirements, this embodiment provides a spray plate disassembly tooling 100.

[0040] Please refer to Figures 1 to 9 , the spray plate disassembly tooling 100 of this embodiment includes:

[0041] A support arm 1, the support arm 1 has a first screw connection post 12;

[0042] A rotating handwheel 2, the rotating handwheel 2 has a second screw connection post 22;

[0043] An upper pressure plate 3, the upper pressure plate 3 has an upper insertion part 313; and

[0044] A lower pressure plate 4, the lower pressure plate 4 has a lower insertion part 413;

[0045] Wherein, the first screw connection post 12 and the second screw connection post 22 are screwed to each other in the axial direction of the rotation axis of the rotating handwheel 2. The upper pressure plate 3 is connected to the rotating handwheel 2, the lower pressure plate 4 is connected to the support arm 1, and the upper insertion part 313 and the lower insertion part 413 together form a disassembly insertion part. Rotating the rotating handwheel 2 causes the rotating handwheel 2 and the support arm 1 to extend in the axial direction of rotation, synchronously driving the upper pressure plate 3 and the lower pressure plate 4 to move away from each other, so that the upper insertion part 313 and the lower insertion part 413 are separated in opposite directions.

[0046] In this embodiment, the first screw post 12 and the second screw post 22 are connected by screwing. When they rotate relative to each other, due to the design of the screwing structure, the first screw post 12 and the second screw post 22 can be shortened or elongated in the length direction. The upper pressure plate 3 and the lower pressure plate 4 are respectively connected to the rotating handwheel 2 and the support arm 1. Therefore, the upper pressure plate 3 and the lower pressure plate 4 can be driven to separate synchronously. The upper pressure plate 3 and the lower pressure plate 4 act on the spray plate and the ceramic ring respectively, so that they can be disassembled slowly and evenly. Compared with the existing manual disassembly method, the spray plate disassembly tooling 100 of this embodiment is more labor-saving, easier to operate, and the force during the disassembly process is controllable and the speed is uniform, without causing damage to the spray plate or the ceramic ring.

[0047] It should be noted that in this embodiment, only the disassembly of the spray plate and the ceramic ring is taken as an example to describe the structural composition of the spray plate disassembly tooling 100. The spray plate disassembly tooling 100 is not limited to the separation and disassembly of the spray plate and the ceramic ring, and it can be applied to any equipment or mechanism that needs to separate the parts connected together from the gap.

[0048] Please refer to again Figure 7 , a through hole 312 is provided on the upper pressure plate 3, the second screw post 22 passes through the through hole 312, and a limiting member 5 is further provided on the second screw post 22, and the limiting member 5 is located below the upper pressure plate 3.

[0049] The upper pressure plate 3 passes through the second screw post 22 through the through hole 312 and is supported at the bottom by the limiting member 5 fixed on the second screw post 22. When the rotating handwheel 2 rises relative to the support arm 1, the upper pressure plate 3 moves upward synchronously under the support of the limiting member 5. The upper pressure plate 3 is movably connected to the second screw post 22, so as to facilitate the adjustment of the upper pressure plate 3 in the initial state and extend the upper pressure plate 3 into the gap between the spray plate and the ceramic ring.

[0050] In this embodiment, the limiting member 5 is a nut screwed on the second screw post 22. In other embodiments, the limiting member 5 can also be any structural member fixed on the second screw post 22 (such as a convex structure or an annular support structure, etc.), which can hold the upper pressure plate 3, so that during the separation process of the upper pressure plate 3 and the lower pressure plate 4, the upper pressure plate 3 can move away from the lower pressure plate 4 following the rotating handwheel.

[0051] Furthermore, a threaded hole 412 is provided on the lower pressure plate 4, and the first screw post 12 is screwed into the threaded hole 412. The lower pressure plate 4 and the first screw post 12 are connected by a threaded structure, which can conveniently adjust the height position of the lower pressure plate 4 and the support arm 1 to adjust the height of the lower pressure plate 4 for different application scenarios. Of course, the upper pressure plate 4 can also be fixedly connected to the first screw post 12. At this time, the lower pressure plate 4 does not have the height adjustment function.

[0052] Please refer again Figures 1 to 8 , the spray plate disassembly tool 100 of the above embodiment, when performing the disassembly and assembly work, uses the lower pressing plate 4 to fix with the first screw column 12, and the upper pressing plate 3 and the second screw column 22 are supported by the limiter 5 connected to the second screw column 22, so that the upper pressing plate 3 and the lower pressing plate 4 are separated following the support arm 1 and the rotating hand wheel 2. In another embodiment, the upper pressing plate 3 and the second screw column 22 can be fixedly connected, and the lower pressing plate 4 and the second screw column 12 can be flexibly connected, which can also be separated following the support arm 1 and the rotating hand wheel 2 moving away. That is, the upper pressing plate 3 and the rotating hand wheel 2, and the lower pressing plate 4 and the support arm 1 can be fixedly connected or flexibly connected in any manner, and the components only need to satisfy that when the support arm 1 and the rotating hand wheel 2 move away, they can synchronously drive the upper pressing plate 3 and the lower pressing plate 4 to move away in the opposite direction.

[0053] The first screw connection column 12 is provided with an internal threaded hole 121, and the second screw connection column 22 is provided with an external threaded structure 221, and the external threaded structure 221 is screwed into the internal threaded hole 121. In another embodiment, the second screw connection column 22 is provided with an internal threaded hole, and the first screw connection column 12 is provided with an external threaded structure, and the external threaded structure is screwed into the internal threaded hole, so that the first screw connection column 12 and the second screw connection column 22 are screwed together.

[0054] In this embodiment, the first screw column 12 is provided with an internal threaded hole 121 and an external thread 122 on the outer wall. The outer wall of the second screw column 22 is provided with an external thread structure 221 . The limiter 5 is screwed to the external thread structure 221 . The threaded hole 412 of the lower pressure plate 4 is screwed to the external thread 122 .

[0055] Please refer again Figure 4 The support arm 1 further comprises a support plate 11 connected to the lower end of the first screw column 12, and the support plate 11 is arranged vertically with the first screw column 12. The first screw column 12 is arranged near the end of the support plate 11, and a clamp is formed between the end of the support plate 11 and the lower pressing plate 4, and the clamp can be clamped on the spray plate when disassembling the spray plate and the ceramic ring. When disassembling the spray plate and the ceramic ring, the operator can hold the support plate 11 with one hand and turn the hand wheel 2 with the other hand to open the spray plate and the ceramic ring.

[0056] Specifically, Figure 6 As shown, the rotating hand wheel 2 further includes a hand wheel disc 21 connected to the top end of the second screw connection column 22 , and the second screw connection column 22 is vertically arranged to the disc surface of the hand wheel disc 21 .

[0057] like Figure 7As shown, the upper pressing plate 3 includes an upper pressing plate portion 311 and an upper insertion portion 313 that extends downward and bends from the edge of the upper pressing plate portion 311. A through hole 312 is provided on the upper pressing plate portion 311, and the second screw post 22 passes through the through hole 312.

[0058] As Figure 8 shown, the lower pressing plate 4 includes a lower pressing plate portion 411 and a lower insertion portion 413 that extends upward and bends from the edge of the lower pressing plate portion 411. A threaded hole 412 is provided on the lower pressing plate portion 411, and the first screw post 12 is screwed into the threaded hole 412.

[0059] As Figure 9 shown, at least a part of the front ends of the upper insertion portion 313 and the lower insertion portion 413 are plate bodies with equal thickness, so that in the initial state, the front ends of the upper pressing plate 3 and the lower pressing plate 4 are at the same height and flush, which is convenient for inserting them together into the gap between the spray plate and the ceramic ring.

[0060] For the spray plate disassembly tool 100 of this embodiment, by the mutual screwing method of the support arm 1 and the rotating handwheel 2, the upper pressing plate 3 and the lower pressing plate 4 are synchronously driven to move away from each other in the opposite direction. The upper pressing plate 3 and the lower pressing plate 4 act on the spray plate and the ceramic ring respectively. The screwing elongation method between the support arm 1 and the rotating handwheel 2 synchronously drives the upper pressing plate 3 and the lower pressing plate 4 to separate at a uniform speed and with a uniform force, which can not only improve the operation convenience, but also control the operation force, so that the spray plate and the ceramic ring can be separated without damage.

[0061] The above only uses the embodiment to further illustrate the technical content of the present invention to make it easier for readers to understand, but it does not mean that the implementation mode of the present invention is limited to this. Any technical extension or re - creation based on the present invention is protected by the present invention. The protection scope of the present invention is subject to the claims.

Claims

1. A spray plate disassembly tooling, characterized in that, Comprising: A support arm having a first screw post; A rotating handwheel having a second screw post; An upper pressing plate having an upper insertion portion; And A lower pressing plate having a lower insertion portion; Wherein, the first screw post and the second screw post are screwed to each other in the axial direction of the rotation axis of the rotating handwheel, the upper pressing plate is connected to the rotating handwheel, the lower pressing plate is connected to the support arm, and the upper insertion portion and the lower insertion portion together form a detachable insertion portion. Rotating the rotating handwheel causes the rotating handwheel and the support arm to extend in the axial direction of rotation, synchronously driving the upper pressing plate and the lower pressing plate to move away from each other, so that the upper insertion portion and the lower insertion portion are separated in opposite directions.

2. The spray plate disassembly tooling according to claim 1, characterized in that, A through hole is provided on the upper pressing plate, the second screw post passes through the through hole, and a limiting member is further provided on the second screw post, and the limiting member is located below the upper pressing plate.

3. The spray plate disassembly tooling according to claim 2, characterized in that, The limiting member is a nut screwed to the second screw post.

4. The spray plate disassembly tooling according to claim 2, characterized in that, A threaded hole is provided on the lower pressing plate, and the first screw post is screwed to the threaded hole.

5. The spray plate disassembly tooling according to any one of claims 1 to 4, characterized in that, An internal threaded hole is provided on the first screw post, and an external thread structure is provided on the second screw post, or an internal threaded hole is provided on the second screw post, and an external thread structure is provided on the first screw post; the external thread structure is screwed to the internal threaded hole.

6. The spray plate disassembly tooling according to claim 5, wherein The support arm further includes a support plate connected to the lower end of the first screw post, and the support plate is perpendicular to the first screw post.

7. The spray plate disassembly tooling according to claim 5, characterized in that, The rotating handwheel further includes a handwheel disk connected to the top end of the second screw post, and the second screw post is perpendicular to the disk surface of the handwheel disk.

8. The spray plate disassembly tooling according to claim 5, characterized in that The upper pressing plate includes an upper pressing plate portion, and the upper insertion portion extending downward by bending from the edge of the upper pressing plate portion, and the second screw post passes through the upper pressing plate portion.

9. The spray plate disassembly tooling according to claim 8, wherein, The lower pressing plate includes a lower pressing plate portion, and the lower insertion portion extending upward by bending from the edge of the lower pressing plate portion, and the first screw post is screwed to the lower pressing plate portion.

10. The spray plate disassembly tooling according to claim 9, characterized in that, At least a part of the front ends of the upper insertion portion and the lower insertion portion is a plate body with equal thickness.

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