Storage rack for storing evaporation cover plate

Abstract

The utility model relates to a placing rack for storing an evaporation cover plate. The placing frame comprises a supporting assembly and a telescopic placing piece. The supporting assembly comprises a first supporting piece and a second supporting piece which are arranged in the first direction. The telescopic placing piece is provided with two connecting ends, the two connecting ends of the telescopic placing piece are connected with the first supporting piece and the second supporting piece respectively, and the telescopic placing piece is telescopic in the first direction. According to the arrangement, the evaporation cover plate can be arranged on the telescopic placing piece of the placing frame, so that the evaporation cover plate can be better stored. Moreover, the telescopic placing pieces can stretch out and draw back in the first direction, so that the sizes of the telescopic placing pieces in the first direction are adjustable, evaporation cover plates of various different sizes can be placed on the telescopic placing pieces of different sizes, the evaporation cover plates of various sizes can share one placing frame, the utilization rate of the placing frame is increased, and the practicability of the placing frame is improved. And the cost of auxiliary equipment related to the evaporation process is saved.

Description

Technical Field

[0001] This application relates to the technical field of evaporation coating auxiliary equipment, and particularly relates to a placement rack for storing evaporation coating covers. Background Art

[0002] In the process of manufacturing semiconductor chips, it is often necessary to form a metal film on the surface of a wafer. After forming the metal film, it is necessary to remove the wafer from the planetary pot. During the process of removing the wafer, it is necessary to first remove the evaporation coating cover covering the wafer. After the evaporation coating cover is removed, how to store the evaporation coating cover is a technical problem to be solved. Summary of the Utility Model

[0003] An embodiment of this application provides a placement rack for storing evaporation coating covers to at least partially solve the above technical problem.

[0004] To achieve the above object, an embodiment of this application provides a placement rack for storing evaporation coating covers, including:

[0005] A support assembly, including a first support member and a second support member arranged along a first direction;

[0006] A telescopic placement member, the telescopic placement member having two connection ends, the two connection ends of the telescopic placement member being respectively connected to the first support member and the second support member, and the telescopic placement member being telescopic along the first direction.

[0007] Optionally, the telescopic placement member includes a first extension portion and a second extension portion, the first extension portion and the second extension portion extending along the first direction, the interior of the second extension portion having a lumen extending along the first direction, and the first extension portion being located in the lumen and movable along the first direction in the lumen.

[0008] Optionally, the first extension portion is connected to the first support member, and the second extension portion is connected to the second support member.

[0009] Optionally, the telescopic placement member further includes a first connection portion and a second connection portion, the first connection portion and the second connection portion being on the same side of the plane defined by the first support member and the second support member and being inclined with respect to the plane;

[0010] One end of the first connection portion is connected to the first support member, and the other end of the first connection portion is connected to the first extension portion; one end of the second connection portion is connected to the second support member, and the other end of the second support member is connected to the second extension portion.

[0011] Optionally, the placement rack further includes a locking assembly, which includes a locking member and a limiting hole. One end of the locking member is installed on the first extension portion, and the limiting hole is provided on the second extension portion; when the locking assembly is in the locked state, the other end of the locking member is inserted into the limiting hole.

[0012] Optionally, a plurality of the limiting holes are arranged along the first direction on one of the second extension portions. The locking assembly further includes a sliding groove extending along the first direction. The sliding groove is provided on the second extension portion and communicates with the plurality of limiting holes;

[0013] When the locking assembly is in the unlocked state, the other end of the locking member is inserted into the sliding groove.

[0014] Optionally, the first extension portion is provided with a receiving groove and an opening that communicate with each other. One end of the locking member is disposed in the receiving groove, and the other end of the locking member passes through the opening. One end of the locking member can move in the receiving groove so that the other end of the locking member moves between the sliding groove and the limiting hole.

[0015] Optionally, the first support member and the second support member extend along a second direction, and a plurality of the telescopic placement members are arranged at intervals along the second direction. The first direction intersects the second direction.

[0016] Optionally, the plurality of telescopic placement members include two first telescopic placement members and at least one second telescopic placement member. At least one of the second telescopic placement members is located between the two first telescopic placement members, and the locking assembly is provided on at least one of the first telescopic placement members.

[0017] Optionally, the first extension portion and the second extension portion of the first telescopic placement member are plate-shaped, and the first extension portion and the second extension portion of the second telescopic placement member are column-shaped.

[0018] In the placement rack for storing evaporation coating covers in the embodiments of the present application, the evaporation coating covers can be arranged on the telescopic placement members to better store the evaporation coating covers. Moreover, the telescopic placement members can be telescoped along the first direction, so that the size of the telescopic placement members along the first direction is adjustable, facilitating the placement of various evaporation coating covers of different sizes on the telescopic placement members of different sizes. The evaporation coating covers of multiple sizes can share one placement rack, improving the utilization rate of the placement rack and saving the cost of auxiliary equipment related to the evaporation coating process. Description of the Drawings

[0019] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the accompanying drawings required for the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those skilled in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0020] To more comprehensively understand the present application and its beneficial effects, the following will be described in conjunction with the accompanying drawings, where the same reference numerals in the following description represent the same parts.

[0021] Figure 1 Schematic plan view of a coating device for some embodiments;

[0022] Figure 2 Schematic top view of a placement rack for storing evaporation coating covers provided by some embodiments of the present application;

[0023] Figure 3 For Figure 2 Partial enlarged structural view at A in

[0024] Figure 4 For along Figure 2 Partial enlarged structural view taken along the B-B' section line in

[0025] Figure 5 For Figure 2 Schematic side view of the placement rack shown in a perspective;

[0026] Figure 6 For Figure 2 Schematic side view of the placement rack shown in another perspective;

[0027] Figure 7 For Figure 2 Partial structural view of the placement rack shown in the first locked state;

[0028] Figure 8 For Figure 2 Partial structural view of the placement rack shown in the unlocked state;

[0029] Figure 9 For Figure 2 Partial structural view of the placement rack shown in the second locked state;

[0030] Figure 10 Schematic side view of a placement rack for storing evaporation coating covers provided by other embodiments of the present application;

[0031] Figure 11 For Figure 10 Schematic front view of the placement rack shown;

[0032] Figure 12 For Figure 10 Another structural schematic diagram of the retractable placement member of the placement rack shown in the figure.

[0033] Explanation of the reference numerals:

[0034] 100, coating device; 11, coating pot; 11A, carrier ring hole; 12, carrier ring; 13, evaporation coating cover plate;

[0035] 200, placement rack;

[0036] 20, support assembly; 201, first support member; 202, second support member;

[0037] 21, retractable placement member; 21A, first retractable placement member; 21B, second retractable placement member; 21C, connection end; 211, first extension portion; 211A, accommodation groove; 211B, opening; 212, second extension portion; 212A, lumen; 213, first connection portion; 214, second connection portion;

[0038] 22, locking assembly; 221, locking member; 2211, head portion; 2212, rod portion; 222, limiting hole; 223, sliding groove;

[0039] 23, suspension member; 231, suspension connection portion; 232, hook portion;

[0040] X, first direction; Y, second direction; Z, third direction. Detailed implementation manners

[0041] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present application.

[0042] Referring to Figure 1 shown in the figure, it is a planar structural schematic diagram of a coating device in some embodiments.

[0043] The coating device 100 includes a coating pot 11, a carrier ring 12, and an evaporation coating cover plate 13. The coating pot 11 includes a plurality of carrier ring holes 11A arranged along its circumference, and the plurality of carrier ring holes 11A penetrate through the coating pot 11. The carrier ring 12 is installed in the carrier ring hole 11A.

[0044] When performing a coating process on a semiconductor structure, the semiconductor structure (not shown in the figure) is placed on a carrier ring 12. A vapor deposition cover plate 13 is located on the semiconductor structure to prevent impurities from falling on the semiconductor structure and causing damage to the semiconductor structure. After the coating process is completed, the vapor deposition cover plate 13 needs to be removed, and then the semiconductor structure is taken out. After removing the vapor deposition cover plate 13, it needs to be stored for subsequent reuse. Since there is no equipment for storing the vapor deposition cover plate 13 in the related art. Therefore, how to better store the vapor deposition cover plate 13 is a technical problem to be solved.

[0045] In view of the above problems, an embodiment of the present application provides a placement rack for storing a vapor deposition cover plate. The placement rack includes a support assembly and a telescopic placement member. The support assembly includes a first support member and a second support member arranged along a first direction. The telescopic placement member has two connection ends, and the two connection ends of the telescopic placement member are respectively connected to the first support member and the second support member, and the telescopic placement member is telescopic along the first direction. With such a setting, the vapor deposition cover plate can be arranged on the telescopic placement member of the placement rack to better store the vapor deposition cover plate. Moreover, the size of the telescopic placement member along the first direction is adjustable, so as to place vapor deposition cover plates of different sizes on the telescopic placement members of different sizes. Vapor deposition cover plates of multiple sizes can share one placement rack, improving the utilization rate of the placement rack and saving the cost of equipment related to the vapor deposition process.

[0046] The technical solution of the present application will be described in detail below with specific embodiments.

[0047] Please refer to Figures 2 to 6 as shown in Figure 2 is a top view structural schematic diagram of a placement rack for storing a vapor deposition cover plate provided by some embodiments of the present application, Figure 3 is Figure 2 a partial enlarged structural schematic diagram of part A in Figure 4 is a partial enlarged structural schematic diagram taken along the section line B-B' in Figure 2 as shown in Figure 5 is Figure 2 a side view structural schematic diagram of the placement rack shown in Figure 6 is Figure 2 a side view structural schematic diagram of the placement rack shown in

[0048] The placement rack 200 includes a support assembly 20 and a telescopic placement member 21. The support assembly 20 plays a supporting role for the telescopic placement member 21.

[0049] Refer to Figure 2 、 Figure 5 and Figure 6As shown, the support assembly 20 includes a first support member 201 and a second support member 202 arranged along the first direction X. The retractable placement member 21 has two connection ends 21C, and the two connection ends 21C of the retractable placement member 21 are respectively connected to the first support member 201 and the second support member 202, and the retractable placement member 21 is retractable along the first direction X. With such an arrangement, the evaporation cover plate can be arranged on the retractable placement member 21 of the placement rack 200 to better store the evaporation cover plate. Moreover, the size of the retractable placement member 21 along the first direction X is adjustable, so as to facilitate placing evaporation cover plates of different sizes on the retractable placement member 21 of different sizes. Evaporation cover plates of multiple sizes can share one placement rack 200, improving the utilization rate of the placement rack 200 and saving the cost of equipment related to the evaporation process.

[0050] The evaporation cover plate is used to cover the semiconductor structure to prevent impurities from falling onto the semiconductor structure and damaging the semiconductor structure. In some embodiments, the evaporation cover plate can be an arched structure. In other embodiments, the evaporation cover plate can also include a top cover portion and a circumferential side portion, and the circumferential side portion is arranged along the edge of the top cover portion.

[0051] In some embodiments, the semiconductor structure can be a single wafer or a stacked wafer formed by bonding multiple wafers together, but is not limited thereto.

[0052] In some embodiments, the first support member 201 and the second support member 202 can be plate-shaped, but are not limited thereto. In other embodiments, the first support member 201 and the second support member 202 can also be columnar. The first support member 201 and the second support member 202 can include metal materials such as stainless steel to ensure that the first support member 201 and the second support member 202 have good support performance and corrosion resistance.

[0053] In some embodiments, the first support member 201 and the second support member 202 can be the same.

[0054] In some embodiments, the two connection ends 21C of the retractable placement member 21 can be detachably connected to the first support member 201 and the second support member 202. The detachable connection can be achieved by screws, bolts or bolts, etc. Exemplarily, the first support member 201 and the second support member 202 can both be provided with mounting holes, and the two connection ends 21C of the retractable placement member 21 can be inserted into the mounting holes.

[0055] In some embodiments, the retractable placement member 21 can be connected to the first support member 201 and the second support member 202 by welding or bonding, etc. In other embodiments, the retractable placement member 21 can also be integral with the support assembly 20.

[0056] Refer to Figure 2 、 Figure 5 AndFigure 6 As shown, in some embodiments, the first support member 201 and the second support member 202 extend along the second direction Y, and a plurality of telescopic placement members 21 are arranged at intervals along the second direction Y. The first direction X intersects the second direction Y. With such an arrangement, a plurality of evaporation cover plates can be placed on the plurality of telescopic placement members 21 respectively, increasing the number of evaporation cover plates that a placement rack 200 can store.

[0057] It should be noted that the distance between two adjacent telescopic placement members 21 can be designed according to the number of evaporation cover plates and the size of the evaporation cover plate in its axial direction.

[0058] In some embodiments, the first direction X is perpendicular to the second direction Y, but it is not limited thereto. The included angle between the first direction X and the second direction Y can also be an acute angle.

[0059] Refer to Figures 2 to 3 、 Figure 4 and Figure 6 As shown, in some embodiments, the telescopic placement member 21 includes a first extension portion 211 and a second extension portion 212. The first extension portion 211 and the second extension portion 212 extend along the first direction X. The second extension portion 212 has a lumen 212A extending along the first direction X therein. The first extension portion 211 is located in the lumen 212A and can move along the first direction X in the lumen 212A. With such an arrangement, by moving the first extension portion 211 along the first direction X in the lumen 212A of the second extension portion 212, the telescopic placement member 21 can be telescoped along the first direction X, thereby adjusting the size of the telescopic placement member 21 along the first direction X.

[0060] Refer to Figure 3 and Figure 4 As shown, in some embodiments, there is a gap between the inner wall of the lumen 212A of the first extension portion 211 and the second extension portion 212. With such an arrangement, it is ensured that the first extension portion 211 can move more flexibly in the lumen 212A of the second extension portion 212.

[0061] In some embodiments, the first extension portion 211 can be solid. In some embodiments, the first extension portion 211 can include a metal material such as stainless steel.

[0062] The inside of the second extension portion 212 is hollow. In some embodiments, the second extension portion 212 can include a metal material such as stainless steel.

[0063] Refer to Figure 2 and Figure 6As shown, in some embodiments, the first extension portion 211 is connected to the first support member 201, and the second extension portion 212 is connected to the second support member 202. With such an arrangement, the retractable placement member 21 is linearly disposed between the first support member 201 and the second support member 202.

[0064] It should be noted that when the first extension portion 211 is connected to the first support member 201 and the second extension portion 212 is connected to the second support member 202, both the first support member 201 and the second support member 202 are horizontally placed, as Figure 2 shown. When the evaporation coating cover plate needs to be stored, the evaporation coating cover plate is disposed between two adjacent retractable placement members 21, and the two adjacent retractable placement members 21 play a supporting role for the evaporation coating cover plate.

[0065] Referring to Figure 2 、 Figure 5 and Figure 6 shown, in some embodiments, the placement rack 200 may further include a suspension member 23, and the suspension member 23 is connected to at least one of the first support member 201 and the second support member 202. With such an arrangement, it is convenient to hang the entire placement rack 200 through the suspension member 23, facilitating the taking and placing of the evaporation coating cover plate and saving the floor space occupied by the placement rack 200.

[0066] Referring to Figure 2 、 Figure 5 and Figure 6 shown, in some embodiments, the suspension member 23 may include a suspension connection portion 231 and a hook portion 232. One end of the suspension connection portion 231 is connected to at least one of the first support member 201 and the second support member 202, and the other end of the suspension connection portion 231 is connected to the hook portion 232.

[0067] In some embodiments, when one end of the suspension connection portion 231 is connected to at least one of the first support member 201 and the second support member 202, the suspension member 23 may be detachably connected to at least one of the first support member 201 and the second support member 202. The detachable connection method is as described above and will not be elaborated here. In other embodiments, the suspension member 23 may be integral with at least one of the first support member 201 and the second support member.

[0068] Exemplarily, when the first extension portion 211 is connected to the first support member 201 and the second extension portion 212 is connected to the second support member 202, the placement rack 200 may further include two suspension members 23, and the two suspension members 23 are connected to the first support member 201.

[0069] Referring to Figures 3 to 4 and Figure 6As shown, in some embodiments, the placement rack 200 further includes a locking assembly 22. The locking assembly 22 includes a locking member 221 and a limiting hole 222. One end of the locking member 221 is mounted on the first extension 211. The limiting hole 222 is provided in the second extension 212, and the limiting hole 222 penetrates through the second extension 212. When the locking assembly 22 is in the locked state, the other end of the locking member 221 is inserted into the limiting hole 222. With this arrangement, the locking member 221 mounted on the first extension 211 is inserted into the limiting hole 222 on the second extension 212 to simultaneously fix the first extension 211 and the second extension 212. In this state, the retractable placement member 21 has a specific dimension along the first direction X, so as to facilitate placing a vapor deposition cover plate of a corresponding dimension. Moreover, by providing the limiting hole 222 on the second extension 212, it is convenient to adjust the position of the other end of the locking member 221 from the outside, and thus adjust the dimension of the retractable placement member 21 along the first direction X.

[0070] Referring to Figure 6 As shown, in some embodiments, a plurality of limiting holes 222 are arranged along the first direction X on one second extension 212. The locking assembly 22 further includes a sliding groove 223 extending along the first direction X. The sliding groove 223 is provided in the second extension 212 and penetrates through the second extension 212, and is communicated with the plurality of limiting holes 222. When the locking assembly 22 is in the unlocked state, the other end of the locking member 221 is inserted into the sliding groove 223. With this arrangement, the locking member 221 can move along the sliding groove 223 to different limiting holes 222, so that the retractable placement member 21 can have a plurality of different dimensions along the first direction X, and the dimension of the retractable placement member 21 along the first direction X can be stably maintained unchanged in the state corresponding to each dimension.

[0071] Exemplarily, the locking assembly 22 includes three limiting holes 222. When the locking member 221 is inserted into the three limiting holes 222 respectively, the retractable placement member 21 can have three different dimensions along the first direction X. It can be understood that the locking assembly 22 can include two or more than three limiting holes 222.

[0072] Referring to Figures 7 to 9As shown, when the other end of the locking member 221 is located in a limiting hole 222, the telescopic placement member 21 has a first dimension d1 along the first direction x; then, the locking member 221 moves upward, the locking member 221 moves from a limiting hole 222 to the sliding groove 223, the other end of the locking member 221 moves along the sliding groove 223 in the first direction X, and the locking member 221 then moves downward to move from the sliding groove 223 to another limiting hole 222, and the telescopic placement member 21 has a second dimension d2 along the first direction x, and the second dimension d2 is greater than the first dimension d1. Thus, when the locking member 221 moves from one limiting hole 222 through the sliding groove 223 to another limiting hole 222, the size of the telescopic placement member 21 becomes larger.

[0073] Wherein, when the telescopic placement member 21 has a first dimension d1 along the first direction x, a vapor deposition cover plate with a smaller size can be stored on the telescopic placement member 21. When the telescopic placement member 21 has a second dimension d2 along the first direction x, a vapor deposition cover plate with a larger size can be stored on the telescopic placement member 21.

[0074] Refer to Figure 4 As shown, in some embodiments, the first extension portion 211 is provided with a receiving groove 211A and an opening 211B communicating with the receiving groove 211A, one end of the locking member 221 is disposed in the receiving groove 211A, and the other end of the locking member 221 passes through the opening 211B. One end of the locking member 221 can move in the receiving groove 211A, so that the other end of the locking member 221 moves from one of the sliding groove 223 and the limiting hole 222 to the other of the sliding groove 223 and the limiting hole 222, that is, the other end of the locking member 221 can move between the sliding groove 223 and the limiting hole 222. With such a setting, while one end of the locking member 221 is installed on the first extension portion 211, the locking member 221 can move up and down, so that the other end of the locking member 221 can move between the sliding groove 223 and the limiting hole 222.

[0075] Refer to Figure 3 and Figure 4 As shown, in some embodiments, the locking member 221 may include a head portion 2211 and a rod portion 2212, and the head portion 2211 is connected to one end of the rod portion 2212. The head portion 2211 is installed on the first extension portion 211, and the rod portion 2212 extends along the direction from the first extension portion 211 to the second extension portion 212.

[0076] Refer to Figure 3 and Figure 4As shown, in some embodiments, when the locking member 221 includes a head 2211 and a rod portion 2212, the head 2211 may be disposed in the receiving groove 211A, the rod portion 2212 passes through the opening 211B, and the size of the head 2211 is greater than the size of the opening 211B. The receiving groove 211A includes two first groove walls 211A1 oppositely disposed in the first direction X and two second groove walls 211A2 oppositely disposed in the third direction Z, and each second groove wall 211A2 is connected to the two first groove walls 211A1. The head 2211 contacts the two first groove walls 211A1, and there are gaps between the head 2211 and the two second groove walls 211A2. The third direction Z intersects the first direction X. With such a setting, the locking member 221 can move in the third direction Z but cannot move in the first direction X.

[0077] In some embodiments, the third direction Z is perpendicular to both the first direction X and the second direction Y, but is not limited thereto.

[0078] Referring to Figure 2 and Figure 4 As shown, in some embodiments, the plurality of telescopic placing members 21 include two first telescopic placing members 21A and at least one second telescopic placing member 21B, and at least one second telescopic placing member 21B is located between the two first telescopic placing members 21A. The locking member 221 is disposed on at least one first telescopic placing member 21A. With such a setting, the locking assembly 22 is disposed on the outermost first telescopic placing member 21A among the plurality of telescopic placing members 21 arranged along the second direction Y, so as to facilitate adjusting the locking assembly 22 on the outermost first telescopic placing member 21A, and the states of the plurality of telescopic placing members 21 can be fixed simultaneously, the number of the locking assemblies 22 is reduced, and the adjustment of the locking assembly 22 is facilitated.

[0079] Exemplarily, the plurality of second telescopic placing members 21B are located between the two first telescopic placing members 21A.

[0080] When the locking assembly 22 is disposed on one first telescopic placing member 21A, the locking member 221 of the locking assembly 22 is installed on the first extension portion 211 of the first telescopic placing member 21A, and the plurality of limiting holes 222 and the sliding groove 223 are disposed on the second extension portion 212 of the first telescopic placing member 21A.

[0081] It can be understood that the locking assembly 22 may also be disposed on the two first telescopic placing members 21A, and / or the locking assembly 22 may also be disposed on at least one second telescopic placing member 21B.

[0082] Referring to Figure 2 and Figure 4As shown, in some embodiments, the first extension portion 211 and the second extension portion 212 of the first retractable placement member 21A are plate-shaped. With such a setting, the size of the first retractable placement member 21A is relatively large, providing more space for arranging the locking assembly 22. Moreover, the strength of the first retractable placement member 21A can be greater, reducing the risk of excessive deformation of the placement rack 200 when storing the evaporation coating cover plate. In addition, when the locking assembly 22 locks the first retractable placement member 21A, the greater strength of the first retractable placement member 21A can more stably maintain the size of the plurality of retractable placement members 21 in the first direction X.

[0083] Referring to Figure 2 and Figure 4 As shown, in some embodiments, the first extension portion 211 and the second extension portion 212 of the second retractable placement member 21B are column-shaped. With such a setting, when the evaporation coating cover plate is stored on the second retractable placement member 21B, the contact area between the evaporation coating cover plate and the second retractable placement member 21B is relatively small, reducing the risk of damage to the evaporation coating cover plate caused by a relatively large contact area between the second retractable placement member 21B and the evaporation coating cover plate.

[0084] In some embodiments, the placement rack 200 may further include a first buffer sheath (not shown in the figure), and the first buffer sheath is sleeved on the first extension portion 211. With such a setting, the first buffer sheath plays a protective role for the first extension portion 211.

[0085] In some embodiments, the placement rack 200 may further include a second buffer sheath (not shown in the figure), and the second buffer sheath is sleeved on the second extension portion 212. With such a setting, the second buffer sheath plays a protective role for the second extension portion 212.

[0086] In some embodiments, the first buffer sheath and the second buffer sheath may include flexible materials. Thus, it is ensured that the first buffer sheath and the second buffer sheath play a buffering role.

[0087] Please refer to Figures 10 to 12 as shown, Figure 10 which is a schematic side view structure of a placement rack for storing evaporation coating cover plates provided in some other embodiments of the present application, Figure 11 is Figure 10 a schematic front view structure of the placement rack shown, Figure 12 is Figure 10 a schematic structure view of another retractable placement member of the placement rack shown.

[0088] Figure 10 and Figure 11 The placement rack 200 shown is Figure 2 basically similar to the placement rack 200 shown, and the same parts will not be described in detail. The differences are that, Figure 10 and Figure 11The retractable placement member 21 shown also includes a first connection portion 213 and a second connection portion 214. The first connection portion 213 and the second connection portion 214 are located on the same side of the plane defined by the first support member 201 and the second support member 202 and are inclined relative to the plane. One end of the first connection portion 213 is connected to the first support member 201, and the other end of the first connection portion 213 is connected to the first extension portion 211; one end of the second connection portion 214 is connected to the second support member 202, and the other end of the second support member 202 is connected to the second extension portion 212. With such a setting, the retractable placement member 21 is inclined relative to the first support member 201 and the second support member 202, and the evaporation cover plate can be stored in the space defined by the retractable placement member 21, the first support member 201, and the second support member 202.

[0089] It should be noted that when storing the evaporation cover plate on Figure 10 and Figure 11 the placement rack 200 shown, the first support member 201 and the second support member 202 need to be placed vertically, and the evaporation cover plate is stored in the space between the retractable placement member 21, the first support member 201, and the second support member 202.

[0090] In some other embodiments, when the first connection portion 213 and the second connection portion 214 are located on the same side of the plane defined by the first support member 201 and the second support member 202 and are inclined relative to the plane, the angle between the extending directions of the first connection portion 213 and the second connection portion 214 and the plane can be greater than 0 degree and less than or equal to 90 degrees. Optionally, the angle between the extending directions of the first connection portion 213 and the second connection portion 214 and the plane can be greater than or equal to 20 degrees and less than or equal to 80 degrees. Exemplarily, the angle between the extending directions of the first connection portion 213 and the second connection portion 214 and the plane is 45 degrees.

[0091] In some other embodiments, when the placement rack 200 further includes hanging members 23, the two hanging members 23 are respectively connected to the first support member 201 and the second support member 202. With such a setting, the two hanging members 23 can hang the placement rack 200 vertically.

[0092] Referring to Figure 12 shown, in some other embodiments, Figure 10 the placement rack 200 shown may also include a locking assembly 22, and the locking assembly 22 is provided on at least one retractable placement member 21. For the relevant content of the locking assembly 22, reference can be made to Figures 2 to 6 the description of the relevant content therein, which will not be elaborated here.

[0093] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of the present application, "a plurality of" means two or more unless otherwise specifically defined.

[0094] In the above embodiments, the descriptions of the respective embodiments have their own focuses. For the parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0095] Among the embodiments, implementation manners and related technical features of the present application, they can be combined and replaced with each other without conflict.

[0096] The above are only the preferred embodiments of the present application and do not impose any form of limitation on the present application. Although in the embodiments of the present application, the descriptions of the respective embodiments have their own focuses, and for the parts not detailed in a certain embodiment, reference may be made to the relevant content of other embodiments, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still fall within the scope of the technical solution of the present application.

Claims

1. A placement rack for storing vapor deposition cover plates, characterized in that, Comprising: A support component, including a first support member and a second support member arranged along a first direction; A telescopically deployable member, having two connection ends, with the two connection ends of the telescopically deployable member respectively connected to the first support member and the second support member, and the telescopically deployable member being telescopically extendable along the first direction.

2. The placement rack according to claim 1, characterized in that, The telescopically deployable member includes a first extension portion and a second extension portion, the first extension portion and the second extension portion extending along the first direction, and the interior of the second extension portion having a lumen extending along the first direction, with the first extension portion located within the lumen and being movable within the lumen along the first direction.

3. The placement rack according to claim 2, characterized in that, The first extension portion is connected to the first support member, and the second extension portion is connected to the second support member.

4. The placement rack according to claim 2, characterized in that, The telescopically deployable member further includes a first connection portion and a second connection portion, with the first connection portion and the second connection portion being on the same side of the plane defined by the first support member and the second support member and being inclined relative to the plane; One end of the first connection portion is connected to the first support member, and the other end of the first connection portion is connected to the first extension portion; one end of the second connection portion is connected to the second support member, and the other end of the second support member is connected to the second extension portion.

5. The rack according to any one of claims 2 to 4, characterized in that, The placement rack further includes a locking component, the locking component including a locking member and a limiting hole, with one end of the locking member being mounted on the first extension portion and the limiting hole being provided on the second extension portion; when the locking component is in the locked state, the other end of the locking member is inserted into the limiting hole.

6. The placement rack according to claim 5, wherein, A plurality of the limiting holes are arranged along the first direction on one of the second extension portions, and the locking component further includes a chute extending along the first direction, with the chute being provided on the second extension portion and communicating with the plurality of limiting holes; When the locking component is in the unlocked state, the other end of the locking member is inserted into the chute.

7. The placement rack according to claim 6, characterized in that, The first extension portion is provided with an accommodating groove and an opening that communicate with each other, with one end of the locking member being disposed in the accommodating groove, and the other end of the locking member passing through the opening, and one end of the locking member being capable of moving within the accommodating groove such that the other end of the locking member moves between the chute and the limiting hole.

8. The rack according to claim 5, characterized in that, The first support member and the second support member extend along a second direction, and a plurality of the telescopically deployable members are arranged at intervals along the second direction, with the first direction intersecting the second direction.

9. The rack according to claim 8, wherein, The plurality of telescopically deployable members include two first telescopically deployable members and at least one second telescopically deployable member, with at least one of the second telescopically deployable members being located between the two first telescopically deployable members, and the locking component being provided on at least one of the first telescopically deployable members.

10. The rack according to claim 9, characterized in that, The first extension portion and the second extension portion of the first telescopically deployable member are plate-shaped, and the first extension portion and the second extension portion of the second telescopically deployable member are column-shaped.

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