Piezoelectric film polarization equipment
The uniform high-voltage electric field generated by the plasma excitation power supply and the plasma source, combined with the rotation and translation mechanism, solves the polarization problem of the irregular piezoelectric film, and achieves large-area uniform polarization and excellent piezoelectric performance.
Patent Information
- Application Number
- CN202422122846.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-08-30
AI Technical Summary
The prior art is difficult to achieve large-area uniform polarization treatment, especially irregular piezoelectric films, resulting in insufficient piezoelectric performance.
A plasma excitation power supply and a plasma source are used to generate a uniform high-voltage electric field, and combined with a translation and rotation mechanism, multiple irregular piezoelectric components are processed, and polarized in the high-voltage electric field is performed through rotation or translation.
The uniform polarization of irregular piezoelectric components was achieved, and PVDF and its polymer films showed excellent piezoelectric properties, with a piezoelectric coefficient reaching 25±2pC/N.
Smart Images
Figure CN223067468U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of piezoelectric thin film polarization, and more specifically, to a piezoelectric thin film polarization device. Background Technique
[0002] PVDF and its polymer piezoelectric thin films are a kind of polymer thin films. Due to their characteristics such as low acoustic impedance, chemical corrosion resistance, light weight, flexibility, and good processing performance, piezoelectric components with them as the core are widely used in many fields of industrial production and daily life. Given their advantages such as being easy to coat or attach to the surfaces of various special-shaped structures, PVDF and its polymer piezoelectric thin films have great advantages as sensing elements in large-area and flexible intelligent sensors, especially in the fields of wearable devices, robot electronic skin, semiconductor devices, and biomedicine.
[0003] Polarization treatment is one of the very important links in the preparation of PVDF and its polymer piezoelectric thin films. PVDF and its polymer thin films without polarization treatment almost have no piezoelectric properties. The main principle of polarization treatment is that under the action of a high electric field, the randomly oriented molecular dipole moments in the polymer thin film overcome the coercive field and are oriented along a specific direction (the direction of the polarization electric field) to generate piezoelectric properties.
[0004] In the prior art, the polarization treatment methods of polymer thin films mainly include high-temperature oil bath polarization, stretching polarization, corona polarization, etc. High-temperature oil bath polarization has problems such as silicone oil contaminating the thin film and being difficult to clean, and high voltage is easy to break down the thin film; while stretching polarization and corona polarization are difficult to prepare large-area and uniform piezoelectric thin films and basically cannot be mass-produced. Especially for special-shaped and irregular piezoelectric thin films, it is basically difficult to achieve large-area and uniform polarization treatment with the existing polarization methods. Summary of the Invention
[0005] In order to solve at least one of the above technical problems, the utility model proposes a piezoelectric thin film polarization device.
[0006] The first aspect of the utility model provides a piezoelectric thin film polarization device, including: a plasma excitation power supply and a plasma source;
[0007] The plasma excitation power supply is electrically connected to the plasma source, and the plasma source generates a uniform high-voltage electric field;
[0008] A plurality of product modules to be polarized are arranged below the plasma source, and the plurality of product modules to be polarized are arranged in parallel in the high-voltage electric field.
[0009] In a preferred embodiment of the utility model, it further includes a translation mechanism, the translation mechanism is cooperatively connected with the plasma source, and the translation mechanism controls the plasma source to move for X-axis and Y-axis motion scanning of the polarization module below.
[0010] In a preferred embodiment of the present utility model, the product module to be polarized includes an electrode metal body, a PVDF polymer film, and an equipotential body metal jacket. The PVDF polymer film is coated or attached to the outer wall of the electrode metal body, and the equipotential body metal jacket is in close contact with the outside of the PVDF polymer film.
[0011] In a preferred embodiment of the present utility model, the equipotential body metal jacket is fabricated by machining, electroplating, evaporation plating, or magnetron sputtering.
[0012] In a preferred embodiment of the present utility model, the plasma excitation power supply includes a pulse, RF, microwave, or DC power supply.
[0013] In a preferred embodiment of the present utility model, the shape of the electrode metal body includes a square or a sphere.
[0014] In a preferred embodiment of the present utility model, the bottom of the electrode metal body is grounded.
[0015] In a preferred embodiment of the present utility model, a rotating mechanism is further included. The rotating mechanism is disposed below the product module to be polarized, and the rotating mechanism is used to control the rotation of the product module to be polarized.
[0016] The above technical solution of the present utility model has the following advantages compared with the prior art:
[0017] The piezoelectric film polarization device of the present application can simultaneously polarize and process multiple special-shaped and irregular piezoelectric components. At the same time, the special-shaped and irregular electrode metal body can activate the rotating mechanism or the translation mechanism. By rotating the product component to be polarized at a certain speed in a high-voltage electric field through the rotating mechanism, or translating it at a certain speed, the PVDF and its polymer film coated or attached to the special-shaped and irregular lower electrode metal body can be further uniformly polarized. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, some of the following drawings are embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0019] Figure 1 is a diagram of the piezoelectric film polarization device according to an embodiment of the present utility model;
[0020] Figure 2 is a structural diagram of the product module to be polarized according to an embodiment of the present utility model;
[0021] Figure 3 It is a schematic diagram of the voltage equipotential surface of the equipotential body metal jacket in the embodiment of the present utility model.
[0022] In the figure: 1. Plasma excitation power supply, 2. Plasma source, 3. Product module to be polarized, 301. Electrode metal body, 302. PVDF polymer film, 303. Equipotential body metal jacket. Detailed implementation manners
[0023] In order to enable those skilled in the art of the present technology to better understand the solution of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.
[0024] It should be noted that the terms "first", "second", etc. in the description and claims of the present application and the above-mentioned accompanying drawings are used to distinguish similar objects, and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so as to describe the embodiments of the present application here. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.
[0025] In the present application, the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. is based on the orientation or positional relationship shown in the accompanying drawings. These terms are mainly used to better describe the present utility model and its embodiments, and are not used to limit that the indicated devices, elements or components must have a specific orientation or be constructed and operated in a specific orientation.
[0026] Moreover, in addition to being able to represent an orientation or positional relationship, some of the above terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in the present utility model can be understood according to specific circumstances.
[0027] In addition, the terms "installed", "set up", "provided with", "connected", "linked", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there is internal communication between two devices, components, or parts. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0028] It should be noted that, without conflict, the embodiments in this application and the features in the embodiments can be combined with each other. The following will detail this application with reference to the drawings and in combination with the embodiments.
[0029] Embodiment 1
[0030] See Figures 1 - 3 As shown, the present utility model provides a piezoelectric thin film polarization device, including: a plasma excitation power supply 1 and a plasma source 2;
[0031] The plasma excitation power supply 1 is electrically connected to the plasma source 2, and the plasma source 2 generates a uniform high-voltage electric field;
[0032] Below the plasma source 2, there are provided a plurality of product modules to be polarized 3, and the plurality of product modules to be polarized 3 are arranged in the high-voltage electric field.
[0033] According to the embodiment of the present utility model, it further includes a translation mechanism, which is cooperatively connected with the plasma source. The translation mechanism controls the movement of the plasma source to perform X-axis and Y-axis movement scans on the product modules to be polarized below.
[0034] According to the embodiment of the present utility model, the product module to be polarized 3 includes an electrode metal body 301, a PVDF polymer film 302, and an equipotential body metal jacket 303. The PVDF polymer film 302 is coated or attached to the outer wall of the electrode metal body 301, and the equipotential body metal jacket 303 is in close contact with the outside of the PVDF polymer film 302.
[0035] Specifically, the bottom of the electrode metal body 301 is grounded.
[0036] According to the embodiment of the present utility model, the equipotential body metal jacket is processed and manufactured by mechanical processing, electroplating, evaporation coating, or magnetron sputtering methods.
[0037] Specifically, the material of the equipotential body metal jacket can be stainless steel or other metal materials, which need to have relatively good conductivity. The product module to be polarized is placed in the above-mentioned uniform high-voltage electric field to form a voltage equipotential surface on the surface of the metal jacket, such as Figure 3 .
[0038] According to an embodiment of the present utility model, the plasma excitation power supply 1 includes a pulse, RF, microwave or DC power supply.
[0039] According to an embodiment of the present utility model, the shape of the electrode metal body 301 includes a square or spherical shape.
[0040] According to an embodiment of the present utility model, it further includes a rotating mechanism, the rotating mechanism is arranged below the product module 3 to be polarized, and the rotating mechanism is used to control the rotation of the product module 3 to be polarized.
[0041] Based on the plasma excitation power supply, the plasma source and the equipotential metal jacket, a uniform electric field of several hundred V / μm can be formed. After maintaining this electric field for a certain period of time, the randomly oriented molecular dipole moments in the PVDF and its polymer thin film placed in this electric field overcome the coercive field and are oriented along the direction of the electric field, thereby generating piezoelectric properties.
[0042] This application solves the problem that currently, special-shaped and irregular piezoelectric components cannot be uniformly polarized. After the special-shaped plasma uniform polarization treatment, the PVDF and its polymer thin film exhibit excellent piezoelectric properties, and the piezoelectric coefficient reaches 25 ± 2 pC / N.
[0043] In summary, the piezoelectric thin film polarization device of this application can simultaneously polarize multiple special-shaped and irregular piezoelectric components. At the same time, the special-shaped and irregular electrode metal body 301 can activate the rotating mechanism or the translation mechanism. The product component to be polarized is rotated in the high-voltage electric field at a certain speed through the rotating mechanism, or translated at a certain speed, so as to further uniformly polarize the PVDF and its polymer thin film coated or attached to the special-shaped and irregular lower electrode metal body 301.
[0044] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present utility model. Various modifications to the above embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present utility model. Therefore, the present utility model will not be limited to the above embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
[0045] The above is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of changes or substitutions, which should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the protection scope of the claims.
Claims
1. A piezoelectric thin film polarization device, comprising: Plasma excitation power supply and plasma source; characterized in that, The plasma excitation power supply is electrically connected to the plasma source, and the plasma source ionizes the gas in the ionization chamber to indirectly form a uniform high-voltage electric field; A plurality of product modules to be polarized are arranged below the plasma source, and the plurality of product modules to be polarized are arranged in parallel in the high-voltage electric field.
2. The piezoelectric thin film polarization device according to claim 1, characterized in that It further includes a translation mechanism, the translation mechanism is cooperatively connected with the plasma source, and the translation mechanism controls the plasma source to move to perform X-axis and Y-axis motion scanning on the polarized module below.
3. A piezoelectric thin film polarization device according to claim 2, characterized in that, The product module to be polarized includes an electrode metal body, a PVDF polymer film and an equipotential body metal jacket. The PVDF polymer film is coated or attached to the outer wall of the electrode metal body, and the equipotential body metal jacket is in close contact with the outside of the PVDF polymer film.
4. A piezoelectric thin film polarization device according to claim 3, characterized in that, The equipotential body metal jacket is manufactured by machining, electroplating, evaporation plating or magnetron sputtering methods.
5. A piezoelectric thin film polarization device according to claim 1, characterized in that, The plasma excitation power supply includes a pulse, RF, microwave or DC power supply.
6. A piezoelectric thin film polarization device according to claim 3, characterized in that, The shape of the electrode metal body includes square or spherical.
7. A piezoelectric thin film polarization device according to claim 6, characterized in that, The bottom of the electrode metal body is grounded.
8. A piezoelectric thin film polarization device according to claim 1, characterized in that, It further includes a rotation mechanism, the rotation mechanism is arranged below the product module to be polarized, and the rotation mechanism is used to control the rotation of the product module to be polarized.