Emergency chemical supply equipment

Abstract

The utility model relates to the technical field of chemical emergency equipment, in particular to emergency chemical supply equipment. The equipment comprises a box body which is provided with a flaring joint; at least two stock solution barrels; the pneumatic assembly comprises a pneumatic pump and at least two pneumatic valves, the flared connector is connected with the pneumatic pump through a liquid conveying pipeline, the pneumatic pump is connected with the pneumatic valves through liquid conveying pipelines, and the pneumatic valves are provided with liquid inlet pipelines used for being connected with a stock solution barrel; the air path assembly comprises a first valve, two pressure regulating valves communicated with the first valve, a first electromagnetic valve and a second electromagnetic valve group, the two pressure regulating valves are communicated with the first electromagnetic valve and the second electromagnetic valve group respectively, the first electromagnetic valve is communicated with the pneumatic pump, and the second electromagnetic valve is communicated with the second electromagnetic valve group. And the second electromagnetic valve group is communicated with the at least two pneumatic valves, and only one pneumatic valve is communicated when the second electromagnetic valve group works. The equipment is simple in structure, easy to miniaturize and low in manufacturing cost.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical emergency equipment, and particularly relates to an emergency chemical supply device. Background Art

[0002] During the chemical supply process, there may be situations where the supply equipment fails and shuts down for maintenance. During this process, on the one hand, it will affect normal production and manufacturing, causing certain losses; on the other hand, if the emergency supply method of manually adding chemicals with a hand-held bucket is adopted, there will be relatively large safety hazards. At this time, in order not to affect the normal production process, an additional supply device is needed for emergency supply. However, in the Fab workshop for chip processing, since the workshop is a dust-free clean room and has extremely strict requirements for the production environment, its cost is extremely high; therefore, considering costs, the Fab workshop generally does not reserve too much spare space. And the chemical supply device that meets the normal supply demand is large and bulky in volume, complex in structure and high in cost, and is not suitable for use as an emergency supply device.

[0003] Therefore, a supply device for emergency use with a simple structure, convenient operation and complete functions is an urgent problem to be solved by those skilled in the art. Summary of the Utility Model

[0004] In order to solve the problems in the above background art, the utility model provides an emergency chemical supply device, which has a simple structure, small volume, light weight and is easy to carry.

[0005] In order to achieve the above object, the utility model provides an emergency chemical supply device, comprising:

[0006] A box body, which is internally provided with a control room and a storage room respectively. The box body is provided with a flared joint, the bottom of the box body is provided with casters, and the side of the box body is provided with a push handle;

[0007] At least two stock solution barrels, which are arranged in the storage room;

[0008] A pneumatic assembly, the pneumatic assembly includes a pneumatic pump and at least two pneumatic valves. The pneumatic pump is arranged in the control room, the pneumatic valves are arranged in the storage room, and the flared joint is connected to the pneumatic pump and the pneumatic pump is connected to the pneumatic valves through infusion pipelines respectively. The pneumatic valves are provided with liquid inlet pipelines for connecting the stock solution barrels;

[0009] An air circuit assembly is disposed in the control room. The air circuit assembly includes a first valve, two pressure regulators both communicating with the first valve, a first solenoid valve, and a second solenoid valve group. The two pressure regulators are respectively communicated with the first solenoid valve and the second solenoid valve group. The first solenoid valve is communicated with the pneumatic pump, and the second solenoid valve group is communicated with at least two pneumatic valves. When the second solenoid valve group works, only one of the pneumatic valves is communicated.

[0010] Preferably, a leak tray is provided at the bottom of the storage room. A leak receiving cavity is formed in the leak tray, and the stock solution barrel is disposed in the leak receiving cavity.

[0011] Preferably, a liquid leakage discharge port is provided at the bottom of the box body, and the liquid leakage discharge port is communicated with the storage room.

[0012] Preferably, a photoelectric liquid level sensor is provided between the pneumatic pump and each pneumatic valve.

[0013] Preferably, a detachable electric control mounting plate is provided in the control room, and the first solenoid valve and the second solenoid valve group are both disposed on the electric control mounting plate.

[0014] Preferably, a first structural plate and a second structural plate are provided in the control room. The first structural plate, the second structural plate and the box body enclose an electric control room. The electric control mounting plate is disposed in the electric control room. An electric control door communicating with the electric control room is provided on the box body, and an operation panel is provided on the electric control door.

[0015] Preferably, a pressure regulating cavity is formed by the inward depression of the outer surface of the box body. A knob for controlling the pressure regulator is provided in the pressure regulating cavity. Pressure gauges are connected to the pressure regulators, and the pressure gauges are embedded on the pressure regulating cavity.

[0016] Preferably, a compressed air inlet is provided on the box body. The compressed air inlet is communicated with the first valve, and a ferrule joint is provided at the compressed air inlet.

[0017] Preferably, a door body communicating with the storage room is provided on the box body.

[0018] Preferably, a door handle is provided on the door body.

[0019] Compared with the prior art, the advantages of the present utility model are as follows: The main structure of the device is only composed of a box body, a pneumatic component and an air circuit assembly. When meeting the requirement of supplying chemical stock solution, its structure is simple and it is easy to be miniaturized, so the cost is not high. At the same time, casters and a push handle are respectively provided at the bottom and side of the box body, and the device can be pushed to supply chemicals in case of emergency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic structural diagram of an emergency chemical supply device provided by an embodiment of the present utility model;

[0021] Figure 2 It is an axial view of the structure of an emergency chemical supply device provided by an embodiment of the present utility model;

[0022] Figure 3 It is a schematic structural diagram of a gas circuit component provided by an embodiment of the present utility model;

[0023] Figure 4 It is a 3D view of an emergency chemical supply device provided by an embodiment of the present utility model;

[0024] Figure 5 It is a sectional view of an emergency chemical supply device provided by an embodiment of the present utility model;

[0025] Figure 6 It is a front view of an emergency chemical supply device provided by an embodiment of the present utility model.

[0026] The main reference numerals in the figure include:

[0027] 10, box body; 110, flared joint; 120, ferrule joint; 130, casters; 140, push handle; 150, liquid leakage discharge port; 20, control room; 210, first structural plate; 220, second structural plate; 230, electric control mounting plate; 240, electric control door; 241, operation panel; 250, third structural plate; 260, fourth structural plate; 30, storage room; 310, stock solution barrel; 320, drip tray; 321, drip tray cavity; 330, door body; 331, door handle;

[0028] 410, pneumatic pump; 420, pneumatic valve; 430, photoelectric liquid level sensor;

[0029] 510, first valve; 520, pressure regulating valve; 521, pressure regulating cavity; 522, pressure gauge; 523, knob; 530, first solenoid valve; 540, second solenoid valve group. Detailed implementation manners

[0030] The accompanying drawings are only for illustrative purposes and should not be construed as a limitation to the present utility model; it should be clear that the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without creative efforts belong to the scope protected by the embodiments of the present utility model.

[0031] The terms used in the embodiments of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the embodiments of the present utility model. The singular forms "a", "the", and "said" used in the embodiments of the present utility model and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0032] When the following description refers to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present utility model. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present utility model as detailed in the appended claims. In the description of the present utility model, it should be understood that the terms "first", "second", "third", etc. are only used to distinguish similar objects and do not have to be used to describe a specific order or sequence, nor can they be understood as indicating or implying relative importance. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0033] In addition, in the description of the present utility model, unless otherwise specified, "a plurality of" means two or more. "And / or" describes the association relationship of associated objects and indicates that three relationships can exist. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. The character " / " generally represents an "or" relationship between the associated objects before and after. The following further elaborates on the present utility model in conjunction with the accompanying drawings and embodiments.

[0034] The following further elaborates on the present utility model in conjunction with the accompanying drawings and embodiments.

[0035] As Figure 1-6 shown, this embodiment provides an emergency chemical supply device, including a box body 10, a stock solution barrel 310, a pneumatic component, and a gas circuit component.

[0036] As Figure 1 shown, the box body 10 is generally divided into two cavities, a control room 20 and a storage room 30, from top to bottom. The two cavities are separated by a structural board. For the purpose of preventing chemical corrosion and light weight, the box body 10 and various structural boards are made of PP boards. The storage room 30 is used to place the stock solution barrel 310, and the stock solution barrel 310 is filled with chemicals. For the purpose of miniaturization and light weight, the stock solution barrel 310 is selected as a 20L barrel. The control room 20 is mainly used to install the pneumatic component and the gas circuit component.

[0037] Combined with Figure 1 and 2, The pneumatic components include a pneumatic pump 410 and two pneumatic valves 420. The pneumatic pump 410 is the power source for sucking the chemicals in the stock solution tank 310, and the pneumatic pump 410 is arranged at the bottom of the control room 20; the pneumatic valve 420 is the switch of the liquid inlet channel for sucking the chemicals in the stock solution tank 310. The two pneumatic valves 420 are arranged in parallel in the storage room 30. A liquid inlet pipe is arranged on the pneumatic valve 420, and the liquid inlet pipe is communicated with the stock solution tank 310; a flared joint 110 is also arranged at the top of the box body 10. The flared joint 110 is communicated with the pneumatic pump 410. The flared joint 110 is the outlet for supplying chemicals to this equipment. The flared joint 110 facilitates the on-site connection and disassembly of the pipeline by the staff, enabling this equipment to be conveniently disassembled and moved, reused at different working locations, and saving costs; at the same time, because the flared joint 110 has good sealing performance, it can effectively prevent the leakage of chemicals during the supply process, avoiding harm to personnel and environmental pollution.

[0038] As Figure 2 shown, the flared joint 110 is connected to the pneumatic pump 410, and the pneumatic pump 410 is connected to the pneumatic valve 420 through a liquid delivery pipeline. Photoelectric liquid level sensors 430 are arranged on the liquid delivery pipelines between the pneumatic pump 410 and the pneumatic valve 420. The on-off of the pneumatic valve 420 can be controlled through PLC linkage to realize the function of automatic switching of the supply tank during supply; configuring this automatic switching function can reduce the number of manual operations and improve convenience.

[0039] Combined with Figure 1 , 2 , 5, a first structural plate 210, a second structural plate 220, a third structural plate 250, and a fourth structural plate 260 are arranged in the control room 20. The first structural plate 210 and the second structural plate 220 and the box body 10 enclose an electric control room, and the second structural plate 220, the third structural plate 250, and the fourth structural plate 260 and the box body 10 enclose a valve area. The pneumatic components are mainly distributed in the electric control room and the valve area. Please also refer to Figure 3The pneumatic assembly includes a first valve 510, two pressure regulating valves 520 both connected to the first valve 510, a first solenoid valve 530 and a second solenoid valve group 540, the two pressure regulating valves 520 are each provided with a pressure gauge 522, one pressure regulating valve 520 is connected to the first solenoid valve 530, the other pressure regulating valve 520 is connected to the second solenoid valve group 540, the first solenoid valve 530 is connected to the pneumatic pump 410, and the second solenoid valve group 540 is connected to at least two pneumatic valves 420; wherein, the first The valve 510 and the two pressure regulating valves 520 are both arranged in the valve area, and the first solenoid valve 530 and the second solenoid valve group 540 are both arranged in the electric control room. The valve area and the electric control room can effectively protect the electrical components and components such as the pressure regulating valve 520 and the pressure gauge 522 from being corroded by the volatile chemical gas; the solenoid valve is installed in the electric control room, and the rear end of the pressure regulating valve 520 is connected to the solenoid valve in the electric control room by an air pipe through a through-plate hole, and then connected to the pneumatic pump 410 and the pneumatic valve 420 by an air pipe through a through-plate hole. The PLC controls the on and off of the solenoid valve, thereby controlling the operation of the pneumatic pump 410 and the pneumatic valve 420.

[0040] Please refer to Figure 3 The compressed air (CDA) enters through the compressed air inlet at the top of the box body 10, is diverted by the first valve 510, and flows to the two pressure regulating valves 520 respectively. After the pressure is adjusted by the pressure regulating valve 520, it flows to the pneumatic pump 410 and the pneumatic valve 420 through the first solenoid valve 530 and the second solenoid valve group 540 respectively, so as to drive the pneumatic pump 410 and the pneumatic valve 420 to operate (only one of the two pneumatic valves 420 works, that is, only one of the pneumatic valves 420 is connected when the second solenoid valve group 540 works). The chemicals are drawn out from the raw liquid barrel 310 by the pneumatic pump 410, and are pumped out from the flared joint 110 after passing through the pneumatic valve 420 and the pneumatic pump 410, and are supplied to the process manufacturing equipment or chemical storage tanks that need chemicals.

[0041] In one embodiment, if Figure 1 and 2 As shown, a detachable electric control mounting plate 230 is provided in the electric control room, and the first solenoid valve 530 and the second solenoid valve group 540 are both provided on the electric control mounting plate 230. During production, the electric control mounting plate 230 can be disassembled and the electrical components can be assembled outside the equipment, which is convenient for production workers to install the electrical components and improves work efficiency.

[0042] In one embodiment, if Figure 1 and 2 As shown, a leak tray 320 is provided at the bottom of the storage chamber 30, a leak cavity 321 is formed in the leak tray 320, and the raw liquid barrel 310 is arranged in the leak cavity 321; it can not only play a certain role in fixing the raw liquid barrel 310, but also receive the leaked liquid when changing the barrel.

[0043] In one embodiment, if Figure 4As shown, an electric control door 240 communicating with the electric control room is provided on the box body 10. A control panel 241 is provided on the electric control door 240. The control panel 241 includes a display touch screen, an emergency stop button, and a reset button. A display touch screen is configured to display the state of the empty or liquid-filled barrel, and on-site staff can also manually control the on / off of the supply through the touch screen. An emergency stop and reset button are configured. In case of an emergency, the operation of the equipment can be stopped in time, greatly improving safety.

[0044] In one embodiment, as Figure 4 shown, a pressure regulating cavity 521 is formed by the inward depression of the outer surface of the box body 10. A knob 523 for controlling the pressure regulating valve 520 is provided in the pressure regulating cavity 521, and a pressure gauge 522 is embedded in the pressure regulating cavity 521. This design facilitates on-site staff to observe and regulate the air source pressure. A maintenance window is also provided at the top of the box body 10, which is directly above the valve area. Staff can perform maintenance on the valves and pipelines in the gas chamber and operate the first valve 510 switch through the maintenance window.

[0045] In one embodiment, as Figure 4 shown, a compressed air inlet is provided on the box body 10. The compressed air inlet is communicated with the first valve 510, and a ferrule joint 120 is provided at the compressed air inlet, which facilitates on-site staff to connect and disassemble the pipeline, enabling the equipment to be conveniently disassembled and moved, reused at different working locations, and saving costs.

[0046] In one embodiment, as Figure 4 shown, a door body 330 communicating with the storage room 30 is provided on the box body 10. A door handle 331 is provided on the door body 330. The door body 330 is of a double-door structure. Opening the door body 330 facilitates on-site staff to replace the original liquid barrel 310.

[0047] In one embodiment, as Figure 4 shown, four casters 130 are provided at the bottom of the box body 10, and a push handle 140 is provided on the side of the box body 10. The four casters 130 and the push handle 140 configured at the bottom of the box body 10 enable the equipment to be pushed by on-site staff to any place inside the Fab workshop. Due to its simple structure and small volume, it can be directly placed beside the process machine, greatly improving the practicability of the equipment. A power inlet and a signal line inlet are also provided at the top of the box body 10. External power lines and signal lines can be connected to the internal electric control room of the equipment through the power inlet and the signal line inlet, thereby providing the power required by the equipment and performing PLC linkage with other equipment.

[0048] In one embodiment, as Figure 5As shown, a liquid leakage discharge port 150 is provided at the bottom of the box body 10. The liquid leakage discharge port 150 is communicated with the storage chamber 30. In case of accidents such as joint loosening that cause a large amount of chemical leakage, the configured liquid leakage discharge port 150 can discharge the leaked liquid outside the equipment, reducing the damage caused by the leaked chemicals to the equipment.

[0049] Main working principle: Chemicals are pumped out of the stock solution barrel 310 by the pneumatic pump 410, pass through the pneumatic valve 420 and the pneumatic pump 410, and then are ejected from the flared joint 110, and are supplied to the process manufacturing equipment or chemical storage tank that requires chemicals; through the linkage of the photoelectric liquid level sensor 430, the pneumatic valve 420 and the PLC, the function of automatically switching the liquid supply barrel can be realized: the pneumatic valve 420 is connected to the corresponding stock solution barrel 310 one by one with PFA pipes (inlet pipes). First, one of the pneumatic valves 420 is opened, and the other pneumatic valve 420 is closed. After the pneumatic pump 410 is started, the chemicals in the first stock solution barrel 310 flow out from the flared joint 110 through the pneumatic valve 420 and the pneumatic pump 410. When the first stock solution barrel 310 is emptied, the photoelectric liquid level sensor 430 detects that the liquid in the pipeline is emptied, and sends a signal to the PLC. The PLC controls the pneumatic valve 420 connected to the first stock solution barrel 310 to close, and the other pneumatic valve 420 is opened. The pneumatic pump 410 starts to pump the chemicals in the second stock solution barrel 310, realizing the function of automatically switching the liquid supply barrel. At the same time, the touch display screen shows that the first stock solution barrel 310 is an empty barrel to remind the on-site staff to replace it.

[0050] The above embodiments are only illustrative of the principles and effects of the present invention, and are not used to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. An emergency chemical supply device, characterized in that, Comprising: A box body, which is internally provided with a control room and a storage room respectively. The box body is also provided with a flared joint. The bottom of the box body is provided with casters, and the side of the box body is provided with a push handle. At least two stock solution barrels, which are arranged in the storage room. A pneumatic assembly, including a pneumatic pump and at least two pneumatic valves. The pneumatic pump is arranged in the control room, and the pneumatic valves are arranged in the storage room. The flared joint is connected to the pneumatic pump and the pneumatic pump is connected to the pneumatic valves through infusion pipelines respectively. The pneumatic valves are provided with liquid inlet pipelines for connecting the stock solution barrels. An air circuit assembly, which is arranged in the control room. The air circuit assembly includes a first valve, two pressure regulating valves both communicating with the first valve, a first solenoid valve and a second solenoid valve group. One of the pressure regulating valves communicates with the first solenoid valve, and the other pressure regulating valve communicates with the second solenoid valve group. The first solenoid valve communicates with the pneumatic pump, and the second solenoid valve group communicates with the at least two pneumatic valves. Only one of the pneumatic valves is communicated when the second solenoid valve group works.

2. The emergency chemical supply device according to claim 1, characterized in that, A liquid receiving tray is arranged at the bottom of the storage room, and a liquid receiving cavity is formed in the liquid receiving tray. The stock solution barrels are arranged in the liquid receiving cavity.

3. The emergency chemical supply device according to claim 1, characterized in that, A liquid leakage discharge port is arranged at the bottom of the box body, and the liquid leakage discharge port communicates with the storage room.

4. The emergency chemical supply device according to claim 1, characterized in that, An optoelectronic liquid level sensor is arranged between the pneumatic pump and each pneumatic valve.

5. The emergency chemical supply device according to claim 1, characterized in that, A detachable electric control mounting plate is arranged in the control room, and the first solenoid valve and the second solenoid valve group are both arranged on the electric control mounting plate.

6. The emergency chemical supply device according to claim 5, wherein, A first structural plate and a second structural plate are arranged in the control room. The first structural plate, the second structural plate and the box body enclose an electric control room. The electric control mounting plate is arranged in the electric control room. An electric control door communicating with the electric control room is arranged on the box body, and an operation panel is arranged on the electric control door.

7. The emergency chemical supply device according to claim 1, characterized in that, A pressure regulating cavity is formed by the inward depression of the outer surface of the box body. A knob for controlling the pressure regulating valve is arranged in the pressure regulating cavity. The pressure regulating valves are respectively connected with pressure gauges, and the pressure gauges are embedded on the pressure regulating cavity.

8. The emergency chemical supply device according to claim 1, wherein, A compressed air inlet is arranged on the box body, and the compressed air inlet communicates with the first valve. A ferrule joint is arranged at the compressed air inlet.

9. The emergency chemical supply device according to claim 1, characterized in that, A door body communicating with the storage room is arranged on the box body.

10. The emergency chemical supply device according to claim 9, characterized in that, A door handle is arranged on the door body.

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