Program-controlled vacuum valve special for VPSA oxygen production

Abstract

The utility model discloses a special program-controlled vacuum valve for VPSA oxygen production, which comprises a valve, the top of the valve is connected with an assembly shell through an assembly support, an assembly hollow valve rod is arranged in the assembly shell, one end of the assembly hollow valve rod penetrates through the assembly shell, the assembly support and the valve and is fixedly connected with an assembly butterfly plate, and the assembly butterfly plate is fixedly connected with the assembly hollow valve rod. The outer side wall of the assembly hollow valve rod is fixedly sleeved with an assembly gear. According to the vacuum valve, the driving bevel gear on the driving rod is driven by the driving motor to rotate, then the driving bevel gear also drives the movable rod on the movable bevel gear and the movable dish plate to rotate, gas can be further controlled to flow conveniently, the vacuum valve can be rapidly opened and closed according to needs, and gas loss and waste are reduced; therefore, the use effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum valves, in particular to a programmable control vacuum valve dedicated to VPSA oxygen production. Background Art

[0002] Vacuum sputtering refers to the process of bombarding atoms or atomic groups from the surface of a target material by inert gas ions in a vacuum environment to form a film on a substrate. A vacuum sputtering device usually includes a loading chamber, an unloading chamber, and a sputtering chamber. Each chamber is separated by a vacuum valve, enabling each chamber to enter a vacuum or non-vacuum state independently. The existing vacuum valves may cause the screw on the valve to slip when controlling the gas flow for a long time, resulting in the inability to quickly open and close the vacuum valve when needed, thus affecting gas loss and waste and reducing the use effect. Summary of the Utility Model

[0003] The purpose of the utility model is to solve the deficiencies existing in the prior art and propose a programmable control vacuum valve dedicated to VPSA oxygen production.

[0004] To achieve the above purpose, the utility model adopts the following technical scheme: A programmable control vacuum valve dedicated to VPSA oxygen production, including a valve. The top of the valve is connected with an assembly housing through an assembly bracket. An assembly hollow valve rod is arranged inside the assembly housing. One end of the assembly hollow valve rod penetrates through the assembly housing, the assembly bracket, and the valve and is fixedly connected with an assembly disc. An assembly gear is fixedly sleeved on the outer side wall of the assembly hollow valve rod. An adjusting component is arranged between the two sides of the inner wall of the assembly bracket.

[0005] An annular opening is formed through the surface of the assembly disc. A movable rod is rotatably connected between the inner top and the inner bottom of the annular opening. A movable disc is fixedly sleeved on the outer side wall of the movable rod. One end of the movable rod penetrates through the assembly disc and the assembly hollow valve rod and is fixedly connected with a movable bevel gear. A driving component for adjusting the rotation of the movable bevel gear is connected to the inner bottom of the assembly housing.

[0006] As a further description of the above technical solution:

[0007] The adjusting component includes an adjusting cross plate fixedly connected between the two sides of the inner wall of the assembly bracket. An adjusting groove is formed on the surface of the adjusting cross plate. An adjusting sleeve block is movably sleeved on the outer side wall of the adjusting cross plate.

[0008] As a further description of the above technical solution:

[0009] An adjusting rack is fixedly connected to the back of the adjusting sleeve block. The adjusting rack is meshed with the assembly gear. An adjusting motor is fixedly connected to the surface of the adjusting sleeve block.

[0010] As a further description of the above technical solution:

[0011] The output end of the adjusting motor is fixedly connected with an adjusting rod. The end of the adjusting rod penetrates through the adjusting sleeve block and extends into the adjusting groove. The end of the adjusting rod is fixedly connected with an adjusting wheel.

[0012] As a further description of the above technical solution:

[0013] The driving assembly includes a driving bracket fixedly connected to the inner bottom of the assembly housing. A driving motor is fixedly connected to the side wall of the driving bracket. The output end of the driving motor is fixedly connected with a driving rod.

[0014] As a further description of the above technical solution:

[0015] The end of the driving rod penetrates through the driving bracket and is rotatably connected to the inner wall of the driving bracket. A driving bevel gear is fixedly sleeved on the outer side wall of the driving rod. The driving bevel gear is meshed and connected with a movable bevel gear.

[0016] The utility model has the following beneficial effects:

[0017] The adjusting assembly can make the adjusting cross plate, adjusting sleeve block, adjusting rack, adjusting motor, adjusting rod and adjusting wheel cooperate, so as to drive the adjusting wheel on the adjusting rod to rotate through the adjusting motor. Since the adjusting wheel contacts the inner wall of the adjusting groove and generates friction, the adjusting sleeve block is driven to move along the direction on the adjusting cross plate. At the same time, the adjusting sleeve block also drives the assembly gear on the adjusting rack to rotate, which is convenient for the assembly gear to drive the assembly disc on the assembly hollow valve stem to rotate, so as to control the flow of gas. The driving assembly can make the movable bevel gear, driving bracket, driving motor, driving rod and driving bevel gear cooperate, so as to drive the driving bevel gear on the driving rod to rotate through the driving motor. Then the driving bevel gear also drives the movable rod and movable disc on the movable bevel gear to rotate, which is convenient for further controlling the flow of gas, so that the vacuum valve can be quickly opened and closed according to needs, reducing the loss and waste of gas, and thus improving the use effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of a special program-controlled vacuum valve for VPSA oxygen production proposed by the utility model;

[0019] Figure 2 For Figure 1 The enlarged schematic diagram of the structure at A in

[0020] Figure 3 It is a schematic diagram of the structure of the assembly hollow valve stem, assembly disc and movable disc of a special program-controlled vacuum valve for VPSA oxygen production proposed by the utility model;

[0021] Figure 4Schematic diagram of the internal structure of the assembly housing of a special programmable vacuum valve for VPSA oxygen production proposed by the present utility model.

[0022] Legend:

[0023] 1. Valve; 2. Assembly bracket; 3. Assembly housing; 4. Assembly hollow valve stem; 5. Assembly disc plate; 6. Assembly gear; 7. Adjusting cross plate; 8. Adjusting sleeve block; 9. Adjusting rack; 10. Adjusting motor; 11. Adjusting rod; 12. Adjusting wheel; 13. Movable rod; 14. Movable disc plate; 15. Movable bevel gear; 16. Driving bracket; 17. Driving motor; 18. Driving rod; 19. Driving bevel gear. Specific implementation mode

[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0025] Referring to Figures 1-4 , a special programmable vacuum valve for VPSA oxygen production provided by the present utility model includes a valve 1. The top of the valve 1 is connected to an assembly housing 3 through an assembly bracket 2. An assembly hollow valve stem 4 is arranged inside the assembly housing 3. One end of the assembly hollow valve stem 4 penetrates through the assembly housing 3, the assembly bracket 2 and the valve 1 and is fixedly connected to an assembly disc plate 5. An assembly gear 6 is fixedly sleeved on the outer side wall of the assembly hollow valve stem 4. An adjusting assembly is arranged between the two sides of the inner wall of the assembly bracket 2 to adjust the rotation of the assembly gear 6 through the adjusting assembly. The adjusting assembly includes an adjusting cross plate 7 fixedly connected between the two sides of the inner wall of the assembly bracket 2. An adjusting groove is formed on the surface of the adjusting cross plate 7. An adjusting sleeve block 8 is movably sleeved on the outer side wall of the adjusting cross plate 7. An adjusting rack 9 is fixedly connected to the back of the adjusting sleeve block 8. The adjusting rack 9 is meshed with the assembly gear 6. An adjusting motor 10 is fixedly connected to the surface of the adjusting sleeve block 8. The output end of the adjusting motor 10 is fixedly connected to an adjusting rod 11. The end of the adjusting rod 11 penetrates through the adjusting sleeve block 8 and extends into the adjusting groove. The end of the adjusting rod 11 is fixedly connected to an adjusting wheel 12. The adjusting motor 10 is used to drive the rotation of the adjusting rod 11.

[0026] The surface of the assembled disc plate 5 is penetrated with an annular opening. A movable rod 13 is rotatably connected between the inner top and the inner bottom of the annular opening. A movable disc plate 14 is fixedly sleeved on the outer side wall of the movable rod 13. One end of the movable rod 13 penetrates through the assembled disc plate 5 and the assembled hollow valve stem 4 and is fixedly connected with a movable bevel gear 15. A driving component for adjusting the rotation of the movable bevel gear 15 is connected to the inner bottom of the assembled housing 3. The driving component includes a driving bracket 16 fixedly connected to the inner bottom of the assembled housing 3. A driving motor 17 is fixedly connected to the side wall of the driving bracket 16. The output end of the driving motor 17 is fixedly connected with a driving rod 18. The end of the driving rod 18 penetrates through the driving bracket 16 and is rotatably connected with the inner wall of the driving bracket 16. A driving bevel gear 19 is fixedly sleeved on the outer side wall of the driving rod 18. The driving bevel gear 19 is meshed with the movable bevel gear 15. The driving motor 17 is used to drive the driving rod 18 to rotate.

[0027] Working principle: When in use, first start the adjusting motor 10. The adjusting motor 10 drives the adjusting wheel 12 on the adjusting rod 11 to rotate. Since the adjusting wheel 12 contacts the inner wall of the adjusting groove and generates friction, the adjusting sleeve block 8 is driven to move along the direction on the adjusting cross plate 7. At the same time, the adjusting sleeve block 8 also drives the adjusting rack 9 to move. Then the adjusting rack 9 also drives the assembled gear 6 to rotate. Then the assembled gear 6 also drives the assembled hollow valve stem 4 to rotate. At the same time, the assembled hollow valve stem 4 also drives the assembled disc plate 5 to rotate, so as to control the flow of gas and ensure the opening and closing effect.

[0028] In order to prevent the assembled hollow valve stem 4 from being locked and unable to adjust the rotation of the assembled disc plate 5, at the same time start the driving motor 17. The driving motor 17 drives the driving bevel gear 19 on the driving rod 18 to rotate. Then the driving bevel gear 19 also drives the movable bevel gear 15 to rotate. The movable bevel gear 15 drives the movable disc plate 14 on the movable rod 13 to rotate, so as to further control the flow of gas and ensure the further opening and closing effect.

[0029] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A special programmable vacuum valve for VPSA oxygen production, comprising a valve (1), characterized in that: The top of the valve (1) is connected to an assembly housing (3) through an assembly bracket (2). An assembly hollow valve stem (4) is arranged inside the assembly housing (3). One end of the assembly hollow valve stem (4) penetrates through the assembly housing (3), the assembly bracket (2) and the valve (1) and is fixedly connected to an assembly disc plate (5). An assembly gear (6) is fixedly sleeved on the outer side wall of the assembly hollow valve stem (4). An adjusting component is arranged between the two sides of the inner wall of the assembly bracket (2). An annular opening is formed through the surface of the assembly disc plate (5). A movable rod (13) is rotatably connected between the inner top and the inner bottom of the annular opening. A movable disc plate (14) is fixedly sleeved on the outer side wall of the movable rod (13). One end of the movable rod (13) penetrates through the assembly disc plate (5) and the assembly hollow valve stem (4) and is fixedly connected to a movable bevel gear (15). A driving component for adjusting the rotation of the movable bevel gear (15) is connected to the inner bottom of the assembly housing (3).

2. The special program-controlled vacuum valve for VPSA oxygen production according to claim 1, wherein: The adjusting component includes an adjusting cross plate (7) fixedly connected between the two sides of the inner wall of the assembly bracket (2). An adjusting groove is formed on the surface of the adjusting cross plate (7). An adjusting sleeve block (8) is movably sleeved on the outer side wall of the adjusting cross plate (7).

3. The VPSA oxygen production dedicated programmable vacuum valve according to claim 2, characterized in that: An adjusting rack (9) is fixedly connected to the back of the adjusting sleeve block (8). The adjusting rack (9) is meshed with the assembly gear (6). An adjusting motor (10) is fixedly connected to the surface of the adjusting sleeve block (8).

4. The VPSA oxygen production dedicated programmable vacuum valve according to claim 3, wherein: The output end of the adjusting motor (10) is fixedly connected to an adjusting rod (11). The end of the adjusting rod (11) penetrates through the adjusting sleeve block (8) and extends into the adjusting groove. An adjusting wheel (12) is fixedly connected to the end of the adjusting rod (11).

5. A dedicated programmable vacuum valve for VPSA oxygen production according to claim 1, characterized in that: The driving component includes a driving bracket (16) fixedly connected to the inner bottom of the assembly housing (3). A driving motor (17) is fixedly connected to the side wall of the driving bracket (16). The output end of the driving motor (17) is fixedly connected to a driving rod (18).

6. A dedicated programmable vacuum valve for VPSA oxygen production according to claim 5, characterized in that: The end of the driving rod (18) penetrates through the driving bracket (16) and is rotatably connected to the inner wall of the driving bracket (16). A driving bevel gear (19) is fixedly sleeved on the outer side wall of the driving rod (18). The driving bevel gear (19) is meshed with the movable bevel gear (15).

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