Power supply calibration device and test machine

Abstract

The utility model relates to a power supply calibration device and a test machine, and the power supply calibration device comprises a switch array which is connected with a power supply and switches the signal of the output power supply; the first bus is connected with the switch array and transmits signals output by the switch array; the POGO connector is connected with the first bus, receives the signal transmitted by the first bus and outputs the signal; and the backboard connector is connected with the power supply power line and the digital communication cable. The first bus is connected with the switch array and the POGO connector, signals output by switching of the switch array are sent to the POGO connector to be output, interference of a power supply power line and a digital communication cable connected with the backboard connector on power supply output is reduced, and calibration precision is improved.

Description

Technical Field

[0001] This application relates to the technical field of power calibration, and particularly to a power calibration device and a testing machine. Background Art

[0002] In semiconductor automatic test equipment, the VI (voltage and current) source is the excitation voltage source of the unit under test, providing a controllable, measurable, and ideal power supply. However, in the actual working environment, the equipment will be affected by electrical interference. Therefore, for VI sources with high-precision requirements, it is necessary to avoid these interferences as much as possible during design to ensure the calibration accuracy of the equipment and the accuracy of chip measurement results.

[0003] In the calibration process of traditional power management chip test boards, the relevant resources of the VI source in the test board are connected to the backplane connector and calibrated through the external instrument on the backplane connected by the backplane connector. Since the backplane connector is also connected to power lines, digital communication cables, etc., it will interfere with the output of the VI source, thereby affecting the calibration accuracy, and there is a disadvantage of low calibration accuracy. Summary of the Utility Model

[0004] Based on this, in view of the above problems, it is necessary to provide a power calibration device and a testing machine that can improve the calibration accuracy.

[0005] The first aspect of this application provides a power calibration device, including:

[0006] A switch array, connected to a power supply, switching and outputting the signal of the power supply;

[0007] A first bus, connected to the switch array, transporting the signal output by the switch array;

[0008] A POGO connector, connected to the first bus, receiving the signal transported by the first bus and outputting it;

[0009] A backplane connector, connected to a power line and a digital communication cable.

[0010] In one embodiment, the power supply is a VI source, and / or the first bus is a BUS bus.

[0011] In one embodiment, the power calibration device further includes an adapter board and a calibration board, and the adapter board is connected to the POGO connector and the calibration board.

[0012] In one embodiment, the adapter board includes a BUS board and an Adapter board, the BUS board is connected to the POGO connector, and the Adapter board is connected to the BUS board and the calibration board.

[0013] In one embodiment, the Adapter board is connected to the BUS board by thumbtacks.

[0014] In one embodiment, the power calibration device further includes a multimeter connected to the calibration board.

[0015] In one embodiment, the calibration board includes a switch circuit and a calibration load circuit. The switch circuit is connected to the adapter board through a second bus, and the calibration load circuit is connected to the switch circuit and the multimeter.

[0016] In one embodiment, the second bus is a BUS bus, and / or the multimeter is an eight-and-a-half-digit high-precision multimeter.

[0017] In one embodiment, the switch circuit includes switches S0, S1, S2, S3, S4, S5, S6, S7, S8, S9, and S10. The first end of switch S0 is connected to the second bus, and the second end of switch S0 is connected to the moving contact b of switch S9. The first end of switch S1 is connected to the second bus, and the second end of switch S1 is connected to the first end of switch S5. The second end of switch S5 is connected to the first end of the calibration load circuit. The first end of switch S2 is connected to the second bus, and the second end of switch S2 is connected to the first end of switch S6 and the positive terminal of the voltage range of the multimeter. The second end of switch S6 is connected to the first end of the calibration load circuit. The first end of switch S3 is connected to the second bus, and the second end of switch S3 is connected to the first end of switch S7 and the moving contact b of switch S10. The second end of switch S7 is connected to the second end of the calibration load circuit. The first end of switch S4 is connected to the second bus, and the second end of switch S4 is connected to the stationary contact a of switch S8. The moving contact b of switch S8 is connected to the second end of the calibration load circuit. The moving contact c of switch S8 is connected to the moving contact c of switch S10. The stationary contact a of switch S10 is connected to the negative terminal of the voltage range of the multimeter. The stationary contact a of switch S9 is connected to the positive terminal of the current range of the multimeter. The moving contact c of switch S9 is connected to the moving contact b of switch S8 and the second end of the calibration load circuit.

[0018] The second aspect of the present application provides a testing machine, including a power supply and the above-mentioned power calibration device.

[0019] For the above-mentioned power calibration device and testing machine, the first bus is connected to the switch array and the POGO connector, and the signal switched and output by the switch array is sent to the POGO connector for output, reducing the interference of the power supply power line and digital communication cable connected to the backplane connector on the power supply output, and improving the calibration accuracy. Description of the Drawings

[0020] Figure 1 It is a block diagram of a power calibration device in an embodiment;

[0021] Figure 2 It is a block diagram of a power calibration device in another embodiment;

[0022] Figure 3 It is a schematic diagram of the calibration connection of FVMV (output voltage measurement voltage) in an embodiment;

[0023] Figure 4 It is a schematic diagram of the calibration connection of FIMI (output current measurement current) in an embodiment;

[0024] Figure 5 It is a schematic diagram of the calibration connection of leakage current in an embodiment;

[0025] Figure 6 It is a schematic diagram of the working principle of FV and FI in an embodiment. Detailed Description of the Embodiments

[0026] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. The terms used in the specification of this application herein are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0028] It can be understood that in the following embodiments, "connection", if there is an electrical signal or data transmission between the connected circuits, modules, units, etc., should be understood as "electrical connection", "communication connection", etc.

[0029] As used herein, the singular forms "a", "an" and "the" may also include the plural forms unless the context clearly dictates otherwise. It should also be understood that the terms "comprises / comprising" or "has / have" etc. specify the presence of the stated features, wholes, operations, components, parts or combinations thereof, but do not preclude the presence or addition of one or more other features, wholes, components, parts or combinations thereof. At the same time, the term "and / or" used in this specification includes any and all combinations of the related listed items.

[0030] In one embodiment, a power calibration device is provided, which is applicable to perform DC calibration on a VI source. As Figure 1As shown in the figure, the power calibration device includes a switch array 110, a first bus 120, a POGO connector 130, and a backplane connector 140. The switch array 110 is connected to the power supply 100 to switch the signal output by the power supply 100. The first bus 120 is connected to the switch array 110 to convey the signal output by the switch array 110. The POGO connector 130 is connected to the first bus 120 to receive the signal conveyed by the first bus 120 and output it. The backplane connector 140 is connected to the power supply power line and the digital communication cable. In addition, the power calibration device may further include a power supply module and a digital communication module. The backplane connector 140 is connected to the power supply module through the power supply power line, and the backplane connector 140 is connected to the digital communication module through the digital communication cable. The power supply 100, the switch array 110, the first bus 120, the POGO connector 130, the backplane connector 140, the power supply module, and the digital communication module may be arranged on the same resource board. Among them, the first bus 120 may be a BUS bus or other bus structure. The POGO connector 130 may be arranged at a position on the resource board far from the backplane connector 140 to reduce the interference of the power supply module and the digital communication module on the output of the power supply 100.

[0031] Taking the power supply 100 as the VI source as an example, as Figure 2 shown, the resources of the VI source may include VI source 1, VI source 2, VI source 3 to VI source 8. When a calibration operation is performed, the output channels of VI source 1 - VI source 8 are sequentially switched to the first bus 120 by the switch array 110, and the signal transmitted by the first bus 120 is output through the POGO connector 130, reducing the interference of the power supply power line and the digital communication cable at the backplane connector 140 on the calibration loop signal on the first bus 120, so as to perform more accurate calibration.

[0032] The power calibration device further includes an adapter board and a calibration board. The adapter board is connected to the POGO connector 130 and the calibration board. Signals can be transmitted to the calibration board through the adapter board, and the power supply is calibrated using the calibration board. Among them, as Figure 2 shown, the adapter board includes a BUS board 210 and an Adapter board 220. The BUS board 210 is connected to the POGO connector 130, and the Adapter board 220 is connected to the BUS board 210 and the calibration board 400. The BUS board 210 may specifically be a BUS32 board, and the Adapter board 220 and the BUS board 210 may be connected by a thimble. Further, the power calibration device may further include a second bus 300. The Adapter board 220 is connected to the calibration board 400 through the second bus 300, and the second bus 300 may also be a BUS bus or other bus structure.

[0033] Continue to refer to Figure 2, the power calibration device further includes a multimeter 500 connected to the calibration board 400. The multimeter 500 can specifically be an 8 1 / 2 digit high-precision multimeter, and relevant data can be measured through the multimeter 500 during the calibration process.

[0034] In one embodiment, the calibration board 400 may include a switch circuit 410 and a calibration load circuit 420. The switch circuit 410 is connected to the adapter board 220 through the second bus 300, and the calibration load circuit 420 is connected to the switch circuit 410 and the multimeter 500. The second bus 300 may specifically include a DC current input line DCI, a high-end output line HF, a high-end measurement line HS, a low-end measurement line LS, and a low-end output line LF. Among them, a wire is led out from the high-end output line HF by a mechanical switch for the DC current input line DCI to implement the function of measuring current by the multimeter.

[0035] The specific structure of the switch circuit 410 is not unique. For example, Figure 3 as shown, the switch circuit 410 may specifically include switches S0, S1, S2, S3, S4, S5, S6, S7, S8, S9, and S10. The first end of switch S0 is connected to the second bus 300, specifically connected to the DC current input line DCI. The second end of switch S0 is connected to the moving contact b of switch S9. The first end of switch S1 is connected to the second bus 300, specifically connected to the high-end output line HF. The second end of switch S1 is connected to the first end of switch S5. The second end of switch S5 is connected to the first end of the calibration load circuit 420. The first end of switch S2 is connected to the second bus 300, specifically connected to the high-end measurement line HS. The second end of switch S2 is connected to the first end of switch S6 and the positive terminal HI of the voltage range of the multimeter 500. The second end of switch S6 is connected to the first end of the calibration load circuit 420. The first end of switch S3 is connected to the second bus 300, specifically connected to the low-end measurement line LS. The second end of switch S3 is connected to the first end of switch S7 and the moving contact b of switch S10. The second end of switch S7 is connected to the second end of the calibration load circuit 420. The first end of switch S4 is connected to the second bus 300, specifically connected to the low-end output line LF. The second end of switch S4 is connected to the stationary contact a of switch S8. The moving contact b of switch S8 is connected to the second end of the calibration load circuit 420. The moving contact c of switch S8 is connected to the moving contact c of switch S10. The stationary contact a of switch S10 is connected to the negative terminal LO of the voltage range of the multimeter 500. The stationary contact a of switch S9 is connected to the positive terminal DCI of the current range of the multimeter 500. The moving contact c of switch S9 is connected to the moving contact b of switch S8 and the second end of the calibration load circuit 420. Among them, the negative terminal of the current range and the negative terminal of the voltage range share a common negative terminal.

[0036] During the calibration process, the calibration load circuit 420 can be connected to a load resistor or left open according to actual needs, and the on / off states of switches S0, S1, S2, S3, S4, S5, S6, S7, S8, S9, and S10 can be controlled. Specifically, during calibration, the output line of the VI source, the calibration load circuit 420, and the multimeter 500 are connected according to different calibration modes, and the machine-measured value and the meter-measured value are obtained through measurement. The following is an explanation in combination with several calibration modes.

[0037] 1. Calibration of FVMV mode

[0038] The four-wire output of the VI source resources is connected to the BUS bus, and one resource channel is switched into the calibration load circuit 420 through a mechanical switch for voltage measurement with a load. As Figure 3 shown, a resistor is selected as the load in the calibration load circuit 420 (such as 50K ohms), switches S5, S6, and S7 are closed, and switches S8 and S10 are both switched to the moving contact b for connection. In the FV mode, the VI source channel outputs a constant voltage through the red curved path. At this time, the high input terminal HI and the low output terminal LO of the multimeter 500 are respectively applied to both ends of the load resistor to detect the load voltage value in real time to obtain the meter-measured value. In addition, the high-end measurement line HS and the low-end measurement line LS convert the detected voltage value through an ADC (analog-to-digital converter) to obtain the MV value. In this way, the machine-measured value and the meter-measured value are obtained simultaneously.

[0039] 2. Calibration of FIMI mode

[0040] The four-wire output of the VI source resources is connected to the BUS bus, and one resource channel is switched into the calibration load circuit 420 through a mechanical switch. As Figure 4 shown, at this time, a load resistor / empty load is added to the calibration load circuit 420. Switches S5, S6, and S7 are closed, and switches S8, S9, and S10 are respectively switched to the moving contact c, the moving contact b, and the moving contact c for connection. At this time, the red path will be short-circuited internally, and the current flows through the multimeter 500 to measure the FI current value. In addition, the VI source internally samples the current value through a sampling resistor and converts it through an ADC to obtain the machine-measured value MI. In this way, the machine-measured value and the meter-measured value are obtained simultaneously.

[0041] 3. Calibration of MI (leakage)

[0042] The four-wire output of the VI source resources is connected to the BUS bus, and one resource channel is switched into the calibration load circuit 420 through a mechanical switch. The leakage current path is as Figure 5As shown, at this time, the calibration load circuit 420 is unloaded. Close switches S5, S6, and S7, and switch S8 is switched to the moving contact b. By scanning the FV value, if there is a leakage, the output current will change with the change of the output voltage. This change is respectively input into the current sampling ADC and the voltage sampling ADC to record the MI and MV values, and the MI / MV fitting coefficient is obtained.

[0043] The FV and FI working principles of the VI source are as Figure 6 shown. Among them, the PID (Proportional-Integral-Derivative) digital loop is implemented by the FPGA (Field-Programmable Gate Array). Its main function is to realize the automatic PID regulation control of the digital voltage loop and the digital current loop, and achieve accurate setting of the external load voltage and current. When the VI source performs normal FV and FI outputs, the FPGA calculates the actual error of the output by taking the difference between the FV / FI setting value set by the host computer and the measured value collected by the ADC for the load DUT. Then, the error is sent to the PID controller for operation. The parameters P and I of the PID controller are set by the host computer. Finally, the calculated data is converted into the DAC_code value for the DAC (Digital-to-Analog Converter) output. This signal is then amplified by the power amplifier PA and finally applied to the load. In the entire digital power supply loop, PID realizes the dynamic adjustment of the loop voltage / current, ensuring that the voltage or current of the output load is always constant at the set value. When considering calibrating the VI source, connect the output resources of the VI source to the BUS bus and connect to the corresponding interfaces of the calibration load circuit 420 and the multimeter 500 through the mechanical switch. After measurement, the machine-measured value and the meter-measured value are obtained respectively. Then, the machine-measured value is fitted into a linear formula Y = K*X + B, where Y is the meter-measured value, K and B are calibration coefficients, and X is the machine-measured value. Subsequently, the obtained K and B calibration coefficient values are stored in the corresponding calibration Flash. When calibrating FV and FI, substitute the target voltage and current values into the calibration coefficient calculation (target value * K + B), and then convert it into the DAC_code value and send it to the DAC to drive the power amplifier PA output. When calibrating MI and MV, the FPGA substitutes the current / voltage value sampled by the ADC into the calibration coefficient calculation, and then converts it into the DAC_code value and sends it to the DAC to drive the power amplifier PA output.

[0044] Finally, when calibrating for leakage, after completing the above calibration calculations for FIMI, retain the corresponding calibration coefficients denoted as K1 and B1. Then unload the load and scan the FV value. If there is a leakage, the corresponding voltage and current values at the output end will change. This change is sampled and recorded as the MI0 and MV0 values respectively through the current sampling ADC and the voltage sampling ADC, and the MI0 / MV0 fitting coefficient is obtained and denoted as K0. Finally, substitute the leakage calibration coefficient into the formula to calculate the true MI value. The formula is as follows:

[0045] MI = K1 × I 机测值 + B1 - K0 × V 机测值

[0046] In one embodiment, a testing machine is further provided, which includes a power supply and the above-mentioned power supply calibration device.

[0047] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0048] The above-described embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several deformations and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A power calibration device, characterized in that, Comprising: A switch array, connected to a power supply, switching and outputting the signal of the power supply; A first bus, conveying the signal output by the switch array; A POGO connector, connected to the first bus, receiving the signal conveyed by the first bus and outputting it; A backplane connector, connected to a power line and a digital communication cable.

2. The power calibration device according to claim 1, wherein The power supply is a VI source, and / or the first bus is a BUS bus.

3. The power calibration device according to claim 1, wherein It further comprises an adapter board and a calibration board, and the adapter board is connected to the POGO connector and the calibration board.

4. The power calibration device according to claim 3, wherein The adapter board comprises a BUS board and an Adapter board, the BUS board is connected to the POGO connector, and the Adapter board is connected to the BUS board and the calibration board.

5. The power calibration device according to claim 4, wherein The Adapter board is connected to the BUS board by a thimble.

6. The power calibration device according to claim 4, characterized in that, It further comprises a multimeter connected to the calibration board.

7. The power calibration device according to claim 6, wherein The calibration board comprises a switch circuit and a calibration load circuit, the switch circuit is connected to the Adapter board through a second bus, and the calibration load circuit is connected to the switch circuit and the multimeter.

8. The power calibration device according to claim 7, wherein The second bus is a BUS bus, and / or the multimeter is an eight-bit high-precision half multimeter.

9. The power calibration device according to claim 7, characterized in that, The switch circuit comprises switches S0, S1, S2, S3, S4, S5, S6, S7, S8, S9 and S10. The first end of switch S0 is connected to the second bus, the second end of switch S0 is connected to the moving contact b of switch S9. The first end of switch S1 is connected to the second bus, the second end of switch S1 is connected to the first end of switch S5. The second end of switch S5 is connected to the first end of the calibration load circuit. The first end of switch S2 is connected to the second bus, the second end of switch S2 is connected to the first end of switch S6 and the positive terminal of the voltage range of the multimeter. The second end of switch S6 is connected to the first end of the calibration load circuit. The first end of switch S3 is connected to the second bus, the second end of switch S3 is connected to the first end of switch S7 and the moving contact b of switch S10. The second end of switch S7 is connected to the second end of the calibration load circuit. The first end of switch S4 is connected to the second bus, the second end of switch S4 is connected to the static contact a of switch S8. The moving contact b of switch S8 is connected to the second end of the calibration load circuit. The moving contact c of switch S8 is connected to the moving contact c of switch S10. The static contact a of switch S10 is connected to the negative terminal of the voltage range of the multimeter. The static contact a of switch S9 is connected to the positive terminal of the current range of the multimeter. The moving contact c of switch S9 is connected to the moving contact b of switch S8 and the second end of the calibration load circuit.

10. A testing machine, characterized in that, Comprising a power supply and the power supply calibration device according to any one of claims 1-9.

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