Sample transfer device with support and vacuum sample transfer system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a sample transfer device with a support and a vacuum sample transfer system. A sample transfer device with a support comprises a flange, a sample transfer rod and a support device. The sample transfer rod penetrates through the flange and is used for transferring a sample. The supporting device comprises a supporting seat and a guide wheel. The supporting seat is fixedly connected with the far end of the flange. And the guide wheel is rotationally arranged on the supporting seat and is used for supporting the sample transfer rod.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and particularly to a sample transfer device with a support and a vacuum sample transfer system. Background Art

[0002] If the existing vacuum sample transfer rod increases the sample transfer distance, for example, when the sample transfer rod is more than 600 mm, the gravity of the sample transfer rod will be all concentrated on the micro bearing below the sample transfer rod, and the bearing will be severely worn when the sample transfer rod moves, greatly shortening the service life of the sample transfer rod. Summary of the Utility Model

[0003] The present disclosure provides a sample transfer device with a support, including:

[0004] A flange;

[0005] A sample transfer rod passing through the flange for transferring a sample;

[0006] A support device, including:

[0007] A support seat fixedly connected to the distal end of the flange; and

[0008] A guide wheel rotatably arranged on the support seat for supporting the sample transfer rod.

[0009] In some embodiments of the present disclosure, the sample transfer device with a support further includes a sample transfer cavity, the proximal end of the flange is vacuum-sealed and connected to the distal end of the sample transfer cavity, and the proximal end of the sample transfer rod is located inside the sample transfer cavity.

[0010] In some embodiments of the present disclosure, the support seat includes a plurality of longitudinal long slot holes;

[0011] The support device further includes a plurality of bolts, the plurality of bolts respectively pass through the plurality of longitudinal long slot holes and are threadedly connected to the flange, and the plurality of longitudinal long slot holes provide redundancy for the installation of the support seat in the longitudinal direction.

[0012] In some embodiments of the present disclosure, the guide wheel includes:

[0013] A guide wheel body;

[0014] A central hole located inside the guide wheel body; and

[0015] A left bearing mounting groove and a right bearing mounting groove respectively located on the left and right sides of the guide wheel body and communicating with the central hole.

[0016] In some embodiments of the present disclosure, the support seat further includes a left guide wheel mounting seat and a right guide wheel mounting seat, the left guide wheel mounting seat includes a left rotating shaft mounting hole, and the right guide wheel mounting seat includes a right rotating shaft mounting hole;

[0017] The support device further includes:

[0018] The left bearing is installed in the left bearing installation groove of the guide wheel;

[0019] The right bearing is installed in the right bearing installation groove of the guide wheel;

[0020] The inner bearing spacer sleeve is arranged in the central hole of the guide wheel for separating the left bearing and the right bearing; and

[0021] The rotating shaft passes through the left bearing, the inner bearing spacer sleeve and the right bearing, and the left end and the right end of the rotating shaft respectively pass through the left rotating shaft installation hole and the right rotating shaft installation hole.

[0022] In some embodiments of the present disclosure, the left end and the right end of the rotating shaft are respectively provided with a left clamping groove and a right clamping groove, and the left clamping groove and the right clamping groove are respectively arranged on the outer sides of the left guide wheel mounting seat and the right guide wheel mounting seat.

[0023] The supporting device further includes a left snap ring and a right snap ring, and the left snap ring and the right snap ring are respectively arranged in the left clamping groove and the right clamping groove to limit the axial movement of the rotating shaft.

[0024] In some embodiments of the present disclosure, the sample transfer device with support further includes:

[0025] The left limiting bearing mounting seat is arranged on the left side of the support seat and includes a left inclined plane;

[0026] The right limiting bearing mounting seat is arranged on the right side of the support seat and includes a right inclined plane; and

[0027] The left upward displacement limiting bearing and the right upward displacement limiting bearing are respectively rotatably arranged on the left inclined plane and the right inclined plane, and are respectively located obliquely above the left side and the right side of the sample transfer rod. The outer bearing surfaces of the left upward displacement limiting bearing and the right upward displacement limiting bearing are tangent to the outer surface of the sample transfer rod.

[0028] In some embodiments of the present disclosure, the left limiting bearing mounting seat further includes a left plane.

[0029] The right limiting bearing mounting seat further includes a right plane.

[0030] The sample transfer device with support further includes:

[0031] The guide rod is fixedly arranged above the sample transfer rod along the axial direction of the sample transfer rod; and

[0032] The left limiting bearing and the right limiting bearing are respectively rotatably arranged on the left plane and the right plane, and are respectively located on the left side and the right side of the guide rod. The outer bearing surfaces of the left limiting bearing and the right limiting bearing are tangent to the outer surface of the guide rod.

[0033] In some embodiments of the present disclosure, the sample transfer device with support further includes:

[0034] The sample transfer platform is provided at the distal end of the sample transfer rod. The linear movement of the sample transfer rod drives the telescopic movement of the sample transfer platform, and the rotational movement of the sample transfer rod drives the lifting movement of the sample transfer platform.

[0035] The present disclosure provides a vacuum sample transfer system, including:

[0036] A vacuum chamber; and

[0037] According to the supported sample transfer device in any embodiment of the present disclosure, the flange of the supported sample transfer device is vacuum-sealed and connected to the vacuum chamber.

[0038] The supported sample transfer device and the vacuum sample transfer system according to some embodiments of the present disclosure can bring beneficial technical effects. For example, in the supported sample transfer device and the vacuum sample transfer system according to some embodiments of the present disclosure, the guide wheel can not only guide the sample transfer rod, but also support the sample transfer rod, improving the smoothness of the sample transfer rod during movement, thereby reducing the outgassing of materials caused by friction and affecting the vacuum degree, and increasing the service life of the sample transfer rod. In addition, the support device is provided at the distal end of the flange, which is not only convenient for maintaining and replacing relevant components, but also the size of the support device is not limited by the sample transfer chamber, and the size can be made larger, enabling the support device to have a larger load and better guiding performance. Another example is that in the supported sample transfer device and the vacuum sample transfer system according to some embodiments of the present disclosure, the upper left surface and the upper right surface of the sample transfer rod can slide respectively by the rolling of the left upward displacement limiting bearing and the right upward displacement limiting bearing, which can improve the smoothness of the sample transfer rod during the sample transfer process, and can prevent the upward displacement of the sample transfer rod, ensuring the stability of the sample transfer process. Another example is that in the supported sample transfer device and the vacuum sample transfer system according to some embodiments of the present disclosure, the left surface and the right surface of the guide rod can slide respectively by the rolling of the left limiting bearing and the right limiting bearing, which can prevent the left and right crosstalk of the sample transfer rod during the sample transfer process, ensuring the stability of the sample transfer process. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only one embodiment of the present disclosure. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0040] Figure 1 A schematic structural diagram showing a supported sample transfer device according to some embodiments of the present disclosure;

[0041] Figure 2 A side view showing a supported sample transfer device according to some embodiments of the present disclosure;

[0042] Figure 3 Front view of a supported sample transfer device according to some embodiments of the present disclosure;

[0043] Figure 4 Exploded schematic view of a support device according to some embodiments of the present disclosure;

[0044] Figure 5 Schematic structural view of a sample transfer table according to some embodiments of the present disclosure;

[0045] Figure 6 Schematic structural view of a vacuum sample transfer system according to some embodiments of the present disclosure;

[0046] In the above figures, each reference numeral represents:

[0047] 1000 - Vacuum sample transfer system

[0048] 100 - Supported sample transfer device

[0049] 101 - Flange

[0050] 102 - Sample transfer rod

[0051] 1021 - Core rod

[0052] 103 - Support device

[0053] 1031 - Support base

[0054] 10311a, 10311b, 10311c - Longitudinal long slot holes

[0055] 10312a, 10312b, 10312c, 10312d - Bolts

[0056] 10313 - Left guide wheel mounting seat, 103131 - Left rotating shaft mounting hole

[0057] 10314 - Right guide wheel mounting seat, 103141 - Right rotating shaft mounting hole

[0058] 1032 - Guide wheel

[0059] 10321 - Guide wheel body

[0060] 10322 - Central hole

[0061] 10323 - Right bearing mounting groove

[0062] 1033 - Left bearing

[0063] 1034 - Right bearing

[0064] 1035 - Bearing inner spacer sleeve

[0065] 1036 - Rotating shaft

[0066] 10361 - Left card slot

[0067] 10362 - Right card slot

[0068] 1037 - Left circlip

[0069] 1038 - Right circlip

[0070] 1039a - Right gasket, 1039b - Left gasket

[0071] 104 - Sample transfer cavity

[0072] 105 - Left limit bearing mounting seat, 1051 - Left inclined plane, 1052 - Left flat surface

[0073] 106 - Right limit bearing mounting seat, 1061 - Right inclined plane; 1062 - Right flat surface

[0074] 107 - Left upward displacement limit bearing

[0075] 108 - Right upward displacement limit bearing

[0076] 109 - Guide rod

[0077] 110 - Left limit bearing

[0078] 111 - Right limit bearing

[0079] 112 - Sample transfer table, 1121 - Fixed seat, 1122 - Gear, 1123 - Rack, 1124 - Sliding seat, 11241 - Guide, 1125 - Guide seat, 11251 - Guide groove

[0080] 113a, 113b, 113c, 113d - Screws

[0081] 114a, 114b, 114c, 114d - Gaskets

[0082] 200 - Vacuum chamber Detailed implementation manners

[0083] Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0084] In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", "transverse", "longitudinal", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. In the description of the present disclosure, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the communication inside two elements. In the description of the present disclosure, the distal end or the far side refers to the end or side that extends deep into the vacuum environment (for example, the vacuum chamber), and the proximal end or the near side is the end or side opposite to the distal end or the far side (for example, the end or side away from the vacuum chamber, or the end or side close to the vacuum chamber wall inside the vacuum chamber, etc.). Or, the end or side close to the driving device is the proximal end or the near side, and the end or side away from the driving device is the distal end or the far side. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0085] Figure 1 The structural schematic diagram of the sample transfer device 100 with a support according to some embodiments of the present disclosure is shown. Figure 2 The side view of the sample transfer device 100 with a support according to some embodiments of the present disclosure is shown. Figure 3 The front view of the sample transfer device 100 with a support according to some embodiments of the present disclosure is shown.

[0086] As Figure 1 、 Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the sample transfer device 100 with a support may include a flange 101, a sample transfer rod 102, and a support device 103. The sample transfer rod 102 passes through the flange 101 and is used to transfer samples. The support device 103 may include a support base 1031 and a guide wheel 1032. The support base 1031 is fixedly connected to the distal end of the flange 101. The guide wheel 1032 is rotatably arranged on the support base 1031 and is used to support the sample transfer rod 102.

[0087] Those skilled in the art can understand that although Figure 1The shown guide wheel 1032 is a flat-bottom V-shaped guide wheel 1032, but this is only exemplary. The support device 103 can also select other suitable types of guide wheels, such as U-shaped guide wheels, etc.

[0088] In some embodiments of the present disclosure, the guide wheel 1032 can not only guide the sample transfer rod 102, but also support the sample transfer rod 102, improving the smoothness of the sample transfer rod 102 during movement, thereby reducing the outgassing of materials due to friction and affecting the vacuum degree, and can improve the service life of the sample transfer rod 102. Moreover, the support base 1031 device is arranged at the distal end of the flange 101. For example, it is arranged on the bottom plate on the distal end side of the flange 101, facilitating the maintenance and replacement of the components on the support base 1031 device.

[0089] As Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the sample transfer device 100 with support may further include a sample transfer cavity 104. The proximal end of the flange 101 is vacuum-sealed and connected to the distal end of the sample transfer cavity 104, and the proximal end of the sample transfer rod 102 is located inside the sample transfer cavity 104.

[0090] For existing sample transfer rods, generally, the gravity will all concentrate inside the sample transfer cavity, causing great pressure on the support structure of the sample transfer rod (for example, two miniature bearings located below the sample transfer rod, such as 619-3 type bearings). When the sample transfer rod moves, the support structure (for example, two miniature bearings) wears severely, greatly shortening the service life of the sample transfer rod. In some embodiments of the present disclosure, the support device 103 is arranged at the distal end of the flange 101, which can replace or assist the original support structure to effectively support the sample transfer rod, not only extending the service life of the extension rod, but also facilitating maintenance. In addition, the size of the support device 103 will not be restricted by the sample transfer cavity 104, and the size can be made larger, so that the support device 103 has a greater load and extends the service life of the sample transfer rod 102.

[0091] In some embodiments, the sample transfer device 100 with support may further include a driving magnetic component (not shown in the figure) and a transmission magnetic component (not shown in the figure). The driving magnetic component is sleeved on the sample transfer cavity 104. The transmission magnetic component is connected to the sample transfer rod 102. The driving magnetic component and the transmission magnetic component are magnetically coupled to drive the sample transfer rod 102 to slide along the sample transfer cavity 104 and / or rotate around the sample transfer cavity 104, so as to drive the sample transfer rod 102 to perform linear motion or rotational motion.

[0092] Figure 4 Shows an exploded view of the support device 103 according to some embodiments of the present disclosure.

[0093] As Figure 4As shown, in some embodiments of the present disclosure, the support base 1031 may include a plurality of longitudinally elongated slots (such as longitudinally elongated slot 10311a, longitudinally elongated slot 10311b, longitudinally elongated slot 10311c). The support device 103 may further include a plurality of bolts (such as bolt 10312a, bolt 10312b, bolt 10312c, bolt 10312d). The plurality of bolts respectively pass through the plurality of longitudinally elongated slots. For example, bolt 10312a, bolt 10312b, and bolt 10312c respectively pass through longitudinally elongated slot 10311a, longitudinally elongated slot 10311b, and longitudinally elongated slot 10311c. The longitudinally elongated slot through which bolt 10312d passes is not shown due to angle limitations and is threadedly connected to the flange 101. The longitudinally elongated slots (such as longitudinally elongated slot 10311a, longitudinally elongated slot 10311b, longitudinally elongated slot 10311c) provide redundancy for the installation of the support base 1031 in the longitudinal direction.

[0094] Those skilled in the art can understand that although Figure 4 only four bolts are shown passing through four longitudinally elongated slots and being threadedly connected to the flange 101, this is merely exemplary. The support base 1031 may also include other suitable numbers of longitudinally elongated slots, such as 3, 6, etc., in cooperation with a suitable number of bolts to provide redundancy for the installation of the support base 1031 in the longitudinal direction.

[0095] In some embodiments of the present disclosure, the longitudinal direction refers to the direction perpendicular to the axial direction of the sample transfer rod 102, such as Figure 1 , Figure 3 , Figure 4 the vertical direction shown. The longitudinally elongated slot means that the length direction of the slot is perpendicular to the axial direction of the sample transfer rod 102.

[0096] In some embodiments of the present disclosure, the longitudinally elongated slots can provide redundancy when the support base 1031 is installed on the flange 101, so that the guide wheel 1032 can be as close as possible to the sample transfer rod 102, thereby improving the guiding accuracy of the guide wheel 1032 and reducing the swaying and vibration of the sample transfer rod 102 during the sample transfer process, and improving the stability of the sample transfer process.

[0097] As Figure 4 shown, in some embodiments of the present disclosure, the guide wheel 1032 may include a guide wheel body 10321, a central hole 10322, a left bearing mounting groove (not shown in the figure), and a right bearing mounting groove 10323. The central hole 10322 is located inside the guide wheel body 10321. The left bearing mounting groove and the right bearing mounting groove 10323 are respectively located on the left and right sides of the guide wheel body 10321 and communicate with the central hole 10322.

[0098] As Figure 4As shown, in some embodiments of the present disclosure, the support base 1031 may further include a left guide wheel mounting base 10313 and a right guide wheel mounting base 10314. The left guide wheel mounting base 10313 includes a left rotating shaft mounting hole 103131. The right guide wheel mounting base 10314 includes a right rotating shaft mounting hole 103141. The support device 103 may further include a left bearing 1033, a right bearing 1034, a bearing inner spacer 1035, and a rotating shaft 1036. The left bearing 1033 is installed in the left bearing mounting groove of the guide wheel 1032. The right bearing 1034 is installed in the right bearing mounting groove 10323 of the guide wheel 1032. The bearing inner spacer 1035 is disposed in the central hole 10322 of the guide wheel 1032 for separating the left bearing 1033 and the right bearing 1034. The rotating shaft 1036 passes through the left bearing 1033, the bearing inner spacer 1035, and the right bearing 1034, and the left end and the right end of the rotating shaft 1036 respectively pass through the left rotating shaft mounting hole 103131 and the right rotating shaft mounting hole 103141.

[0099] In some embodiments, the left bearing 1033 and the right bearing 1034 are respectively installed in the left bearing mounting groove of the guide wheel 1032 and the right bearing mounting groove 10323, and separated by the bearing inner spacer 1035, which can limit the axial movement of the left bearing 1033 and the right bearing 1034 towards the center of the guide wheel 1032, and improve the stability and reliability of the support device 103.

[0100] As Figure 4 shown, in some embodiments, a left gasket 1039b and a right gasket 1039a are respectively provided on the left side of the left bearing 1033 and the right side of the right bearing 1034 to disperse the stress of the left bearing 1033 and the right bearing 1034, and protect the contact surfaces between the left bearing 1033 and the left guide wheel mounting base 10313, and between the right bearing 1034 and the right guide wheel mounting base 10314.

[0101] As Figure 4 shown, in some embodiments of the present disclosure, a left clamping groove 10361 and a right clamping groove 10362 are respectively provided at the left end and the right end of the rotating shaft 1036. The left clamping groove 10361 and the right clamping groove 10362 are respectively located outside the left guide wheel mounting base 10313 and the right guide wheel mounting base 10314. The support device 103 may further include a left snap ring 1037 and a right snap ring 1038. The left snap ring 1037 and the right snap ring 1038 are respectively disposed in the left clamping groove 10361 and the right clamping groove 10362 to limit the axial movement of the rotating shaft 1036.

[0102] As Figure 4As shown, in some embodiments of the present disclosure, the sample transfer device 100 with support may further include a left limit bearing mount 105, a right limit bearing mount 106, a left upward displacement limit bearing 107, and a right upward displacement limit bearing 108. The left limit bearing mount 105 is disposed on the left side of the support base 1031. The left limit bearing mount 105 may include a left inclined surface 1051. The right limit bearing mount 106 is disposed on the right side of the support base 1031. The right limit bearing mount 106 includes a right inclined surface 1061. The left upward displacement limit bearing 107 and the right upward displacement limit bearing 108 are respectively rotatably disposed on the left inclined surface 1051 and the right inclined surface 1061, and are respectively located obliquely above the left side and the right side of the sample transfer rod 102. The outer surfaces of the bearings of the left upward displacement limit bearing 107 and the right upward displacement limit bearing 108 are tangent to the outer surface of the sample transfer rod 102.

[0103] In some embodiments of the present disclosure, the upper left surface and the upper right surface of the sample transfer rod 102 can slide respectively by the rolling of the left upward displacement limit bearing 107 and the right upward displacement limit bearing 108, which can improve the smoothness of the sample transfer rod 102 during the sample transfer process, and can prevent the sample transfer rod 102 from moving upward, ensuring the stability of the sample transfer process.

[0104] As Figure 1 、 Figure 2 、 Figure 3 and Figure 4 As shown, in some embodiments of the present disclosure, the left limit bearing mount 105 may further include a left plane 1052. The right limit bearing mount 106 may further include a right plane 1062. The sample transfer device 100 with support may further include a guide rod 109, a left limit bearing 110, and a right limit bearing 111. The guide rod 109 is fixedly disposed above the sample transfer rod 102 along the axial direction of the sample transfer rod 102. The left limit bearing 110 and the right limit bearing 111 are respectively rotatably disposed on the left plane 1052 and the right plane 1062, and are respectively located on the left side and the right side of the guide rod 109. The outer surfaces of the bearings of the left limit bearing 110 and the right limit bearing 111 are tangent to the outer surface of the guide rod 109.

[0105] As Figure 4As shown, in some embodiments, the right upward displacement limiting bearing 108 can be threadedly connected to the right limiting bearing mounting seat 106 by screws 113c. Those skilled in the art can understand that this is only exemplary, and the right upward displacement limiting bearing 108 can also be disposed on the right limiting bearing mounting seat 106 by other means such as welding. Similarly, the left upward displacement limiting bearing 107 can be threadedly connected to the left limiting bearing mounting seat 105 by screws 113d, the right limiting bearing 111 can be threadedly connected to the right limiting bearing mounting seat 106 by screws 113a, and the left limiting bearing 110 can be threadedly connected to the left limiting bearing mounting seat 105 by screws 113b.

[0106] As Figure 4 shown, in some embodiments, a gasket 114c can also be provided between the right upward displacement limiting bearing 108 and the right limiting bearing mounting seat 106. Similarly, a gasket 114d can be provided between the left upward displacement limiting bearing 107 and the left limiting bearing mounting seat 105, a gasket 114a can be provided between the right limiting bearing 111 and the right limiting bearing mounting seat 106, and a gasket 114b can be provided between the left limiting bearing 110 and the left limiting bearing mounting seat 105.

[0107] Those skilled in the art can understand that although Figure 4 the shown right limiting bearing mounting seat 106 integrates a right inclined surface 1061 and a right plane 1062 to mount the right upward displacement limiting bearing 108 and the right limiting bearing 111, which can simplify the installation process. However, the right upward displacement limiting bearing 108 and the right limiting bearing 111 can also be respectively mounted on different mounting seats. Similarly, the left upward displacement limiting bearing 107 and the left limiting bearing 110 can also be respectively mounted on different mounting seats.

[0108] In some embodiments of the present disclosure, the left and right surfaces of the guide rod 109 can slide respectively by the rolling of the left limiting bearing 110 and the right limiting bearing 111, which can prevent the left and right crosstalk of the sample transfer rod 102 during the sample transfer process and ensure the stability of the sample transfer process.

[0109] In some embodiments of the present disclosure, the sample transfer device 100 with support can further include a sample transfer table 112 (such as Figure 5 , Figure 6 the shown sample transfer table 112). The sample transfer table 112 is disposed at the distal end of the sample transfer rod 102, and the linear motion of the sample transfer rod 102 drives the sample transfer table 112 to expand and contract, and the rotational motion of the sample transfer rod 102 drives the sample transfer table 112 to lift.

[0110] Figure 5 shows a schematic structural view of the sample transfer table 112 according to some embodiments of the present disclosure.

[0111] As Figure 5 shown, in some embodiments of the present disclosure, the sample transfer table 112 may include a fixed seat 1121, a gear 1122, a rack 1123, a sliding seat 1124, and a guide seat 1125. The proximal end of the fixed seat 1121 is rotatably (e.g., through a bearing) connected to the distal end of the sample transfer rod 102. A core rod (e.g., Figure 1 and Figure 2 the core rod 1021 shown) is disposed through the sample transfer rod, the proximal end of the core rod 1021 is fixedly connected to the sample transfer rod 102, and the distal end of the core rod 1021 is connected to the gear 1122. The rack 1123 meshes with the gear 1122 and is fixedly connected to the sliding seat 1124. The guide seat 1125 is fixedly connected to the fixed seat 1121. The guide seat 1125 includes a guide groove 11251. The sliding seat 1124 includes a guide member 11241 that cooperates with the guide groove 11251 of the guide seat 1125. The rotation of the sample transfer rod 102 drives the rotation of the core rod 1021, thereby driving the rotation of the gear 1122, so that the rack 1123 can perform a lifting motion, thereby driving the sliding seat 1124 to perform a lifting motion along the guide seat 1125.

[0112] Those skilled in the art can understand that Figure 5 the sample transfer table 112 shown is only exemplary, and a sample transfer table with other structures may also be used.

[0113] In some embodiments, the driving assembly is used to slide along and / or rotate around the sample transfer cavity 104 to drive the movement of the sample transfer rod 102, thereby driving the movement of the sample transfer table 112.

[0114] In some embodiments of the present disclosure, the left limit bearing 110 and the right limit bearing 111 limit the left and right displacements of the sample transfer rod 102, the left upward displacement limit bearing 107 and the right upward displacement limit bearing 108 limit the upward displacement of the sample transfer rod 102, and the guide wheel 1032 limits the downward displacement of the sample transfer rod 102. The large-sized guide wheel 1032 not only bears the rolling motion of the extension and retraction of the sample transfer rod 102 when sliding along the sample transfer cavity 104, but also provides a good support for the extended sample transfer rod 102, ensuring that the sample transfer rod 102 will not cause serious sagging after extension, which not only improves the smoothness of the movement of the sample transfer rod 102, but also improves the service life of the sample transfer rod 102.

[0115] Figure 6 shows a schematic structural diagram of a vacuum sample transfer system 1000 according to some embodiments of the present disclosure.

[0116] As Figure 6As shown, in some embodiments of the present disclosure, the vacuum sample transfer system 1000 may include a vacuum chamber 200 and a supported sample transfer device 100 according to any one of the embodiments of the present disclosure. The flange 101 of the supported sample transfer device 100 is vacuum-sealedly connected to the vacuum chamber 200.

[0117] It should be noted that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present disclosure shall be included within the protection scope of the present disclosure.

Claims

1. A sample transfer device with support, characterized in that, Comprising: Flange; Sample transfer rod, passing through the flange for transferring samples; Support device, comprising: Support base, fixedly connected to the distal end of the flange; And Guide wheels, rotatably arranged on the support base for supporting the sample transfer rod.

2. The sample transfer device with support according to claim 1, wherein, It further comprises a sample transfer cavity, the proximal end of the flange is vacuum-sealedly connected to the distal end of the sample transfer cavity, and the proximal end of the sample transfer rod is located inside the sample transfer cavity.

3. The sample transfer device with support according to claim 1, wherein The support base includes a plurality of longitudinal slotted holes; The support device further comprises a plurality of bolts, the plurality of bolts respectively pass through the plurality of longitudinal slotted holes and are threadedly connected to the flange, and the plurality of longitudinal slotted holes provide redundancy for the installation of the support base in the longitudinal direction.

4. The sample transfer device with support according to claim 1, characterized in that, The guide wheel includes: Guide wheel body; Central hole, located inside the guide wheel body; and Left bearing mounting groove and right bearing mounting groove, respectively located on the left and right sides of the guide wheel body and communicating with the central hole.

5. The sample transfer device with support according to claim 4, wherein The support base further includes a left guide wheel mounting seat and a right guide wheel mounting seat, the left guide wheel mounting seat includes a left rotating shaft mounting hole, and the right guide wheel mounting seat includes a right rotating shaft mounting hole; The support device further comprises: Left bearing, installed in the left bearing mounting groove of the guide wheel; Right bearing, installed in the right bearing mounting groove of the guide wheel; Bearing inner spacer sleeve, arranged in the central hole of the guide wheel for separating the left bearing and the right bearing; and Rotating shaft, passing through the left bearing, the bearing inner spacer sleeve and the right bearing, and the left end and the right end of the rotating shaft respectively pass through the left rotating shaft mounting hole and the right rotating shaft mounting hole.

6. The sample transfer device with support according to claim 5, wherein The left end and the right end of the rotating shaft are respectively provided with a left clamping groove and a right clamping groove, the left clamping groove and the right clamping groove are respectively arranged outside the left guide wheel mounting seat and the right guide wheel mounting seat, The support device further comprises a left circlip and a right circlip, the left circlip and the right circlip are respectively arranged in the left clamping groove and the right clamping groove to limit the axial movement of the rotating shaft.

7. The sample transfer device with support according to claim 1, characterized in that, It further comprises: Left side limit bearing mounting seat, arranged on the left side of the support base, including a left inclined plane; Right side limit bearing mounting seat, arranged on the right side of the support base, including a right inclined plane; and Left upward displacement limit bearing and right upward displacement limit bearing, respectively rotatably arranged on the left inclined plane and the right inclined plane and respectively located obliquely above the left side and the right side of the sample transfer rod, and the outer surfaces of the bearings of the left upward displacement limit bearing and the right upward displacement limit bearing are tangent to the outer surface of the sample transfer rod.

8. The sample transfer device with support according to claim 7, wherein The left side limit bearing mounting seat further includes a left plane, The right side limit bearing mounting seat further includes a right plane, The sample transfer device with support further comprises: Guide rod, fixedly arranged above the sample transfer rod along the axial direction of the sample transfer rod; and The left limit bearing and the right limit bearing are respectively rotatably arranged on the left plane and the right plane, and are respectively located on the left side and the right side of the guide rod. The outer surfaces of the bearings of the left limit bearing and the right limit bearing are tangent to the outer surface of the guide rod.

9. The supported sample transfer device according to claim 1, wherein, Further comprising: A sample transfer table is arranged at the distal end of the sample transfer rod. The linear movement of the sample transfer rod drives the sample transfer table to expand and contract, and the rotational movement of the sample transfer rod drives the sample transfer table to lift and lower.

10. A vacuum sample transfer system, characterized in that, Comprising: A vacuum chamber; And The sample transfer device with a support according to any one of claims 1-9, wherein the flange of the sample transfer device with a support is vacuum-sealed and connected to the vacuum chamber.

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