Waste liquid recovery device and waste liquid recovery system
The waste liquid recovery system with isolated spaces and connection system addresses the safety risks of chemical reactions in semiconductor manufacturing by segregating waste liquids from operational personnel, enhancing safety in research environments.
Patent Information
- Application Number
- CN202421061025.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-05-15
AI Technical Summary
During semiconductor manufacturing, safety hazards caused by the use of various chemicals, especially the problem that chemical reactions may cause harm to the operators due to chemical reactions in waste liquids.
A waste liquid recycling system is designed, including an operation module, a storage module and a connector. The operation module and a storage module are respectively arranged in the first and second spaces isolated and independent of each other. After the waste liquid is processed, it flows to the storage module through the connector for centralized storage. The exhaust device is used to prevent the diffusion of waste gas and the barrier hook prevents the return of liquid. The measurement is called monitoring the weight of the waste liquid storage part.
Effectively isolate the operators and waste liquids, prevent chemical reactions from causing harm to the operators, reduce safety hazards during the experiment, and ensure the convenience of air quality and waste liquid treatment.
Smart Images

Figure CN223102756U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, in particular to a waste liquid recovery device and a waste liquid recovery system. Background Art
[0002] With the development of my country's semiconductor industry, all walks of life have made relevant investments and have participated in all aspects of device manufacturing and processing. Scientific research institutes and schools in various places have established relevant semiconductor manufacturing R&D platforms, and various chemicals have also been widely used in semiconductor industry processing.
[0003] However, due to the different device manufacturing needs of various research institutes, schools and other research and development platforms, a wide variety of chemicals are used, which poses a safety hazard, and the safe use of chemicals has become a common problem. Utility Model Content
[0004] Based on this, it is necessary to provide a waste liquid recovery device and a waste liquid recovery system to address the potential safety hazards in semiconductor manufacturing and research and development.
[0005] A waste liquid recovery device, comprising:
[0006] An operation module, including several waste liquid treatment components;
[0007] A storage module, including a plurality of waste liquid storage parts; and
[0008] A connecting piece, the connecting piece connecting the plurality of waste liquid processing pieces and the plurality of waste liquid storage pieces;
[0009] The operation module and the storage module are respectively arranged in a first space and a second space which are isolated and independent from each other.
[0010] In one embodiment, the connecting member includes a first connecting tube and a second connecting tube, wherein two adjacent ends of the first connecting tube and the second connecting tube are spaced apart from each other and connected, and an end of the first connecting tube away from the second connecting tube is connected to the waste liquid treatment member, and an end of the second connecting tube away from the first connecting tube is connected to the waste liquid storage member.
[0011] In one of the embodiments, an exhaust device is further included, wherein the exhaust device includes an outer cover and a fan, wherein the outer cover surrounds the interval area between the first connecting pipe and the second connecting pipe, and the fan is used to drive the gas in the outer cover to flow to the outside.
[0012] In one embodiment, the first connecting pipe extends toward the second space, and a spacing area between the first connecting pipe and the second connecting pipe is located in the second space.
[0013] In one embodiment, the end of the second connecting pipe facing the first connecting pipe is funnel-shaped.
[0014] In one embodiment, a blocking hook is provided at the end of the first connecting pipe facing the second connecting pipe, and the free end of the blocking hook is located within the spaced area.
[0015] In one embodiment, the storage module further includes a spare container, the waste liquid storage member is disposed within the spare container, and a spare liquid storage space is reserved between the waste liquid storage member and the side wall of the spare container.
[0016] In one embodiment, the storage module further includes a weighing scale, and the weighing scale is disposed at the bottom of the waste liquid storage member.
[0017] In one embodiment, the operation module includes a plurality of waste liquid treatment members. A part of the plurality of waste liquid treatment members is a cleaning tank, and another part of the plurality of waste liquid treatment members is a funnel. The cleaning tank and / or the funnel communicate with the waste liquid storage member through a connecting member.
[0018] A waste liquid recovery system includes the above-mentioned waste liquid recovery device, and a first space and a second space that are isolated and independent from each other. The operation module and the storage module are respectively disposed in the first space and the second space, and the connecting member is fixed on the side walls of the first space and the second space.
[0019] During the use of the above-mentioned waste liquid recovery device, an operator is located in the first space where the operation module is set, conducts experiments on various chemicals, and puts the waste liquid after the experiment into the waste liquid treatment member. Then, the waste liquid flows through the connecting member into the waste liquid storage member in the second space. In this way, the waste liquid during the experiment process will eventually be centrally stored in the waste liquid storage member in the second space. The operator in the first space is isolated and independent from the waste liquid in the second space, which can prevent chemical reactions of the waste liquid from causing harm to the operator and reduce potential safety hazards during the experiment process. Description of the Drawings
[0020] Figure 1 It is a schematic structural diagram of a waste liquid recovery system in an embodiment of the present application;
[0021] Figure 2 It is a schematic structural diagram of a waste liquid recovery device in an embodiment of the present application.
[0022] Description of the drawing reference numerals: 100, waste liquid recovery device; 10, operation module; 11, waste liquid treatment member; 30, storage module; 32, waste liquid storage member; 34, spare container; 50, connecting member; 52, first connecting pipe; 54, second connecting pipe; 56, blocking hook; 70, air extraction device; 72, outer cover; 74, fan; 90, weighing scale; 200, first space; 300, second space; 1000, waste liquid recovery system. Detailed implementation manners
[0023] In order to make the above objects, features, and advantages of the present utility model more obvious and understandable, the following will describe the detailed implementation manners of the present utility model with reference to the accompanying drawings. Many specific details are set forth in the following description to fully understand the present utility model. However, the present utility model can be implemented in many other ways different from those described herein. Those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.
[0024] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.
[0025] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.
[0026] In the present utility model, unless otherwise clearly specified and defined, the terms "installed", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0027] In the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.
[0028] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.
[0029] As described in the background art, in research institutes, schools and other R & D platforms, in each link of semiconductor device manufacturing and processing, a variety of different types of chemicals are needed, and a large amount of waste liquid will be generated. If a chemical reaction occurs in the waste liquid and causes an explosion or other situations, it will cause physical harm to the operators and there are safety hazards.
[0030] Refer to Figure 1 and Figure 2 , to solve this technical problem, the present application provides a waste liquid recovery system 1000, including a waste liquid recovery device 100, and a first space 200 and a second space 300 that are isolated and independent from each other. The waste liquid recovery device 100 includes an operation module 10, a storage module 30 and a connection member 50. The operation module 10 includes a number of waste liquid treatment members 11, the storage module 30 includes a number of waste liquid storage members 32, and the connection member 50 connects the number of waste liquid treatment members 11 and the number of waste liquid storage members 32. The operation module 10 and the storage module 30 are respectively disposed in the first space 200 and the second space 300.
[0031] During the experiment, the operator is located in the first space 200 where the operation module 10 is set up, conducts experiments on various chemicals, and puts the waste liquid after the experiment into the waste liquid treatment part 11. Then, the waste liquid flows through the connecting piece 50 into the waste liquid storage part 32 in the second space 300. In this way, the waste liquid during the experiment process will ultimately be centrally stored in the waste liquid storage part 32 in the second space 300. The operator in the first space 200 is isolated and independent from the waste liquid in the second space 300, which can prevent chemical reactions of the waste liquid from causing harm to the operator and reduce potential safety hazards during the experiment.
[0032] Understandably, during actual use, two independent rooms can be used as the first space 200 and the second space 300 to keep the waste liquid away from the operator and protect the operator. For example, the first space 200 and the second space 300 are two spaces on the upper and lower floors, or the first space 200 and the second space 300 are two independent rooms on the same floor.
[0033] In some embodiments, the waste liquid treatment part 11 is a cleaning tank, or the waste liquid treatment part 11 is a funnel, which is used to receive the waste liquid during the experiment. When the operator conducts the experiment, the waste liquid during the experiment can be poured into the cleaning tank or the funnel, and then the waste liquid can flow through the connecting piece 50 into the waste liquid storage part 32. Optionally, the first space 200 includes an experimental area and a waste liquid treatment area. The cleaning tank is arranged in the experimental area, and the funnel is arranged in the waste liquid treatment area. In this way, the areas for the experiment and the waste liquid steps are separated to facilitate the arrangement and cleaning of the first space 200.
[0034] In some embodiments, the operation module 10 includes multiple waste liquid treatment parts 11. A part of the multiple waste liquid treatment parts 11 is a cleaning tank, and a part of the multiple waste liquid treatment parts 11 is a cleaning tank, and another part of the multiple waste liquid tanks is a funnel. The cleaning tank and / or the funnel are connected to the waste liquid storage part 32 through a connecting piece 50, that is, the cleaning tank and the funnel are respectively connected to the waste liquid storage part 32 through their respective corresponding connecting pieces 50, or the cleaning tank and the funnel are connected to the same connecting piece 50 and then connected to the waste liquid storage part 32. Specifically, how to connect each waste liquid treatment part 11 to the waste liquid storage part 32 can be set according to the actual situation.
[0035] Optionally, both the waste liquid storage part 32 and the connecting piece 50 are provided with multiple. The waste liquid storage part 32 is set to be multiple, and multiple waste liquid treatment parts 11 are connected to different waste liquid storage parts 32 through multiple connecting pieces 50 to guide the waste liquid into different waste liquid storage parts 32. In this way, the waste liquid is accommodated by multiple waste liquid storage parts 32. When cleaning the waste liquid storage part 32, the multiple small-volume waste liquid storage parts 32 can be easily carried and cleaned, improving the convenience of waste liquid treatment. Optionally, the waste liquid storage part 32 is a waste liquid bucket.
[0036] In some embodiments, the connecting member 50 includes a first connecting pipe 52 and a second connecting pipe 54. Two adjacent ends of the first connecting pipe 52 and the second connecting pipe 54 are spaced apart from each other and are communicatively arranged. Moreover, the end of the first connecting pipe 52 remote from the second connecting pipe is connected to the waste liquid treatment member 11, and the end of the second connecting pipe 54 remote from the first connecting pipe 52 is connected to the waste liquid storage member. In this way, the connecting member 50 is arranged as the first connecting pipe 52 and the second connecting pipe 54 that are spaced apart from each other and communicative, that is, the second connecting pipe 54 is located on the flow path of the fluid in the first connecting pipe 52. For example, the second connecting pipe 54 is located below the first connecting pipe 52, and the ends of the two are oppositely arranged. In this way, the waste liquid flowing out from the waste liquid treatment member 11 can smoothly flow into the second connecting pipe 54 after passing through the first connecting pipe 52 and finally be stored in the waste liquid storage member.
[0037] Moreover, the second connecting pipe 54 and the first connecting pipe 52 are spaced apart from each other. If a chemical reaction occurs in the waste liquid in the waste liquid bucket and causes backflow, the backflow liquid can flow out from the spaced area between the second connecting pipe 54 and the first connecting pipe 52, and will not flow back into the waste liquid treatment member 11, and will not affect the normal use of the operation module 10. In addition, when a chemical reaction occurs in the waste liquid treatment member 11 and generates gas, the generated gas can also flow along the second connecting pipe 54 to the spaced area between the second connecting pipe 54 and the first connecting pipe 52, and flow out from here, and will not continue to flow back along the first connecting pipe 52 to the operation module 10, causing pollution to the air in the first space 200.
[0038] Optionally, the first connecting pipe 52 and the second connecting pipe 54 are arranged along the wall, and the waste liquid storage member is placed against the wall to facilitate installation and fixation.
[0039] In some embodiments, the waste liquid recovery device 100 further includes an air extraction device 70. The air extraction device 70 includes an outer cover 72 and a fan 74. The outer cover 72 surrounds the spaced area between the first connecting pipe 52 and the second connecting pipe 54, and the fan 74 drives the gas in the outer cover 72 to flow to the outside. In this way, when there is gas generated by the waste liquid reaction in the spaced area, it can be restricted within the outer cover 72 and can also be drawn to the outside by the fan 74 to prevent the waste gas from diffusing and affecting the indoor air.
[0040] Specifically, in one embodiment, one end of the outer cover 72 is fixed to the end of the first connecting pipe 52 facing the second connecting pipe 54, and the other end of the outer cover 72 is fixed to the end of the second connecting pipe 54 facing the first connecting pipe 52. In this way, the outer cover 72 surrounds the outside of the spaced area to collect the gas volatilized from the spaced area.
[0041] In some embodiments, the first connecting pipe 52 extends towards the second space 300, and the spaced area between the first connecting pipe 52 and the second connecting pipe 54 is located within the second space 300, thus forming a spaced area within the second space 300. If the waste liquid or waste gas leaks at the spaced area, it will not flow towards the first space 200 to cause harm to the operator, further protecting the operator.
[0042] Optionally, the end of the second connecting pipe 54 facing the first connecting pipe 52 is funnel-shaped, thus expanding the opening at the end of the second connecting pipe 54 to effectively guide the liquid flowing out from the first connecting pipe 52 into the second connecting pipe 54 and prevent the liquid from flowing outside the flow channel when entering the second connecting pipe 54 from the first connecting pipe 52.
[0043] Also optionally, a blocking hook 56 is provided at the end of the first connecting pipe 52 facing the second connecting pipe 54, and the free end of the blocking hook 56 is located within the spaced area. In this way, after the waste liquid is collected in the waste liquid storage member 32, if someone wants to suck the waste liquid to obtain experimental information and the sucking member goes deep into the first connecting pipe 52 and wants to continue to go deep into the second connecting pipe 54, it will be blocked by the blocking hook 56 extending into the spaced area, preventing the theft of the waste liquid.
[0044] In some embodiments, the storage module 30 further includes a spare container 34, the waste liquid storage member 32 is disposed within the spare container 34, and a spare liquid storage space is reserved between the waste liquid storage member 32 and the side wall of the spare container 34. When a chemical reaction occurs in the waste liquid in the waste liquid storage member 32 and causes backflow, the backflow liquid can flow out from the second connecting pipe 54 and overflow into the spare liquid storage space, preventing the backflow waste liquid from flowing out and polluting the environment.
[0045] Optionally, the waste liquid storage member 32 is a waste liquid bucket, the spare container 34 is a waste liquid tank, the waste liquid bucket is placed within the waste liquid tank, and the overflowing waste liquid is contained by the waste liquid tank.
[0046] In some embodiments, the storage module 30 further includes a weighing scale 90, the weighing scale 90 is disposed at the bottom of the waste liquid storage member 32, and is used to monitor the weight of the waste liquid storage member 32. When the waste liquid storage member 32 is overweight, it can give an alarm to remind to clean the waste liquid storage member 32.
[0047] In the above waste liquid recovery system 1000, it includes a waste liquid recovery device 100, and the first space 200 and the second space 300 that are isolated from each other and independent. The waste liquid recovery device 100 includes an operation module 10, a storage module 30 and a connecting member 50. The operation module 10 includes a number of waste liquid treatment members 11, the storage module 30 includes a number of waste liquid storage members 32, the connecting member 50 connects the number of waste liquid treatment members 11 and the number of waste liquid storage members 32, and the operation module 10 and the storage module 30 are respectively disposed within the first space 200 and the second space 300.
[0048] When conducting experiments, the operator is located in the first space 200 where the operation module 10 is set up, conducts experiments on various chemicals, and puts the waste liquid after the experiments into the waste liquid treatment component 11. Then, the waste liquid flows through the connecting component 50 to the waste liquid storage component 32 in the second space 300. With such a setting, the waste liquid during the experiment process will ultimately be centrally stored in the waste liquid storage component 32 in the second space 300. The operator in the first space 200 is isolated and independent from the waste liquid in the second space 300, which can prevent chemical reactions of the waste liquid from causing harm to the operator and reduce potential safety hazards during the experiment process.
[0049] In some embodiments of the present application, there is also provided a waste liquid recovery device 100 as described in any of the above embodiments. The waste liquid recovery device 100 includes an operation module 10, a storage module 30, and a connecting component 50. The operation module 10 includes a number of waste liquid treatment components 11, the storage module 30 includes a number of waste liquid storage components 32, the connecting component 50 connects the number of waste liquid treatment components 11 and the number of waste liquid storage components 32, and the operation module 10 and the storage module 30 are respectively arranged in the first space 200 and the second space 300.
[0050] When conducting experiments, the operator is located in the first space 200 where the operation module 10 is set up, conducts experiments on various chemicals, and puts the waste liquid after the experiments into the waste liquid treatment component 11. Then, the waste liquid flows through the connecting component 50 to the waste liquid storage component 32 in the second space 300. With such a setting, the waste liquid during the experiment process will ultimately be centrally stored in the waste liquid storage component 32 in the second space 300. The operator in the first space 200 is isolated and independent from the waste liquid in the second space 300, which can prevent chemical reactions of the waste liquid from causing harm to the operator and reduce potential safety hazards during the experiment process.
[0051] In some embodiments, the connecting component 50 includes a first connecting pipe 52 and a second connecting pipe 54. Two adjacent ends of the first connecting pipe 52 and the second connecting pipe 54 are spaced apart from each other and connected in communication. Moreover, the end of the first connecting pipe 52 far from the second connecting pipe is connected to the waste liquid treatment component 11, and the end of the second connecting pipe 54 far from the first connecting pipe 52 is connected to the waste liquid storage component. In this way, the connecting component 50 is set as the first connecting pipe 52 and the second connecting pipe 54 that are spaced apart from each other and connected in communication, that is, the second connecting pipe 54 is on the flow path of the fluid in the first connecting pipe 52. For example, the second connecting pipe 54 is located below the first connecting pipe 52, and their ends are arranged opposite to each other. In this way, the waste liquid flowing out of the waste liquid treatment component 11 can smoothly flow into the second connecting pipe 54 through the first connecting pipe 52 and finally be stored in the waste liquid storage component.
[0052] Moreover, the second connecting pipe 54 and the first connecting pipe 52 are arranged at intervals from each other. If a chemical reaction occurs in the waste liquid in the waste liquid bucket and causes backflow, the backflow liquid can flow out from the interval area between the second connecting pipe 54 and the first connecting pipe 52, and will not return to the waste liquid treatment member 11 in the flow channel, thus not affecting the normal use of the operation module 10. In addition, when a chemical reaction occurs in the waste liquid treatment member 11 to generate gas, the generated gas can also flow along the second connecting pipe 54 to the interval area between the second connecting pipe 54 and the first connecting pipe 52, and flow out from here, and will not continue to flow back along the first connecting pipe 52 to the operation module 10 to pollute the air in the first space 200.
[0053] In some embodiments, the waste liquid recovery device 100 further includes an air extraction device 70. The air extraction device 70 includes an outer cover 72 and a fan 74. The outer cover 72 surrounds the interval area between the first connecting pipe 52 and the second connecting pipe 54, and the fan 74 drives the gas in the outer cover 72 to flow to the outside. Thus, when there is gas generated by the waste liquid reaction in the interval area, it can be restricted within the outer cover 72 and can also be drawn to the outside by the fan 74 to prevent the waste gas from diffusing and affecting the indoor air.
[0054] Specifically, in one embodiment, one end of the outer cover 72 is fixed to the end of the first connecting pipe 52 facing the second connecting pipe 54, and the other end of the outer cover 72 is fixed to the end of the second connecting pipe 54 facing the first connecting pipe 52. In this way, the outer cover 72 surrounds the outside of the interval area to collect the gas volatilized from the interval area.
[0055] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.
[0056] The above-described embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the utility model patent should be subject to the appended claims.
Claims
1. A waste liquid recovery device, characterized in that, Comprising: An operation module, including a number of waste liquid treatment components; A storage module, including a number of waste liquid storage components; And A connecting piece, the connecting piece connecting the number of waste liquid treatment components and the number of waste liquid storage components; Wherein, the operation module and the storage module are respectively arranged in a first space and a second space that are isolated and independent, and two independent rooms are respectively used as the first space and the second space, so as to keep the waste liquid away from the operators to protect the operators.
2. The waste liquid recovery device according to claim 1, wherein, The connecting piece includes a first connecting pipe and a second connecting pipe. Two adjacent ends of the first connecting pipe and the second connecting pipe are spaced apart and connected, and an end of the first connecting pipe away from the second connecting pipe is connected to the waste liquid treatment component, and an end of the second connecting pipe away from the first connecting pipe is connected to the waste liquid storage component.
3. The waste liquid recovery device according to claim 2, characterized in that, It further includes an air extraction device, the air extraction device including an outer cover and a fan. The outer cover surrounds the spaced area between the first connecting pipe and the second connecting pipe, and the fan is used to drive the gas in the outer cover to flow to the outside.
4. The waste liquid recovery device according to claim 2, wherein, The first connecting pipe extends towards the second space, and the spaced area between the first connecting pipe and the second connecting pipe is located in the second space.
5. The waste liquid recovery device according to claim 2, characterized in that, The end of the second connecting pipe facing the first connecting pipe is funnel-shaped.
6. The waste liquid recovery device according to claim 3, characterized in that, A blocking hook is provided at the end of the first connecting pipe facing the second connecting pipe, and the free end of the blocking hook is located in the spaced area.
7. The waste liquid recovery device according to any one of claims 1-6, characterized in that, The storage module further includes a spare container, the waste liquid storage component is arranged in the spare container, and a spare liquid storage space is reserved between the waste liquid storage component and the side wall of the spare container.
8. The waste liquid recovery device according to any one of claims 1-6, characterized in that, The storage module further includes a weighing scale, and the weighing scale is arranged at the bottom of the waste liquid storage component.
9. The waste liquid recovery device according to any one of claims 1-6, characterized in that, The operation module includes a plurality of waste liquid treatment components. A part of the plurality of waste liquid treatment components is a cleaning tank, and another part of the plurality of waste liquid treatment components is a funnel. The cleaning tank and / or the funnel are connected to the waste liquid storage component through one of the connecting pieces.
10. A waste liquid recovery system, characterized in that, It includes the waste liquid recovery device according to any one of the above claims 1-9, and a first space and a second space that are isolated and independent. The operation module and the storage module are respectively arranged in the first space and the second space, and the connecting piece is fixed on the side walls of the first space and the second space.