Spraying device and reaction furnace

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a spraying device and a reacting furnace, and solves the problems that in the related technology, a spraying device in a furnace cavity of the reacting furnace is high in installation difficulty and difficult to maintain in the later period. The spraying device is applied to the reacting furnace, the reacting furnace is provided with a furnace cavity and a furnace opening communicated with the furnace cavity, and the spraying device comprises a guide part arranged on the side, facing the furnace cavity, of the reacting furnace, and the guide part is configured to extend towards the interior of the furnace cavity from the position close to the furnace opening in the first direction; the sliding piece is detachably connected with the guiding piece, and the sliding piece can slide in the first direction relative to the guiding piece; and the spraying assembly is connected to the sliding piece, the sliding piece is matched with the guiding piece so that the spraying assembly can be pushed into or out of the furnace cavity from the furnace opening, and the spraying assembly is configured to introduce gas into the furnace cavity. According to the spraying device and the reacting furnace, the whole spraying device can be pushed into or out of the furnace cavity of the reacting furnace, installation is convenient, and later maintenance is facilitated.

Description

Technical Field

[0001] The present disclosure relates to the fields of semiconductor and photovoltaic technologies, and particularly to a spraying device and a reaction furnace. Background Art

[0002] In the fields of semiconductor and photovoltaic technologies, as one of the important processing technologies, the coating process requires placing a substrate into a coating device for film formation through a chemical reaction. For example, when processing a substrate using an Atomic Layer Deposition (ALD) device, during the growth process of the ALD process by the ALD device, one or more precursors need to be provided in a gaseous form to the furnace chamber of the reaction furnace through a spraying device provided in the reaction furnace.

[0003] In the reaction furnace of the ALD device, the space of the furnace chamber of the reaction furnace is small. During the process of assembling the spraying device into the furnace chamber, the staff needs to assemble the components of the spraying device into the furnace chamber one by one in sequence, with a high assembly difficulty, inconvenient operation, and difficult disassembly of the spraying device during later maintenance. Summary of the Utility Model

[0004] In view of this, embodiments of the present disclosure provide a spraying device and a reaction furnace to solve the problems of high installation difficulty and difficult later maintenance of the spraying device in the furnace chamber of the reaction furnace in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides a spraying device applied to a reaction furnace. The reaction furnace has a furnace chamber and a furnace opening communicating with the furnace chamber. The spraying device includes: a guiding member disposed on a side of the reaction furnace facing the furnace chamber, the guiding member being configured to extend into the furnace chamber along a first direction from a position close to the furnace opening; a sliding member detachably connected to the guiding member, and the sliding member being able to slide relative to the guiding member along the first direction; a spraying assembly connected to the sliding member, the cooperation between the sliding member and the guiding member enabling the spraying assembly to be pushed into or out of the furnace chamber from the furnace opening, and the spraying assembly being configured to introduce gas into the furnace chamber.

[0006] In some embodiments, the reaction furnace includes a cavity cover enclosing the furnace chamber, and the guiding member is detachably connected to a side of the cavity cover facing the furnace chamber; wherein, the guiding member is provided with a chute extending along the first direction, and one end of the guiding member facing the furnace opening is provided with an insertion opening communicating with the chute, and the sliding member can be inserted into the chute from the insertion opening.

[0007] In some embodiments, the guiding member is provided with depressions on opposite sides of the chute along a second direction perpendicular to the first direction, and the sliding member is provided with protrusions cooperating with the depressions at least on both sides in the second direction. After the sliding member is inserted into the chute from the insertion opening, at least a part of the protrusions can extend into the depressions.

[0008] In some embodiments, the cross-section of the protrusion in the first direction is arranged as a V-shaped protrusion structure, and the cross-section of the recess in the first direction is arranged as a V-shaped groove structure that cooperates with the protrusion.

[0009] In some embodiments, the guiding member includes: a plurality of first pulleys, arranged at intervals in the first direction, the first pulleys are connected to the cavity cover, the first pulleys can rotate in a horizontal plane, and recesses are arranged on the circumferential sides of the first pulleys; a plurality of second pulleys, arranged at intervals in the first direction, the second pulleys are connected to the cavity cover, the second pulleys can rotate in a horizontal plane, the second pulleys and the first pulleys are arranged at intervals in the second direction so as to form a chute extending in the first direction between the first pulleys and the second pulleys, recesses are arranged on the circumferential sides of the second pulleys, and the sliding member can rollingly contact the first pulleys and the second pulleys along the first direction.

[0010] In some embodiments, it further includes: a blocking member, detachably connected to the side of the guiding member facing the furnace opening, and the blocking member can block at least a part of the insertion opening in the first direction, and the blocking member is configured to block the sliding member from disengaging from the chute.

[0011] In some embodiments, it further includes: a limiting member, connected to the guiding member, and the limiting member is arranged on the side of the chute away from the insertion opening, and the limiting member is configured to limit the sliding member inserted from the insertion opening from continuing to move along the chute in the direction away from the furnace opening.

[0012] In some embodiments, it further includes: at least one first mounting member, connected to the sliding member; at least one second mounting member, connected to the sliding member, and the first mounting member and the second mounting member are oppositely arranged on both sides of the sliding member in the second direction, the second direction is perpendicular to the first direction, and at least a part of the spraying assembly is located between the first mounting member and the second mounting member in the second direction so that the first mounting member and the second mounting member are respectively detachably connected to the side walls of the spraying assembly.

[0013] In a second aspect, an embodiment of the present disclosure further provides a reaction furnace, including: a furnace body, provided with a furnace cavity and a furnace opening communicating with the furnace cavity; the spraying device described above, and the spraying device is installed in the furnace cavity of the furnace body.

[0014] In some embodiments, the furnace body includes: a main body, provided with a groove having an opening, and a furnace opening communicating with the groove is provided on the side wall of the main body; a furnace door, covering the furnace opening, and the furnace door is configured to be able to open or close the furnace opening; a cavity cover, detachably connected to the main body, the cavity cover covers the opening so that the main body, the furnace door and the cavity cover enclose to form a furnace cavity, and the guiding member of the spraying device is detachably connected to the side of the cavity cover facing the furnace cavity.

[0015] A spraying device and a reaction furnace provided by an embodiment of the present disclosure can assemble various components of a spraying assembly outside the furnace chamber of the reaction furnace, and then utilize a sliding member connected to the spraying assembly and a guiding member preset inside the reaction furnace. The sliding member and the guiding member are detachably connected. The spraying assembly as a whole can enter the furnace chamber from the furnace opening, and at a position close to the furnace opening, connect the sliding member with the guiding member so that the sliding member cooperates with the guiding member. The sliding member can move relative to the guiding member along a first direction into the furnace chamber, and then under the action of an external force, push the spraying assembly as a whole from the furnace opening into the interior of the furnace chamber, and then connect the joint of the spraying assembly with the transmission pipeline of the gas transmission system. When maintenance of the spraying device is required, only apply an external force to the spraying assembly from the furnace opening. The sliding member can move relative to the guiding member along the first direction towards the furnace opening direction, so that the spraying assembly is pushed out of the main body from the furnace opening, and the staff can directly disassemble and maintain the spraying assembly externally, thereby reducing the difficulty of installation and disassembly of the spraying device and facilitating later maintenance.

[0016] In addition, the guiding member is configured to extend from a position close to the furnace opening along the first direction into the furnace chamber, which can facilitate the staff to complete the pushing or pushing out of the spraying assembly at the furnace opening position without reaching into the furnace chamber with their hands, further reducing the loading and unloading difficulty and improving the safety factor of the staff for loading and unloading the spraying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By describing the embodiments of the present disclosure in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present disclosure will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present disclosure, and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation to the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 Shown is a perspective view of a reaction furnace provided by an embodiment of the present disclosure.

[0019] Figure 2 Shown is a side view of the reaction furnace provided by an embodiment of the present disclosure in a state where the furnace opening is open.

[0020] Figure 3 Shown as Figure 2 a partial enlarged view of area A in

[0021] Figure 4 Shown as Figure 3 a partial enlarged view of area B in

[0022] Figure 5 Shown as Figure 4 a schematic diagram of the reaction furnace without the spraying assembly connected in

[0023] Figure 6The figure shows a schematic diagram of the cooperation between the guide member and the sliding member in the spray device provided by an embodiment of the present disclosure.

[0024] Figure 7 The figure shows a schematic diagram of the spray device provided by an embodiment of the present disclosure disposed on the cavity cover.

[0025] Figure 8 The figure shows a front view of the cooperation between the spray device provided by an embodiment of the present disclosure and the cavity cover.

[0026] Figure 9 As shown in Figure 8 a partial enlarged view of region C in

[0027] Figure 10 The figure shows a side view of the cooperation between the spray device provided by an embodiment of the present disclosure and the cavity cover.

[0028] Reference numerals:

[0029] 10, reaction furnace; 1, spray device; 11, guide member; 11a, chute; 111, first pulley; 112, second pulley; 113, depression; 114, insertion opening; 115, mounting seat; 12, sliding member; 121, protrusion; 13, spray assembly; 14, blocking member; 15, limiting member; 16, first mounting member; 17, second mounting member; 2, furnace body; 21, body; 22, cavity cover, 23, furnace door; 2a, furnace cavity; 24, transmission pipeline; X, first direction; Y, second direction. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present disclosure.

[0031] Figure 1 The figure shows a perspective view of the reaction furnace provided by an embodiment of the present disclosure. Figure 2 The figure shows a side view of the reaction furnace provided by an embodiment of the present disclosure in the state where the furnace opening is open. Among them, the direction indicated by arrow X is the first direction, and the direction indicated by arrow Y is the second direction. The first direction X and the second direction Y are perpendicular to each other and will not be separately emphasized hereafter. In addition, Figure 1 in order to facilitate observing the spray device in the furnace cavity, a partial position of the reaction furnace is set to be transparent.

[0032] The embodiments of the present disclosure provide a spray device, which is applied to the reaction furnace 10, as Figure 1 and Figure 2, the reaction furnace 10 is provided with a spraying device 1, and the reaction furnace 10 is provided with a furnace cavity 2a and a furnace opening communicating with the furnace cavity 2a. The spraying device 1 is installed in the furnace cavity 2a. The spraying device 1 includes a guiding member 11, a sliding member 12 and a spraying assembly 13. The guiding member 11 is arranged on one side of the reaction furnace 10 facing the furnace cavity 2a. The guiding member 11 is configured to extend into the furnace cavity 2a along the first direction X from a position close to the furnace opening. The sliding member 12 is detachably connected to the guiding member 11, and the sliding member 12 can slide relative to the guiding member 11 along the first direction X. The spraying assembly 13 is connected to the sliding member 12. The cooperation between the sliding member 12 and the guiding member 11 enables the spraying assembly 13 to be pushed into or out of the furnace cavity 2a from the furnace opening. The spraying assembly 13 is configured to introduce gas into the furnace cavity 2a.

[0033] It can be understood that the reaction furnace 10 can be, for example, the ALD reaction furnace of an ALD device. Further, the ALD reaction furnace can be a plate-type reaction furnace, that is, the ALD reaction furnace is set to a cuboid structure, and the furnace cavity 2a is set to an enclosed space that encloses a cuboid. In other embodiments, the reaction furnace 10 can also be other chemical reaction furnaces with a spraying device 1 and used for depositing thin films, without specific limitation. In the embodiments of the present disclosure, the specific structure of the spraying device 1 is described in detail by taking the plate-type reaction furnace of the ALD device as an example.

[0034] It should be emphasized that the reaction furnace 10 can be set to the structure of a cylindrical furnace body 2. A process position for carrying a substrate can be provided in the furnace cavity 2a of the furnace body 2. The process position can carry the substrate through a carrier provided in the furnace cavity 2a, and the process surface of the substrate is exposed, so that the process surface can be deposited with a thin film through the ALD process.

[0035] The ALD device can also include a gas transmission system. The gas transmission system is connected to the spraying device 1 through one or more transmission pipelines 24, so that the spraying device 1 can introduce gas into the furnace cavity 2a. Specifically, in the ALD process, the precursor sources provided to the furnace cavity 2a by the gas transmission system through the spraying device 1 include one or more. The precursor sources include: gaseous sources, solid sources and liquid sources. The gaseous sources are directly connected to the spraying device 1 of the furnace cavity 2a by the transmission pipeline 24 plus a pulse valve. The solid sources and liquid sources will mainly be loaded into the source bottle by an inert gas and enter the furnace cavity 2a in a gaseous form through the transmission pipeline 24 and the spraying device 1. Through the opening and closing of the pulse valve in the gas transmission system and the spraying device 1, the precursor source gases enter the furnace cavity 2a alternately in the form of gases, so as to realize the growth of one or more layers of thin films on the process surface of the substrate.

[0036] Optionally, the reaction furnace 10 can also include an exhaust device, a tail gas treatment device, etc. that communicate with the furnace cavity 2a to ensure the stability of the air flow in the furnace cavity 2a, without specific limitation.

[0037] Optionally, the spraying assembly 13 has an air inlet and an air outlet. The air inlet is communicated with the transmission pipeline 24 of the gas transmission system through a joint, and the air outlet is configured to introduce gas into the furnace chamber 2a. It can be understood that the number, arrangement form, and setting position of the air inlet and air outlet of the spraying assembly 13 can be adaptively adjusted according to requirements. In addition, the spraying assembly 13 may specifically include a plurality of components such as a gas distribution box and a spraying chamber. After the plurality of components are assembled, the spraying assembly 13 is finally formed, and the specific structure will not be described in detail.

[0038] The spraying device 1 provided by the present disclosure can assemble the components of the spraying assembly 13 together outside the furnace chamber 2a of the reaction furnace 10, and utilize the sliding member 12 connected to the spraying assembly 13 and the guiding member 11 preset in the reaction furnace 10. The sliding member 12 and the guiding member 11 are detachably connected. The whole spraying assembly 13 can enter the furnace chamber 2a from the furnace opening, and at a position close to the furnace opening, the sliding member 12 is connected to the guiding member 11, so that the sliding member 12 cooperates with the guiding member 11, and the sliding member 12 can move relative to the guiding member 11 in the first direction X into the furnace chamber 2a. Then, under the action of an external force, the whole spraying assembly 13 is pushed into the interior of the furnace chamber 2a from the furnace opening, and then the joint of the spraying assembly 13 is connected to the transmission pipeline 24 of the gas transmission system. When the spraying device 1 needs to be overhauled, only an external force needs to be applied to the spraying assembly 13 from the furnace opening, and the sliding member 12 can move relative to the guiding member 11 in the first direction X towards the furnace opening direction, so that the spraying assembly 13 is pushed out of the reaction furnace 10 from the furnace opening, and the staff can directly disassemble and overhaul the spraying assembly 13 outside, thereby reducing the installation and disassembly difficulty of the spraying device 1 and facilitating later maintenance.

[0039] In addition, the guiding member 11 is configured to extend into the furnace chamber 2a along the first direction X from a position close to the furnace opening, which can facilitate the staff to complete the pushing or pushing out of the spraying assembly 13 at the furnace opening position without reaching into the furnace chamber 2a with their hands, further reducing the loading and unloading difficulty and improving the safety factor of the staff for loading and unloading the spraying device 1.

[0040] In an alternative embodiment, the furnace body 2 includes a main body 21, a cavity cover 22 and a furnace door 23. The main body 21 is provided with a groove having an opening. A furnace opening communicating with the groove is provided on the side wall of the main body 21. The furnace door 23 covers the furnace opening. The furnace door 23 is configured to be able to open or close the furnace opening. The cavity cover 22 is detachably connected to the main body 21. The cavity cover 22 covers the opening. The main body 21, the furnace door 23 and the cavity cover 22 enclose the groove to form a furnace cavity 2a. The guide member 11 is detachably connected to the side of the cavity cover 22 facing the furnace cavity 2a. The furnace body 2 is provided as a split structure including the main body 21 and the cavity cover 22, so that the cavity cover 22 can be opened to facilitate the installation of the guide member 11 and the installation of other components inside the main body 21. It should be emphasized that the main body 21 includes a bottom wall and a plurality of side walls that enclose the groove. The bottom wall and the plurality of side walls can be integrally formed or detachably connected, and no specific limitation is made.

[0041] Optionally, the furnace door 23 can be rotatably connected to the position corresponding to the furnace opening of the reaction furnace 10 through a rotating shaft, a hinge, etc., or can be detachably connected to the reaction furnace 10 to facilitate the opening and closing of the furnace door 23.

[0042] Optionally, in order to ensure the airtightness of the furnace cavity 2a, a sealing member can be provided at the position where the furnace door 23 contacts the furnace opening, and a sealing member can also be provided at the position where the cavity cover 22 contacts the main body 21. The sealing member can be, for example, sealing rubber, and no specific limitation is made.

[0043] Figure 3 As shown in Figure 2 a partial enlarged view of area A in Figure 4 As shown in Figure 3 a partial enlarged view of area B in Figure 5 As shown in Figure 4 a schematic diagram of the non-connected spray assembly 13 in Figure 6 As shown is a schematic diagram of the cooperation between the guide member and the sliding member in the spray device provided by an embodiment of the present disclosure.

[0044] As Figures 3 to 6 , the guide member 11 is provided with a chute 11a extending in the first direction X, and an insertion port 114 communicating with the chute 11a is provided at one end of the guide member 11 facing the furnace opening. The sliding member 12 can be inserted into the chute 11a from the insertion port 114. By using the provided chute 11a and the insertion port 114 communicating with the chute 11a, the sliding member 12 can be inserted into the chute 11a from the insertion port 114 at the furnace opening, so as to realize the detachable connection between the sliding member 12 and the guide member 11, and enable the connected sliding member 12 to slide into the furnace cavity 2a along the guide member 11, which is convenient for the staff to integrally connect the spray assembly 13 into the furnace cavity 2a, and the installation is convenient and fast.

[0045] Optionally, the chute 11a can penetrate through both ends of the guide member 11 in the first direction X, and the end of the chute 11a facing the furnace mouth is used as the insertion port 114. The shape of the insertion port 114 can match the shape of the provided chute 11a or be larger than the size of the chute 11a to facilitate the installation of the sliding member 12. It should be emphasized that the specific structure of the chute 11a can be selected according to the actual situation and is not specifically limited.

[0046] In some alternative embodiments, the guide member 11 is provided with recesses 113 on opposite sides of the chute 11a in the second direction Y, and the sliding member 12 is provided with protrusions 121 that cooperate with the recesses 113 at least on both sides in the second direction Y. After the sliding member 12 is inserted into the chute 11a from the insertion port 114, at least a part of the protrusion 121 can extend into the recess 113. The provision of the protrusion 121 and the recess 113 enables the sliding member 12 to be restricted within the chute 11a of the guide member 11 and move along the first direction X, preventing the sliding member 12 from falling off, thereby integrally mounting the spray assembly 13 on the cavity cover 22 and further improving the connection stability between the guide member 11 and the sliding member 12.

[0047] Optionally, the cross-section of the protrusion 121 in the first direction X is provided with a V-shaped protrusion structure, and the cross-section of the recess 113 in the first direction X is provided with a V-shaped groove structure that cooperates with the V-shaped protrusion. Further, it avoids the sliding member 12 from easily falling off in the state of cooperating with the guide member 11. It should be emphasized that the cross-sections of the protrusion 121 and the recess 113 can also be provided with other shaped mating structures, such as circular, wavy, etc., and are not specifically limited.

[0048] In some embodiments, the guide member 11 includes a plurality of first pulleys 111 and a plurality of second pulleys 112. The plurality of first pulleys 111 are arranged at intervals along the first direction X. The first pulleys 111 are connected to the cavity cover 22. The first pulleys 111 can rotate in a horizontal plane. A recess 113 is arranged on the circumferential side of the first pulleys 111. The plurality of second pulleys 112 are arranged at intervals along the first direction X. The second pulleys 112 are connected to the cavity cover 22. The second pulleys 112 can rotate in a horizontal plane. The second pulleys 112 and the first pulleys 111 are arranged at intervals in the second direction Y, so as to enclose a chute 11a extending along the first direction X between the first pulleys 111 and the second pulleys 112. A recess 113 is arranged on the circumferential side of the second pulleys 112. The sliding member 12 can rollingly contact the first pulleys 111 and the second pulleys 112 along the first direction X. By using the provided first pulleys 111 and second pulleys 112, the sliding member 12 can be inserted from the insertion opening 114, and the protrusion 121 of the sliding member 12 is restricted within the recesses 113 provided on the first pulleys 111 and the second pulleys 112. When the sliding member 12 is pushed into the furnace cavity 2a along the first direction X under an external force, the first pulleys 111 and the second pulleys 112 can rotate in a horizontal plane. The rotation of the pulleys reduces the friction coefficient at the mating position of the protrusion 121 and the recess 113 during the movement of the sliding member 12, thereby reducing wear and increasing the service life.

[0049] It can be understood that the plurality of first pulleys 111 and the plurality of second pulleys 112 can be arranged in a one-to-one correspondence. For example, along the first direction X, in the direction from the furnace opening into the furnace cavity 2a, on the side facing the furnace opening between the first first pulley 111 and the first second pulley 112, an insertion opening 114 is enclosed. The second first pulley 111 and the second second pulley 112 are arranged at intervals on the side away from the furnace opening, and so on, so that the gaps between the plurality of first pulleys 111 and the plurality of second pulleys 112 form a chute 11a extending along the first direction X. The distance between any two adjacent first pulleys 111 along the first direction X can be the same or different. The distance between any two adjacent second pulleys 112 can be the same or different. Along the second direction Y, the first pulleys 111 and the second pulleys 112 can be arranged opposite to each other or offset. They can be adaptively adjusted according to actual needs and are not specifically limited.

[0050] Optionally, the guide member 11 can include a mounting seat 115. The mounting seat 115 is detachably connected to the cavity cover 22. The plurality of first pulleys 111 and the plurality of second pulleys 112 are connected to the mounting seat 115 through rotating shafts, so as to facilitate the removal of the entire guide member 11 by disassembling the mounting seat 115, which is convenient and fast.

[0051] In some alternative embodiments, a pulley may also be used as the sliding member 12, and the guiding member 11 may be directly configured as a chute 11a structure formed in the mounting base 115 and extending along the first direction X. The pulley and the corresponding side walls of the chute 11a are provided with matching protrusions 121 and depressions 113 so that the pulley can roll along the chute 11a. The guiding member 11 and the sliding member 12 may also adopt other mating structures capable of achieving sliding, without specific limitations.

[0052] Figure 7 The figure shows a schematic diagram of a spray device provided in an embodiment of the present disclosure being disposed on a cavity cover. Figure 8 The figure shows a front view of the spray device provided in an embodiment of the present disclosure in cooperation with the cavity cover. Figure 9 As shown in Figure 8 the partial enlarged view of region C in Figure 10 The figure shows a side view of the spray device provided in an embodiment of the present disclosure in cooperation with the cavity cover.

[0053] As Figures 7 to 10 , the spray device 1 further includes a blocking member 14. The blocking member 14 is detachably connected to the side of the guiding member 11 facing the furnace opening, and the blocking member 14 can block at least a part of the insertion opening 114 in the first direction X. The blocking member 14 is configured to prevent the sliding member 12 from disengaging from the chute 11a. After the spray assembly 13 is pushed into place from the furnace opening, the blocking member 14 is disposed at the insertion opening 114 to limit the sliding member 12 from moving along the guiding member 11 towards the furnace opening direction under external forces such as vibration, ensuring the stability of the spray assembly 13 installed in the furnace cavity 2a.

[0054] It can be understood that the blocking member 14 may be, for example, configured as a plate-like structure on one side of the mounting base 115, and the blocking member 14 can be detachably connected to the mounting base 115 through bolts. When it is necessary to push the spray assembly 13 out of the furnace opening, only the blocking member 14 needs to be disassembled, and then the entire spray assembly 13 can be pulled out, which is convenient and fast.

[0055] In some embodiments, the spray device 1 further includes a limiting member 15. The limiting member 15 is connected to the guiding member 11, and the limiting member 15 is disposed on the side of the chute 11a away from the insertion opening 114. The limiting member 15 is configured to limit the sliding member 12 inserted from the insertion opening 114 from continuing to move along the chute 11a in the direction away from the furnace opening. The setting of the limiting member 15 enables the sliding member 12 to move along the chute 11a until it comes into contact and cooperation with the limiting member 15 during the process of pushing the spray assembly 13 into the furnace cavity 2a, at which time the spray assembly 13 cannot be further pushed, indicating that the spray assembly 13 is in place. At this time, the joint of the spray assembly 13 is connected to the transmission pipeline 24. The spray assembly 13 at this position can diffuse gas into the furnace cavity 2a more evenly.

[0056] Optionally, the limiting member 15 can be detachably connected to the side of the chute 11a away from the furnace opening. When the chute 11a is directly set as the groove structure of the mounting seat 115, the end of the chute 11a in the direction away from the furnace opening can also not penetrate the mounting seat 115, so that the side wall of the mounting seat 115 directly forms the limiting member 15, without specific limitation.

[0057] It can be understood that when the chute 11a is composed of a plurality of first pulleys 111 and a plurality of second pulleys 112, the limiting member 15 can be set to the same plate-like structure as the blocking member 14, and in the positive projection along the first direction X, the limiting member 15 can cover at least part of the insertion opening 114, thereby preventing the sliding member 12 from moving excessively and disengaging from the guiding member 11.

[0058] In some embodiments, the spraying device 1 further includes at least one first mounting member 16 and at least one second mounting member 17, which are respectively connected to the sliding member 12, and the first mounting member 16 and the second mounting member 17 are oppositely arranged on both sides of the sliding member 12 in the second direction Y, and at least part of the spraying assembly 13 is located between the first mounting member 16 and the second mounting member 17 in the second direction Y, so that the first mounting member 16 and the second mounting member 17 are respectively detachably connected to the side wall of the spraying assembly 13. The spraying assembly 13 is detachably connected by the provided first mounting member 16 and second mounting member 17, avoiding interference with the air inlet and outlet holes of the spraying assembly 13.

[0059] Optionally, a plurality of first mounting members 16 can be provided, and the plurality of first mounting members 16 are arranged at intervals along the first direction X. A plurality of second mounting members 17 can be provided, and the plurality of second mounting members 17 are arranged at intervals along the first direction X, and the plurality of second mounting members 17 can be arranged in one-to-one correspondence with the plurality of first mounting members 16. To improve the installation stability of the spraying assembly 13.

[0060] It should be emphasized that the provided first mounting member 16 and second mounting member 17 can be set as square or circular rod-shaped structures extending in the vertical direction, and an avoidance groove can be provided at the position where they cooperate with the spraying assembly 13 to avoid interference with relevant parts of the spraying assembly 13. In other examples, the first mounting member 16 and the second mounting member 17 can also be set as other matching structures, and appropriate positions and appropriate shapes can be selected for connection according to the specific structures of the sliding member 12 and the spraying assembly 13 and their matching relationships, without specific limitation.

[0061] The embodiment of the present disclosure also provides a reaction furnace, such as Figure 1 , the reaction furnace 10 includes a furnace body 2 and a spraying device 1. The furnace body 2 is provided with a furnace cavity 2a and a furnace opening communicating with the furnace cavity 2a, and the spraying device 1 is installed in the furnace cavity 2a of the furnace body 2. The spraying device 1 can refer to the relevant descriptions of the above embodiments and will not be elaborated herein.

[0062] Optionally, the furnace body 2 includes a main body 21. The main body 21 is provided with a groove having an opening, and a furnace opening communicating with the groove is provided on the side wall of the main body 21; a furnace door 23 covers the furnace opening, and the furnace door 23 is configured to be able to open or close the furnace opening; a cavity cover 22 is detachably connected to the main body 21, and the cavity cover 22 covers the opening so that the main body 21, the furnace door 23 and the cavity cover 22 enclose a furnace cavity 2a. The guiding member 11 of the spraying device 1 is detachably connected to the side of the cavity cover 22 facing the furnace cavity 2a. When the furnace door 23 is in the open state, the guiding member 11 can be connected to the cavity cover 22, and the spraying device 1 can be pushed into the furnace cavity 2a from the furnace opening, reducing the installation difficulty of the spraying device 1.

[0063] It can be understood that the reaction furnace 10 can be, for example, an ALD reaction furnace of an ALD device. Further, the ALD reaction furnace can be a plate-type reaction furnace, that is, the ALD reaction furnace is arranged in a cuboid structure, and the furnace cavity 2a is arranged as an enclosed space enclosing a cuboid. In other embodiments, the reaction furnace 10 can also be other chemical reaction furnaces with a spraying device 1 and used for depositing thin films, which is not specifically limited.

[0064] In the embodiments of the present disclosure, if not clearly limited, the connection form can be detachably connected by means such as bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, non-detachable connection can be carried out by means such as welding and bonding.

[0065] The basic principles of the present disclosure have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present disclosure. In addition, the above-mentioned specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present disclosure to necessarily adopt the above specific details to implement.

[0066] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present disclosure are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used herein refer to the word "and / or" and can be used interchangeably with it, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with it.

[0067] It should also be noted that in the devices, equipment and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations shall be regarded as equivalent solutions of the present disclosure.

[0068] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Thus, the present disclosure is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0069] The above description has been presented for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize some of their variations, modifications, alterations, additions, and subcombinations.

Claims

1. A spraying device, characterized in that, Applied to a reaction furnace, the reaction furnace having a furnace chamber and a furnace opening communicating with the furnace chamber, the spraying device comprising: A guiding member disposed on a side of the reaction furnace facing the furnace chamber, the guiding member being configured to extend into the furnace chamber from a position near the furnace opening along a first direction; A sliding member detachably connected to the guiding member, and the sliding member being capable of sliding relative to the guiding member along the first direction; A spraying assembly connected to the sliding member, the cooperation between the sliding member and the guiding member enabling the spraying assembly to be pushed into or out of the furnace chamber from the furnace opening, the spraying assembly being configured to introduce a gas into the furnace chamber.

2. The spray device according to claim 1, wherein, The reaction furnace includes a chamber cover enclosing the furnace chamber, and the guiding member is detachably connected to a side of the chamber cover facing the furnace chamber; Wherein, the guiding member is provided with a chute extending along the first direction, and one end of the guiding member facing the furnace opening is provided with an insertion opening communicating with the chute, and the sliding member can be inserted into the chute from the insertion opening.

3. The spray device according to claim 2, characterized in that, The guiding member is provided with depressions on opposite sides of the chute along a second direction perpendicular to the first direction, and the sliding member is provided with protrusions cooperating with the depressions at least on both sides in the second direction. After the sliding member is inserted into the chute from the insertion opening, at least a part of the protrusions can extend into the depressions.

4. The spray device according to claim 3, characterized in that, The cross-section of the protrusion in the first direction is provided with a V-shaped protrusion structure, and the cross-section of the depression in the first direction is provided with a V-shaped groove structure cooperating with the protrusion.

5. The spray device according to claim 3, characterized in that, The guiding member includes: A plurality of first pulleys arranged at intervals along the first direction, the first pulleys being connected to the chamber cover, the first pulleys being capable of rotating in a horizontal plane, and the depressions being arranged on the circumferential sides of the first pulleys; A plurality of second pulleys arranged at intervals along the first direction, the second pulleys being connected to the chamber cover, the second pulleys being capable of rotating in a horizontal plane, and the second pulleys and the first pulleys being arranged at intervals in the second direction so as to form the chute extending along the first direction between the first pulleys and the second pulleys, the depressions being arranged on the circumferential sides of the second pulleys, and the sliding member being capable of rollingly contacting the first pulleys and the second pulleys along the first direction.

6. The spray device according to any one of claims 2-5, characterized in that, Further comprising: A blocking member detachably connected to a side of the guiding member facing the furnace opening, and the blocking member being capable of blocking at least a part of the insertion opening in the first direction, the blocking member being configured to block the sliding member from disengaging from the chute.

7. The spraying device according to any one of claims 2-5, characterized in that, Further comprising: A limiting member connected to the guiding member, and the limiting member being disposed on a side of the chute away from the insertion opening, the limiting member being configured to limit the sliding member inserted from the insertion opening from continuing to move along the chute in a direction away from the furnace opening.

8. The spray device according to any one of claims 2-5, characterized in that, Further comprising: At least one first mounting member connected to the sliding member; At least one second mounting member, which is connected to the sliding member, and the first mounting member and the second mounting member are oppositely arranged on both sides of the sliding member in a second direction, the second direction being perpendicular to the first direction, and at least a part of the spray assembly is located between the first mounting member and the second mounting member in the second direction, so that the first mounting member and the second mounting member are respectively detachably connected to the side wall of the spray assembly.

9. A reactor, characterized in that, Comprising: A furnace body, which is provided with a furnace cavity and a furnace opening communicating with the furnace cavity; The spray device according to any one of claims 1 to 8, wherein the spray device is installed in the furnace cavity of the furnace body.

10. The reactor according to claim 9, characterized in that, The furnace body comprises: A main body, which is provided with a groove having an opening, and a furnace opening communicating with the groove is provided on the side wall of the main body; A furnace door, which covers the furnace opening, and the furnace door is configured to be able to open or close the furnace opening; A cavity cover, which is detachably connected to the main body, and the cavity cover covers the opening, so that the main body, the furnace door and the cavity cover enclose to form the furnace cavity, and the guiding member of the spray device is detachably connected to the side of the cavity cover facing the furnace cavity.

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