Aluminum oxide ceramic plate levelness detection equipment

The device addresses the inability of existing methods to detect S-type curvature in ceramic boards by using a vacuum pressure system to assess flatness across multiple slots, enabling precise detection.

CN223106917UActive Publication Date: 2025-07-15HUNAN NAMI XIAOXIN SEMICON CO LTD
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Patent Information

Application Number
CN202422360452.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-26
Publication Date
2025-07-15
Estimated Expiration
2034-09-26

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Abstract

The utility model provides aluminum oxide ceramic plate levelness detection equipment, and relates to the technical field of aluminum oxide ceramic plate levelness detection. The aluminum oxide ceramic plate levelness detection equipment comprises a detection table and a vacuum pump, a plurality of detection grooves are formed in the detection table at intervals, air exhaust connectors and air pressure detection connectors are arranged in the detection grooves, and the air exhaust connectors are communicated with the vacuum pump. The vacuum pump extracts air in the detection groove through the air extraction connector, the air pressure detection connector is used for detecting air pressure in the detection groove, and the air pressure displayer connected with the air pressure detection connector can display the air pressure value detected by the air pressure detection connector. Based on the technical scheme provided by the utility model, the aluminum oxide ceramic plate levelness detection equipment can detect the aluminum oxide ceramic plate which is twisted in an S shape.
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Description

Technical Field

[0001] The utility model relates to the technical field of flatness detection of alumina ceramic plates, and particularly relates to an alumina ceramic plate flatness detection device. Background Art

[0002] At present, the existing methods for detecting the flatness of alumina ceramic plates are as follows: placing them on a marble platform and detecting with a feeler gauge; making a jig with a fixed gap to see if the alumina ceramic plate can pass the detection. These two methods have a common drawback: when the deformation of the alumina ceramic plate is not too large, but an S-shaped distorted alumina ceramic plate cannot be detected. Therefore, it is necessary to design an alumina ceramic plate flatness detection device that can detect an S-shaped distorted alumina ceramic plate. Summary of the Utility Model

[0003] Aiming at the problems in the above-mentioned prior art, the present application proposes an alumina ceramic plate flatness detection device that can detect an S-shaped distorted alumina ceramic plate.

[0004] The utility model provides an alumina ceramic plate flatness detection device, which includes a detection table and a vacuum pump. A plurality of detection grooves are spaced on the detection table. An air extraction joint and a pressure detection joint are arranged in the detection groove. The air extraction joint is communicated with the vacuum pump. When the alumina ceramic plate to be detected is horizontally covered on a plurality of the detection grooves, the vacuum pump extracts the air in the detection groove through the air extraction joint. The pressure detection joint is used to detect the air pressure in the detection groove, and a pressure display connected to the pressure detection joint can display the air pressure value detected by the pressure detection joint.

[0005] As a further improvement of the above technical solution:

[0006] For the above alumina ceramic plate flatness detection device, further, the detection table includes a support base and a detection plate. The detection plate is installed on the support base. The detection groove is opened on the detection plate. A positioning mechanism is also installed on the support base. The positioning mechanism is used to position and place the alumina ceramic plate to be detected on the detection plate.

[0007] For the above alumina ceramic plate flatness detection device, further, the positioning mechanism includes a first positioning component, a second positioning component, and a plurality of positioning pins. The plurality of positioning pins are respectively installed on adjacent sides of the detection plate. The first positioning component and the second positioning component are respectively installed on the other two sides of the detection plate. The positioning component is used to position and abut the alumina ceramic plate to be detected against the positioning pins on the opposite side.

[0008] The above-mentioned flatness detection device for alumina ceramic plates. Further, the first positioning component includes a first positioning seat, on which a guide rod is slidably installed. A first positioning block is installed at the end of the guide rod close to the detection plate, and a limit block is installed at the end of the guide rod away from the detection plate. A return spring is sleeved on the guide rod, and the two ends of the return spring are respectively connected to the limit block and the first positioning seat. The return spring can drive the first positioning block away from the detection plate. A first telescopic driving member is installed on the first positioning seat, and the telescopic end of the first telescopic driving member is connected to the first positioning block. When the telescopic end of the first telescopic driving member extends, it can drive the first positioning block to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected on the positioning pin on the opposite side.

[0009] The above-mentioned flatness detection device for alumina ceramic plates. Further, the second positioning component includes a second positioning seat, on which a second positioning block is rotatably installed around the horizontal direction. A second telescopic driving member is installed on the second positioning seat, and the telescopic end of the second telescopic driving member is connected to the lower end of the second positioning block. When the telescopic end of the second telescopic driving member extends, it can drive the upper end of the second positioning block to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected on the positioning pin on the opposite side.

[0010] The above technical features can be combined in various suitable ways or replaced by equivalent technical features as long as the purpose of the present invention can be achieved.

[0011] A flatness detection device for alumina ceramic plates provided by the present invention, compared with the prior art, at least has the following beneficial effects: When in use, the alumina ceramic plate to be detected produced is placed on the detection table, and the alumina ceramic plate to be detected straddles and covers a plurality of detection grooves. Then, the vacuum pump extracts the air in the detection grooves through the air extraction joint, the air pressure detection joint detects the air pressure in the detection grooves, and the air pressure display connected to the air pressure detection joint displays the air pressure value detected by the air pressure detection joint. The flatness of the alumina ceramic plate is judged by the air pressure value displayed on the display. Since a plurality of detection grooves are spaced apart on the detection table and the alumina ceramic plate to be detected straddles and covers a plurality of detection grooves, therefore, this flatness detection device for alumina ceramic plates can detect the S-shaped distorted alumina ceramic plates.

[0012] In order to make the above objects, features and advantages of the present invention more obvious and understandable, the following specific preferred embodiments are given below and are described in detail in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] To more clearly illustrate the technical solution of the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present utility model and should not be regarded as a limitation of the scope. For those of ordinary skill in the art, without creative efforts, other relevant drawings can also be obtained based on these drawings.

[0014] In the following, the present utility model will be described in more detail based on the embodiments and with reference to the drawings. Among them:

[0015] Figure 1 Shows a schematic structural diagram of the flatness detection device for alumina ceramic plates provided by the embodiments of the present utility model;

[0016] Figure 2 Shows a schematic structural diagram of the detection table of the flatness detection device for alumina ceramic plates provided by the embodiments of the present utility model;

[0017] Figure 3 Shows a schematic structural diagram of the support base of the flatness detection device for alumina ceramic plates provided by the embodiments of the present utility model.

[0018] In the drawings, the same components are denoted by the same reference numerals. The drawings are not drawn to actual scale.

[0019] Description of reference numerals:

[0020] 100 - Flatness detection device for alumina ceramic plates, 110 - Detection table, 111 - Detection groove, 112 - Air pressure display, 113 - Support base, 114 - Detection plate, 115 - First positioning component, 116 - Second positioning component, 117 - Positioning pin, 118 - First positioning seat, 119 - Guide rod, 120 - First positioning block, 121 - Limit block, 122 - Return spring, 123 - First telescopic driving member, 124 - Second positioning seat, 125 - Second positioning block, 126 - Second telescopic driving member, 130 - Vacuum pump. Specific embodiments

[0021] The following details the embodiments of the present utility model. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0022] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.

[0023] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "a plurality of" is two or more unless otherwise specifically defined.

[0024] In the present utility model, unless otherwise clearly defined and limited, the terms such as "mounted", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0025] In the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or simply indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or simply indicates that the first feature has a lower horizontal height than the second feature.

[0026] The present utility model will be further described below in conjunction with the drawings.

[0027] The embodiment of the present utility model provides a device for detecting the flatness of an alumina ceramic plate, which can detect an alumina ceramic plate with S-shaped distortion.

[0028] Please refer to Figure 1 and Figure 2, the flatness detection device 100 for alumina ceramic plates provided by the embodiment of the present utility model. The flatness detection device 100 for alumina ceramic plates includes a detection table 110 and a vacuum pump 130. A plurality of detection grooves 111 are spaced apart on the detection table 110. An air extraction joint and a pressure detection joint are arranged in the detection groove 111. The air extraction joint is communicated with the vacuum pump 130. When the alumina ceramic plate to be detected is horizontally covered on a plurality of detection grooves 111, the vacuum pump 130 extracts the air in the detection groove 111 through the air extraction joint. The pressure detection joint is used to detect the air pressure in the detection groove 111. A pressure display 112 connected to the pressure detection joint can display the air pressure value detected by the pressure detection joint.

[0029] During use, place the produced alumina ceramic plate to be detected on the detection table 110. The alumina ceramic plate to be detected is horizontally covered on a plurality of detection grooves 111. Then, the vacuum pump 130 extracts the air in the detection groove 111 through the air extraction joint. The pressure detection joint detects the air pressure in the detection groove 111. The pressure display 112 connected to the pressure detection joint displays the air pressure value detected by the pressure detection joint. The flatness of the alumina ceramic plate is judged by the air pressure value displayed on the display. Since a plurality of detection grooves 111 are spaced apart on the detection table 110 and the alumina ceramic plate to be detected is horizontally covered on a plurality of detection grooves 111, therefore, the flatness detection device 100 for alumina ceramic plates provided by the embodiment of the present utility model can detect the S-shaped twisted alumina ceramic plates.

[0030] The flatness detection device 100 for alumina ceramic plates provided by the embodiment of the present utility model. Specifically, please refer to Figure 2 and Figure 3 , the detection table 110 includes a support base 113 and a detection board 114. The detection board 114 is installed on the support base 113. The detection grooves 111 are opened on the detection board 114. A positioning mechanism is also installed on the support base 113. The positioning mechanism is used to position and place the alumina ceramic plate to be detected on the detection board 114. The positioning mechanism includes a first positioning component 115, a second positioning component 116 and a plurality of positioning pins 117. The plurality of positioning pins 117 are respectively installed on the adjacent two sides of the detection board 114. The first positioning component 115 and the second positioning component 116 are respectively installed on the other two sides of the detection board 114. The positioning component is used to position and abut the alumina ceramic plate to be detected against the positioning pins 117 on the opposite side.

[0031] In this embodiment, please refer to Figure 3, the first positioning component 115 includes a first positioning seat 118. A guide rod 119 is slidably mounted on the first positioning seat 118. A first positioning block 120 is installed at the end of the guide rod 119 close to the detection plate 114, and a limit block 121 is installed at the end of the guide rod 119 away from the detection plate 114. A return spring 122 is sleeved on the guide rod 119. The two ends of the return spring 122 are respectively connected to the limit block 121 and the first positioning seat 118. The return spring 122 can drive the first positioning block 120 away from the detection plate 114. A first telescopic driving member 123 is installed on the first positioning seat 118. The telescopic end of the first telescopic driving member 123 is connected to the first positioning block 120. When the telescopic end of the first telescopic driving member 123 extends, it can drive the first positioning block 120 to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected against the positioning pin 117 on the opposite side.

[0032] Please refer to Figure 3 , the second positioning component 116 includes a second positioning seat 124. A second positioning block 125 is rotatably mounted on the second positioning seat 124 around the horizontal direction. A second telescopic driving member 126 is installed on the second positioning seat 124. The telescopic end of the second telescopic driving member 126 is connected to the lower end of the second positioning block 125. When the telescopic end of the second telescopic driving member 126 extends, it can drive the upper end of the second positioning block 125 to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected against the positioning pin 117 on the opposite side.

[0033] Before the alumina ceramic plate to be detected produced needs to be placed on the detection table 110, the telescopic ends of both the first telescopic driving member 123 and the second telescopic driving member 126 contract. The first positioning block 120 moves away from the detection plate 114 under the action of the return spring 122, and the upper end of the second positioning block 125 moves away from the detection plate 114. Then, the alumina ceramic plate to be detected produced is placed on the detection table 110. The telescopic end of the first telescopic driving member 123 extends to drive the first positioning block 120 to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected against the positioning pin 117 on the opposite side. The telescopic end of the second telescopic driving member 126 extends to drive the upper end of the second positioning block 125 to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected against the positioning pin 117 on the opposite side. At this time, the alumina ceramic plate to be detected straddles and covers a plurality of detection slots 111, completing the positioning placement of the alumina ceramic plate to be detected.

[0034] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0035] Although the present utility model has been described herein with reference to specific embodiments, it should be understood that these embodiments are merely examples of the principles and applications of the present utility model. Therefore, it should be understood that many modifications can be made to the exemplary embodiments, and other arrangements can be designed, as long as they do not deviate from the spirit and scope of the present utility model as defined by the appended claims. It should be understood that the different dependent claims and the features described herein can be combined in a manner different from that described in the original claims. It should also be understood that the features described in connection with a single embodiment can be used in other described embodiments.

Claims

1. An alumina ceramic plate flatness detection device, characterized in that, The flatness detection device for the alumina ceramic plate includes a detection table and a vacuum pump. A plurality of detection grooves are spaced apart on the detection table. An air extraction joint and a barometric pressure detection joint are arranged in the detection groove. The air extraction joint is communicated with the vacuum pump. When the alumina ceramic plate to be detected is horizontally covered on a plurality of the detection grooves, the vacuum pump extracts the air in the detection groove through the air extraction joint. The barometric pressure detection joint is used to detect the barometric pressure in the detection groove, and a barometric pressure display connected to the barometric pressure detection joint can display the barometric pressure value detected by the barometric pressure detection joint.

2. The flatness detection device for alumina ceramic plates according to claim 1, characterized in that, The detection table includes a support base and a detection plate. The detection plate is installed on the support base. The detection grooves are formed on the detection plate. A positioning mechanism is also installed on the support base. The positioning mechanism is used to position and place the alumina ceramic plate to be detected on the detection plate.

3. The flatness detection device for alumina ceramic plates according to claim 2, characterized in that, The positioning mechanism includes a first positioning component, a second positioning component, and a plurality of positioning pins. The plurality of positioning pins are respectively installed on adjacent sides of the detection plate. The first positioning component and the second positioning component are respectively installed on the other two sides of the detection plate. The positioning component is used to position and abut the alumina ceramic plate to be detected against the positioning pins on the opposite side.

4. The flatness detection device for alumina ceramic plates according to claim 3, characterized in that, The first positioning component includes a first positioning seat. A guide rod is slidably installed on the first positioning seat. A first positioning block is installed at the end of the guide rod close to the detection plate. A limit block is installed at the end of the guide rod away from the detection plate. A return spring is sleeved on the guide rod. The two ends of the return spring are respectively connected to the limit block and the first positioning seat. The return spring can drive the first positioning block away from the detection plate. A first telescopic driving member is installed on the first positioning seat. The telescopic end of the first telescopic driving member is connected to the first positioning block. When the telescopic end of the first telescopic driving member extends, it can drive the first positioning block to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected against the positioning pins on the opposite side.

5. The flatness detection device for alumina ceramic plates according to claim 3, wherein, The second positioning component includes a second positioning seat. A second positioning block is rotatably installed around the horizontal direction on the second positioning seat. A second telescopic driving member is installed on the second positioning seat. The telescopic end of the second telescopic driving member is connected to the lower end of the second positioning block. When the telescopic end of the second telescopic driving member extends, it can drive the upper end of the second positioning block to abut against the alumina ceramic plate to be detected, so as to position and abut the alumina ceramic plate to be detected against the positioning pins on the opposite side.