Sample supporting assembly

Abstract

The utility model discloses a sample supporting assembly. The sample supporting assembly comprises a supporting table and a sample holder. A mounting groove is formed in the supporting table. The sample holder comprises a supporting piece and a tray, one end of the supporting piece is connected with the tray, and the other end is inserted into the mounting groove. The tray is provided with a plurality of supporting parts with different heights, and the supporting parts are used for supporting samples; therefore, the samples can be placed on the supporting parts with different heights according to the heights of the samples, and the top surfaces of all the samples can be positioned on the same plane, so that the probe of the detector can be prevented from colliding with the samples with different heights in the moving process, the detector is prevented from being damaged, the service life of the detector is ensured, and meanwhile, the sample testing period is ensured; the sample testing efficiency is improved.

Description

Technical Field

[0001] This application belongs to the technical field of experimental equipment manufacturing, and particularly relates to a sample support assembly. Background Art

[0002] With the rapid development of FIB dual-beam electron microscopes, micro-nano scale fixed-point micro-area processing and analysis technologies have been widely used in the field of materials science.

[0003] When actually testing a sample using a scanning electron microscope, first, the sample to be tested needs to be fixed on a grooved nail-shaped sample holder, and then the sample holder is inserted into a hole in a sample seat inside the sample chamber. Then, the inside of the sample chamber is evacuated, and after the evacuation is completed, the sample is tested inside the sample chamber.

[0004] One sample can be placed on each sample holder. Since the samples placed on multiple sample holders have different heights, the detector probe collides with samples at different heights during movement, damaging the detector probe and affecting the sample testing cycle. Utility Model Content

[0005] To solve the technical problem in the related art that since the samples placed on multiple sample holders have different heights, the detector probe collides with samples at different heights during movement, damaging the detector probe and affecting the sample testing cycle, this application provides a sample support assembly. The sample support assembly includes:

[0006] A support table, on which an installation groove is provided;

[0007] A sample holder, including a support member and a tray. One end of the support member is connected to the tray, and the other end is inserted into the installation groove;

[0008] Wherein, the tray is provided with multiple support parts with different heights, and the support parts are used to support the sample.

[0009] In some embodiments, the tray is divided into multiple support parts, and the bottoms of the multiple support parts are on the same plane.

[0010] In some embodiments, multiple trays are provided, and adjacent trays are spaced apart.

[0011] In some embodiments, the outer shape of the tray is a polygon.

[0012] In some embodiments, the outer shape of the tray is a regular hexagon and is divided into four support parts, and the cross-sectional shape of the support part is a right trapezoid.

[0013] In some embodiments, the materials of the support table and the sample holder are stainless steel, aluminum alloy or high-hardness resin.

[0014] In some embodiments, the support member is rod-shaped, and one end of the support member is fixedly connected to the tray and perpendicular to the plane where the tray is located.

[0015] In some embodiments, the support member is fixedly connected to the middle position of the tray; alternatively, there are multiple installation slots provided, and the support members are provided in multiple numbers. The multiple support members are arranged at intervals. One end of the support member is fixedly connected to the tray, and the other end is inserted into the installation slot.

[0016] In some embodiments, there are multiple installation slots provided, and the multiple installation slots are arranged in an array.

[0017] In some embodiments, the notch of the installation slot is circular, and the notch diameters of the multiple installation slots are different.

[0018] According to the sample support assembly provided by one or more embodiments of the present application, the sample support assembly includes a support table and a sample tray. An installation slot is provided on the support table. The sample tray includes a support member and a tray. One end of the support member is connected to the tray, and the other end is inserted into the installation slot. Since the tray is provided with multiple support portions with different heights, the support portions are used to support the samples; then the samples can be placed on the support portions with different heights according to the height of the samples, so that the top surfaces of all the samples are in the same plane. In this way, when the probe of the detector moves, it can prevent collision with samples at different heights, prevent damage to the detector, ensure the service life of the detector, and at the same time ensure the sample test cycle and improve the sample test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings here are incorporated into the description and form a part of this description, showing embodiments consistent with the present application and used together with the description to explain the principles of the present application. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] In the drawings: Figure 1 is a schematic structural diagram of the sample support assembly in one or more embodiments of the present application;

[0021] Figure 2 is a schematic structural diagram of the sample tray in one or more embodiments of the present application;

[0022] Figure 3 is a schematic structural diagram of another type of the sample tray in one or more embodiments of the present application;

[0023] Figure 4 is a schematic structural diagram of the support table in one or more embodiments of the present application;

[0024] Figure 5 For Figure 4 the sectional view at A-A in the figure.

[0025] Explanation of reference numerals:

[0026] 10. Support platform; 11. Installation groove; 20. Sample holder; 21. Support member; 22. Tray; 23. Support portion. Specific implementation manner

[0027] In order to make the purpose, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0028] The following will describe in detail some embodiments of the present application with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0029] With the rapid development of FIB dual-beam electron microscopes, micro-nano scale fixed-point micro-area processing and analysis technologies have been widely applied in the field of materials science.

[0030] When actually testing a sample using a scanning electron microscope, first, the sample to be tested needs to be fixed on a grooved nail-shaped sample holder, and then the sample holder is inserted into the hole on the sample seat in the sample chamber. Then, the sample chamber is evacuated, and after the vacuum extraction is completed, the sample is tested in the sample chamber.

[0031] One sample can be placed on each sample holder. Since the heights of the samples placed on multiple sample holders may be different, it may cause the detector probe to collide with samples at different heights during movement, damaging the detector probe and affecting the test cycle of the sample. At the same time, frequent sampling and sample replacement will also cause wear and tear of the components of the equipment. In addition, when placing a sample on the sample holder, the bottom of the sample holder is nail-shaped and cannot be directly placed on the test bench. The usual method is to hold the sample holder with conductive tape in one hand and hold the sample with the other hand and align it with the sample holder to fix the sample on the sample holder. This method is likely to cause the sample to be adhesively fixed obliquely, the sample to be adhesively fixed insecurely, or the test surface of the sample to be soiled, affecting the detection result of the sample. If the sample is adhesively fixed obliquely or insecurely, the sample needs to be fixed again, increasing the preparation time for sample detection and affecting the analysis and detection efficiency of the sample and the test result of the sample.

[0032] To solve the above problems, the present application provides a sample support assembly. Please refer to Figures 1 to 2, the sample support assembly includes a support table 10 and a sample holder 20. An installation groove 11 is provided on the support table 10. The sample holder 20 includes a support member 21 and a tray 22. One end of the support member 21 is connected to the tray 22, and the other end is inserted into the installation groove 11. Since the tray 22 is provided with a plurality of support portions 23 having different heights, and the support portions 23 are used to support the samples; then the samples can be placed on the support portions 23 having different heights according to the height of the samples, so that the top surfaces of all the samples are in the same plane. In this way, the probe of the detector can be prevented from colliding with samples of different heights during the movement process, preventing damage to the detector, ensuring the service life of the detector, and at the same time ensuring the sample test cycle and improving the sample test efficiency.

[0033] Since the tray 22 is provided with a plurality of support portions 23, multiple samples can be placed for detection at the same time. In this way, the frequency of sampling and sample replacement can be reduced, the loss of the sample support assembly can be reduced, and the service life of the sample support assembly can be improved.

[0034] When the sample is placed on the support portion 23 of the tray 22, the support portion 23 of the sample holder 20 can be inserted into the installation groove 11 first to keep the tray 22 stable. A carbon conductive tape is adhered to the support portion 23. Use tweezers to hold the sample and adjust the placement angle of the sample in real time. Place the sample on the carbon conductive tape to place the sample on the tray 22; in this way, the accuracy of the bonding angle of the sample can be ensured, and the stability of the sample bonded to the tray 22 through the carbon conductive tape can be ensured, improving the placement efficiency of the sample, reducing the preparation time for sample detection, and further preventing the surface to be measured of the sample from being soiled, thereby improving the analysis and detection efficiency of the sample and ensuring the detection result of the sample.

[0035] It should be noted that the sample can also be bonded to the support portion 23 of the tray 22 using 502 glue or other types of glue, which can be set according to actual needs and is not limited in this application.

[0036] The tray 22 is divided into a plurality of support portions 23. The bottoms of the plurality of support portions 23 are in the same plane, and the heights of the plurality of support portions 23 are different, so that the top surfaces of samples of different heights can be located in the same plane, preventing the probe of the detector from colliding with samples of different heights during the movement process, ensuring the service life of the detector, and at the same time ensuring the sample test cycle and improving the sample test efficiency.

[0037] In order to further reduce the frequency of sampling and sample replacement, a plurality of trays 22 can be provided to realize the simultaneous placement of multiple samples. Furthermore, multiple samples can be simultaneously placed on the sample seats in the sample chamber for detection, thereby reducing the frequency of sampling and sample replacement, reducing the loss of the sample support assembly, and improving the service life of the sample support assembly. The interval between adjacent two trays 22 is set to facilitate the insertion of the tray 22 into the installation groove 11 of the support table 10 through the support member 21, improving the convenience of placing the tray 22.

[0038] The external shape of the tray 22 can be polygonal, please refer to Figure 2 , the external shape of the tray 22 can be a regular hexagon and is divided into four supporting parts 23, and the cross-sectional shape of the supporting part 23 is a right trapezoid. The side length of the regular hexagon-shaped tray 22 can be 13.5 mm, and the tray 22 is evenly divided into four supporting parts 23 with equal sizes. The cross-sectional shape of the supporting part 23 is a right trapezoid. The heights of the four supporting parts 23 can be 1 mm, 2 mm, 3 mm, and 4 mm respectively, and the thicknesses of the samples that can be placed on each supporting part 23 can be 4 mm, 3 mm, 2 mm, and 1 mm in sequence. Samples with different thicknesses can be placed on the corresponding supporting parts 23, so that the top surfaces of the samples with different heights are located on the same plane, preventing the probe of the detector from colliding with samples of different heights during movement, ensuring the service life of the detector, and at the same time ensuring the sample test cycle and improving the sample test efficiency.

[0039] The cross-sectional shape of the supporting part 23 can also be irregular. The irregular supporting part 23 can be in the shape of a butterfly and is divided into four supporting parts 23. The heights of the four supporting parts 23 can be 1 mm, 2 mm, 3 mm, and 4 mm respectively, and the thicknesses of the samples that can be placed on each supporting part 23 can be 4 mm, 3 mm, 2 mm, and 1 mm in sequence. Samples with different thicknesses can be placed on the corresponding supporting parts 23, so that the top surfaces of the samples with different heights are located on the same plane.

[0040] Please refer to Figure 1 and Figure 3 , the samples to be tested can include the first sample A, the second sample B, the third sample C, and the fourth sample D, and the thicknesses are 4 mm, 3 mm, 2 mm, and 1 mm respectively. Place the first sample A, the second sample B, the third sample C, and the fourth sample D on the corresponding supporting parts 23 in sequence, so that the overall height of the sample and the supporting part 23 is 5 mm, ensuring that the top surfaces of the first sample A, the second sample B, the third sample C, and the fourth sample D are on the same plane, and at the same time ensuring the accuracy of the bonding angle of the sample and the stability of the sample bonded to the tray 22 through the carbon conductive tape.

[0041] The support 21 can be rod-shaped. One end of the support 21 is fixedly connected to the tray 22 and is perpendicular to the plane where the tray 22 is located. The height of the support 21 can be 7 mm. The support 21 is used to support the tray 22, thereby realizing the support of the sample.

[0042] The support member 21 can be fixedly connected to the middle position of the tray 22. In some embodiments, in order to improve the stability of the tray 22, a plurality of mounting grooves 11 may be provided on the support table 10, and a plurality of support members 21 are provided. The plurality of support members 21 are arranged at intervals. One end of the support member 21 is fixedly connected to the tray 22, and the other end is inserted into the mounting groove 11. The support stability of the tray 22 can be improved by the plurality of support members 21, the accuracy of the bonding angle of the sample can be ensured, the stability of the sample bonded to the tray 22 through the carbon conductive tape can be ensured, and the placement efficiency of the sample can be improved.

[0043] Please refer to Figures 4 to 5 and Figure 1 , a plurality of mounting grooves 11 are provided and the plurality of mounting grooves 11 are arranged in an array. The side length of the regular hexagonal tray 22 can be 13 mm to 15 mm; the side length of the cubic support table 10 is 100 mm to 150 mm, and the thickness is 10 mm to 20 mm; the groove depth of the mounting groove 11 of the support table 10 is 8 mm to 10 mm, and the number of the mounting grooves 11 is 20 to 50, which can be set according to actual needs and is not limited in this application.

[0044] The support table 10 can be set as a cube with a size of 100 mm * 100 mm * 10 mm. The support table 10 has a chamfer with a radius of Ф10 mm, and 25 mounting grooves 11 are arranged in an equidistant array on the surface of the support table 10.

[0045] The notch of the mounting groove 11 is circular, and the notch diameters of the plurality of mounting grooves 11 are different. The notch diameters are Ф3.2 mm, Ф4.5 mm and Ф6 mm respectively. The setting of different notch diameters can improve the compatibility of the support table 10, and further improve the practicability and applicability of the support table 10. Please refer to Figure 5 , the groove depth is 8 mm, which improves the stability of the support member 21 inserted into the mounting groove 11.

[0046] The materials of the support table 10 and the sample holder 20 can be stainless steel, aluminum alloy or high-hardness resin, which improves the strength of the support table 10 and the sample holder 20, and further improves the service life of the sample support assembly. The materials of the support table 10 and the sample holder 20 can be set according to actual needs and are not limited in this application.

[0047] The working principle of the sample support assembly is as follows: Insert the support member 21 of the sample holder 20 into the mounting groove 11 of the support table 10. After the sample holder 20 is placed stably, bond the carbon conductive tape to different support parts 23 of the tray 22. Then use tweezers to hold the first sample A, the second sample B, the third sample C and the fourth sample D with different thicknesses to be tested and bond them to the sample holder 20 with the carbon conductive tape, ensuring that the top surfaces of the first sample A, the second sample B, the third sample C and the fourth sample D are in the same plane, and at the same time ensuring the accuracy of the bonding angle of the sample and the stability of the sample bonded to the tray 22 through the carbon conductive tape.

[0048] Then, remove the sample carrier 20 on the support table 10 and insert it into the corresponding slot on the sample seat in the sample chamber. Evacuate the sample chamber, and conduct sample testing in the sample chamber after the evacuation is completed. The operation is simple, fast, and highly practical.

[0049] In this application, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "over", and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below", and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0050] In the description of this application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to this application.

[0051] In this application, unless otherwise clearly specified and defined, terms such as "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or integral; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0052] In addition, in this application, descriptions such as "first" and "second" are only for descriptive purposes and should not be understood as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of this application, the meaning of "a plurality" is two or more, unless otherwise clearly specifically defined.

[0053] Although embodiments of the present application have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present application. The scope of the present application is defined by the claims and their equivalents.

Claims

1. A sample support assembly, characterized in that, The sample support assembly includes: A support table, on which an installation groove is provided; A sample holder, including a support member and a tray, one end of the support member is connected to the tray, and the other end is inserted into the installation groove; Wherein, the tray is provided with a plurality of support parts with different heights, and the support parts are used to support the sample.

2. The sample support assembly according to claim 1, wherein The tray is divided into a plurality of the support parts, and the bottoms of the plurality of support parts are on the same plane.

3. The sample support assembly according to claim 2, wherein, A plurality of the trays are provided, and adjacent two trays are arranged at intervals.

4. The sample support assembly according to any one of claims 1 to 3, characterized in that, The outer shape of the tray is polygonal.

5. The sample support assembly according to claim 4, wherein, The outer shape of the tray is a regular hexagon and is divided into four of the support parts, and the cross-sectional shape of the support part is a right trapezoid.

6. The sample support assembly according to claim 5, characterized in that, The materials of the support table and the sample holder are stainless steel, aluminum alloy or high-hardness resin.

7. The sample support assembly according to claim 1, wherein The support member is rod-shaped, one end of the support member is fixedly connected to the tray and is perpendicular to the plane where the tray is located.

8. The sample support assembly according to claim 7, wherein, The support member is fixedly connected to the middle position of the tray; or, a plurality of the installation grooves are provided, the support members are provided as multiple, the multiple support members are arranged at intervals, one end of the support member is fixedly connected to the tray, and the other end is inserted into the installation groove.

9. The sample support assembly according to claim 7, wherein A plurality of the installation grooves are provided, and the plurality of installation grooves are arranged in an array.

10. The sample support assembly according to claim 9, wherein, The notch of the installation groove is circular, and the notch diameters of the plurality of installation grooves are different.

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