Sample accommodating device of electron beam detection equipment

Abstract

The utility model relates to the technical field of semiconductor equipment, in particular to a sample containing device of electron beam detection equipment, and the sample containing device of the electron beam detection equipment comprises a box body which comprises a sample cavity with an opening; the cover plate is matched with the opening and is used for opening or closing the sample chamber; the opening and closing mechanism is fixedly arranged on the side wall of the box body, the telescopic end of the opening and closing mechanism is connected with the cover plate, and the opening and closing mechanism stretches out and draws back to enable the cover plate to close or open the sample cavity. The lifting opening and closing mechanism is used for replacing an electric hoist, automatic lifting of the cover plate is achieved through mechanical or electric driving, and manual intervention is reduced. Not only is the working efficiency improved, but also the operation difficulty and the safety risk are reduced. The opening and closing mechanism is fixed to the side wall of the box body instead of the top or the position needing additional space, and space resources around the box body are effectively utilized.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a sample accommodating device for an electron beam detection device. Background Art

[0002] An electron beam detection device is a key device for detecting the performance and defects of chips in the semiconductor manufacturing process. Regular maintenance and servicing of it are important links to ensure the normal operation of the device. The sample chamber is the core part of the device. A large cover on it integrates a variety of high-precision instruments including an electron gun, an energy spectrometer, an industrial camera, a photoelectric sensing device, etc. During the maintenance and servicing of the sample chamber, opening the cover requires extreme caution; if tilting occurs during the opening process and the instruments interfere, the precision instruments may be damaged, causing great losses, and particulate matter invisible to the naked eye is likely to be generated during the opening and closing processes, contaminating the sample chamber and then contaminating the wafer in the process.

[0003] At present, the traditional method is to use a chain block to open the cover by hoisting and stretching. Firstly, due to the huge friction between the chain and the gear of the chain block, a large number of fine particles will inevitably be generated; secondly, for more stable hoisting, multiple chain blocks are usually required to hoist the large cover at the same time. If the lifting speeds of multiple chain blocks vary greatly, the large cover has a risk of tipping over, and after each hoisting and opening of the cover, the cover plate needs to be fixed manually or by using a support structure, resulting in low efficiency and high labor consumption.

[0004] Therefore, in view of this, the present application is specifically proposed. Utility Model Content

[0005] In view of the above technical problems, the purpose of the present application is to propose a sample accommodating device for an electron beam detection device, aiming to solve the technical problems that the existing method of opening the cover of the sample chamber by using a chain block for hoisting has a risk of tipping over and requires multiple hoists to operate simultaneously, increasing the operation difficulty and labor cost.

[0006] The sample accommodating device for an electron beam detection device provided by the present application includes: a box body including a sample chamber with an opening; a cover plate matching the opening for opening or closing the sample chamber; and at least one telescopic opening and closing mechanism fixedly arranged on the side wall of the box body and having its telescopic end connected to the cover plate; the opening and closing mechanism closes or opens the sample chamber by telescoping.

[0007] In a further solution of the present application, each opening and closing mechanism includes: a lifting column including a support member and a telescopic member, the support member is arranged on the side wall of the box body, sleeved with the telescopic member, and together with the telescopic member forms a receiving cavity; the telescopic member is connected to the cover plate and is telescopically connected to the support member; and a driving member arranged in the receiving cavity and connected to the telescopic member to be able to drive the telescopic member to perform telescopic movement relative to the support member.

[0008] In a further aspect of the present application, both the support member and the telescopic member are hollow cylindrical shapes with one end being open.

[0009] In a further aspect of the present application, the cross-sections of both the support member and the telescopic member are rectangular.

[0010] In a further aspect of the present application, the driving member includes: a driving motor disposed in the accommodation cavity; a threaded lead screw, one end of which is connected to the output end of the driving motor and the other end is connected to the telescopic member; wherein, the driving motor can cause the threaded lead screw to perform a linear motion to control the movement of the telescopic member relative to the support member.

[0011] In a further aspect of the present application, the number of opening and closing mechanisms is an even number, and they are arranged in two rows and symmetrically distributed on both sides of the cover plate; wherein, all the opening and closing mechanisms synchronously expand and contract to close or open the sample chamber.

[0012] In a further aspect of the present application, the sample holding device further includes a connecting member, and the connecting member includes: a first connecting portion connected to the cover plate; and a second connecting portion connected to the telescopic member and connected to the first connecting portion and arranged at an angle.

[0013] In a further aspect of the present application, both the first connecting portion and the second connecting portion are flat plate-like structures and are integrally formed, and are both arranged parallel to the cover plate.

[0014] In a further aspect of the present application, a strengthening member is provided on the connecting member, and the strengthening member includes a first strengthening portion and a second strengthening portion connected to each other; wherein, the first strengthening portion is provided on the first connecting portion, and the second strengthening portion is provided on the second connecting portion.

[0015] In a further aspect of the present application, a controller is further included, and the support member is provided with an electrical hole penetrating through the side wall of the accommodation cavity; the controller is disposed outside the accommodation cavity and is electrically connected to the driving motor.

[0016] In a further aspect of the present application, the cover plate includes a main body portion and a closing portion, the closing portion is disposed on the side of the main body portion facing the box body and protrudes relatively from the main body portion; wherein, the telescopic member is directly or indirectly connected to the main body portion, the cover plate can cover the opening, and extends into the opening through the closing portion to close the sample chamber.

[0017] In a further aspect of the present application, a flexible sealing ring is provided at the edge of the closing portion; the edge of the main body portion does not exceed the side wall edge of the box body.

[0018] In summary, the present application provides a sample accommodating device for an electron beam detection device, including a box body, a cover plate, and at least one opening and closing mechanism; the box body includes a sample chamber with an opening; the cover plate is matched with the opening for opening or closing the sample chamber; the opening and closing mechanism is fixedly arranged on the side wall of the box body and its telescopic end is connected to the cover plate; the opening and closing mechanism makes the cover plate close or open the sample chamber by telescoping, and has at least the following beneficial effects:

[0019] 1) Replacing the electric hoist with a liftable opening and closing mechanism, and realizing the automatic lifting of the cover plate through mechanical or electric drive to reduce manual intervention. This not only improves work efficiency but also reduces operation difficulty and safety risks.

[0020] 2) Fixing the opening and closing mechanism on the side wall of the box body instead of the top or a position that requires additional space, effectively utilizing the space resources around the box body. On the one hand, it is applicable to working environments with limited top space or requiring a compact layout. On the other hand, the position of the opening and closing mechanism completely avoids the opening position to avoid interference from particles.

[0021] Other features and advantages of the embodiments of the present application will be described in the subsequent specific implementation part. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation manners of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required to be used in the description of the specific implementation manners or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0023] Figure 1 It is a schematic structural diagram of the sample accommodating device provided by the embodiment of the present application;

[0024] Figure 2 It is a partial structural schematic diagram of the sample accommodating device provided by the embodiment of the present application;

[0025] Figure 3 It is a schematic structural diagram of the opening and closing mechanism in the sample accommodating device provided by the embodiment of the present application;

[0026] Figure 4 It is a schematic structural diagram of the opening and closing mechanism in the telescopic state provided by the embodiment of the present application;

[0027] Figure 5 It is a cross-sectional view of the opening and closing mechanism provided by the embodiment of the present application;

[0028] Figure 6 It is a schematic structural diagram of the connecting member in the opening and closing mechanism provided by the embodiment of the present application;

[0029] Figure 7 Schematic diagram of the reinforcement structure in the opening and closing mechanism provided by the embodiment of the present application; and

[0030] Figure 8 Front view of the box body and the cover plate in the opening and closing mechanism provided by the embodiment of the present application.

[0031] Among them, the reference numerals are explained as follows:

[0032] 100, sample accommodating device;

[0033] 10, box body;

[0034] 20, cover plate; 21, main body part; 22, closing part;

[0035] 30, opening and closing mechanism; 31, lifting column; 311, support member; 312, telescopic member; 32, driving member; 321, driving motor; 322, threaded lead screw;

[0036] 40, connecting member; 41, first connecting part; 42, second connecting part; 43, strengthening member; 431, first strengthening part; 432, second strengthening part;

[0037] 50, controller. Detailed implementation manners

[0038] For the descriptions of the terms "second direction", "first direction", "third direction", "inside", "outside", etc. indicating the orientation or positional relationship that appear hereinafter, unless otherwise specifically stated, they are understood to be based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application.

[0039] In addition, for the features limited by "first" and "second" only for descriptive purposes, they cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. The features limited by "first" and "second" may explicitly or implicitly include at least one of the limited features. For the description of "a plurality", generally it means at least including two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0040] In this application, unless otherwise clearly specified and defined, terms such as "installed", "connected", "linked", "fixed", etc. shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection, it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0041] In the description of this specification, terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0042] Referring to Figure 1 and Figure 2 , this application first provides a sample accommodating device 100 for an electron beam detection device, including a box body 10, a cover plate 20, and at least one retractable opening and closing mechanism 30.

[0043] The box body 10 adopts a rectangular hollow structure, and a sample chamber A with an opening a is arranged inside it for placing the sample to be detected. The cover plate 20 matches the opening a of the box body 10 and is used to open or close the sample chamber A. When the cover plate 20 is closed, it can effectively isolate the influence of the external environment on the inside of the sample chamber A and ensure the accuracy of the detection.

[0044] Based on the general concept, the opening and closing mechanism 30 is fixedly arranged on the side wall of the box body 10 and its telescopic end is connected to the cover plate 20, and the opening and closing mechanism 30 makes the cover plate 20 close or open the sample chamber A through telescoping.

[0045] In an optional solution of the embodiment of this application, the opening and closing mechanism 30 can be selected from various types such as electric, pneumatic, or hydraulic. Exemplarily, an electric opening and closing mechanism has advantages such as precise control and fast response speed, while pneumatic and hydraulic opening and closing mechanisms have characteristics such as large thrust and stable operation. Therefore, the appropriate type of opening and closing mechanism can be selected according to specific requirements.

[0046] In this application, the box body 10 can be a container made of metal, plastic or other solid materials, and it includes a plurality of outer wall surfaces. The sample chamber A is a specific area inside the box body 10, which is specifically used for placing samples to be tested.

[0047] The opening a is a hole in the box body 10 for accessing the sample chamber A. The opening a can be rectangular, circular or other shapes. In this application, the opening a is provided on a top wall surface of the box body 10. The cover plate 20 is used to close the opening a. By being horizontally arranged and matching with the opening a, the opening and closing of the sample chamber A can be realized. The opening and closing mechanism 30 is a structure for driving the cover plate 20 to open and close. It is connected to the cover plate 20 to drive the cover plate 20 to lift, so as to realize the automatic opening and closing of the sample chamber A.

[0048] In a variant embodiment based on the concept of this application, in an application scenario where the horizontal setting and lifting of the cover plate 20 are restricted in the top space of the box body 10, the opening a can also be provided on the side wall of the box body 10, that is, the cover plate 20 is arranged vertically, and the opening a is closed by the lifting of the opening and closing mechanism 30.

[0049] Based on the overall concept, adopting the opening and closing mechanism 30 that can lift and realizing the automatic lifting of the cover plate 20 through electric drive can improve the efficiency and safety of the sample accommodating device of the electron beam detection equipment, and significantly reduce the need for manual intervention. Specifically, the operator can easily complete the opening and closing of the cover plate 20 only through the control panel or the remote control system, which not only improves the work efficiency but also reduces the safety risks caused by improper manual operation. In addition, based on the precise control ability and stable operation performance of the opening and closing mechanism 30, it can ensure the smoothness and accuracy of the cover plate 20 during the lifting process, thus protecting the integrity of the sample and the equipment.

[0050] Moreover, in the embodiment of this application, the opening and closing mechanism 30 is fixed to the side wall of the box body 10 instead of the top, which is particularly suitable for working environments with limited top space or requiring a compact layout. It can reduce the space occupied by the equipment, make the entire sample accommodating device more compact, easy to install and move. At the same time, the opening and closing mechanism 30 completely avoids the opening position, preventing the interference caused by the possible entry of particles into the sample chamber A during the opening or closing process due to the movement of the opening and closing mechanism 30.

[0051] Such as Figures 3 to 5, in a further embodiment of the present application, each opening and closing mechanism 30 includes a lifting column 31 and a driving member 32. The lifting column 31 includes a support member 311 and a telescopic member 312. The support member 311 is disposed on the side wall of the box body 10 and includes an accommodation cavity B inside to sleeved at least part of the telescopic member 312. The telescopic member 312 is connected to the cover plate 20 and is telescopically connected to the support member 311. The driving member 32 is disposed in the accommodation cavity B and is connected to the telescopic member 312 to drive the telescopic member 312 to perform telescopic movement relative to the support member 311.

[0052] Understandably, the support member 311 is disposed on the side wall of the box body 10 and supported on the ground as the main support of the lifting column 31. It includes an accommodation cavity B inside. Through this accommodation cavity B, the support member 311 can be sleeved on the telescopic member 312 to accommodate and guide at least part of the telescopic member 312. One end of the telescopic member 312 is connected to the cover plate 20, and the other end extends into the accommodation cavity B of the support member 311 and forms a telescopic connection with the support member 311, so as to allow the telescopic member 312 to perform telescopic movement relative to the support member 311 under the action of the driving member 32 to drive the lifting of the cover plate 20.

[0053] In the present application, the driving member 32 is completely encapsulated in the accommodation cavity B of the support member 311. In this way, any particles generated during the operation of the driving member 32 will be restricted in the accommodation cavity B and cannot enter the sample chamber A, thereby improving the cleanliness of the sample chamber A. At the same time, through the integrated design of the driving member 32, the structure is more compact, which helps to reduce the volume of the entire opening and closing mechanism 30.

[0054] In the present application, both the support member 311 and the telescopic member 312 are hollow cylindrical structures with an open end at one end.

[0055] Understandably, one end of the support member 311 is designed to be open, which is convenient for sleeving the telescopic member 312 through this open end. The support member 311 is also a hollow cylindrical structure with an open end at one end. This design enables part of the driving member 32 to enter the inside of the telescopic member 312 after the support member 311 and the telescopic member 312 are matched, so as to provide enough telescopic space for the telescopic member 312. The telescopic member 312 can perform long-stroke telescopic movement inside the support member 311, so that the cover plate 20 can open the sample chamber A at a larger opening. At the same time, the use of the hollow cylindrical structure can also reduce the mass of the two to achieve lightweight design, and the mutually nested method can also strengthen the sealing performance of the accommodation cavity B.

[0056] Furthermore, the cross-sections of both the support member 311 and the telescopic member 312 are rectangular.

[0057] Compared with the circular sleeve, the support member 311 and the telescopic member 312 with a rectangular cross-section naturally limit the movement of the telescopic member 312 in a direction perpendicular to its sliding direction when they cooperate. Simply put, the telescopic member 312 has no rotational freedom. At this time, during the telescopic process of the telescopic member 312, no additional chutes and sliders are required to limit its rotation, thereby simplifying the structure and reducing potential wear points. At the same time, the rectangular design provides relatively more stable structural support and can better resist torsion and lateral forces during support.

[0058] In the present application, the driving member 32 includes a driving motor 321 and a threaded lead screw 322. The driving motor 321 is disposed in the accommodation cavity B, and one end of the threaded lead screw 322 is connected to the output end of the driving motor 321, and the other end is connected to the telescopic member 312. Among them, the driving motor 321 can cause the threaded lead screw 322 to perform a linear motion to control the movement of the telescopic member 312 relative to the support member 311.

[0059] The driving motor 321 is the power source of the driving member 32, which can convert electrical energy into mechanical energy and provide power for the rotation of the threaded lead screw 322. Since the driving motor 321 is disposed in the accommodation cavity B of the support member 311, it can be ensured that the motor is not exposed outside, so that the particles generated during rotation will not enter and affect the sample chamber A.

[0060] In a preferred solution, the driving motor 321 is disposed at the end of the accommodation cavity B facing away from the telescopic member 312 so as to be directly supported on the inner wall bottom of the accommodation cavity B, which can reduce the vibration and instability factors caused by the suspension or inclination of the motor. That is, this stable installation method helps to maintain the smoothness of the entire opening and closing mechanism 30 during operation. And placing the heavier driving motor 321 at the bottom can lower the center of gravity of the entire opening and closing mechanism 30 and improve its anti-overturning ability, which helps to reduce the shaking of the equipment during high-speed operation or when subjected to external impacts.

[0061] One end of the threaded lead screw 322 is connected to the output end of the driving motor 321, and the power is transmitted through a coupling or other transmission devices. The other end of the threaded lead screw 322 is connected to the telescopic member 312, so that the telescopic member 312 can perform a linear motion under the rotation of the threaded lead screw 322. Specifically, when the driving motor 321 is started, it will drive the threaded lead screw 322 to rotate. Since the telescopic member 312 and the threaded lead screw 322 are threadedly engaged through an intermediate member, the telescopic member 312 will perform a linear motion along its axis under the rotation of the threaded lead screw 322. By controlling the rotation direction and speed of the driving motor 321, the telescopic and speed of the telescopic member 312 can be precisely controlled, thereby realizing the precise control of the lifting of the cover plate 20.

[0062] When the threaded screw 322 is subjected to a force in the opposite direction of its rotation (such as the gravity of the cover plate 20 or an external impact), the threaded screw 322 is naturally locked in the current position under the friction force of the thread, preventing the telescopic member 312 from accidentally sliding down. This self-locking function ensures that the cover plate 20 can maintain its current position even in the event of a sudden power failure, thereby increasing the safety and reliability of the entire device.

[0063] As a preferred solution of the present application, the number of opening and closing mechanisms 30 is an even number, and they are arranged in two rows and symmetrically distributed on both sides of the cover plate 20; wherein all the opening and closing mechanisms 30 are synchronously extended and retracted to make the cover plate 20 close or open the sample chamber A. The stability and reliability of lifting can be enhanced by the synchronous operation of multiple opening and closing mechanisms 30 rather than the traditional single-point drive mode. The synchronous movement ensures the stability of the cover plate 20 during the opening or closing process, and reduces the vibration or jamming caused by uneven force at a single point.

[0064] like Figures 6 to 7 The sample holding device further includes a connecting member 40, and the connecting member 40 includes a first connecting portion 41 and a second connecting portion 42. The first connecting portion 41 is connected to the cover plate 20, and the second connecting portion 42 is connected to the telescopic member 312, and the second connecting portion 42 and the first connecting portion 41 are connected and arranged at an angle.

[0065] That is, the connecting member 40 serves as a receiving member to connect the opening and closing mechanism 30 on the side wall with the cover plate 20. The second connecting portion 42 and the first connecting portion 41 are connected and arranged at an angle, thereby allowing the opening and closing mechanism 30 to be installed on the side wall without the need for additional connection points on the cover plate 20, while saving the space occupied by the cover plate 20 and making the overall structure more compact.

[0066] In a preferred embodiment, the first connecting portion 41 and the second connecting portion 42 are both planar plate-shaped structures and are integrally formed, and are both arranged parallel to the cover plate 20, thereby facilitating the reduction of the longitudinal height of the connecting member 40 and avoiding interference with other structures. The planar plate-shaped structure is relatively simple, easy to manufacture and process, and can form a surface-to-surface contact with the cover plate 20, thereby improving the connection stability.

[0067] In the present application, a reinforcing component 43 is provided on the connecting member 40, and the reinforcing component 43 includes a first reinforcing portion 431 and a second reinforcing portion 432 connected to each other. The first reinforcing portion 431 is provided on the first connecting portion 41, and the second reinforcing portion 432 is provided on the second connecting portion 42, so as to reinforce the connecting member 40, thereby improving the bearing capacity and stability of the connecting member 40, thereby reducing the risk of damage caused by stress concentration or fatigue.

[0068] In the present application, the first reinforcing portion 431 is parallel to the first connecting portion 41, and the second reinforcing portion 432 is also parallel to the second connecting portion 42. This can ensure that the force is transmitted more evenly in the structure, reduce the stress concentration phenomenon, and thus improve the overall strength and stability of the connecting member 40.

[0069] In a further aspect of the present application, the sample accommodating device of the electron beam detection device includes a controller 50. The support member 311 is provided with an electrical hole E penetrating through the side wall of the accommodating cavity B; the controller 50 is disposed outside the accommodating cavity B and is electrically connected to the driving motor 321 through a wire harness passing through the electrical hole E.

[0070] In a preferred embodiment of the present application, the electrical hole E is disposed at the bottom of the support member 311, that is, at the end facing away from the telescopic member 312, which can more effectively prevent external dust, moisture, and other impurities from entering the interior of the accommodating cavity B through the electrical hole E. Because the bottom position is less susceptible to direct impact and contamination from the external environment compared to other positions, the cleanliness of the detection environment and the stability of the device are improved. Moreover, the electrical hole E and the driving motor 321 are relatively close to each other, reducing the length of the wire harness and improving the control response speed.

[0071] Those skilled in the art should understand that the controller 50 can be electrically connected to the driving motors 321 in a plurality of opening and closing mechanisms 30 simultaneously to achieve synchronous control.

[0072] As Figure 8 , the cover plate 20 includes a main body portion 21 and a closing portion 22. The closing portion 22 is disposed on the side of the main body portion 21 facing the box body 10 and protrudes relative to the main body portion 21; wherein, the telescopic member 312 is directly or indirectly connected to the main body portion 21, and the cover plate 20 can cover the opening a and extend into the opening a through the closing portion 22 to close the sample chamber A.

[0073] The cover plate 20 can completely cover the opening a and close the sample chamber A by the extension of the closing portion 22. Due to the protruding design of the closing portion 22 and the close contact with the box body 10, the cover plate 20 provides good sealing performance, which helps to maintain the cleanliness and stability inside the sample chamber A, thus ensuring the accuracy and reliability of the detection results.

[0074] Furthermore, a flexible sealing ring is provided at the edge of the closing portion 22, which not only improves the sealing performance but also has a certain compensation ability, and can adapt to the minute gap changes caused by factors such as manufacturing tolerances, temperature variations, or vibrations, avoiding rigid contact between the cover plate 20 and the box body 10 and contaminating the sample chamber A.

[0075] Even further, the edge of the main body portion 21 does not extend beyond the side wall edge of the box body 10 to save space and avoid the risk of interference with other components.

[0076] The various technical features described above can be combined arbitrarily. Although not all possible combinations of these technical features are described, any combination of these technical features should be considered to be covered by this specification, as long as there is no contradiction in such a combination.

[0077] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still adjust the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these adjustments or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the various embodiments of the present application.

Claims

1. A sample accommodating device of an electron beam detection device, characterized in that, Comprising: A box body (10), including a sample chamber (A) having an opening (a); A cover plate (20), matching with the opening (a) for opening or closing the sample chamber (A); and At least one retractable opening and closing mechanism (30), fixedly arranged on the side wall of the box body (10) and its retractable end connected to the cover plate (20); the opening and closing mechanism (30) makes the cover plate (20) close or open the sample chamber (A) by retracting and extending.

2. The sample accommodating device of the electron beam inspection apparatus according to claim 1, wherein Each of the opening and closing mechanisms (30) includes: A lifting column (31), including a support member (311) and a telescopic member (312), the support member (311) is arranged on the side wall of the box body (10), and its interior includes a receiving cavity (B) to sleeved at least part of the telescopic member (312), the telescopic member (312) is connected to the cover plate (20) and is telescopically connected relative to the support member (311); and A driving member (32), arranged in the receiving cavity (B) and connected to the telescopic member (312) to be able to drive the telescopic member (312) to perform telescopic movement relative to the support member (311).

3. The sample accommodating device of the electron beam inspection apparatus according to claim 2, characterized in that, Both the support member (311) and the telescopic member (312) are hollow cylindrical structures with an open end at one end.

4. The sample accommodating device of the electron beam inspection apparatus according to claim 2, characterized in that, The cross-sections of both the support member (311) and the telescopic member (312) are rectangular.

5. The sample accommodating device of the electron beam inspection apparatus according to claim 2, characterized in that, The driving member (32) includes: A driving motor (321), arranged in the receiving cavity (B); A threaded lead screw (322), one end connected to the output end of the driving motor (321), and the other end connected to the telescopic member (312); Wherein, the driving motor (321) can make the threaded lead screw (322) perform linear movement to control the telescopic member (312) to move relative to the support member (311).

6. The sample accommodating device of the electron beam detection device according to claim 2, characterized in that The number of the opening and closing mechanisms (30) is an even number, and they are arranged in two rows and symmetrically distributed on both sides of the cover plate (20); Wherein, all the opening and closing mechanisms (30) retract and extend synchronously to make the cover plate (20) close or open the sample chamber (A).

7. The sample accommodating device of the electron beam inspection apparatus according to claim 2, wherein, The sample accommodating device further includes a connecting member (40), and the connecting member (40) includes: A first connecting portion (41), connected to the cover plate (20); and A second connecting portion (42), connected to the telescopic member (312), and connected to the first connecting portion (41) and arranged at an angle.

8. The sample accommodating device of the electron beam inspection apparatus according to claim 7, characterized in that, Both the first connecting portion (41) and the second connecting portion (42) are flat plate-like structures and are integrally formed, and are both arranged parallel to the cover plate (20).

9. The sample holding device of the electron beam inspection apparatus according to claim 8, characterized in that, The connecting member (40) is provided with a strengthening member (43), and the strengthening member (43) includes a first strengthening portion (431) and a second strengthening portion (432) connected to each other; Wherein, the first strengthening portion (431) is arranged on the first connecting portion (41), and the second strengthening portion (432) is arranged on the second connecting portion (42).

10. The sample holding device of the electron beam inspection apparatus according to any one of claims 2 to 9, characterized in that, The cover plate (20) includes a main body portion (21) and a closing portion (22). The closing portion (22) is disposed on a side of the main body portion (21) facing the box body (10) and protrudes relatively from the main body portion (21). Wherein, the telescopic member (312) is directly or indirectly connected to the main body portion (21). The cover plate (20) can cover the opening (a), and extends into the opening (a) through the closing portion (22) to close the sample chamber (A).

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