Laser interferometer multi-angle measuring device

Abstract

The laser interferometer multi-angle measuring device comprises a working plate, an angle bottom plate, a pitching angle plate, a supporting column and a working holder, the working plate comprises a first surface and a second surface which are opposite to each other, and a hollow groove is formed in the edge of the working plate; a first included angle is formed between the angle bottom plate and the working plate, the end, where the hollowed-out groove is located, of the working plate is arranged on the angle bottom plate, and deflection scale marks corresponding to the hollowed-out groove are arranged on the angle bottom plate. The pitching angle plate comprises a first edge area and a second edge area, the first edge area is connected with the second surface, a plurality of first threaded holes are formed in the second edge area, and different first threaded holes correspond to different first included angles; the supporting column is connected with the angle bottom plate and one of the first threaded holes; the working holder is used for emitting laser, and the working holder is connected with the first surface. Through the processing scheme disclosed by the invention, not only is the accuracy of tilt axis measurement improved, but also the measurement time and the measurement cost can be greatly reduced.

Description

Technical Field

[0001] The present disclosure relates to the technical field of mechanical precision measurement, and particularly to a multi-angle measuring device for a laser interferometer. Background Art

[0002] For the precision error compensation of various tilt angles in machine tools, it has always been a difficult problem to ensure the machining precision during the movement of the machine tool bed. Since numerically controlled machine tools are mainly used for various high-efficiency, precision, and automated machining, and the position precision of multi-axis linkage is directly related to the final machining precision of the machine tool, it is particularly important to perform laser compensation for the precision error of the moving axis of the numerically controlled machine tool during the debugging stage of the machine tool. In the prior art, when measuring the diagonal of a machine tool, the laser interferometer device used can only be installed on the machine tool workbench, and then by adding a refracting mirror and an angle reflecting mirror to the interference mirror, the beam and the mirror group need to be continuously debugged to measure the corresponding motion precision. However, adding a refracting mirror and an angle reflecting mirror not only takes a lot of debugging time and equipment maintenance costs but also introduces new measurement errors.

[0003] Therefore, there is an urgent need to make a multi-angle measuring device for a laser interferometer, so as to avoid using too many mirror groups, reduce the measurement time, and reduce the measurement error and various measurement costs when measuring the diagonal of a machine tool. Summary of the Invention

[0004] In view of this, the embodiments of the present disclosure provide a multi-angle measuring device for a laser interferometer, which at least partially solves the problems existing in the prior art.

[0005] The embodiments of the present disclosure provide a multi-angle measuring device for a laser interferometer, including a working plate, an angle base plate, a pitch angle plate, a support column, and a working cloud platform. The working plate includes opposite first and second surfaces, and a hollow groove is provided at the edge of the working plate; the angle base plate is arranged at a first included angle with the working plate, the end of the working plate where the hollow groove is located is placed on the angle base plate, and the angle base plate is provided with a yaw scale line corresponding to the hollow groove; the pitch angle plate includes a first edge area and a second edge area, the first edge area is connected to the second surface, and a plurality of first threaded holes are provided on the second edge area, wherein different first threaded holes correspond to different first included angles; the support column connects the angle base plate and one of the first threaded holes; the working cloud platform is used for emitting laser, and the working cloud platform is connected to the first surface.

[0006] According to a specific implementation manner of the embodiments of the present disclosure, the working plate includes a first part and a second part, the first part is semicircular, the hollow groove is arranged on the first part, and the pitch angle plate is connected to the second part.

[0007] According to a specific implementation manner of the embodiments of the present disclosure, the second part is provided with a second threaded hole, and the first edge area is connected to the second threaded hole through a bolt.

[0008] According to a specific implementation manner of an embodiment of the present disclosure, a limiting groove is provided on the second part, and the first border area is placed in the limiting groove.

[0009] According to a specific implementation manner of an embodiment of the present disclosure, the pitch angle plate is semi-circular, the second border area is an arc-shaped border area, the number of the first threaded holes is 5, and the first included angles corresponding to the 5 first threaded holes are 20°, 30°, 45°, 60°, and 75° respectively.

[0010] According to a specific implementation manner of an embodiment of the present disclosure, a groove is provided at the end of the support column connected to the pitch angle plate, and threaded holes are provided on the two opposite side surfaces of the groove.

[0011] According to a specific implementation manner of an embodiment of the present disclosure, third threaded holes and fourth threaded holes are provided on the angle base plate at intervals along the first direction, and the end of the support column away from the pitch angle plate is connected to the third threaded hole or the fourth threaded hole.

[0012] According to a specific implementation manner of an embodiment of the present disclosure, the angle base plate includes a connected third part and a fourth part, the support column is connected to the third part, the fourth part is semi-circular, and the yaw scale line is provided on the fourth part.

[0013] According to a specific implementation manner of an embodiment of the present disclosure, the angle base plate includes 2 positioning grooves provided at intervals along the second direction.

[0014] According to a specific implementation manner of an embodiment of the present disclosure, a fifth threaded hole is provided on the angle base plate, and the fifth threaded hole is used to connect the angle base plate and the tripod through a bolt.

[0015] The multi-angle measuring device of the laser interferometer in the embodiment of the present disclosure includes a working plate, an angle base plate, a pitch angle plate, a support column, and a working cloud platform. A hollow groove is provided at the edge of the working plate, and a yaw scale line corresponding to the hollow groove is provided on the angle base plate. A plurality of first threaded holes are provided on the second border area of the pitch angle plate, wherein different first threaded holes correspond to different first included angles, and the support column connects the angle base plate and one of the first threaded holes. When performing the diagonal measurement of the machine tool, according to the running angle of the machine tool detection axis, the support column is connected to the corresponding first threaded hole on the pitch angle plate. After the included angle between the working plate and the angle base plate is approximately the same as the running angle of the machine tool detection axis, the support column and the pitch angle plate are fastened, and the yaw scale line of the angle base plate is observed through the hollow groove to determine the yaw angle of the working plate. Finally, the measurement is performed according to the inspection standard. Using this multi-angle measuring device of the laser interferometer can avoid using too many mirror groups in the measurement to increase the cosine error, not only improve the accuracy of the tilt axis measurement, but also can be used multiple times with one installation, greatly reducing the measurement time and reducing various measurement costs. Description of the Drawings

[0016] To more clearly illustrate the technical solutions of the embodiments of the present disclosure, the accompanying drawings required for the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present disclosure. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0017] Figure 1 It is a schematic structural diagram of a multi-angle measuring device for a laser interferometer provided by an embodiment of the present disclosure;

[0018] Figure 2 It is a schematic structural diagram of a multi-angle measuring device for a laser interferometer provided by an embodiment of the present disclosure when installed on a tripod;

[0019] Figure 3 It is a schematic structural diagram of a multi-angle measuring device for a laser interferometer provided by an embodiment of the present disclosure in another case when installed on a tripod.

[0020] Reference numerals:

[0021] 10. Multi-angle measuring device for laser interferometer; 1. Working plate; 11. First surface; 12. Second surface; 13. Hollow groove; 14. First part; 15. Second part; 151. Second threaded hole; 2. Angle base plate; 21. Yaw scale line; 22. Third part; 23. Fourth part; 24. Third threaded hole; 25. Fourth threaded hole; 26. Positioning groove; 27. Fifth threaded hole; 3. Pitch angle plate; 31. First threaded hole; 4. Support column; 5. Working pan-tilt head; 20. Tripod. Specific embodiments

[0022] The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0023] The following illustrates the embodiments of the present disclosure through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present disclosure from the content disclosed in this specification. Obviously, the described embodiments are only some embodiments of the present disclosure, rather than all embodiments. The present disclosure can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present disclosure. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present disclosure without creative efforts belong to the scope of protection of the present disclosure.

[0024] It should be noted that the following describes various aspects of embodiments within the scope of the appended claims. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is illustrative only. Based on this disclosure, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number of aspects set forth herein can be used to implement an apparatus and / or practice a method. Additionally, this apparatus and / or this method can be implemented using other structures and / or functionality in addition to one or more of the aspects set forth herein.

[0025] It should also be noted that the diagrams provided in the following embodiments only illustrate the basic concept of the present disclosure schematically. The components shown in the diagrams only relate to those of the present disclosure and are not drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0026] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the aspects can be practiced without these specific details.

[0027] Regarding the precision error compensation for various tilt angles in a machine tool, it has always been a difficult problem to ensure the machining precision during the movement of the machine tool bed. Since numerically controlled machine tools are mainly applied to various high-efficiency, precision, and automated machining, and the position precision of multi-axis linkage is directly related to the final machining precision of the machine tool, it is particularly important to perform laser compensation for the precision error of the moving axes of the numerically controlled machine tool during the machine tool debugging stage. In the prior art, when measuring the diagonal of a machine tool, the laser interferometer device can only be installed on the machine tool workbench, and then by adding a refractive mirror and an angle reflector to the interference mirror, the beam and the mirror group are continuously debugged to measure the corresponding motion precision. However, adding a refractive mirror and an angle reflector not only takes a lot of debugging time and equipment maintenance costs but also introduces new measurement errors.

[0028] To solve the above problems, an embodiment of the present disclosure provides a laser interferometer multi-angle measurement device. The laser interferometer multi-angle measurement device of the embodiment of the present disclosure will be described below with reference to the accompanying drawings.

[0029] Please refer to Figures 1 to 3 , Figure 1 which is a schematic structural diagram of a laser interferometer multi-angle measurement device provided by an embodiment of the present disclosure; Figure 2 which is a schematic structural diagram of a laser interferometer multi-angle measurement device provided by an embodiment of the present disclosure when installed on a tripod.Figure 3 This is a schematic structural diagram of another case where a multi-angle measuring device of a laser interferometer provided by an embodiment of the present disclosure is installed on a tripod. An embodiment of the first aspect of the present disclosure provides a multi-angle measuring device 10 of a laser interferometer, including a working plate 1, an angle base plate 2, a pitch angle plate 3, a support column 4, and a working pan-tilt head 5.

[0030] The working plate 1 includes opposite first surface 11 and second surface 12. A hollow groove 13 is provided at the edge of the working plate 1. The angle base plate 2 is arranged at a first included angle with the working plate 1. The end of the working plate 1 where the hollow groove 13 is located is placed on the angle base plate 2, and the angle base plate 2 is provided with a yaw scale line 21 corresponding to the hollow groove 13. During measurement, the yaw scale line 21 of the angle base plate 2 can be observed through the hollow groove 13 to determine the yaw angle of the working plate 1. Optionally, the angle base plate 2 includes a connected third part 22 and a fourth part 23. The support column 4 is connected to the third part 22, and the fourth part 23 is semicircular. The yaw scale line 21 is arranged on the fourth part 23. Optionally, the yaw angle lines include 0° line, ±15° lines, ±30° lines, ±45° lines, ±60° lines, ±75° lines, and ±90° lines, and the yaw angle lines represent the laser yaw angle. The pitch angle plate 3 includes a first border area and a second border area. The first border area is connected to the second surface 12, and a plurality of first threaded holes 31 are provided on the second border area. The support column 4 connects the angle base plate 2 and one of the first threaded holes 31, where different first threaded holes 31 correspond to different first included angles. It should be understood that the more the number of the first threaded holes 31, the wider the measurement range during the diagonal measurement of the machine tool. The working pan-tilt head 5 is used to emit laser, and the working pan-tilt head 5 is connected to the first surface 11. Optionally, all parts of the multi-angle measuring device 10 of the laser interferometer are made of alloy.

[0031] When the multi-angle measuring device 10 of the laser interferometer provided by the embodiment of the present disclosure is used for the diagonal measurement of the machine tool, according to the running angle of the machine tool detection axis, the support column 4 is connected to the corresponding first threaded hole 31 on the pitch angle plate 3. After making the included angle between the working plate 1 and the angle base plate 2 approximately the same as the running angle of the machine tool detection axis, the support column 4 and the pitch angle plate 3 are fastened, and the yaw scale line 21 of the angle base plate 2 is observed through the hollow groove 13 to determine the yaw angle of the working plate 1. Finally, the measurement is carried out according to the inspection standard. Using the multi-angle measuring device 10 of the laser interferometer can avoid using too many lens groups during the measurement to increase the cosine error, not only improve the accuracy of the tilt axis measurement, but also can be used multiple times with one installation, greatly reducing the measurement time and reducing various measurement costs.

[0032] In some alternative embodiments, the working plate 1 includes a first part 14 and a second part 15. The first part 14 is semi-circular, and the hollow groove 13 is provided in the first part 14. The pitch angle plate 3 is connected to the second part 15. The semi-circular first part 14 is placed on the angle base plate 2. It is equivalent that the part where the working plate 1 contacts the angle base plate 2 is a point, and this point is also located in the hollow groove 13, which is more convenient to observe the yaw scale line 21 of the angle base plate 2 through the hollow groove 13 so as to determine the yaw angle of the working plate 1.

[0033] In some alternative embodiments, the second part 15 is provided with a second threaded hole 151, and the first side area is connected to the second threaded hole 151 by a bolt. The bolt connection structure is reliable and the connection is simple.

[0034] In some alternative embodiments, a limiting groove is provided on the second part 15, and the first side area is placed in the limiting groove. The pitch angle plate 3 is clamped in the limiting groove, which is convenient for positioning and installation, and can prevent the pitch angle plate 3 from shifting, causing measurement errors.

[0035] In some alternative embodiments, the pitch angle plate 3 is semi-circular, the second side area is an arc-shaped side area, and the number of the first threaded holes 31 is 5. The first included angles corresponding to the 5 first threaded holes 31 are 20°, 30°, 45°, 60°, and 75° respectively. By setting 5 first threaded holes 31, 5 common measurement angles can be obtained. Under the condition of meeting the measurement requirements as much as possible, the processing difficulty can be reduced. It should be understood that in the case of requiring more measurement angles, more first threaded holes 31 can be drilled on the pitch angle plate 3.

[0036] In some alternative embodiments, the end of the support column 4 connected to the pitch angle plate 3 is provided with a groove, and threaded holes are provided on the opposite two side surfaces of the groove. By providing the groove, it is convenient to connect the pitch angle plate 3 and the support column 4 by bolts, and at the same time, the groove can play a role in limiting the pitch angle plate 3 to a certain extent.

[0037] In some alternative embodiments, third threaded holes 24 and fourth threaded holes 25 are provided on the angle base plate 2 at intervals along the first direction. The end of the support column 4 away from the pitch angle plate 3 is connected to the third threaded hole 24 or the fourth threaded hole 25, so as to adapt to measurements at different angles. Exemplarily, the distance from the third threaded hole 24 to the yaw scale line 21 is less than the distance from the fourth threaded hole 25 to the yaw scale line 21. The third threaded hole 24 and the fourth threaded hole 25 are respectively applied to large-angle inclination measurement and small-angle inclination measurement, as Figure 2 and Figure 3 shown.

[0038] In some alternative embodiments, the angle base plate 2 includes two positioning slots 26 spaced apart in the second direction. By providing the positioning slots 26, while reducing the weight, when installing the laser interferometer multi-angle measuring device 10 provided in this embodiment onto the machine tool workbench, rapid positioning and installation can be achieved through the positioning slots 26.

[0039] In some alternative embodiments, a fifth threaded hole 27 is provided on the angle base plate 2, and the fifth threaded hole 27 is used to connect the angle base plate 2 and the tripod 20 by bolts, as Figure 2 and Figure 3 shown. By providing the fifth threaded hole 27, during the diagonal measurement of the machine tool, the laser interferometer multi-angle measuring device 10 can be installed on the tripod 20, overcoming the limitation that the existing laser interferometer equipment can only be installed on the machine tool workbench, and having a wider range of applications.

[0040] As described above, the above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed by the present disclosure should be covered within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the protection scope of the claims.

Claims

1. A multi-angle measuring device for a laser interferometer, characterized in that Comprising: A working plate, including opposite first and second surfaces, with a hollowed-out groove provided at the edge of the working plate; An angle base plate, arranged at a first included angle with the working plate, the end of the working plate where the hollowed-out groove is located is placed on the angle base plate, and the angle base plate is provided with a yaw scale line corresponding to the hollowed-out groove; A pitch angle plate, including a first marginal area and a second marginal area, the first marginal area is connected to the second surface, and a plurality of first threaded holes are provided on the second marginal area, wherein different first threaded holes correspond to different first included angles; A support column, connecting the angle base plate and one of the first threaded holes; A working pan-tilt head, for emitting laser, the working pan-tilt head is connected to the first surface.

2. The laser interferometer multi-angle measuring device according to claim 1, wherein The working plate includes a first part and a second part, the first part is semi-circular, the hollowed-out groove is provided in the first part, and the pitch angle plate is connected to the second part.

3. The laser interferometer multi-angle measuring device according to claim 2, wherein, The second part is provided with second threaded holes, and the first marginal area is connected to the second threaded holes by bolts.

4. The laser interferometer multi-angle measurement device according to claim 3, wherein, A limiting groove is provided on the second part, and the first marginal area is placed in the limiting groove.

5. The laser interferometer multi-angle measuring device according to claim 1, characterized in that, The pitch angle plate is semi-circular in shape, the second marginal area is an arc-shaped marginal area, the number of the first threaded holes is 5, and the first included angles corresponding to the 5 first threaded holes are 20°, 30°, 45°, 60°, and 75° respectively.

6. The laser interferometer multi-angle measurement device according to claim 1, wherein The end of the support column connected to the pitch angle plate is provided with a groove, and threaded holes are provided on the two opposite side surfaces of the groove.

7. The multi-angle measuring device of a laser interferometer according to claim 1, characterized in that Third threaded holes and fourth threaded holes are provided on the angle base plate at intervals along a first direction, and the end of the support column away from the pitch angle plate is connected to the third threaded hole or the fourth threaded hole.

8. The laser interferometer multi-angle measuring device according to claim 1, characterized in that, The angle base plate includes a connected third part and a fourth part, the support column is connected to the third part, the fourth part is semi-circular, and the yaw scale line is provided on the fourth part.

9. The laser interferometer multi-angle measuring device according to claim 1, characterized in that, The angle base plate includes 2 positioning grooves provided at intervals along a second direction.

10. The laser interferometer multi-angle measuring device according to claim 1, characterized in that, A fifth threaded hole is provided on the angle base plate, and the fifth threaded hole is used to connect the angle base plate and a tripod by bolts.

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