Gas branch valve box and gas conveying equipment

Abstract

The utility model belongs to the technical field of gas sub-valves, particularly relates to a gas sub-valve box and gas conveying equipment, and aims to solve the problems that a common pre-mounting plate is fixedly connected with the interior of a box body through a bolt, stress is concentrated at the bolt to cause bolt deformation, and when the mounting position needs to be adjusted, the pre-mounting plate needs to be propped by one hand, so that the mounting position is inconvenient to adjust. In order to solve the problems that in the prior art, when a valve body needs to be installed, a bolt is firstly fed into a threaded hole by one hand to be pre-positioned and then is tightened through a screwdriver by the other hand, and installation is not convenient enough, the following scheme is provided that the device comprises a box body, a containing space used for installing the valve body is formed in the box body, and a plurality of guide rods are arranged in the containing space; the bottom plate capable of adjusting the vertical height is arranged in the box body to play a role in supporting the pre-mounting plate, stress concentration of the pre-mounting plate at the bolt fixing position is avoided, after the pre-mounting plate is supported, the height can be adjusted only with one hand, the bottom plate can be fixed by driving the limiting rod to stretch out through the rotary knob, and the use is convenient. And the operation is more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of gas valve distribution, in particular to a gas valve distribution box and gas delivery equipment. Background Art

[0002] In the development of modern industry and high-tech, almost all intelligent devices are inseparable from semiconductors, and the processing of semiconductors includes deposition processes such as chemical vapor deposition (CVD) of metal, dielectric and semiconductor materials, etching of surface layers, polishing of photoresist mask layers, etc. In these semiconductor processing processes, a large amount of gas is required for reaction, and multiple gases need to be introduced. These gases are transported through the gas manifold box (Valve Manifold Box, VMB) for diversion. The existing gas delivery device has the following shortcomings:

[0003] In order to facilitate the installation of the valve body, a pre-installation plate is generally provided. The valve body is first installed on the pre-installation plate, and then the valve body and the pre-installation plate are installed together in the box. Generally, the pre-installation plate is fixed to the inside of the box by bolts. The stress is concentrated at the bolts, causing the bolts to deform. When the installation position needs to be adjusted, one hand is required to support the pre-installation plate, and the other hand is used to first insert the bolt into the threaded hole for pre-positioning, and then the bolt is tightened with a screwdriver. The installation is not convenient enough. Utility Model Content

[0004] The utility model provides a gas valve distribution box and a gas delivery device, which solves the shortcomings of the prior art that a general pre-installed plate is fixedly connected to the inside of a box body by bolts, stress is concentrated at the bolts, causing the bolts to deform, and when the installation position needs to be adjusted, one hand is required to support the pre-installed plate, and the other hand is required to first insert the bolt into the threaded hole for pre-positioning, and then tighten the bolt with a screwdriver, resulting in inconvenient installation.

[0005] The utility model provides the following technical solutions:

[0006] On the one hand, the present application provides a gas distribution valve box, including a box body. There is an accommodation space in the box body for installing valve bodies. A plurality of guide rods are arranged in the accommodation space. A bottom plate is slidably connected to the guide rods. The lower part of the bottom plate is formed with a U-shaped groove opening upwards by bending. A knob is installed on the upper part of the bottom plate. A limiting disc and a crank mechanism are installed on the rotating shaft of the knob. The end of the crank mechanism is connected with a limiting rod. Limiting grooves with different heights are opened on both sides of the box body. Insert the lower side of the pre-installation plate into the U-shaped groove, turn the knob to drive the limiting rods at both ends to extend into the limiting grooves for limiting. At the same time, the limiting disc limits the upper side of the pre-installation plate. By arranging a bottom plate capable of adjusting the vertical height in the box body to support the pre-installation plate, stress concentration at the fixing bolts of the pre-installation plate is avoided. After supporting the pre-installation plate, the height can be adjusted with only one hand. By driving the limiting rod to extend out through the knob, the fixing of the bottom plate can be completed, and the operation is more convenient.

[0007] As a further improvement of the above solution.

[0008] Preferably, a left guide rod and a right guide rod are arranged in the accommodation space. The bottom and top of the left guide rod and the right guide rod are fixedly connected to the inner wall of the box body. A left sliding sleeve and a right sliding sleeve are sleeved on the left guide rod and the right guide rod. A bottom plate is fixed between the left sliding sleeve and the right sliding sleeve. By arranging the left guide rod and the right guide rod, the left sliding sleeve, the right sliding sleeve and the bottom plate can slide freely along the guide rods in the box body. When adjusting the height, only a vertical acting force needs to be provided, and there is no need to exert effort to control the bottom plate, avoiding the bottom plate from tilting towards the front and back sides and the left and right sides.

[0009] Preferably, the lower part of the bottom plate is provided with a first bending section formed by bending upwards to form a U-shaped groove. A second bending section perpendicular to the bottom plate is arranged on the first bending section. The pre-installation plate is a U-shaped pre-installation plate. Horizontal extension edges are arranged on the upper and lower sides of the U-shaped pre-installation plate. The extension edges are adapted to the U-shaped groove. The vertical extension edge of the U-shaped pre-installation plate is adapted to the second bending section. By arranging the first bending section on the bottom plate to form a U-shaped groove, the pre-installation plate can be supported, providing an upward acting force on the pre-installation plate. By arranging the second bending section, the pre-installation plate is further limited, avoiding the pre-installation plate from tipping forward and reducing stress concentration during knob limiting.

[0010] Preferably, the crank mechanism includes a rotating lever fixed to the rotating shaft. The two ends of the rotating lever are rotatably connected with a first connecting rod and a second connecting rod through pin shafts. The first connecting rod is rotatably connected with the right limiting rod. The right limiting rod passes through the right limiting sleeve. The second connecting rod is rotatably connected with the left limiting rod. The left limiting rod passes through the left limiting sleeve. When turning the knob, the crank mechanism can be driven at the same time. By the crank mechanism, the left limiting rod and the right limiting rod on both sides are driven to extend out. The bottom plate is limited by the cooperation of the left limiting rod, the right limiting rod and the limiting groove.

[0011] Preferably, the limiting groove is composed of a left limiting fence and a right limiting fence with depth. When the knob rotates 90° and the limiting disc presses against the outer side of the extended edge of the U-shaped pre-installation plate, the left limiting rod and the right limiting rod extend out simultaneously. The left limiting rod extends into the left limiting fence, and the right limiting rod extends into the right limiting fence. The bottom plate is limited by the cooperation of the left limiting rod, the right limiting rod and the limiting groove.

[0012] On the other hand, the present application provides a gas delivery device including the gas distribution valve box.

[0013] It should be understood that the above general description and the following detailed description are only exemplary and do not limit the present invention.

[0014] In the present invention, by providing a bottom plate capable of adjusting the vertical height in the box body to support the pre-installation plate, stress concentration at the fixing bolts of the pre-installation plate is avoided. After supporting the pre-installation plate, the height can be adjusted with only one hand. The bottom plate can be fixed by driving the limiting rod to extend out through the knob, and the operation is more convenient.

[0015] By providing a left guide rod and a right guide rod, the left sliding sleeve, the right sliding sleeve and the bottom plate can slide freely along the guide rod in the box body. When adjusting the height, only a vertical acting force needs to be provided, and there is no need to exert effort to control the bottom plate, avoiding the bottom plate from tilting to the front and back sides and the left and right sides.

[0016] By providing a first bending section on the bottom plate to form a U-shaped groove, the pre-installation plate can be supported, and an upward acting force is provided to the pre-installation plate. By providing a second bending section, the pre-installation plate is further limited to avoid the pre-installation plate from tipping forward and reducing stress concentration during knob limiting. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a three-dimensional structure diagram of the gas distribution valve box provided by the embodiment of the present invention;

[0018] Figure 2 is an internal structure diagram of the gas distribution valve box provided by the embodiment of the present invention;

[0019] Figure 3 is a structure diagram of the bottom plate and the crank of the gas distribution valve box provided by the embodiment of the present invention;

[0020] Figure 4 is Figure 3 the rear view of

[0021] Figure 5 is a structure diagram of the U-shaped pre-installation plate.

[0022] Reference numerals:

[0023] 1. Box body; 2. Left guide rod; 3. Left limit fence; 4. Right guide rod; 5. Left sliding sleeve; 6. Right sliding sleeve; 7. Knob; 8. Limit disc; 9. Bottom plate; 10. First bending section; 11. Second bending section; 12. Right limit sleeve; 13. Right limit rod; 14. First connecting rod; 15. Rotating lever; 16. Second connecting rod; 17. Left limit sleeve; 18. Left limit rod; 19. U-shaped pre-installation plate. Specific implementation mode

[0024] The embodiments of the present invention will be described below with reference to the accompanying drawings in the embodiments of the present invention.

[0025] In the description of the embodiments of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "connection" and "installation" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. In addition, "communication" can be a direct communication or an indirect communication through an intermediate medium. Among them, "fixation" means that they are connected to each other and the relative position relationship after connection remains unchanged. The orientation terms mentioned in the embodiments of the present invention, such as "inside", "outside", "top", "bottom", etc., are only references to the direction of the accompanying drawings. Therefore, the orientation terms used are for better and clearer description and understanding of the embodiments of the present invention, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present invention.

[0026] In the embodiments of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features.

[0027] In the embodiments of the present invention, "and / or" is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B may represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this article generally represents an "or" relationship between the associated objects before and after.

[0028] Example, refer to Figures 1 - 5 , The gas distribution valve box includes a box body 1. There is an accommodation space for installing the valve body inside the box body 1. A plurality of guide rods are arranged in the accommodation space. A left guide rod 2 and a right guide rod 4 are arranged in the accommodation space. The bottoms and tops of the left guide rod 2 and the right guide rod 4 are fixedly connected to the inner wall of the box body 1. A bottom plate 9 is slidably connected to the guide rods. A left sliding sleeve 5 and a right sliding sleeve 6 are sleeved on the left guide rod 2 and the right guide rod 4. A bottom plate 9 is fixed between the left sliding sleeve 5 and the right sliding sleeve 6;

[0029] The lower part of the bottom plate 9 is formed by bending to form a U-shaped groove opening upward, and the lower part of the bottom plate 9 is provided with a first bending section 10 bent upward to form the U-shaped groove, and the first bending section 10 is provided with a second bending section 11 perpendicular to the bottom plate 9, and the pre-installed plate is a U-shaped pre-installed plate 19, and the upper and lower sides of the U-shaped pre-installed plate 19 are provided with horizontal extended edges, which are adapted to the U-shaped groove, and the vertical extended edges of the U-shaped pre-installed plate 19 are adapted to the second bending section 11.

[0030] A knob 7 is installed on the upper part of the bottom plate 9, and a limit plate 8 and a crank mechanism are installed on the rotating shaft of the knob 7. The crank mechanism includes a rotating lever 15 fixed on the rotating shaft, and the two ends of the rotating lever 15 are rotatably connected with a first connecting rod 14 and a second connecting rod 16 through a pin shaft. The first connecting rod 14 is rotatably connected with the right limit rod 13, and the right limit rod 13 passes through the right limit sleeve 12. The second connecting rod 16 is rotatably connected with the left limit rod 18, and the left limit rod 18 passes through the left limit sleeve 17. The end of the crank mechanism is connected to the limit rod, and the box body 1 is opened on both sides. There are limit grooves of different heights, and the size of the limit grooves is adapted to the size of the limit rods. Insert the lower side of the pre-installed plate into the U-shaped groove, turn the knob 7 to drive the limit rods at both ends to extend into the limit grooves for limiting. The limit grooves are composed of a left limit fence 3 and a right limit fence with depth. When the knob 7 is rotated 90° and the limit plate 8 is pressed to the outer side of the extended edge of the U-shaped pre-installed plate 19, the left limit rod 18 and the right limit rod 13 are extended at the same time, the left limit rod 18 extends into the left limit fence 3, and the right limit rod 13 extends into the right limit fence. At the same time, the limit plate 8 limits the upper side of the pre-installed plate.

[0031] A gas delivery device comprises a gas valve box.

[0032] The working principle of the present application is: first, install the valve component on the U-shaped pre-installation plate 19, insert the lower extension edge of the U-shaped pre-installation plate 19 into the U-shaped groove, and the second bending section 11 can vertically support the U-shaped pre-installation plate 19, then adjust the height of the bottom plate 9, and after adjusting the bottom plate 9 to a suitable height, turn the knob 7 90°, and the crank mechanism drives the left limit rod 18 and the right limit rod 13 to extend at the same time, the left limit rod 18 extends into the left limit fence 3, and the right limit rod 13 extends into the right limit fence, and at the same time, the limit plate 8 limits the upper side of the pre-installation plate, thereby completing the fixation of the U-shaped pre-installation plate 19.

[0033] The above are only specific implementations of the utility model, but the protection scope of the utility model is not limited to them. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model; in the absence of conflicts, the embodiments of the utility model and the features in the embodiments can be combined with each other. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims.

Claims

1. Gas distribution valve box, characterized in that, It includes a box body. There is a receiving space for installing a valve body inside the box body. A plurality of guide rods are arranged in the receiving space. A bottom plate is slidably connected to the guide rods. An upwardly open U-shaped groove is formed by bending the lower part of the bottom plate. A knob is installed on the upper part of the bottom plate. A limiting disc and a crank mechanism are installed on the rotating shaft of the knob. The end of the crank mechanism is connected to a limiting rod. Limiting grooves with different heights are formed on both sides of the box body. The lower side of the pre-installation plate is inserted into the U-shaped groove. The knob is rotated to drive the limiting rods at both ends to extend into the limiting grooves for limiting. At the same time, the limiting disc limits the upper side of the pre-installation plate.

2. The gas distribution valve box according to claim 1, wherein A left guide rod and a right guide rod are arranged in the receiving space. The bottom and top of the left guide rod and the right guide rod are fixedly connected to the inner wall of the box body. A left sliding sleeve and a right sliding sleeve are sleeved on the left guide rod and the right guide rod. A bottom plate is fixed between the left sliding sleeve and the right sliding sleeve.

3. The gas distribution valve box according to claim 1, wherein A first bending section for upwardly bending to form a U-shaped groove is provided at the lower part of the bottom plate. A second bending section perpendicular to the bottom plate is provided on the first bending section. The pre-installation plate is a U-shaped pre-installation plate. Horizontal extension edges are provided on the upper and lower sides of the U-shaped pre-installation plate. The extension edges are adapted to the U-shaped groove. The vertical extension edge of the U-shaped pre-installation plate is adapted to the second bending section.

4. The gas distribution valve box according to claim 1, characterized in that The crank mechanism includes a rotating lever fixed to the rotating shaft. The two ends of the rotating lever are rotatably connected to a first connecting rod and a second connecting rod through pin shafts. The first connecting rod is rotatably connected to the right limiting rod. The right limiting rod passes through the right limiting sleeve. The second connecting rod is rotatably connected to the left limiting rod. The left limiting rod passes through the left limiting sleeve.

5. The gas distribution valve box according to claim 1, wherein The limiting groove is composed of a left limiting fence and a right limiting fence with depth. When the knob is rotated 90° and the limiting disc presses against the outer side of the upper extension edge of the U-shaped pre-installation plate, the left limiting rod and the right limiting rod extend out at the same time. The left limiting rod extends into the left limiting fence, and the right limiting rod extends into the right limiting fence.

6. A gas delivery device, characterized in that, It includes the gas distribution valve box according to any one of claims 1-5.

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