Miniature diaphragm pump

Abstract

The utility model discloses a miniature diaphragm pump which comprises a water inlet and outlet cover, a flow dividing cover, a plunger mounting plate and a motor shell. A driving shaft is arranged in the motor shell, a plurality of variable-pressure cavities are formed between the plunger mounting plate and the flow dividing cover, water pressing plungers are arranged in the variable-pressure cavities, and a pressurizing structure is arranged between the plunger mounting plate and the motor shell and comprises a transmission cam connected with the driving shaft and a cam disc connected with the transmission cam. An insertion channel inclined to the axis of the driving shaft is formed in the transmission cam, the driving shaft is connected with the insertion channel, so that the transmission cam is obliquely arranged in the radial direction, the driving shaft drives the cam disc to rotate so as to drive the water pressing plunger to move up and down, and a water inlet area and a water outlet area are defined between the water inlet and outlet cover and the flow dividing cover. A pressure control switch is arranged on the water inlet and outlet cover, the water inlet area has a normal pressure state and an overpressure state, and when the water inlet area is in the overpressure state, the pressure control switch controls the driving shaft to stop rotating.

Description

Technical Field

[0001] The utility model relates to the technical field of diaphragm pumps, and particularly relates to a micro diaphragm pump. Background Art

[0002] A micro diaphragm pump refers to a micro air pump or liquid pump, which has one air suction nozzle and one air exhaust nozzle for inlet and outlet respectively. Inside, a mechanical device makes the diaphragm in the pump move reciprocally, and a vacuum or negative pressure can be continuously formed at the inlet, and a slightly positive pressure is formed at the air exhaust nozzle; the working medium is mainly gas or fluid, and it is a kind of instrument with a small volume, which is widely used in coffee machines, beer machines, blood pressure machines, water purifiers, etc. The existing diaphragm pumps can also be used as compression pumps by compressing gases or liquids.

[0003] For the start or stop of the existing micro diaphragm pumps, manual intervention is required, or they are started and stopped by manually controlling buttons or switches. When the water pressure inside the micro diaphragm pump is too high, the power supply cannot be automatically cut off, which easily causes damage to the diaphragm pump. Summary of the Utility Model

[0004] To solve the technical problems in the background art, the utility model provides a micro diaphragm pump.

[0005] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0006] A micro diaphragm pump includes a water inlet and outlet cover, a flow dividing cover, a plunger mounting plate, and a motor housing, which are assembled in sequence from top to bottom;

[0007] A drive shaft is arranged inside the motor housing. A plurality of pressure transformation chambers are formed between the plunger mounting plate and the flow dividing cover. A water pressure plunger is arranged inside the pressure transformation chambers. And a boosting structure is arranged between the plunger mounting plate and the motor housing. The boosting structure includes a transmission cam connected to the drive shaft and a cam disc connected to the transmission cam. An insertion channel obliquely arranged with respect to the axis of the drive shaft is formed inside the transmission cam. The drive shaft is connected to the insertion channel so that the transmission cam is arranged obliquely in the radial direction. The drive shaft drives the cam disc to rotate to drive the water pressure plunger to move up and down;

[0008] The water inlet and outlet cover covers the flow dividing cover, and an inlet area and an outlet area are defined between the water inlet and outlet cover and the flow dividing cover. A water inlet pipe communicating with the inlet area and a water outlet pipe communicating with the outlet area are formed on the water inlet and outlet cover. And a water inlet hole placed in the inlet area and a water outlet hole placed in the outlet area are formed on the flow dividing cover. And the water inlet hole and the water outlet hole communicate with the pressure transformation chambers;

[0009] A pressure control switch for controlling the movement of the drive shaft is provided on the water inlet and outlet cover. The water inlet area has a normal pressure state and an overpressure state. When the water inlet area is in the overpressure state, the pressure control switch controls the drive shaft to stop rotating.

[0010] Preferably, a plurality of extrusion units are formed on the cam disk. The extrusion units rotate with the cam disk and form a height difference therebetween to force the water pressure plunger to move up and down. Through the above improvement, since the cam disk is connected to the transmission cam, the cam disk will rotate eccentrically with the transmission cam. And the transmission cam is formed with an obliquely arranged insertion channel, and the drive shaft is connected to the insertion channel, resulting in the cam disk rotating obliquely with the transmission cam. Thus, a height difference will be generated as the cam disk rotates, causing the plunger to alternately compress water into the pressure conversion cavity to generate pressurized water output.

[0011] Preferably, a positioning convex portion is formed in the pressure conversion cavity, and a positioning groove for inserting the positioning convex portion is formed on the plunger. Through the above improvement, the cooperation of the positioning convex portion and the positioning groove ensures the accuracy of the plunger position installation.

[0012] Preferably, the pressure control switch includes an elastic drive piece provided on the water inlet and outlet cover, a drive slider slidably provided above the water inlet and outlet cover, and a control unit. A certain water storage space is formed between the elastic drive piece and the water inlet and outlet cover, and a water inlet communicating with the water storage space is formed on the water inlet and outlet cover;

[0013] When the water inlet area is in the normal pressure state, the drive slider is away from the control unit. When the water inlet area is in the overpressure state, the elastic drive piece deforms towards the drive slider and drives the drive slider to abut against the control unit. Through the above improvement, when the water inlet area is in the high pressure state, the elastic drive piece will deform under pressure, thus deforming towards the drive slider and pushing the drive slider to move, thereby starting the control unit to cut off the power supply and making the transmission cam stop rotating.

[0014] Preferably, a mounting seat is provided on the water inlet and outlet cover, the control unit is arranged on the mounting seat, a sliding convex portion is formed on the drive slider, and a sliding groove for inserting the sliding convex portion is formed on the mounting seat. Through the above improvement, the stability of the drive slider during the sliding process is improved.

[0015] Preferably, a plurality of water return grooves are formed on the shunt cover, the water outlet holes are arranged in the water return grooves, and a first check valve piece is inserted on the water return groove. The first check valve piece includes a shielding piece and a sliding column. The shielding piece is placed in the water return groove and shields the water outlet holes, and a slot for the sliding column to be placed is formed on the water return groove. Through the above improvement, the shielding piece can shield the water outlet holes to prevent the water in the water outlet area from flowing back into the pressure conversion chamber, and during the process of discharging water into the water outlet area, the sliding column will slide along the slot to prevent the position of the first check valve piece from shifting.

[0016] Preferably, a limiting column is formed on the water inlet and outlet cover. The limiting column is located above the shielding piece and abuts against the shielding piece to limit the upward movement of the first check valve piece. Through the above improvement, when the first check valve piece rises to a certain position, it will abut against the limiting column, thus preventing the first check valve piece from detaching from the water return groove.

[0017] Preferably, a second check valve piece is inserted at the bottom in the shunt cover. The second check valve piece includes an elastically arranged elastic edge and a plug-in column inserted on the shunt cover, and a clamping convex part is formed on the plug-in column. The clamping convex part abuts against the upper end surface of the shunt cover to limit the second check valve piece from detaching from the shunt cover. Through the above improvement, when water enters the pressure conversion chamber, the elastic edge will deform to expose the water inlet hole, so that water can enter the pressure conversion chamber from the water inlet area and prevent the water in the pressure conversion chamber from flowing back. And because a clamping convex part is formed on the plug-in column, the clamping convex part abuts against the upper end surface of the shunt cover to limit the second check valve piece from detaching from the shunt cover.

[0018] Preferably, a partition groove is formed on the shunt cover, and a partition convex part is formed at the bottom of the water inlet and outlet cover. The partition convex part is inserted into the partition groove to define a water inlet area and a water outlet area between the water inlet and outlet cover and the shunt cover. Through the above improvement, the partition groove and the partition convex part are used in cooperation to define a water inlet area and a water outlet area between the water inlet and outlet cover and the shunt cover, realizing the entire water flow circulation.

[0019] Preferably, a sealing ring is arranged in the partition groove, and the partition convex part abuts against the sealing ring. Through the above improvement, the sealing performance between the water inlet area and the water outlet area is greatly improved.

[0020] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0021] The drive shaft drives the transmission cam to rotate, causing the transmission cam to drive the cam disk to rotate. The transmission cam is provided with an insertion channel obliquely arranged with respect to the axis of the drive shaft. The drive shaft is connected to the insertion channel, causing the transmission cam to be arranged obliquely in the radial direction, thereby causing the cam disk to rotate obliquely with the transmission cam. As the cam disk rotates, a height difference is generated, causing the plunger to alternately compress water into the pressure conversion chamber. The water enters the pressure conversion chamber from the water inlet area for pressurization, then enters the water outlet area from the pressure conversion chamber, and finally is discharged from the water outlet pipe. A pressure control switch for controlling the operation of the drive shaft is provided on the water inlet and outlet cover. When the pressure in the water inlet area is too high, the pressure control switch cuts off the power supply, causing the drive shaft to stop working, thereby realizing the internal pressure control of the pump body and avoiding damage to the pump body. Brief Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram of the whole of the present utility model;

[0023] Figure 2 It is an exploded view of the whole structure of the present utility model;

[0024] Figure 3 It is a sectional view of the whole structure of the present utility model;

[0025] Figure 4 It is a schematic structural diagram of the water inlet and outlet cover of the present utility model;

[0026] Figure 5 It is a schematic structural diagram of the pressure control switch of the present utility model;

[0027] Figure 6 It is a schematic structural diagram of the cooperation between the flow dividing cover and the second check valve piece of the present utility model;

[0028] Figure 7 It is a schematic structural diagram of the cooperation between the flow dividing cover and the first check valve piece of the present utility model;

[0029] Figure 8 It is a schematic structural diagram of the flow dividing cover of the present utility model;

[0030] Figure 9 It is a schematic structural diagram of the second check valve piece of the present utility model;

[0031] Figure 10 It is a schematic structural diagram of the first check valve piece of the present utility model;

[0032] Figure 11 It is a schematic structural diagram of the plunger mounting plate of the present utility model;

[0033] Figure 12 It is a schematic structural diagram of the cooperation between the drive shaft and the cam disk of the present utility model;

[0034] In the figure: 1, inlet and outlet cover; 2, shunt cover; 3, plunger mounting plate; 4, motor housing; 5, drive shaft; 6, pressurization structure; 7, pressure control switch; 1.1, variable pressure chamber; 1.2, water pressure plunger; 1.3, transmission cam; 1.4, cam disc; 1.5, insertion channel; 1.6, water inlet area; 1.7, water outlet area; 2.1, water inlet pipe; 2.2, water outlet pipe; 2.3, water inlet hole; 2.4, water outlet hole; 2.5, extrusion unit; 2.6, positioning convex part; 2.7, positioning groove; 3.1, elastic drive piece; 3.2, drive slider; 3.3, control unit; 3.4, water storage space; 3.5, water inlet; 3.6, mounting seat; 3.7, sliding convex part; 3.8, sliding groove; 4.1, water return groove; 4.2, first check valve piece; 4.3, shielding piece; 4.4, sliding column; 4.5, limiting column; 4.6, second check valve piece; 4.7, elastic edge; 4.8, insertion column; 4.9, clamping convex part; 5.1, partition groove; 5.2, partition convex part; 5.3, sealing ring; 5.4, slot; Detailed implementation mode

[0035] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0036] It should be understood that although the terms upper, middle, lower, top, one end, etc. appear in this article to describe various elements, these elements are not limited by these terms. These terms are only used to distinguish the elements from each other for easy understanding, rather than to define any directional or sequential limitations.

[0037] As Figures 1-12 shown, a micro diaphragm pump includes an inlet and outlet cover 1, a shunt cover 2, a plunger mounting plate 3, and a motor housing 4 that are assembled in sequence from top to bottom;

[0038] Specifically, a drive shaft 5 is arranged in the motor housing 4. A plurality of variable pressure chambers 1.1 are formed between the plunger mounting plate 3 and the shunt cover 2. A water pressure plunger 1.2 is arranged in the variable pressure chamber 1.1. And a pressurization structure 6 is arranged between the plunger mounting plate 3 and the motor housing 4. The pressurization structure 6 includes a transmission cam 1.3 connected to the drive shaft 5 and a cam disc 1.4 connected to the transmission cam 1.3. An insertion channel 1.5 inclined obliquely to the axis of the drive shaft 5 is formed in the transmission cam 1.3. The drive shaft 5 is connected to the insertion channel 1.5 so that the transmission cam 1.3 is arranged obliquely in the radial direction. The drive shaft 5 drives the cam disc 1.4 to rotate to drive the water pressure plunger 1.2 to move up and down;

[0039] Further, the water inlet and outlet cover 1 is covered on the flow dividing cover 2, and a water inlet area 1.6 and a water outlet area 1.7 are defined between the water inlet and outlet cover 1 and the flow dividing cover 2. A water inlet pipe 2.1 communicating with the water inlet area 1.6 and a water outlet pipe 2.2 communicating with the water outlet area 1.7 are formed on the water inlet and outlet cover 1. An inlet hole 2.3 placed in the water inlet area 1.6 and an outlet hole 2.5 placed in the water outlet area 1.7 are formed on the flow dividing cover 2, and the inlet hole 2.3 and the outlet hole 2.4 communicate with the pressure transformation cavity 1.1;

[0040] In addition, a pressure control switch 7 for controlling the movement of the driving shaft 5 is arranged on the water inlet and outlet cover 1. The water inlet area 1.6 has a normal pressure state and an overpressure state. When the water inlet area 1.6 is in the overpressure state, the pressure control switch 7 controls the driving shaft 5 to stop rotating.

[0041] During the operation of the entire diaphragm pump, the driving shaft 5 drives the transmission cam 1.3 to rotate, causing the transmission cam 1.3 to drive the cam disk 1.4 to rotate. And the transmission cam 1.3 is formed with an obliquely arranged insertion channel 1.5. The driving shaft 5 is connected to the insertion channel 1.5, making the transmission cam 1.3 arranged obliquely in the radial direction, so that the cam disk 1.4 rotates obliquely along with the transmission cam 1.3. As the cam disk 1.4 rotates, a height difference is generated, generating pressure to suck water into the pressure transformation cavity 1.1. The water enters the pressure transformation cavity 1.1 from the water inlet area 1.6 and is pressurized. After the pressurization is completed, it then enters the water outlet area 1.7 from the pressure transformation cavity 1.1 and finally is discharged from the water outlet pipe 2.2. And a pressure control switch 7 for controlling the movement of the driving shaft 5 is arranged on the water inlet and outlet cover 1. When the pressure in the water inlet area 1.6 is too high, the pressure control switch 7 will cut off the power supply to make the driving shaft 5 stop working, thereby realizing the internal pressure control of the pump body and avoiding damage to the pump body.

[0042] As Figure 2 、 Figure 3 、 Figure 11 、 Figure 12 shown, for a further explanation of the implementation manner of the cam disk 1.4, a number of extrusion units 2.5 are formed on the cam disk 1.4. The extrusion units 2.5 rotate along with the cam disk 1.4 and form a height difference to force the water pressure plunger 1.2 to move up and down.

[0043] Since the cam disk 1.4 is connected to the drive cam 1.3, the cam disk 1.4 will rotate radially eccentrically with the drive cam 1.3. And the drive cam 1.3 is formed with an obliquely arranged insertion channel 1.5, and the drive shaft 5 is connected to the insertion channel 1.5, resulting in the cam disk 1.4 rotating obliquely with the drive cam 1.3, causing the cam disk 1.4 to rotate eccentrically axially. Thus, a height difference will be generated as the cam disk 1.4 rotates, enabling the plunger to alternately compress water into the pressure conversion chamber 1.1 to produce pressurized water output.

[0044] As Figure 11 shown, preferably, a positioning convex portion 2.6 is formed in the pressure conversion chamber 1.1, and a positioning groove 2.7 for inserting the positioning convex portion 2.6 is formed on the plunger. The cooperation of the positioning convex portion 2.6 and the positioning groove 2.7 ensures the accuracy of the plunger position installation.

[0045] As Figures 2 to 10 shown, for a further explanation of the internal water circuit of the diaphragm pump, a plurality of water return grooves 4.1 are formed on the shunt cover 2, the water outlet hole 2.4 is arranged in the water return groove 4.1, and a first check valve piece 4.2 is inserted on the water return groove 4.1. The first check valve piece 4.2 includes a shielding piece 4.3 and a sliding column 4.4. The shielding piece 4.3 is placed in the water return groove 4.1 and shields the water outlet hole 2.4, and a slot 5.4 for inserting the sliding column 4.4 is formed on the water return groove 4.1.

[0046] When the pressure conversion chamber 1.1 does not discharge water, the shielding piece 4.3 can shield the water outlet hole 2.4 to prevent the water in the water outlet area 1.7 from flowing back into the pressure conversion chamber 1.1. And during the process of water being discharged into the water outlet area 1.7, the sliding column 4.4 will slide along the slot 5.4 to expose the water outlet hole 2.4, and the water can enter the water outlet area 1.7 along the water outlet hole 2.4. And the cooperation of the sliding column 4.4 and the slot 5.4 can prevent the position of the first check valve piece 4.2 from shifting.

[0047] In addition, a limiting column 4.5 is formed on the water inlet and outlet cover 1, and the limiting column 4.5 is located above the shielding piece 4.3. When the first check valve piece 4.2 rises to a certain position, it will abut against the limiting column 4.5, thereby preventing the first check valve piece 4.2 from detaching from the water return groove 4.1.

[0048] Furthermore, a second check valve piece 4.6 is inserted at the bottom in the shunt cover 2. The second check valve piece 4.6 includes an elastically arranged elastic edge 4.7 and a plugging column 4.8 inserted on the shunt cover 2, and a clamping convex portion 4.9 is formed on the plugging column 4.8. The clamping convex portion 4.9 abuts against the upper end surface of the shunt cover 2 to limit the second check valve piece 4.6 from detaching from the shunt cover 2.

[0049] When the cam disk 1.4 rotates, a height difference will be generated, causing the plunger to compress water in turn, deforming the elastic edge 4.7 downward, exposing the water inlet hole 2.3, so that water can enter the pressure-changing chamber 1.1 from the water inlet area 1.6, avoiding the backflow of water in the pressure-changing chamber 1.1. And because a clamping convex part 4.9 is formed on the plug post 4.8, the clamping convex part 4.9 abuts against the upper end face of the shunt cover 2 to limit the second check valve piece 4.6 from detaching from the shunt cover 2, ensuring the reliability of the installation of the second check valve piece 4.6.

[0050] Wherein, a partition groove 5.1 is formed on the shunt cover 2, and a partition convex part 5.2 is formed at the bottom of the water inlet and outlet cover 1. The partition convex part 5.2 is inserted into the partition groove 5.1, and a water inlet area 1.6 and a water outlet area 1.7 are defined between the water inlet and outlet cover 1 and the shunt cover 2.

[0051] By using the cooperation of the partition groove 5.1 and the partition convex part 5.2, a water inlet area 1.6 and a water outlet area 1.7 are defined between the water inlet and outlet cover 1 and the shunt cover 2, realizing the whole waterway circulation.

[0052] Preferably, a sealing ring 5.3 is arranged in the partition groove 5.1, and the partition convex part 5.2 abuts against the sealing ring 5.3, greatly improving the sealing performance between the water inlet area 1.6 and the water outlet area 1.7.

[0053] As Figure 3 、 Figure 5 As shown in

[0054] As a further explanation of the pressure control switch 7, the pressure control switch 7 includes an elastic driving piece 3.1 arranged on the water inlet and outlet cover 1, a driving slider 3.2 slidably arranged above the water inlet and outlet cover 1, and a control unit 3.3. A certain water storage space 3.4 is formed between the elastic driving piece 3.1 and the water inlet and outlet cover 1, and a water inlet 3.5 communicating with the water storage space 3.4 is formed on the water inlet and outlet cover 1.

[0055] Further, when the water inlet area 1.6 is in the normal pressure state, the driving slider 3.2 is far away from the control unit 3.3. When the water inlet area 1.6 is in the high pressure state, the elastic driving piece 3.1 will deform under pressure, so as to deform towards the driving slider 3.2 and push the driving slider to move, thereby starting the control unit 3.3 to cut off the power supply and stopping the rotation of the transmission cam 1.3.

[0056] This specific embodiment is only an interpretation of the present utility model, and it does not limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment that do not contribute creatively as needed, but as long as it is within the scope of the claims of the present utility model, it is protected by the patent law.

Claims

1. A micro diaphragm pump, characterized in that, It includes a water inlet and outlet cover (1), a flow dividing cover (2), a plunger mounting plate (3), and a motor housing (4) which are assembled in sequence from top to bottom; A drive shaft (5) is arranged inside the motor housing (4). A plurality of variable pressure chambers (1.1) are formed between the plunger mounting plate (3) and the flow dividing cover (2). A water pressure plunger (1.2) is arranged inside the variable pressure chamber (1.1). A boosting structure (6) is arranged between the plunger mounting plate (3) and the motor housing (4). The boosting structure (6) includes a transmission cam (1.3) connected to the drive shaft (5) and a cam disc (1.4) connected to the transmission cam (1.3). An insertion channel (1.5) obliquely arranged with respect to the axis of the drive shaft (5) is formed inside the transmission cam (1.3). The drive shaft (5) is connected to the insertion channel (1.5) so that the transmission cam (1.3) is arranged radially inclined. The drive shaft (5) drives the cam disc (1.4) to rotate to drive the water pressure plunger (1.2) to move up and down; The water inlet and outlet cover (1) covers the flow dividing cover (2), and a water inlet area (1.6) and a water outlet area (1.7) are defined between the water inlet and outlet cover (1) and the flow dividing cover (2). A water inlet pipe (2.1) communicating with the water inlet area (1.6) and a water outlet pipe (2.2) communicating with the water outlet area (1.7) are formed on the water inlet and outlet cover (1). A water inlet hole (2.3) placed inside the water inlet area (1.6) and a water outlet hole (2.4) placed inside the water outlet area (1.7) are formed on the flow dividing cover (2). The water inlet hole (2.3) and the water outlet hole (2.4) communicate with the variable pressure chamber (1.1); A pressure control switch (7) for controlling the action of the drive shaft (5) is arranged on the water inlet and outlet cover (1). The water inlet area (1.6) has a normal pressure state and an overpressure state. When the water inlet area (1.6) is in the overpressure state, the pressure control switch (7) controls the drive shaft (5) to stop rotating.

2. The micro diaphragm pump according to claim 1, wherein, A plurality of extrusion units (2.5) are formed on the cam disc (1.4). The extrusion units (2.5) form a height difference as the cam disc (1.4) rotates to force the water pressure plunger (1.2) to move up and down.

3. A micro diaphragm pump according to claim 1, characterized in that, A positioning convex part (2.6) is formed inside the variable pressure chamber (1.1), and a positioning groove (2.7) for inserting the positioning convex part (2.6) is formed on the plunger.

4. A micro diaphragm pump according to claim 1, characterized in that, The pressure control switch (7) includes an elastic drive piece (3.1) arranged on the water inlet and outlet cover (1), a drive slider (3.2) slidably arranged above the water inlet and outlet cover (1), and a control unit (3.3). A certain water storage space (3.4) is formed between the elastic drive piece (3.1) and the water inlet and outlet cover (1). A water inlet (3.5) communicating with the water storage space (3.4) is formed on the water inlet and outlet cover (1); When the water inlet area (1.6) is under normal pressure, the driving slider (3.2) is away from the control unit (3.3). When the water inlet area (1.6) is under overpressure, the elastic driving piece (3.1) deforms towards the driving slider (3.2) and drives the driving slider (3.2) to abut against the control unit (3.3).

5. A micro diaphragm pump according to claim 4, characterized in that, An installation seat (3.6) is provided on the water inlet and outlet cover (1), the control unit (3.3) is arranged on the installation seat (3.6), a sliding convex part (3.7) is formed on the driving slider (3.2), and a sliding groove (3.8) for the sliding convex part (3.7) to be inserted into is formed on the installation seat (3.6).

6. A micro diaphragm pump according to claim 1, characterized in that, A plurality of water return grooves (4.1) are formed on the flow dividing cover (2), the water outlet hole (2.4) is arranged in the water return groove (4.1), and a first check valve piece (4.2) is inserted on the water return groove (4.1). The first check valve piece (4.2) includes a shielding piece (4.3) and a sliding column (4.4). The shielding piece (4.3) is placed in the water return groove (4.1) and shields the water outlet hole (2.4), and a slot (5.4) for the sliding column (4.4) to be inserted into is formed on the water return groove (4.1).

7. A micro diaphragm pump according to claim 6, characterized in that, A limiting column (4.5) is formed on the water inlet and outlet cover (1), the limiting column (4.5) is located above the shielding piece (4.3), and the limiting column (4.5) abuts against the shielding piece (4.3) to limit the upward movement of the first check valve piece (4.2).

8. A micro diaphragm pump according to claim 1, characterized in that, A second check valve piece (4.6) is inserted at the bottom in the flow dividing cover (2). The second check valve piece (4.6) includes an elastically arranged elastic edge (4.7) and a plugging column (4.8) inserted on the flow dividing cover (2), and a clamping convex part (4.9) is formed on the plugging column (4.8). The clamping convex part (4.9) abuts against the upper end surface of the flow dividing cover (2) to limit the second check valve piece (4.6) from separating from the flow dividing cover (2).

9. A micro diaphragm pump according to claim 1, wherein A separating groove (5.1) is formed on the flow dividing cover (2), a separating convex part (5.2) is formed at the bottom of the water inlet and outlet cover (1), and the separating convex part (5.2) is inserted into the separating groove (5.1) to define a water inlet area (1.6) and a water outlet area (1.7) between the water inlet and outlet cover (1) and the flow dividing cover (2).

10. A micro diaphragm pump according to claim 9, characterized in that, A sealing ring (5.3) is arranged in the separating groove (5.1), and the separating convex part (5.2) abuts against the sealing ring (5.3).

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