Synchronous rotating mechanism

Abstract

The utility model relates to a synchronous rotating mechanism which comprises a machine frame. The lifting mechanism comprises a supporting body arranged on the machine frame in the first direction and a sliding base movably connected to the supporting body. The rotating mechanism comprises a first arm body and a second arm body which are rotationally connected to the sliding seat respectively, a third arm body and a fourth arm body which are rotationally connected to the end parts of the first arm body and the second arm body respectively, and a first bracket and a second bracket which are arranged at one end of the third arm body and one end of the fourth arm body respectively along a second direction; the second end of the third arm body and the second end of the fourth arm body are rotationally connected to the first rotating shaft. Through the arrangement, the test workpieces mounted on the first bracket and the second bracket can synchronously rotate, so that the test precision of the ellipsometer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ellipsometers, in particular to a synchronous rotation mechanism. Background Art

[0002] With the development of semiconductor device technology, the integration of chips is getting higher and higher, and defect detection has become an indispensable means to improve the semiconductor yield. Defects on the wafer surface and uneven film thickness will cause a decrease in the yield. Therefore, it is necessary to test the wafer film thickness during production. Generally, an ellipsometer and other testing devices are used to collect and analyze the light reflected or scattered from the surface, and quantify the surface features for defect detection. It is sensitive to surface defects such as particles and scratches.

[0003] Existing ellipsometers generally work in a fixed state. When adjusting the directions of the incident light and the outgoing light, it is necessary to manually or automatically adjust the direction of the light-emitting device. It is difficult to ensure that the rotation angle difference between the incident light and the outgoing light remains the same, resulting in an easy occurrence of direction deviation after adjusting the angles of the incident light and the outgoing light, thereby reducing the detection accuracy of the ellipsometer. Summary of the Utility Model

[0004] Therefore, the technical problem to be solved by the utility model is to overcome the problem that the incident light and the outgoing light of the ellipsometer in the prior art are prone to direction deviation after adjusting the angles, thereby reducing the detection accuracy of the ellipsometer, and thus provides a synchronous rotation mechanism.

[0005] To solve the above technical problem, the utility model provides a synchronous rotation mechanism, including:

[0006] A frame;

[0007] A lifting mechanism, which includes: a support body arranged on the frame along a first direction, and a sliding seat movably connected to the support body;

[0008] A rotating mechanism, which includes: a first arm body and a second arm body respectively rotatably connected to the sliding seat, a third arm body and a fourth arm body respectively rotatably connected to the ends of the first arm body and the second arm body, a first bracket and a second bracket respectively arranged at one ends of the third arm body and the fourth arm body along a second direction, and the second ends of the third arm body and the fourth arm body are both rotatably connected to a first rotating shaft.

[0009] In an embodiment of the utility model, the sliding seat is provided with a second rotating shaft, and the first ends of the first arm body and the second arm body are both rotatably connected to the second rotating shaft.

[0010] In an embodiment of the utility model, the third arm body and the fourth arm body are respectively provided with a third rotating shaft and a fourth rotating shaft, and the second ends of the first arm body and the second arm body are respectively rotatably connected to the third rotating shaft and the fourth rotating shaft.

[0011] In an embodiment of the present utility model, the lengths of the first rotating shaft and the second rotating shaft are equal, the lengths of the third rotating shaft and the fourth rotating shaft are equal, the distances between the third rotating shaft and the first support and between the fourth rotating shaft and the second support are equal, and the distances between the third rotating shaft and the first rotating shaft and between the fourth rotating shaft and the first rotating shaft are equal.

[0012] In an embodiment of the present utility model, the frame includes a base and a first frame body. The base is horizontally arranged, the plane where the first frame body is located is perpendicular to the base, and the lifting mechanism and the rotating mechanism are arranged on the first frame body.

[0013] In an embodiment of the present utility model, the base is further provided with a second frame body and a third frame body. The second frame body and the third frame body are respectively provided with a scale, and the scales are respectively arranged along the rotation directions of the second frame body and the third frame body.

[0014] In an embodiment of the present utility model, the second frame body and the third frame body are respectively provided with a pointer, and the pointer corresponds to the scale.

[0015] In an embodiment of the present utility model, the second support and the third support are further provided with a mounting component for mounting the workpiece to be rotated.

[0016] In an embodiment of the present utility model, a slider is slidably connected to the support body, the sliding seat is fixedly connected to the slider, the sliding seat is connected with a lead screw sleeve, a driving lead screw is screw-fitted through the lead screw sleeve, bearings are sleeved at both ends of the driving lead screw, and the driving lead screw is further connected with a driving member.

[0017] In an embodiment of the present utility model, the number of the third arm bodies and the fourth arm bodies is two each, and the two third arm bodies and the fourth arm bodies are respectively arranged on both sides of the first frame body along the second direction.

[0018] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0019] For a synchronous rotation mechanism of the present utility model, a support body is fixedly installed on a frame along a first direction (the vertical direction in this embodiment) to carry a sliding seat and allow it to move up and down. The sliding seat is movably connected to the support body. The first arm body and the second arm body are symmetrically arranged and are respectively rotatably connected to the sliding seat, and can freely rotate around the center of the sliding seat. The third arm body and the fourth arm body are symmetrically arranged, one end of each of them is respectively connected to the ends of the first arm body and the second arm body through a rotating shaft, and the other end is commonly connected to the first rotating shaft, forming a closed link structure, so that the test workpieces installed on the first support and the second support can rotate synchronously, thereby improving the test accuracy of the ellipsometer. Description of the Drawings

[0020] To make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to specific embodiments of the present utility model in combination with the accompanying drawings, wherein

[0021] Figure 1 is a perspective view of the rotation mechanism of the present utility model;

[0022] Figure 2 is a perspective view of the back of the rotation mechanism of the present utility model;

[0023] Figure 3 is a sectional view of the rotation mechanism of the present utility model;

[0024] Figure 4 is a perspective view of the connecting rod mechanism of the present utility model.

[0025] Explanation of the reference numerals in the drawings of the specification: 1. Base; 2. First frame; 3. First rotating shaft; 4. First bracket; 5. Pointer; 6. Second bracket; 7. Scale; 8. Second frame; 9. Third frame; 10. First arm body; 11. Second arm body; 12. Third arm body; 13. Fourth arm body; 14. Driving lead screw; 15. Second rotating shaft; 16. Third rotating shaft; 17. Fourth rotating shaft; 18. Slide block; 19. Hand wheel; 20. Support body; 21. Lead screw sleeve. Specific embodiments

[0026] The following further describes the present utility model in combination with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the embodiments cited do not limit the present utility model.

[0027] Embodiment

[0028] Referring to Figures 1-4 as shown, a synchronous rotation mechanism of the present utility model includes:

[0029] Frame;

[0030] Lifting mechanism, which includes: a support body 20 arranged on the frame along the first direction, and a slide block 18 movably connected to the support body 20;

[0031] Rotating mechanism, which includes: a first arm body 10 and a second arm body 11 respectively rotatably connected to the slide block 18, a third arm body 12 and a fourth arm body 13 respectively rotatably connected to the ends of the first arm body 10 and the second arm body 11, and a first bracket 4 and a second bracket 6 respectively arranged at one end of the third arm body 12 and the fourth arm body 13 along the second direction, and the second ends of the third arm body 12 and the fourth arm body 13 are both rotatably connected to the first rotating shaft 3.

[0032] A synchronous rotation mechanism according to the present utility model, a support body 20 is fixedly installed on a frame along a first direction (in this embodiment, the vertical direction) to carry a slide seat 18 and allow it to move up and down. The slide seat 18 is movably connected to the support body 20. A first arm body 10 and a second arm body 11 are symmetrically arranged and are respectively rotatably connected to the slide seat 18, and can freely rotate around the center of the slide seat 18. A third arm body 12 and a fourth arm body 13 are symmetrically arranged, and one end of each is connected to the ends of the first arm body 10 and the second arm body 11 through a rotating shaft, and the other ends are jointly connected to a first rotating shaft 3 to form a closed link structure, so that the test workpieces installed on the first bracket 4 and the second bracket 6 can rotate synchronously. The test workpieces are respectively the light source incident end and the light source outgoing end, improving the test accuracy of the ellipsometer.

[0033] See Figure 2 、 Figure 4 As shown, the slide seat 18 is provided with a second rotating shaft 15. The first ends of the first arm body 10 and the second arm body 11 are respectively rotatably connected to the second rotating shaft 15. A second rotating shaft 15 is added to the slide seat 18, and this rotating shaft is fixedly connected to the slide seat 18. The first ends of the first arm body 10 and the second arm body 11 are no longer directly connected to the slide seat 18, but are respectively rotatably connected to the second rotating shaft 15 through bearings, and the first wall body or the second wall body has avoidance portions at the first rotating shaft 3 and the second rotating shaft 15, or the third wall body or the fourth wall body has avoidance portions at the first rotating shaft 3 and the second rotating shaft 15, so that the first arm body 10 and the second arm body 11 do not interfere when rotating, or the third arm body 12 and the fourth arm body 13 do not interfere when rotating, increasing the sum and stability of the rotation angles.

[0034] Continue to see Figure 2 、 Figure 4 As shown, the third arm body 12 and the fourth arm body 13 are respectively provided with a third rotating shaft 16 and a fourth rotating shaft 17. The second ends of the first arm body 10 and the second arm body 11 are respectively rotatably connected to the third rotating shaft 16 and the fourth rotating shaft 17. In order to enhance the flexibility and functionality of the structure, a rotating shaft is added to each of the third arm body 12 and the fourth arm body 13, that is, the third rotating shaft 16 and the fourth rotating shaft 17. The rotating shafts are respectively fixed on the third arm body 12 and the fourth arm body 13 and are arranged along a direction parallel to the first rotating shaft 3 (the second direction, in this embodiment, the front-back direction). The second end of the first arm body 10 is rotatably connected to the third rotating shaft 16, and the second end of the second arm body 11 is rotatably connected to the fourth rotating shaft 17.

[0035] The lengths of the first rotating shaft 3 and the second rotating shaft 15 are equal, the lengths of the third rotating shaft 16 and the fourth rotating shaft 17 are equal, the distance between the third rotating shaft 16 and the first bracket 4 is equal to the distance between the fourth rotating shaft 17 and the second bracket 6, and the distance between the third rotating shaft 16 and the first rotating shaft 3 is equal to the distance between the fourth rotating shaft 17 and the first rotating shaft 3, so that the distances from the two support points on both sides of the first arm body 10 and the second wall body, the third wall body and the fourth wall body to the centers of their respective rotating shafts are equal, enhancing the left-right symmetry of the structure and ensuring the dimensional accuracy of synchronous rotation.

[0036] The frame includes a base 1 and a first frame body 2. The base 1 is horizontally arranged, and the plane where the first frame body 2 is located is perpendicular to the base 1. The lifting mechanism and the rotating mechanism are arranged on the first frame body 2. The base 1 is designed as a planar structure, horizontally laid on the ground or other support platforms, and anti-slip pads or fixed bolt holes can be provided at the bottom to enhance the stability during installation.

[0037] The base 1 is further provided with a second frame body 8 and a third frame body 9. The second frame body 8 and the third frame body 9 are respectively provided with a scale 7, and the scale 7 is respectively arranged along the rotation direction of the second frame body 8 and the third frame body 9. The second frame body 8 and the third frame body 9 are respectively arranged on both sides of the first frame body 2, and the scales 7 on the second frame body 8 and the third frame body 9 are used for quick and accurate manual or automatic adjustment.

[0038] See Figure 1 As shown, the second frame body 8 and the third frame body 9 are respectively provided with a pointer 5, and the pointer 5 corresponds to the scale 7. Beside the scale 7 of the second frame body 8, a closely matched pointer 5 device is provided. The pointer 5 is designed to move with the rotation of the second frame body 8 and directly align with the corresponding value on the scale 7, and the rotation center is the first rotating shaft 3.

[0039] The second bracket 6 and the third bracket are further provided with an installation component for installing the workpiece to be rotated, including but not limited to fixtures, chucks or fixing bolts, etc., which can be flexibly adjusted according to the size, shape and material of the workpiece to be rotated, ensuring that the incident end and the exit end of the ellipsometer are firmly installed on the first frame body 2, preparing for subsequent rotation operations, and enabling symmetric processing, multi-faceted processing or rotary testing. The rotation mechanism can be applied to the testing of the ellipsometer, and the first bracket 4 and the second bracket 6 are respectively used for installing the incident end and the exit end.

[0040] See Figure 3As shown, a slider is slidably connected to the support body 20, the sliding seat 18 is fixedly connected to the slider, the sliding seat 18 is connected with a lead screw sleeve 21, the lead screw sleeve 21 is provided with a driving lead screw 14 in a screw fit manner, bearings are sleeved at both ends of the driving lead screw 14, the driving lead screw 14 is further connected with a driving member, the support body 20 is fixed along the first direction of the frame, and a low-friction slide rail is built in. The slider is slidably connected along the slide rail in the support body 20, providing a basis for the up and down movement of the sliding seat 18. The sliding seat 18 is fixedly connected to the top of the slider and serves as a carrying platform for the lifting mechanism and the rotating mechanism. The lead screw sleeve 21 is installed on the sliding seat 18 and is of a hollow structure, and its inner diameter is precisely matched with the outer diameter of the driving lead screw 14. The driving lead screw 14 passes through the lead screw sleeve 21 through thread fit, and bearings are installed at both ends thereof to reduce friction and improve transmission efficiency. The bearings are located at both ends of the driving lead screw 14 to support the lead screw and ensure its smooth rotation. The driving member is any one of a motor, a hydraulic motor or a handwheel 19 and is connected to the driving lead screw 14 to provide rotational power for lifting. When the driving member starts and rotates the driving lead screw 14, the helical movement of the driving lead screw 14 is converted into a linear movement of the slider along the support body 20 through the lead screw sleeve 21, thereby driving the sliding seat 18 to rise or fall.

[0041] The number of the third arm bodies 12 and the fourth arm bodies 13 is two each, which enhances the load capacity of the mechanism. The two third arm bodies 12 and the fourth arm bodies 13 are respectively arranged on both sides of the first frame body 2 along the second direction, which helps to evenly distribute the load and maintain the balance and stability of the structure, thereby reducing vibration and improving the operation accuracy.

[0042] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the creation of the present utility model.

Claims

1. A synchronous rotation mechanism, characterized in that, Comprising: A frame; A lifting mechanism, which includes: a support body disposed on the frame along a first direction, and a sliding seat movably connected to the support body; A rotating mechanism, which includes: a first arm body and a second arm body respectively rotatably connected to the sliding seat, a third arm body and a fourth arm body respectively rotatably connected to the ends of the first arm body and the second arm body, a first bracket and a second bracket respectively disposed at one ends of the third arm body and the fourth arm body along a second direction, and second ends of the third arm body and the fourth arm body are both rotatably connected to a first rotating shaft.

2. The synchronous rotation mechanism according to claim 1, characterized in that: The sliding seat is provided with a second rotating shaft, and first ends of the first arm body and the second arm body are both rotatably connected to the second rotating shaft.

3. A synchronous rotation mechanism according to claim 1, characterized in that: The third arm body and the fourth arm body are respectively provided with a third rotating shaft and a fourth rotating shaft, and second ends of the first arm body and the second arm body are respectively rotatably connected to the third rotating shaft and the fourth rotating shaft.

4. A synchronous rotation mechanism according to claim 3, characterized in that: The lengths of the first rotating shaft and the second rotating shaft are equal, the lengths of the third rotating shaft and the fourth rotating shaft are equal, the distances between the third rotating shaft and the first bracket and between the fourth rotating shaft and the second bracket are equal, and the distances between the third rotating shaft and the first rotating shaft and between the fourth rotating shaft and the first rotating shaft are equal.

5. The synchronous rotation mechanism according to claim 1, characterized in that: The frame includes a base and a first frame body, the base is horizontally disposed, a plane where the first frame body is located is perpendicular to the plane of the base, and the lifting mechanism and the rotating mechanism are disposed on the first frame body.

6. The synchronous rotation mechanism according to claim 5, characterized in that: The base is further provided with a second frame body and a third frame body, the second frame body and the third frame body are respectively provided with a scale, and the scales are respectively disposed along the rotation directions of the second frame body and the third frame body.

7. A synchronous rotation mechanism according to claim 6, characterized in that: The second frame body and the third frame body are respectively provided with a pointer, and the pointers correspond to the scales.

8. The synchronous rotation mechanism according to claim 6, characterized in that: The second bracket and the third bracket are further provided with a mounting assembly for mounting a workpiece to be rotated.

9. The synchronous rotation mechanism according to claim 1, characterized in that: The support body is slidably connected with a slider, the sliding seat is fixedly connected to the slider, the sliding seat is connected with a lead screw sleeve, the lead screw sleeve is threadedly penetrated with a driving lead screw, both ends of the driving lead screw are sleeved with bearings, and the driving lead screw is further connected with a driving member.

10. A synchronous rotation mechanism according to claim 1, characterized in that: The numbers of the third arm body and the fourth arm body are both two, and the two third arm bodies and the fourth arm bodies are respectively disposed on both sides of the first frame body along the second direction.

Images