Polishing device

Abstract

The utility model provides a polishing device. The polishing device comprises a supporting piece, a polishing piece, an end point detection device and a transparent cover plate. The polishing piece is arranged on the supporting piece, and a detection window is formed in the polishing piece; the end point detection assembly is arranged in the polishing piece, is used for detecting the polishing condition and comprises a detection light emitting piece and a detection light receiving piece; the transparent cover plate is arranged in the detection window and comprises a first surface and a second surface, a first incident surface and a second emergent surface are formed on the first surface, a first emergent surface and a second incident surface are formed on the second surface, the first emergent surface is parallel to the first incident surface, the second emergent surface is parallel to the second incident surface, and the first incident surface is parallel to the second emergent surface. A first inclination angle is formed between the first incident plane and the vertical direction, the first inclination angle is configured to enable detection light emitted by the detection light emitting part to vertically enter the transparent cover plate, a second inclination angle is formed between the second incident plane and the vertical direction, and the second inclination angle is configured to enable the detection light reflected by the polished part to vertically enter the transparent cover plate.

Description

Technical Field

[0001] This application relates to the technical field of chemical mechanical polishing, and particularly to a polishing device. Background Art

[0002] In the process of semiconductor manufacturing, a polishing device is required to polish a wafer. The polishing device includes a polishing member and an end point detection component. A receiving space is provided inside the polishing member, and a detection window communicating with the receiving space is also formed on the polishing member. The end point detection component is disposed in the receiving space, and a transparent cover plate is disposed in the detection window. The end point detection component is used to detect whether the polishing operation is completed. It includes a detection light emitting member and a detection light receiving member. The detection light reflecting member is used to emit detection light toward the transparent cover plate. The detection light passes through the transparent cover plate and exits onto the workpiece to be polished, and then is reflected by the workpiece to be polished and passes through the transparent cover plate and is received by the detection light receiving member, so as to determine whether the polishing operation is completed by measuring the detection light reflected by the workpiece to be polished. However, when the detection light passes through the transparent cover plate, reflection and refraction will occur, resulting in light intensity attenuation and interference reflection of the detection light, leading to inaccurate detection results and affecting the polishing quality. Utility Model Content

[0003] This application discloses a polishing device, which can improve the polishing quality of the polishing device.

[0004] To achieve the above object, this application discloses a polishing device, which includes:

[0005] A support member;

[0006] A polishing member, the polishing member is disposed on the support member, a receiving space is provided inside the polishing member, and a detection window communicating with the receiving space is also formed on the polishing member;

[0007] An end point detection component, the end point detection component is disposed inside the polishing member, the end point detection component is used to detect the polishing condition, and the end point detection component includes a detection light emitting member and a detection light receiving member;

[0008] A transparent cover plate is disposed within the detection window. Along the thickness direction of the transparent cover plate, the transparent cover plate includes a first surface and a second surface. A first incident surface and a second exit surface are formed on the first surface, and a first exit surface and a second incident surface are formed on the second surface. The first exit surface is parallel to the first incident surface, and the second exit surface is parallel to the second incident surface. The detection light emitted by the detection light emitting member exits through the first incident surface and the first exit surface in sequence and then exits onto the workpiece to be polished. The detection light reflected by the workpiece to be polished is received by the detection light receiving member after passing through the second incident surface and the second exit surface in sequence. The first incident surface has a first inclination angle with respect to the vertical direction, and the first inclination angle is configured such that the detection light emitted by the detection light emitting member is perpendicularly incident on the transparent cover plate. The second incident surface has a second inclination angle with respect to the vertical direction, and the second inclination angle is configured such that the detection light reflected by the workpiece to be polished is perpendicularly incident on the transparent cover plate.

[0009] Optionally, the optical path of the detection light emitted by the detection light emitting member is parallel to the horizontal direction;

[0010] The end point detection assembly further includes a reflector having a reflecting surface. The reflecting surface has a third inclination angle with respect to the horizontal direction such that the detection light emitted by the detection light emitting member is perpendicularly incident on the first incident surface after being reflected by the reflecting surface.

[0011] Optionally, the first inclination angle is a1, the third inclination angle is b, and the angle between the detection light emitted by the detection light emitting member and the horizontal direction is d. When the detection light incident on the first incident surface is perpendicular to the first incident surface, the first inclination angle a1, the third inclination angle b, and the angle d between the detection light emitted by the detection light emitting member and the horizontal direction satisfy the relationship: b = (a1 - d) / 2.

[0012] Optionally, the reflector includes a driving assembly for driving the reflecting surface of the reflector to achieve angle adjustment.

[0013] Optionally, the range of the third inclination angle is 20° - 50°.

[0014] Optionally, the first inclination angle is equal to the second inclination angle.

[0015] Optionally, along the direction perpendicular to the first incident surface, the thickness of the transparent cover plate is 4 mm - 5 mm.

[0016] Optionally, the first incident surface and the second exit surface are connected to each other and form an edge at the connection.

[0017] Optionally, the first incident surface is connected to the second exit surface, and there is a smooth transition at the connection.

[0018] Optionally, a sealing structure is provided between the transparent cover plate and the detection window.

[0019] Optionally, the sealing structure includes an annular sealing groove provided on the circumference of the transparent cover plate and a sealing ring provided in the annular sealing groove.

[0020] Optionally, along the thickness direction of the polishing member, the detection window has a first section and a second section that communicate with each other, and in the direction pointing from the second surface to the second surface, the projection of the second section is located within the first section. The second section is close to the support member, and the transparent cover plate has a mounting portion, and the mounting portion is mounted within the first section.

[0021] Optionally, the transparent cover plate is fixedly mounted within the first section by fasteners

[0022] Optionally, the transparent cover plate is in interference fit with the detection window.

[0023] Compared with the prior art, the beneficial effects of the present application are as follows:

[0024] There is a first inclination angle between the first incident surface and the vertical direction, so that the detection light emitted by the detection light emitting member can perpendicularly enter the transparent cover plate, so that the detection light will not refract when passing through the transparent cover plate, which can ensure the highest transmission efficiency of the detection light when entering the transparent cover plate, and reduce the light loss caused by angle deviation. The first exit surface is parallel to the first incident surface, which ensures the direction stability of the detection light when exiting. There is a second inclination angle between the second incident surface and the vertical direction, so that the detection light reflected by the polished part perpendicularly enters the transparent cover plate. Similarly, this design improves the reception efficiency of the reflected light and ensures that the detection light receiving member can accurately receive the reflected light. The second exit surface is parallel to the second incident surface, further enhancing the stability of the reflected light transmission. Through the design of the inclination angles of the incident surfaces and the exit surfaces on both sides of the transparent cover plate, the detection light maintains the best incident and reflection angles during the entire transmission process, thereby improving the accuracy of the end point detection component in detecting the polishing condition, being able to more accurately judge the end point of polishing, avoiding the occurrence of over-polishing or under-polishing, and accurate end point detection can ensure that the polishing operation stops at the appropriate time, improving the polishing quality. Description of the Drawings

[0025] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the accompanying drawings required for the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0026] Figure 1 It is a schematic partial position diagram of the polishing device provided by the embodiment of the present application;

[0027] Figure 2 is Figure 1 the enlarged view of part A in

[0028] Figure 3 It is the transparent cover plate provided by the embodiment of the present application;

[0029] Figure 4 is Figure 1 the enlarged view of part B in

[0030] Figure 5 It is a schematic partial position diagram at the reflecting surface provided by the embodiment of the present application;

[0031] Figure 6 It is a schematic partial position diagram of the polishing device provided by another embodiment of the present application;

[0032] Figure 7 is Figure 6 the enlarged view of part C in

[0033] Figure 8 It is a schematic diagram of the sealing structure provided by the embodiment of the present application;

[0034] Figure 9 It is a top view of the installation position of the transparent cover plate provided by the embodiment of the present application.

[0035] Main reference numerals description

[0036] 1 - Polishing device;

[0037] 2 - Workpiece to be polished;

[0038] 100 - Support member;

[0039] 200 - Polishing member; 201 - Accommodating space; 210 - Detection window; 2101 - First section; 2102 - Second section;

[0040] 300 - Endpoint detection component; 310 - Detection light emitting member; 320 - Detection light receiving member; 330 - Detection light; 340 - Reflecting member; 3401 - Reflecting surface;

[0041] 400 - Transparent cover plate; 410 - First surface; 4101 - First incident surface; 4102 - Second exit surface; 420 - Second surface; 4201 - First exit surface; 4202 - Second incident surface;

[0042] 500 - Sealing structure; 510 - Annular sealing groove; 520 - Sealing ring;

[0043] 600 - Fastener. Detailed implementation manner

[0044] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0045] In the present application, the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. is based on the orientation or positional relationship shown in the accompanying drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit that the indicated device, element or component must have a specific orientation, or be constructed and operated in a specific orientation.

[0046] Moreover, in addition to being able to represent the orientation or positional relationship, some of the above - mentioned terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in the present application can be understood according to specific circumstances.

[0047] In addition, the terms "install", "set", "provided with", "connect", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there is an internal connection between two devices, elements or components. For those of ordinary skill in the art, the specific meanings of the above - mentioned terms in the present application can be understood according to specific circumstances.

[0048] In addition, the terms "first", "second", etc. are mainly used to distinguish different types of devices, elements or components. The specific types and structures may be the same or different, and are not used to indicate or imply the relative importance and quantity of the indicated device, element or component. Unless otherwise specified, the meaning of "a plurality" is two or more.

[0049] As mentioned in the background art, when the detection light passes through the transparent cover plate, reflection and refraction occur, resulting in attenuation of the light intensity and interference reflection of the detection light, leading to inaccurate detection results and affecting the polishing quality.

[0050] To solve the above problems, the present application makes the first incident surface of the transparent cover plate have a first inclination angle, so that the detection light emitted by the detection light emitting member can be perpendicularly incident on the transparent cover plate, so that the detection light will not be refracted when passing through the transparent cover plate, ensuring the highest transmission efficiency of the detection light when entering the transparent cover plate and reducing the light loss caused by angle deviation. The first exit surface is parallel to the first incident surface, ensuring the direction stability of the detection light when exiting. The second incident surface has a second inclination angle, making the detection light reflected by the workpiece to be polished perpendicularly incident on the transparent cover plate, ensuring that the detection light receiving member can accurately receive the reflected light, improving the accuracy of the end point detection assembly in determining whether the workpiece to be polished is polished, enabling a more accurate judgment of the polishing end point, and improving the polishing quality.

[0051] The technical solution of the present application will be further described below in conjunction with specific embodiments and drawings.

[0052] See Figures 1 to 3, this embodiment provides a polishing device 1, and the polishing device 1 includes: a support member 100, a polishing member 200, an end point detection component 300, and a transparent cover plate 400; the polishing member 200 is disposed on the support member 100, a receiving space 201 is provided inside the polishing member 200, and a detection window 210 communicating with the receiving space 201 is further provided on the polishing member 200; the end point detection component 300 is disposed inside the polishing member 200, and the end point detection component 300 is used for detecting the polishing condition, and the end point detection component 300 includes a detection light emitting member 310 and a detection light receiving member 320; the transparent cover plate 400 is disposed inside the detection window 210, along the thickness direction of the transparent cover plate 400, the transparent cover plate 400 includes a first surface 410 and a second surface 420, a first incident surface 4101 and a second exit surface 4102 are formed on the first surface 410, a first exit surface 4201 and a second incident surface 4202 are formed on the second surface 420, the first exit surface 4201 is parallel to the first incident surface 4101, the second exit surface 4102 is parallel to the second incident surface 4202, the detection light 330 emitted by the detection light emitting member 310 exits to the workpiece 2 to be polished after passing through the first incident surface 4101 and the first exit surface 4201 in sequence, and the detection light 330 reflected by the workpiece 2 to be polished is received by the detection light receiving member 320 after passing through the second incident surface 4202 and the second exit surface 4102 in sequence, a first inclination angle is provided between the first incident surface 4101 and the vertical direction, and the first inclination angle is configured such that the detection light 330 emitted by the detection light emitting member 310 is perpendicularly incident on the transparent cover plate 400, a second inclination angle is provided between the second incident surface 4202 and the vertical direction, and the second inclination angle is configured such that the detection light 330 reflected by the workpiece 2 to be polished is perpendicularly incident on the transparent cover plate 400.

[0053] Wherein, the thickness direction of the transparent cover plate 400 is Figure 3 the direction indicated by the arrow Y in Figure 3 and the first inclination angle is the angle shown as a1 in Figure 3 and the second inclination angle is the angle shown as a2 in

[0054] It should be noted that the above polishing condition includes the polishing end point and the polishing thickness, and, the support member 100 in the polishing device 1 is usually connected to a rotation driving member to drive the polishing member 200 disposed on the support member 100 to rotate, so as to polish the workpiece 2 to be polished.

[0055] In addition, the above first preset angle is the included angle less than 90° between the first incident surface 4101 and the vertical direction, and the above second preset angle is the included angle less than 90° between the second incident surface 4202 and the vertical direction.

[0056] During the polishing process, the polishing member 200 performs a polishing operation on the workpiece to be polished 200, and at the same time, it cooperates with the end point detection component 300 to monitor the polishing condition in real time. The end point detection component 300 includes a detection light emitting member 310 and a detection light receiving member 320. By emitting the detection light 330 and receiving the light reflected by the workpiece to be polished 2, the polishing condition is determined according to the change in the characteristics of the light. The transparent cover plate 400 disposed in the detection window 210 plays a role in protecting the end point detection component 300 and ensuring the normal transmission of the detection light 330. Its special two-sided structure design enables the detection light 330 to enter and exit at a specific angle, improving the accuracy and stability of the detection. The transparent cover plate 400 isolates the end point detection component 300 from the polishing environment, preventing coolant from entering the accommodation space 201 of the polishing member and the detection area during operations such as replacing the polishing pad, which may affect the detection result.

[0057] Further, the first incident surface 4101 has a first inclination angle with respect to the vertical direction, such that the detection light 330 emitted by the detection light emitting member 310 can perpendicularly enter the transparent cover plate 400, so that the detection light 330 will not refract when passing through the transparent cover plate 400, ensuring the highest transmission efficiency of the detection light 330 when entering the transparent cover plate 400 and reducing the light loss caused by angle deviation. The first exit surface 4201 is parallel to the first incident surface 4101, ensuring the direction stability of the detection light 330 when exiting. The second incident surface 4202 has a second inclination angle with respect to the vertical direction, enabling the detection light 330 reflected by the workpiece to be polished 2 to perpendicularly enter the transparent cover plate 400. Similarly, this design improves the reception efficiency of the reflected light, ensuring that the detection light receiving member 320 can accurately receive the reflected light. The second exit surface 4102 is parallel to the second incident surface 4202, further enhancing the stability of the reflected light transmission. Through the inclination angle design of the incident surface and the exit surface on both sides of the transparent cover plate 400, the detection light 330 maintains the best incident and reflection angles during the entire transmission process, thereby improving the accuracy of the end point detection component 300 in detecting the polishing condition, enabling a more accurate judgment of the end point of the polishing operation, avoiding over-polishing or under-polishing, and ensuring that the polishing operation stops at the appropriate time with accurate end point detection.

[0058] In a possible embodiment, referring to Figure 1 and Figure 4 , the end point detection component 300 further includes a reflector 340. The reflector 340 has a reflection surface 3401, and the reflection surface 3401 has a third inclination angle with respect to the horizontal direction, such that the detection light 330 emitted by the detection light emitting member 310 is reflected by the reflection surface 3401 and then perpendicularly enters the first incident surface 4101.

[0059] Among them, the above-mentioned third inclination angle is the angle less than 90° between the reflecting surface 3401 and the horizontal direction.

[0060] Through the reflecting surface 3401 with the third inclination angle, the detection light 330 emitted by the detection light emitting member 310 is reflected and then perpendicularly incident on the first incident surface 4101, so that the detection light 330 can enter the transparent cover plate 400 at a specific angle. The third inclination angle of the reflecting surface 3401 can ensure that the detection light 330 emitted by the detection light emitting member 310 is perpendicularly incident on the first incident surface 4101 after being reflected by the reflecting surface 3401, which can minimize the light loss and scattering caused by the angle deviation and improve the transmission efficiency and detection accuracy of the detection light 330.

[0061] In a possible embodiment, refer to Figure 4 and Figure 5 , the first inclination angle is a1, the third inclination angle is b, and the angle between the detection light 330 emitted by the detection light emitting member 310 and the horizontal direction is d. When the detection light 330 incident on the first incident surface 4101 is perpendicular to the first incident surface 4101, the first inclination angle a1, the third inclination angle b, and the angle d between the detection light emitted by the detection light emitting member and the horizontal direction satisfy the relational expression: b = (a1 - d) / 2.

[0062] Among them, in this embodiment, the angle between the detection light 330 incident on the first incident surface 4101 and the reflecting surface 3401 is c. When the detection light 330 incident on the first incident surface 4101 is perpendicular to the first incident surface 4101, the relational expressions are satisfied: a1 = b + c, c = b + d.

[0063] Thus, through the setting of the above-mentioned angle relationships, the angle between the detection light 330 emitted by the detection light emitting member 310 and the horizontal direction can be accurately calculated and controlled, so as to change the angle of the reflecting surface 3401 to ensure that the detection light 330 can be perpendicularly incident on the first incident surface 4101.

[0064] In a possible embodiment, the reflector 340 includes a driving component, and the driving component is used to drive the reflecting surface 3401 of the reflector 340 to achieve angle adjustment.

[0065] Among them, the way for the driving component to drive the reflecting surface 3401 of the reflector 340 to achieve angle adjustment can be to drive the reflector 340 to rotate to drive the reflecting surface 3401 to rotate, or directly drive the reflecting surface 3401 to rotate, which is not limited herein.

[0066] Thus, the angle of the reflecting surface 3401 can be adjusted according to actual requirements, so as to accurately guide the detection light 330, and ensure as much as possible that the detection light 330 can be vertically incident on the first incident surface 4101.

[0067] In a possible embodiment, the range value of the third tilt angle is 20° - 50°.

[0068] The range value of the third tilt angle being 20° - 50° can achieve a more reasonable layout within a limited space, neither causing space waste due to too small an angle nor occupying too much unnecessary space due to too large an angle, and it is easy to process, thus reducing the processing difficulty.

[0069] In a possible embodiment, the first tilt angle is equal to the second tilt angle.

[0070] When the first tilt angle and the second tilt angle are equal, it can ensure that the propagation path of the detection light in the transparent cover plate 400 has a high degree of symmetry. When the detection light 330 emitted by the detection light emitter 310 and the detection light 330 reflected back by the polished part 2 pass through the transparent cover plate 400, they are incident and exit at the same angle, making the propagation of the detection light 330 more stable and predictable, helping to improve the accuracy and reliability of detection, reducing errors caused by inconsistent propagation paths of the detection light 330, and the equal tilt angles simplify the design and processing process of the transparent cover plate 400.

[0071] In a possible embodiment, along the direction perpendicular to the first incident surface 4101, the thickness of the transparent cover plate 400 is 4 mm - 5 mm.

[0072] By making the thickness of the transparent cover plate 400 within the range of 4 mm - 5 mm, it can ensure that the detection light 330 has good optical performance when passing through the transparent cover plate 400. The appropriate thickness can reduce the scattering, refraction, and absorption of the detection light 330, enabling the detection light 330 to be transmitted with high efficiency, thereby improving the accuracy of detection. During the polishing process, the transparent cover plate 400 needs to withstand a certain amount of pressure and impact force, and at the same time remain stable without cracking or deforming. A thickness of 4 mm - 5 mm can provide sufficient mechanical strength on the premise of ensuring optical performance to adapt to the working environment of the polishing device 1.

[0073] In a possible embodiment, along the vertical direction, the highest point of the first surface 410 of the transparent cover plate 400 is 0.1 mm - 0.5 mm lower than the upper surface of the polished part. In a preferred embodiment, along the vertical direction, the highest point of the first surface 410 of the transparent cover plate 400 is 0.2 mm lower than the upper surface of the polished part.

[0074] In a possible embodiment, refer toFigure 3 In order to match the size of the existing polishing part 200 and minimize the interference of stray light as much as possible, the preferred size of the transparent cover plate 400 is: L1 = 10 mm - 20 mm, L2 = 3 mm - 15 mm.

[0075] In a possible embodiment, refer to Figure 3 , the first incident surface 4101 and the second exit surface 4102 are connected to each other, and an edge is formed at the connection.

[0076] The first incident surface 4101 and the second exit surface 4102 are connected to each other and form an edge, which makes a clear boundary between the two surfaces. During the transmission of the detection light 330, this edge can serve as an important reference point to help determine the incident and exit positions of the detection light 330. At the same time, it is also convenient to position the processing and installation of the transparent cover plate 400, improving the accuracy of production and assembly. The edge at the connection can increase the structural strength of the transparent cover plate 400 and improve the anti-deformation ability.

[0077] In a possible embodiment, the first incident surface 4101 and the second exit surface 4102 are connected to each other, and a smooth transition is formed at the connection.

[0078] When the first incident surface 4101 and the second exit surface 4102 have a smooth transition at the connection, it can effectively reduce the scattering of the detection light 330 at the junction, making the detection light 330 transition from one surface to another more smoothly, reducing scattering loss, and improving the utilization efficiency of the detection light 330. During the operation of the polishing device 1, the transparent cover plate 400 may be affected by various external forces, such as pressure, vibration, etc. The design of smooth transition can disperse stress, reduce the degree of stress concentration, and improve the strength and durability of the transparent cover plate 400.

[0079] In a possible embodiment, refer to Figure 6 and Figure 7 , both the first surface 410 and the second surface 420 are arc surfaces with equal radian, and the incident angle of the detection light 330 is perpendicular to the tangent plane of the incident point.

[0080] When both the first surface 410 and the second surface 420 are arc surfaces with equal radian, making the incident angle of the detection light 330 perpendicular to the tangent plane at the incident point can make the propagation path of the detection light 330 in the transparent cover plate 400 more uniform, reduce the refraction and scattering of the detection light 330 caused by uneven planes or sudden angle changes, help improve the transmission efficiency of the detection light 330, ensure that the detection light 330 can accurately irradiate the surface of the workpiece 2 to be polished and be reflected back, thereby improving the accuracy of the endpoint detection, and the arc surface can better withstand external pressure and impact force, reducing the risk of deformation and rupture caused by external force. For the polishing device 1, this means that the transparent cover plate 400 can play a more stable role during operation, protect the endpoint detection component 300 from damage, and improve the reliability of the entire device.

[0081] In a possible embodiment, referring to Figure 8 , a sealing structure 500 is provided between the transparent cover plate 400 and the detection window 210.

[0082] During operations such as replacing the polishing pad, the coolant may enter the internal space of the workpiece to be polished through the detection window. In this embodiment, by providing the sealing structure 500, these impurities can be effectively prevented from entering the detection window 210, thereby protecting the endpoint detection component 300 from contamination, ensuring that the transmission path of the detection light 330 is not disturbed, and improving the accuracy and reliability of the detection. The sealing structure 500 helps to keep the inside of the detection window 210 clean. Without sealing, debris, coolant, etc. generated during the polishing process may enter the detection window 210, affecting the effect of the endpoint detection. The sealing structure 500 can prevent these substances from entering, keep the detection area clean, and provide a good environment for accurate detection.

[0083] In a possible embodiment, referring to Figure 8 , the sealing structure 500 includes an annular sealing groove 510 provided on the circumference of the transparent cover plate 400 and a sealing ring 520 provided in the annular sealing groove 510.

[0084] Among them, the sealing ring 520 is made of a material with elasticity and sealing properties, such as rubber, silica gel, etc., which is not limited herein.

[0085] An annular sealing groove 510 is provided in the circumferential direction of the transparent cover plate 400, providing a specific installation position for the sealing ring 520. The sealing ring 520 is installed in the annular sealing groove 510 and can closely fit the inner walls of the transparent cover plate 400 and the detection window 210, forming an effective seal, ensuring the stability and reliability of the seal, and preventing the sealing ring 520 from shifting or falling off during use. The elasticity of the sealing ring 520 allows it to deform under a certain pressure, filling the tiny gap between the transparent cover plate 400 and the detection window 210, further improving the sealing effect, effectively preventing impurities, liquids, and dust from entering the detection window 210, protecting the normal operation of the end-point detection component 300, ensuring that the transmission of the detection light 330 is not disturbed, and improving the accuracy and reliability of the detection.

[0086] Of course, the sealing structure 500 is not limited to the above form. For example, the sealing structure 500 can also apply a sealing adhesive on the contact surface between the transparent cover plate 400 and the detection window 210. After the sealing adhesive cures, a sealing layer is formed to fill the gap between the two, achieving the sealing effect, or fill a sealing filler between the transparent cover plate 400 and the detection window 210, such as asbestos rope, graphite, etc.

[0087] In a possible embodiment, referring to Figure 1 and Figure 2 , along the thickness direction of the polishing member 200, the detection window 210 has a first section 2101 and a second section 2102 that communicate with each other. And in the horizontal projection plane, the projection of the second section 2102 is located within the first section 2101. The second section 2102 is close to the support member 100. The transparent cover plate 400 has a mounting portion, and the mounting portion is mounted within the first section 2101.

[0088] It should be noted that in the horizontal projection plane, the projection of the second section 2102 being located within the first section 2101 should be understood as that in the projection formed by looking down from directly above, the second section 2102 is within the projection range of the first section 2101.

[0089] The detection window 210 has a first section 2101 and a second section 2102 that communicate with each other. And in the direction from the second surface 420 to the first surface 410, the projection of the second section 2102 is located within the first section 2101. The second section 2102 is close to the support member 100. The transparent cover plate 400 is installed within the first section 2101, providing a specific spatial layout for the installation of the transparent cover plate 400. The second section 2102 being close to the support member 100 mainly plays a connecting and transitional role, while the first section 2101 provides an installation position for the transparent cover plate 400. The first section 2101 can provide more stable support for the transparent cover plate 400, ensuring that it will not loosen or displace during the polishing process, and improving the accuracy and reliability of the end-point detection.

[0090] In a possible embodiment, referring to Figure 2 and Figure 9 , the transparent cover plate 400 is fixedly installed in the first section 2101 through the fastener 600.

[0091] Among them, the fastener 600 can be a bolt, a nut, a screw, etc., which is not limited herein.

[0092] Using the fastener 600 to fixedly install the transparent cover plate 400 in the first section 2101 can generate sufficient clamping force between the transparent cover plate 400 and the large-diameter end, ensuring that the transparent cover plate 400 is firmly installed in the detection window 210, preventing the transparent cover plate 400 from shifting or loosening during the polishing process. A stable installation position is crucial for ensuring the accurate transmission of the detection light 330, which helps to improve the accuracy and reliability of the end-point detection. The way of fixing the fastener 600 makes the installation and disassembly of the transparent cover plate 400 relatively easy. When it is necessary to replace the transparent cover plate 400 or maintain the detection window 210, just loosen the fastener 600, and the transparent cover plate 400 can be taken out. This design facilitates the maintenance work of the operator and reduces the maintenance cost and time.

[0093] In a possible embodiment, the transparent cover plate 400 and the detection window 210 are in interference fit.

[0094] Interference fit means that during assembly, the size of the transparent cover plate 400 is slightly larger than the size of the detection window 210, so that a certain extrusion stress is generated after the two are assembled, thereby realizing a tight connection, which can ensure that there is no gap between the transparent cover plate 400 and the detection window 210, effectively preventing impurities, liquids, etc. from entering the inside of the detection window 210, and protecting the normal operation of the end-point detection component 300. The interference fit can provide good stability, and the transparent cover plate 400 will not loosen or displace in the detection window 210. During the operation of the polishing device 1, even under the action of external forces such as vibration and impact, the transparent cover plate 400 can remain in the correct position, ensuring the accurate transmission of the detection light 330 and the reliability of the end-point detection.

[0095] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the polishing device of the present application, rather than to limit it; although the polishing device of the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A polishing device, characterized in that, The polishing device includes: a support; a polishing member disposed on the support, with a receiving space formed inside the polishing member, and a detection window communicating with the receiving space is further formed on the polishing member; an end point detection component disposed in the receiving space for detecting the polishing condition, the end point detection component including a detection light emitting member and a detection light receiving member; a transparent cover plate disposed in the detection window. Along the thickness direction of the transparent cover plate, the transparent cover plate includes a first surface and a second surface. A first incident surface and a second exit surface are formed on the first surface, and a first exit surface and a second incident surface are formed on the second surface. The first exit surface is parallel to the first incident surface, and the second exit surface is parallel to the second incident surface. The detection light emitted by the detection light emitting member passes through the first incident surface and the first exit surface in sequence and then exits to the workpiece to be polished. The detection light reflected by the workpiece to be polished passes through the second incident surface and the second exit surface in sequence and is then received by the detection light receiving member. The first incident surface has a first inclination angle with respect to the vertical direction, and the first inclination angle is configured such that the detection light emitted by the detection light emitting member is perpendicularly incident on the transparent cover plate. The second incident surface has a second inclination angle with respect to the vertical direction, and the second inclination angle is configured such that the detection light reflected by the workpiece to be polished is perpendicularly incident on the transparent cover plate.

2. The polishing device according to claim 1, wherein the end point detection component further includes a reflector having a reflecting surface with a third inclination angle with respect to the horizontal direction, so that the detection light emitted by the detection light emitting member is reflected by the reflecting surface and then perpendicularly incident on the first incident surface.

3. The polishing device according to claim 2, wherein The first inclination angle is a1, the third inclination angle is b, and the angle between the detection light emitted by the detection light emitting member and the horizontal direction is d. When the detection light incident on the first incident surface is perpendicular to the first incident surface, the first inclination angle a1, the third inclination angle b, and the angle d between the detection light emitted by the detection light emitting member and the horizontal direction satisfy the relationship: b = (a1 - d) / 2.

4. The polishing device according to claim 3, characterized in that, The reflector includes a driving component for driving the reflecting surface of the reflector to achieve angle adjustment.

5. The polishing device according to any one of claims 2-4, characterized in that, The range of the third inclination angle is 20° - 50°.

6. The polishing device according to claim 1, characterized in that, The first inclination angle is equal to the second inclination angle.

7. The polishing device according to claim 1, characterized in that, Along the direction perpendicular to the first incident surface, the thickness of the transparent cover plate is 4 mm - 5 mm.

8. The polishing device according to any one of claims 1-4, characterized in that, The first incident surface and the second exit surface are connected to each other and form an edge at the connection; or, the first incident surface and the second exit surface are connected to each other and have a smooth transition at the connection.

9. The polishing device according to any one of claims 1-4, characterized in that A sealing structure is provided between the transparent cover plate and the detection window, and the sealing structure includes an annular sealing groove provided on the circumference of the transparent cover plate and a sealing ring provided in the annular sealing groove.

10. The polishing device according to claim 1, characterized in that, In the thickness direction of the polishing member, the detection window has a first section and a second section that communicate with each other. And in the horizontal projection plane, the projection of the second section is located within the first section. The second section is disposed close to the support member. The transparent cover plate has a mounting portion, and the mounting portion is mounted within the first section.

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