Wafer sucking and conveying mechanism of automatic silicon wafer inserting machine
By designing the suction blade conveying mechanism and limiting components, the problems of low conveying efficiency and inaccurate positioning of the existing silicon wafer automatic inserting machine are solved, and efficient single crystal silicon wafer conveying and accurate insertion are achieved.
Patent Information
- Application Number
- CN202422144005.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-02
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-02
AI Technical Summary
The conveying efficiency of the existing silicon wafer automatic inserting machine is low in diameter and cannot accurately insert single crystal silicon wafers into the storage box.
A structure including a base, a work table, a first and a second conveying device, a controller, a lifting assembly, a limiting assembly and a suction sheet conveying mechanism is designed. The single crystal silicon wafer is adsorbed and released through the suction cup, and combined with the positioning of the limiting plate, efficient conveying and accurate insertion are achieved.
The conveying frequency of single crystal silicon wafers is improved, ensuring that the single crystal silicon wafer can be accurately inserted into the storage box, and improving the insertion efficiency.
Smart Images
Figure CN223133439U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer suction and conveying of a wafer inserter, in particular to a wafer suction and conveying mechanism of an automatic silicon wafer inserter. Background Technique
[0002] In the production process of single-crystal silicon wafers, a wafer inserter is required to insert the silicon wafers into special plastic boxes one by one. At present, the automatic silicon wafer inserter needs to perform the wafer insertion operation on the washed single-crystal silicon wafers. The automatic silicon wafer inserter needs to use a wafer suction and conveying mechanism to place the single-crystal silicon wafers on the conveying device, and the conveying device can insert the single-crystal silicon wafers into the storage box. However, most of the existing wafer suction and conveying mechanisms suck one single-crystal silicon wafer and place it on the conveying device, and then return to suck another one and place it on the conveying device, resulting in low conveying efficiency; moreover, the existing conveying device cannot limit the position when conveying the single-crystal silicon wafers, and the single-crystal silicon wafers cannot be accurately inserted into the storage box. Therefore, we propose a wafer suction and conveying mechanism of an automatic silicon wafer inserter. Summary of the Utility Model
[0003] The purpose of the utility model is to provide a wafer suction and conveying mechanism of an automatic silicon wafer inserter to solve the problems raised in the above background technique.
[0004] To achieve the above purpose, the utility model provides the following technical solution: A wafer suction and conveying mechanism of an automatic silicon wafer inserter, including a base, a workbench is provided on the top of the base, a first conveying device is provided on the front side of the top of the workbench, a second conveying device is provided on the top of the workbench, a controller is provided on the top of the workbench, a storage box is provided on the right side of the workbench, a lifting assembly is provided on the right side wall of the base, a limiting assembly is provided on the top of the second conveying device, and a wafer suction and conveying mechanism is provided on the top of the workbench. The wafer suction and conveying mechanism includes a mounting frame provided on the top of the workbench, a rotating shaft penetrates through the top of the mounting frame, a driven belt pulley is provided at one end of the rotating shaft, a motor is provided on the left side wall of the mounting frame, a driving belt pulley is connected to the output end of the motor, a belt is sleeved on the outer walls of the driving belt pulley and the driven belt pulley, a fixing plate is provided at the other end of the rotating shaft, a second electric telescopic rod is provided at the bottom of the fixing plate, a connecting plate is provided at one end of the second electric telescopic rod, and connecting rods are provided on the left and right sides at the bottom of the connecting plate. One end of each of the two groups of connecting rods is provided with a suction cup.
[0005] Further, the lifting assembly includes a lifting plate slidably connected to the right side wall of the base, a hydraulic rod is provided at the bottom of the workbench, one end of the hydraulic rod is connected to the top of the lifting plate, a fixing frame is provided on the top of the lifting plate, the storage box is placed in the fixing frame, a pressing plate is provided in the fixing frame, a hydraulic cylinder is provided on the top of the fixing frame, and the output end of the hydraulic cylinder is connected to the top of the pressing plate.
[0006] Further, a guiding groove is formed in the right side wall of the base, and a guiding block matching the guiding groove is arranged on the left side wall of the lifting plate.
[0007] Further, the limiting assembly includes two groups of limiting plates arranged on the top of the second conveying device. Mounting plates are arranged on the front and rear side walls of the second conveying device. First electric telescopic rods are arranged on the opposite side walls of the two groups of mounting plates, and one ends of the two groups of first electric telescopic rods are respectively connected to the side walls far away from the two groups of mounting plates.
[0008] Further, a through hole is formed through the top of the mounting frame, and a bearing is sleeved on the outer wall of the rotating shaft, and the bearing matches the through hole.
[0009] Further, the fixing frame is arranged in a U shape.
[0010] Further, the two suckers are respectively located directly above the first conveying device and the second conveying device.
[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows: Under the action of the chip suction and conveying mechanism, the present utility model can improve the frequency of transporting the single crystal silicon wafer to the second conveying device, thereby improving the inserting efficiency; under the action of the limiting assembly, the single crystal silicon wafer can be limited, ensuring that the single crystal silicon wafer can be accurately inserted into the storage box. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 is a schematic structural diagram of the present utility model;
[0013] Figure 2 is a left view of the structure of the present utility model.
[0014] In the figure: 1. Base; 2. Storage box; 3. Lifting assembly; 30. Lifting plate; 31. Hydraulic rod; 32. Fixing frame; 33. Pressing plate; 34. Hydraulic cylinder; 4. Workbench; 5. Controller; 6. First conveying device; 7. Second conveying device; 8. Limiting assembly; 80. Limiting plate; 81. Mounting plate; 82. First electric telescopic rod; 9. Chip suction and conveying mechanism; 90. Sucker; 91. Connecting rod; 92. Connecting plate; 93. Second electric telescopic rod; 94. Fixing plate; 95. Mounting frame; 96. Rotating shaft; 97. Driven pulley; 98. Belt; 99. Driving pulley; 900. Motor. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0015] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.
[0016] Embodiment 1:
[0017] Please refer to Figure 1-2 , the present utility model provides a technical solution: a wafer automatic inserting machine's wafer suction and conveying mechanism, including a base 1. A workbench 4 is provided at the top of the base 1. A first conveying device 6 is provided at the front side of the top of the workbench 4. A second conveying device 7 is provided at the top of the workbench 4. A controller 5 is provided at the top of the workbench 4. A storage box 2 is provided on the right side of the workbench 4. A lifting assembly 3 is provided on the right side wall of the base 1. A limiting assembly 8 is provided at the top of the second conveying device 7. A wafer suction and conveying mechanism 9 is provided at the top of the workbench 4. The wafer suction and conveying mechanism 9 includes a mounting frame 95 provided at the top of the workbench 4. A rotating shaft 96 penetrates through the top of the mounting frame 95. A through hole is provided through the top of the mounting frame 95. A bearing is sleeved and installed on the outer wall of the rotating shaft 96, and the bearing matches the through hole. Under the action of the bearing, the rotation of the rotating shaft 96 is more stable. One end of the rotating shaft 96 is provided with a driven pulley 97. A motor 900 is provided on the left side wall of the mounting frame 95. The output end of the motor 900 is connected with a driving pulley 99. A belt 98 is sleeved on the outer walls of the driving pulley 99 and the driven pulley 97. The other end of the rotating shaft 96 is provided with a fixing plate 94. A second electric telescopic rod 93 is provided at the bottom of the fixing plate 94. One end of the second electric telescopic rod 93 is provided with a connecting plate 92. Both the left and right sides of the bottom of the connecting plate 92 are provided with connecting rods 91. One end of each of the two groups of connecting rods 91 is provided with a suction cup 90. The two groups of suction cups 90 are respectively located directly above the first conveying device 6 and the second conveying device 7, so that the two groups of suction cups 90 can simultaneously release and adsorb single-crystal wafers.
[0018] Please refer to Figure 1 , the lifting assembly 3 includes a lifting plate 30 slidably connected to the right side wall of the base 1. A guiding groove is provided on the right side wall of the base 1. A guiding block matching the guiding groove is provided on the left side wall of the lifting plate 30. Under the action of the guiding groove and the guiding block, the up and down movement of the lifting plate 30 is more stable. A hydraulic rod 31 is provided at the bottom of the workbench 4. One end of the hydraulic rod 31 is connected to the top of the lifting plate 30. A fixed frame 32 is provided at the top of the lifting plate 30. The fixed frame 32 is arranged in a U shape. The storage box 2 is placed in the fixed frame 32. A pressing plate 33 is provided in the fixed frame 32. A hydraulic cylinder 34 is provided at the top of the fixed frame 32. The output end of the hydraulic cylinder 34 is connected to the top of the pressing plate 33.
[0019] Please refer to Figure 2, the limiting component 8 includes two groups of limiting plates 80 provided on the top of the second conveying device 7. Mounting plates 81 are provided on the front and rear side walls of the second conveying device 7. First electric telescopic rods 82 are provided on the opposite side walls of the two groups of mounting plates 81. One ends of the two groups of first electric telescopic rods 82 are respectively connected to the side walls of the two groups of mounting plates 81 away from each other.
[0020] Working principle: Place the storage box 2 on the fixed frame 32. The hydraulic cylinder 34 drives the pressing plate 33 to fix the storage box 2. Then, the first conveying device 6 conveys the single-crystalline silicon wafers that have been produced and cleaned. The second electric telescopic rod 93 drives the connecting plate 92 and the suction cup 90 to move downward. The suction cup 90 can adsorb the single-crystalline silicon wafers. The motor 900 drives the driving pulley 99 to rotate. The driving pulley 99 drives the belt 98 to rotate. The belt 98 drives the driven pulley 97 to rotate. The driven pulley 97 drives the rotating shaft 96 to rotate. The rotating shaft 96 drives the fixing plate 94 and the connecting plate 92 to rotate. The connecting plate 92 drives the two suction cups 90 to rotate. The second electric telescopic rod 93 drives the connecting plate 92 and the suction cup 90 to move downward. The suction cup 90 located on the second conveying device 7 releases the single-crystalline silicon wafer, and the suction cup 90 located on the first conveying device 6 adsorbs the single-crystalline silicon wafer. Thus, the two suction cups 90 can release and adsorb the single-crystalline silicon wafers simultaneously, improving the conveying efficiency. The first electric telescopic rod 82 drives the limiting plate 80 to move. The limiting plate 80 can limit the single-crystalline silicon wafer. Thus, the second conveying device 7 is limited when conveying the single-crystalline silicon wafer, and the single-crystalline silicon wafer can be accurately inserted into the storage box 2. The hydraulic rod 31 drives the lifting plate 30 to move upward. The lifting plate 30 can drive the storage box 2 to move upward. Thus, the single-crystalline silicon wafers can be inserted into the storage box 2 layer by layer.
[0021] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A suction and conveying mechanism for an automatic silicon wafer inserter, comprising a base (1), a workbench (4) is provided on the top of the base (1), a first conveying device (6) is provided on the front side of the top of the workbench (4), a second conveying device (7) is provided on the top of the workbench (4), and a controller (5) is provided on the top of the workbench (4), characterized in that: On the right side of the workbench (4), there is a storage box (2). On the right side wall of the base (1), there is a lifting assembly (3). On the top of the second conveying device (7), there is a limiting assembly (8). On the top of the workbench (4), there is a suction cup conveying mechanism (9). The suction cup conveying mechanism (9) includes a mounting frame (95) provided on the top of the workbench (4). A rotating shaft (96) penetrates through the top of the mounting frame (95). One end of the rotating shaft (96) is provided with a driven pulley (97). On the left side wall of the mounting frame (95), there is a motor (900). The output end of the motor (900) is connected with a driving pulley (99). A belt (98) is sleeved on the outer walls of the driving pulley (99) and the driven pulley (97). The other end of the rotating shaft (96) is provided with a fixing plate (94). At the bottom of the fixing plate (94), there is a second electric telescopic rod (93). One end of the second electric telescopic rod (93) is provided with a connecting plate (92). On the left and right sides of the bottom of the connecting plate (92), there are connecting rods (91) respectively. One end of each of the two groups of connecting rods (91) is provided with a suction cup (90).
2. The suction and conveying mechanism of the automatic silicon wafer inserter according to claim 1, characterized in that: The lifting assembly (3) includes a lifting plate (30) slidably connected to the right side wall of the base (1). At the bottom of the workbench (4), there is a hydraulic rod (31). One end of the hydraulic rod (31) is connected to the top of the lifting plate (30). On the top of the lifting plate (30), there is a fixing frame (32). The storage box (2) is placed in the fixing frame (32). In the fixing frame (32), there is a pressing plate (33). On the top of the fixing frame (32), there is a hydraulic cylinder (34). The output end of the hydraulic cylinder (34) is connected to the top of the pressing plate (33).
3. The suction sheet conveying mechanism of the automatic silicon wafer inserter according to claim 2, characterized in that: A guiding groove is formed on the right side wall of the base (1). A guiding block matched with the guiding groove is provided on the left side wall of the lifting plate (30).
4. The suction and conveying mechanism of the automatic silicon wafer inserter according to claim 1, characterized in that: The limiting assembly (8) includes two limiting plates (80) provided on the top of the second conveying device (7). Mounting plates (81) are provided on the front and rear side walls of the second conveying device (7). On the opposite side walls of the two groups of mounting plates (81), there are first electric telescopic rods (82) respectively. One end of each of the two groups of first electric telescopic rods (82) is connected to the side wall far away from the two groups of mounting plates (81).
5. The suction and conveying mechanism of the automatic silicon wafer inserter according to claim 1, characterized in that: A through hole penetrates through the top of the mounting frame (95). A bearing is sleeved and installed on the outer wall of the rotating shaft (96), and the bearing is matched with the through hole.
6. The suction sheet conveying mechanism of the automatic silicon wafer inserter according to claim 2, characterized in that: The fixing frame (32) is arranged in a U shape.
7. The suction sheet conveying mechanism of the automatic silicon wafer inserter according to claim 1, characterized in that: The two suction cups (90) are respectively located directly above the first conveying device (6) and the second conveying device (7).