Real-time detection equipment applied to dry film processing

Abstract

The utility model discloses real-time detection equipment applied to dry film processing, which comprises a real-time detection component, a detection component and a control component, and is characterized in that the real-time detection component comprises a machine frame and a detector; the auxiliary machining assembly comprises a set of fixing rods, vertical rods, a connecting plate, transverse plates, connecting holes and a movable plate, the fixing rods are fixed to the two sides of the other end of the machine frame, the vertical rods are located above the fixing rods, the connecting plate is fixed between the inner side faces of the vertical rods, and the transverse plates are fixed to the edges of the two sides of the bottom end of the connecting plate; and the movable plate is located between the two ends of the inner side of the transverse plate. By arranging the fixed rod, the vertical rod, the connecting plate, the transverse plate, the connecting hole and the movable plate, the surface of the movable plate in the connecting hole is smooth, a dry film can be conveniently machined, and therefore the situation that machining of the dry film is affected by an uneven plane is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of dry film processing, and particularly relates to a real-time detection device applied to dry film processing. Background Technique

[0002] Dry film processing is a key process used to protect the surface of circuit boards and provide high-quality lithography pattern transfer during the manufacturing process of semiconductors and electronic components. When processing dry films, real-time detection devices are required to detect the dry films.

[0003] During the existing dry film processing, workers directly place the dry film at the front end of the detection device for manual processing. After processing, the dry film is placed on the conveyor belt of the detection device, and then the conveyor belt drives the dry film to move under the detector. The detector detects the dry film. After detection, the dry film can be further processed. However, the front end of the device is uneven, which easily affects the processing effect of the dry film. Therefore, a detection device for auxiliary processing is needed to avoid affecting the processing effect of the dry film. Content of the Utility Model

[0004] In view of the problem that during the existing dry film processing, workers directly place the dry film at the front end of the detection device for manual processing. After processing, the dry film is placed on the conveyor belt of the detection device, and then the conveyor belt drives the dry film to move under the detector. The detector detects the dry film. After detection, the dry film can be further processed. However, the front end of the device is uneven, which easily affects the processing effect of the dry film, the utility model proposes the following technical solutions:

[0005] The utility model is a real-time detection device applied to dry film processing, including:

[0006] A real-time detection component, the real-time detection component includes a machine frame and a detector, and the detector is fixed above one end of the machine frame;

[0007] An auxiliary processing component, the auxiliary processing component includes a group of fixed rods, vertical rods, connecting plates, cross plates, connecting holes and moving plates. The fixed rods are fixed on both sides of the other end of the machine frame. The vertical rods are located above the fixed rods. The connecting plates are fixed between the inner sides of the vertical rods. The cross plates are fixed at both sides of the bottom end of the connecting plates. The connecting holes are opened at the center of the top and bottom ends of the connecting plates. The moving plates are located between the inner sides of the two ends of the cross plates.

[0008] As a preference of the above technical solution, clamping grooves are opened on the inner sides of the cross plates. Both ends of the moving plates extend into the clamping grooves. Magnetism surfaces are fixedly connected to the opposite surfaces of the moving plates, and the two are adsorbed to each other.

[0009] As a preference of the above technical solution, grooves are opened on the bottom surface of the inner part of the clamping grooves and on both sides of the bottom end of the connecting plates. Protrusions are fixedly connected to the top and bottom ends of both ends of the moving plates, and the protrusions are slidably connected with the grooves.

[0010] As a preference of the above technical solution, it further includes an adjusting component;

[0011] The adjusting component includes an annular block, a threaded rod and a vertical groove. The annular block is located below the vertical rod. The threaded rod is fixed to the bottom end of the annular block. The vertical groove is opened inside the top end of the fixed rod.

[0012] As a preference of the above technical solution, the threaded rod is in threaded connection with the vertical groove. A connecting block is fixedly connected to the top end of the annular block. The connecting block is rotatably connected to the inside of the bottom end of the vertical rod.

[0013] As a preference of the above technical solution, the real-time detection component further includes a support frame and a conveyor belt. The support frame is fixed to the bottom end on one side of the machine frame. The conveyor belt is fixed between the inner sides of the machine frame.

[0014] The beneficial effects of the present utility model are as follows:

[0015] First, in the present utility model, by setting the fixed rod, the vertical rod, the connecting plate, the cross plate, the connecting hole and the moving plate, when the moving plates move and merge, the dry film to be processed can be placed on the moving plates in the connecting holes. At this time, the staff can process the dry film on the connecting plate. After processing, push the moving plates to both sides. The moving plates move to both sides through the cross plate. At this time, the dry film falls through the connecting holes onto the conveyor belt below. The conveyor belt drives the dry film to move below the detector, and the detector detects it. The surface of the moving plate in the connecting hole is relatively smooth, which is convenient for processing the dry film, thus avoiding the influence of the uneven plane on the processing of the dry film.

[0016] Second, based on the above beneficial effects, at the same time, a rotatable annular block is provided at the bottom end of the vertical rod. The bottom end of the annular block is fixedly connected with a threaded rod. A vertical groove is opened inside the top end of the fixed rod. The threaded rod is in threaded connection with the vertical groove. When the connecting plate needs to be adjusted according to the height of the staff, rotate the annular block, so that the annular block drives the threaded rod to rotate in the vertical groove, so that the threaded rod drives the connecting plate to be adjusted through the thread and the vertical rod, so that the connecting plate can be adjusted to a height suitable for the staff to process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is the schematic diagram of the external structure of the present utility model;

[0018] Figure 2 is the schematic diagram of the auxiliary processing component structure of the present utility model;

[0019] Figure 3 is the exploded structure diagram of the connecting plate and the cross plate of the present utility model;

[0020] Figure 4 is the schematic diagram of the bottom end structure of the connecting plate of the present utility model;

[0021] Figure 5 Schematic cross-sectional structure diagram of the connecting plate and the transverse plate of the present utility model;

[0022] Figure 6 Exploded structure diagram of the adjusting assembly of the present utility model;

[0023] Figure 7 Schematic cross-sectional structure diagram of the adjusting assembly of the present utility model.

[0024] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0025] 11, support frame; 12, machine frame; 13, conveyor belt; 14, detector; 21, fixed rod; 22, vertical rod; 23, connecting plate; 24, transverse plate; 25, connection hole; 26, moving plate; 261, magnetic surface; 27, card slot; 28, convex block; 29, groove; 31, annular block; 32, threaded rod; 33, vertical groove; 34, connection block. Detailed implementation manners

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions of the present utility model will be clearly and completely described below in conjunction with the embodiments.

[0027] Please refer to Figures 1-5 As shown, this embodiment is a real-time detection device applied to dry film processing, including:

[0028] A real-time detection assembly, the real-time detection assembly includes a machine frame 12 and a detector 14, and the detector 14 is fixed above one end of the machine frame 12;

[0029] The real-time detection assembly further includes a support frame 11 and a conveyor belt 13. The support frame 11 is fixed to the bottom end of one side of the machine frame 12, and the conveyor belt 13 is fixed between the inner sides of the machine frame 12;

[0030] The support frame 11 is used to support the machine frame 12 and the detector 14 above. The machine frame 12 is used for placing the conveyor belt 13. The conveyor belt 13 drives the dry film to move below the detector 14, and the detector 14 detects the dry film.

[0031] An auxiliary processing assembly, the auxiliary processing assembly includes a set of fixed rods 21, vertical rods 22, connecting plates 23, transverse plates 24, connection holes 25 and moving plates 26. The fixed rods 21 are fixed to both sides of the other end of the machine frame 12. The vertical rods 22 are located above the fixed rods 21. The connecting plates 23 are fixed between the inner sides of the vertical rods 22. The transverse plates 24 are fixed to the edges of both sides of the bottom end of the connecting plates 23. The connection holes 25 are opened at the centers of the top and bottom ends of the connecting plates 23. The moving plates 26 are located between the inner ends of both sides of the transverse plates 24;

[0032] The fixed rod 21 is used for the connection of the vertical rod 22. There are two fixed rods 21 in each group. The vertical rod 22 is used for the connection of the connecting plate 23. The connecting plate 23 is used for the opening of the connecting hole 25 and the connection of the horizontal plate 24. The horizontal plate 24 is used for the connection and movement of the moving plate 26. The connecting hole 25 is used for the processed dry film to fall onto the lower conveyor belt 13. The moving plate 26 is used for placing the dry film to be processed.

[0033] Slots 27 are formed on the inner sides of the horizontal plate 24. Both ends of the moving plate 26 extend into the slots 27. Magnetism surfaces 261 are fixedly connected to the opposite surfaces of the moving plate 26, and they adsorb to each other.

[0034] The slots 27 are used for the connection and movement of the moving plate 26. The magnetism surfaces 261 are used for the adsorption and connection of the two moving plates 26 on both sides. The magnetism surfaces 261 can combine the two moving plates 26 on both sides together, thereby closing the bottom end of the connecting hole 25.

[0035] On the inner bottom surface of the slots 27 and on both sides of the bottom end of the connecting plate 23, grooves 29 are formed. Protrusions 28 are fixedly connected to the top and bottom ends of both ends of the moving plate 26. The protrusions 28 are slidably connected to the grooves 29.

[0036] The grooves 29 are used for the connection and sliding of the protrusions 28. When the moving plate 26 moves, the moving plate 26 can be pushed to both sides. At this time, both ends of the moving plate 26 move in the slots 27, and the protrusions 28 move in the grooves 29, so that the moving plate 26 moves to both sides, opening the bottom end of the connecting hole 25.

[0037] Working principle: When the component is in use, the moving plate 26 is in a combined state, making the bottom end of the connecting hole 25 in a closed state. When the component is used, the dry film to be processed is placed on the top end of the moving plate 26 in the connecting hole 25. After placement, the dry film is processed. After processing, the moving plate 26 is pushed to both sides by hand. At this time, both ends of the moving plate 26 move in the slots 27, and the protrusions 28 move in the grooves 29, so that the moving plate 26 moves away from each other to both sides, opening the bottom end of the connecting hole 25. At this time, the dry film falls through the connecting hole 25 onto the lower conveyor belt 13. The conveyor belt 13 drives the dry film to move under the detector 14, and the detector 14 detects it. After detection, the moving plate 26 is pushed inward by hand, making the moving plate 26 move relatively. The moving plates 26 adsorb and combine together through the magnetism surfaces 261, and then the detected dry film is placed on the moving plate 26 in the connecting hole 25, and the dry film is continuously processed.

[0038] Through the interaction between the slots 27, the grooves 29 and the protrusions 28 in the above steps, the moving plate 26 moves between the inner sides of the horizontal plate 24.

[0039] Please refer to Figures 1-2 、 Figures 6-7As shown in the figure, this embodiment further includes on the basis of the above-mentioned Embodiment 1;

[0040] Adjusting assembly;

[0041] The adjusting assembly includes an annular block 31, a threaded rod 32, and a vertical groove 33. The annular block 31 is located below the vertical rod 22. The threaded rod 32 is fixed to the bottom end of the annular block 31. The vertical groove 33 is opened inside the top end of the fixed rod 21;

[0042] The annular block 31 is used for the connection of the threaded rod 32. The threaded rod 32 is used for the connection between the annular block 31 and the fixed rod 21. The vertical groove 33 is used for the connection and rotation of the threaded rod 32.

[0043] The threaded rod 32 is threadedly connected to the vertical groove 33. A connecting block 34 is fixedly connected to the top end of the annular block 31. The connecting block 34 is rotatably connected to the inside of the bottom end of the vertical rod 22;

[0044] The vertical groove 33 is threadedly connected to the threaded rod 32. Therefore, when the annular block 31 is rotated, the annular block 31 rotates through the connecting block 34 at the bottom end of the vertical rod 22, so that the annular block 31 drives the threaded rod 32 to rotate together, thereby causing the threaded rod 32 to move upward in the vertical groove 33, and then causing the threaded rod 32 to drive the vertical rod 22 to move upward together through the annular block 31.

[0045] Working principle: When the assembly is not in use, the threaded rod 32 is sleeved in the vertical groove 33. When the assembly is in use, the annular block 31 is rotated by hand. The annular block 31 rotates through the connecting block 34 at the bottom end of the vertical rod 22, so that the annular block 31 drives the threaded rod 32 to rotate in the vertical groove 33. Since the vertical groove 33 is threadedly connected to the threaded rod 32, the threaded rod 32 moves upward in the vertical groove 33, and then the threaded rod 32 drives the vertical rod 22 to move upward together through the annular block 31 and the connecting block 34, thereby moving and adjusting the height of the connecting plate 23, and then facilitating the staff to process the dry film on the moving plate 26.

[0046] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it.

Claims

1. A real-time detection device applied to dry film processing, characterized in that, Including: A real-time detection component, the real-time detection component includes a frame (12) and a detector (14), and the detector (14) is fixed above one end of the frame (12); An auxiliary processing component, the auxiliary processing component includes a set of fixed rods (21), vertical rods (22), connecting plates (23), horizontal plates (24), connecting holes (25) and moving plates (26). The fixed rods (21) are fixed on both sides of the other end of the frame (12), the vertical rods (22) are located above the fixed rods (21), the connecting plates (23) are fixed between the inner sides of the vertical rods (22), the horizontal plates (24) are fixed at both sides of the bottom end of the connecting plates (23), the connecting holes (25) are opened at the centers of the top and bottom ends of the connecting plates (23), and the moving plates (26) are located between the inner ends of the horizontal plates (24).

2. The real-time detection device applied to dry film processing according to claim 1, characterized in that, Slots (27) are formed on the inner sides of the horizontal plates (24). Both ends of the moving plate (26) extend into the slots (27). Magnetism surfaces (261) are fixedly connected to the opposite surfaces of the moving plate (26), and the two attract each other.

3. The real-time detection device for dry film processing according to claim 2, characterized in that, Grooves (29) are formed on the inner bottom surfaces of the slots (27) and on both sides of the bottom end of the connecting plate (23). Protrusions (28) are fixedly connected to the top and bottom ends of both ends of the moving plate (26), and the protrusions (28) are slidably connected to the grooves (29).

4. The real-time detection device applied to dry film processing according to claim 1, characterized in that, It further includes an adjustment component; The adjustment component includes an annular block (31), a threaded rod (32) and a vertical groove (33). The annular block (31) is located below the vertical rod (22), the threaded rod (32) is fixed to the bottom end of the annular block (31), and the vertical groove (33) is opened inside the top end of the fixed rod (21).

5. The real-time detection device for dry film processing according to claim 4, wherein, The threaded rod (32) is threadedly connected to the vertical groove (33). A connecting block (34) is fixedly connected to the top end of the annular block (31), and the connecting block (34) is rotatably connected to the inside of the bottom end of the vertical rod (22).

6. The real-time detection device applied to dry film processing according to claim 1, wherein, The real-time detection component further includes a support frame (11) and a conveyor belt (13). The support frame (11) is fixed to the bottom end of one side of the frame (12), and the conveyor belt (13) is fixed between the inner sides of the frame (12).

Images