Cooling system for vacuum ion plating equipment

Abstract

The utility model relates to a cooling system for vacuum ion coating equipment, which comprises a liquid inlet distribution unit, a liquid outlet distribution unit, a heat exchange unit and an adjusting unit, coating source devices are arranged on a coating chamber, a cooling cavity channel unit A is arranged on the coating chamber, a cooling cavity channel unit B is respectively arranged on each coating source device, and a cooling cavity channel unit C is arranged on each cooling cavity channel unit B; the adjusting unit is used for adjusting the flow velocity or flow of the fluid, a detection unit is further arranged on the coating chamber, the detection unit transmits a detected signal to the control unit to be analyzed and processed, and the control unit regulates and controls the operation state of each component according to an analysis and processing result. According to the technical scheme provided by the utility model, the water flow is regulated and controlled, so that the temperature of the coating chamber is accurately controlled, heat generated in the coating chamber is reliably discharged, the vacuum state in the coating chamber is prevented from being damaged due to temperature rise, the coating environment in the coating chamber is ensured, the service lives of coating equipment and a coating source device are prolonged, and the production efficiency is improved. And the stability and uniformity of the film layer are improved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a cooling system for a vacuum ion coating device. Background Art

[0002] Vacuum ion coating is a means of "putting on" a layer of "super energy nano coat" on products. After vacuum ion coating, the quality and lifespan of the products are "qualitatively" improved. Dry coating is basically "zero pollution" during the coating process and has been widely used in various fields such as cutting tools, molds, automobiles, aerospace, medical, 3C consumer electronics, and military in recent years. Temperature control during the coating process is the key to the quality of the coating layer. Therefore, to ensure the smooth progress of the coating work and the improvement of the coating layer quality, a cooling system for a vacuum ion coating device is required. Summary of the Invention

[0003] The purpose of the utility model is to provide a cooling system for a vacuum ion coating device, which can meet the precise control of temperature during the vacuum ion coating process.

[0004] The technical solution adopted by the utility model is as follows.

[0005] A cooling system for a vacuum ion coating device, characterized in that: it includes a liquid inlet distribution unit, a liquid outlet distribution unit, and a heat exchange unit. Each coating source device is arranged on the coating chamber. The coating chamber is provided with an A cooling channel unit for fluid flow and for cooling the coating chamber. Each coating source device is respectively provided with a B cooling channel unit for fluid flow and for cooling the coating source device; the A cooling channel unit, the B cooling channel unit, the liquid inlet distribution unit, the liquid return collecting unit, and the heat exchange unit form a flow path for fluid to circulate. The liquid inlet distribution unit is provided with each liquid inlet joint assembly, and each liquid inlet joint assembly is respectively used to communicate with the liquid inlets on the A cooling channel unit and the B cooling channel unit. The liquid return collecting unit is provided with each liquid return joint assembly, and each liquid return joint assembly is respectively used to communicate with the liquid outlets on the A cooling channel unit and the B cooling channel unit. The heat exchange unit is arranged between the liquid return collecting unit and the liquid inlet distribution unit. The heat exchange unit is used to reduce the temperature of the fluid. A regulating unit is also arranged on the flow path, and the regulating unit is used to regulate the flow rate or flow of the fluid. A detection unit for detecting the temperature in the coating chamber is also arranged on the coating chamber. The detection unit transmits the detected signal to the control unit for analysis and processing, and the control unit regulates the operating states of each component according to the results of the analysis and processing.

[0006] A further solution is as follows: The liquid inlet distribution unit includes a vertically arranged A1 liquid inlet distribution pipe, the upper end of the A1 liquid inlet distribution pipe is arranged in a blocked state, and each liquid inlet distribution connection sub-unit is arranged at intervals along the height direction of the A1 liquid inlet distribution pipe. Each liquid inlet distribution connection sub-unit respectively includes each liquid inlet joint assembly arranged at intervals along the circumferential direction of the A1 liquid inlet distribution pipe.

[0007] The liquid return collection unit includes a vertically arranged B1 liquid return collection pipe, the upper end of the B1 liquid return collection pipe is arranged in a blocked state, and each liquid return collection connection sub-unit is arranged at intervals along the height direction of the B1 liquid return collection pipe. Each liquid return collection connection sub-unit respectively includes each liquid return joint assembly arranged at intervals along the circumferential direction of the B1 liquid return collection pipe.

[0008] The liquid inlet joint assembly includes an A union joint arranged on the A1 liquid inlet distribution pipe. The A union joint is connected in communication with one end of an A switch joint, the other end of the A switch joint is connected to an A pipe joint, and the A pipe joint is connected in communication with the liquid inlet on the A cooling channel unit or the B cooling channel unit through an A water inlet pipe.

[0009] The liquid inlet distribution unit further includes a horizontally arranged A2 liquid inlet distribution pipe and an A3 liquid inlet distribution pipe. The A3 liquid inlet distribution pipe is connected in communication with the lower end of the A1 liquid inlet distribution pipe through the A2 liquid inlet distribution pipe. The A2 liquid inlet distribution pipe is respectively arranged perpendicular to the A1 liquid inlet distribution pipe and the A3 liquid inlet distribution pipe. An A flow meter and an A water inlet valve are arranged on the front side of the water inlet end of the A3 liquid inlet distribution pipe.

[0010] The A flow meter is a turbine water flow meter, the A flow meter is connected to the control unit, the A water inlet valve is a ball valve, the A1 liquid inlet distribution pipe, the A2 liquid inlet distribution pipe, and the A3 liquid inlet distribution pipe are all square pipe bodies, and the liquid inlet distribution connection sub-unit is composed of the liquid inlet joint assemblies respectively arranged on the three pipe surfaces of the A1 liquid inlet distribution pipe.

[0011] The liquid return joint assembly includes a B union joint arranged on the B1 liquid return collection pipe. The B union joint is connected in communication with one end of a B switch joint, the other end of the B switch joint is connected to one end of a B flow meter, the other end of the B flow meter is connected to a B pipe joint, and the liquid outlet on the A cooling channel unit or the B cooling channel unit is connected in communication with the B pipe joint through a B water return pipe.

[0012] The liquid return collection unit further includes a horizontally arranged B2 liquid return collection pipe. The B1 liquid return collection pipe is connected in communication with the B2 liquid return collection pipe. The B1 liquid return collection pipe and the B2 liquid return collection pipe are arranged in an L shape. A B water return valve is arranged on the rear side of the water outlet end of the B2 liquid return collection pipe.

[0013] The B flowmeter is a CKD water flowmeter. The B flowmeter is connected to the control unit. The B return water valve is a ball valve. The B1 return liquid collecting pipe and the B2 return liquid collecting pipe are respectively composed of square pipe bodies. The return liquid distribution connection sub-unit is composed of return liquid joint assemblies respectively arranged on three pipe surfaces of the B1 return liquid collecting pipe.

[0014] A heating unit is also arranged on the coating chamber. The heating unit is used to heat the coating chamber. The heating unit includes heating rods arranged in the coating chamber. The detection unit is composed of temperature control thermocouples arranged on the coating chamber. The heat exchange unit is a chiller. The control unit is a PLC control device.

[0015] Through the above technical solution provided by the present utility model, by regulating the water flow, the temperature of the coating chamber can be accurately controlled, the heat generated in the coating chamber can be reliably discharged, the vacuum state in the coating chamber can be prevented from being damaged due to temperature rise, the coating environment in the coating chamber can be ensured, the service life of the coating equipment and the coating source device can be extended, and the stability and uniformity of the film layer can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic structural diagram of the present utility model.

[0017] Figure 2 It is a schematic diagram of the liquid inlet distribution unit.

[0018] Figure 3 It is a schematic diagram of the liquid outlet distribution unit.

[0019] Explanation of figure numbers: 10 - chamber body, 11 - chamber door body, 12 - coating source device, 13 - heating rod, 14 - temperature control thermocouple, 15 - A water inlet pipe, 16 - B return water pipe, 21 - A1 liquid inlet distribution pipe, 22 - A3 liquid inlet distribution pipe, 23 - A flowmeter, 24 - A water inlet valve, 25 - A union, 26 - A switch joint, 27 - A pipe joint, 31 - B1 return liquid collecting pipe, 32 - B2 return liquid collecting pipe, 33 - B return water valve, 34 - B union, 35 - B switch joint, 36 - B flowmeter, 37 - B pipe joint, 40 - chiller, 41 - A connecting pipe, 42 - B connecting pipe, 50 - control device. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] In order to make the purpose and advantages of the present utility model clearer, the present utility model will be specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific implementation manners of the present utility model, and does not strictly limit the specific protection scope claimed by the present utility model.

[0021] As used herein, terms such as "parallel", "perpendicular", etc. are not limited to their strict geometric definitions, but include tolerances for reasonable machining or human errors and inconsistencies.

[0022] As Figures 1 to 3 As shown, a cooling system for a vacuum ion coating device includes a liquid inlet distribution unit, a liquid outlet distribution unit, and a heat exchange unit. Each coating source device 12 is provided on the coating chamber. The coating chamber has an A cooling channel unit for fluid flow and for cooling the coating chamber. Each coating source device 12 has a B cooling channel unit for fluid flow and for cooling the coating source device 12. The A cooling channel unit, the B cooling channel unit, the liquid inlet distribution unit, the liquid return collecting unit, and the heat exchange unit form a flow path for fluid circulation. The liquid inlet distribution unit has each liquid inlet joint assembly, and each liquid inlet joint assembly is respectively used to communicate and connect with the liquid inlets on the A cooling channel unit and the B cooling channel unit. The liquid return collecting unit has each liquid return joint assembly, and each liquid return joint assembly is respectively used to communicate and connect with the liquid outlets on the A cooling channel unit and the B cooling channel unit. The heat exchange unit is arranged between the liquid return collecting unit and the liquid inlet distribution unit, and the heat exchange unit is used to reduce the temperature of the fluid. A regulating unit is also provided on the flow path, and the regulating unit is used to regulate the flow rate or flow of the fluid. A detection unit for detecting the temperature in the coating chamber is also provided on the coating chamber. The detection unit transmits the detected signal to the control unit for analysis and processing, and the control unit regulates the operating states of each component according to the results of the analysis and processing. The components automatically regulated by the control unit include the water turbine flowmeter on the total water flow path, the CKD water flowmeters provided on each water flow branch path, each coating source device, the heating unit, etc.

[0023] Specifically, as Figure 2As shown in the figure, the liquid inlet distribution unit includes a vertically arranged A1 liquid inlet distribution pipe 21. The upper end of the A1 liquid inlet distribution pipe 21 is arranged in a blocked state. Along the height direction of the A1 liquid inlet distribution pipe 21, each liquid inlet distribution connection sub-unit is arranged at intervals. Each liquid inlet distribution connection sub-unit respectively includes each liquid inlet joint assembly arranged at intervals along the circumferential direction of the A1 liquid inlet distribution pipe 21. The liquid return collection unit includes a vertically arranged B1 liquid return collection pipe 31. The upper end of the B1 liquid return collection pipe 31 is arranged in a blocked state. Along the height direction of the B1 liquid return collection pipe 31, each liquid return collection connection sub-unit is arranged at intervals. Each liquid return collection connection sub-unit respectively includes each liquid return joint assembly arranged at intervals along the circumferential direction of the B1 liquid return collection pipe 31. The liquid inlet joint assembly includes an A union joint 25 arranged on the A1 liquid inlet distribution pipe 21. The A union joint 25 is connected and communicated with one end of an A switch joint 26. The other end of the A switch joint 26 is connected to an A pipe joint 27. The A pipe joint 27 is connected and communicated with the liquid inlet on the A cooling channel unit or the B cooling channel unit through an A water inlet pipe 15. The liquid inlet distribution unit further includes a horizontally arranged A2 liquid inlet distribution pipe and an A3 liquid inlet distribution pipe 22. The A3 liquid inlet distribution pipe 22 is connected and communicated with the lower end of the A1 liquid inlet distribution pipe 21 through the A2 liquid inlet distribution pipe. The A2 liquid inlet distribution pipes are respectively arranged perpendicular to the A1 liquid inlet distribution pipe 21 and the A3 liquid inlet distribution pipe 22. On the front side of the water inlet end of the A3 liquid inlet distribution pipe 22, an A flowmeter 23 and an A water inlet valve 24 are arranged. The A flowmeter 23 is a turbine water flowmeter. The A flowmeter 23 is connected to the control unit. The A water inlet valve 24 is a ball valve. The A1 liquid inlet distribution pipe 21, the A2 liquid inlet distribution pipes, and the A3 liquid inlet distribution pipe 22 are all square pipe bodies. The liquid inlet distribution connection sub-unit is composed of the liquid inlet joint assemblies respectively arranged on the three pipe surfaces of the A1 liquid inlet distribution pipe 21.

[0024] Furthermore, as Figure 3 shown in the figure: The liquid return joint assembly includes a B union joint 34 arranged on the B1 liquid return collection pipe 31. The B union joint 34 is connected and communicated with one end of a B switch joint 35. The other end of the B switch joint 35 is connected to one end of a B flowmeter 36. The other end of the B flowmeter 36 is connected to a B pipe joint 37. The liquid outlet on the A cooling channel unit or the B cooling channel unit is connected and communicated with the B pipe joint 37 through a B water return pipe 16. The liquid return collection unit further includes a horizontally arranged B2 liquid return collection pipe 32. The B1 liquid return collection pipe 31 is connected and communicated with the B2 liquid return collection pipe 32. The B1 liquid return collection pipe 31 and the B2 liquid return collection pipe 32 are arranged in an L shape. On the rear side of the water outlet end of the B2 liquid return collection pipe 32, a B water return valve 33 is arranged. The B flowmeter 36 is a CKD water flowmeter. The B flowmeter 36 is connected to the control unit. The B water return valve 33 is a ball valve. The B1 liquid return collection pipe 31 and the B2 liquid return collection pipe 32 are respectively composed of square pipe bodies. The liquid return distribution connection sub-unit is composed of the liquid return joint assemblies respectively arranged on the three pipe surfaces of the B1 liquid return collection pipe 31.

[0025] Details: A heating unit is also provided on the coating chamber. The heating unit is used to heat the coating chamber. The heating unit includes heating rods 13 arranged in the coating chamber. The detection unit is composed of temperature control thermocouples 14 arranged on the coating chamber. The heat exchange unit is a chiller 40. The control unit is a PLC control device 50. The liquid outlet interface of the chiller 40 is connected to the inlet of the A water inlet valve 24 through an A connecting pipe 41. The liquid inlet interface of the chiller 40 is connected to the outlet of the B water inlet valve through a B connecting pipe 42. More specifically, the temperature control thermocouples are respectively arranged at various points in the vacuum chamber to accurately detect the temperature of each part of the vacuum chamber and feedback to the PLC control terminal (PLC control device 50). During specific operation, the liquid inlet distribution unit and the liquid outlet distribution unit can be installed in the water distribution box. 0.5-inch A ports are opened on the pipe surface of the A1 liquid inlet distribution pipe 21. An A union 25 is assembled at the A port. The other end of the A union 25 is installed with a 0.5-inch A switch joint 26. The other end of the A switch joint 26 is installed with a 0.5-inch A pipe joint 27. Each A pipe joint 27 is respectively connected and assembled with each A water inlet pipe 15. The inlet port of the A3 liquid inlet distribution pipe 22 is designed with a 1.5-inch port and connected to a 1.5-inch turbine water flow controller. The turbine water flow controller is of pulse output type, and its flow pulse signal output is connected to the PLC control terminal. The coating chamber is composed of a chamber body 10 and a chamber door body 11. Coating source devices 12 are respectively arranged on the chamber body 10 and the chamber door body 11. Each coating source device 12 has a group of B cooling channel units. A group of B cooling channel units are respectively connected to the A pipe joint 27 and the B pipe joint 37 on the liquid inlet distribution unit and the liquid return collection unit through a group of A water inlet pipes 15 and B return water pipes 16. The B pipe joint and the A pipe joint can specifically be faucets. The ball valve and the faucet switch can be adjusted manually by the operator.

[0026] The liquid inlet distribution unit and the liquid return collection unit with an L-shaped structure can facilitate installation and buffering. Since the temperature required for each coating layer is different, the coating chamber may need to be heated or cooled. Some coating layers, such as those on optical glass and plastics, can be coated at a very low temperature (room temperature is sufficient), but metal and rare metal coating layers require a temperature of at least 80 degrees Celsius or higher (for example, tungsten and gold coating layers need to be coated at about 500 degrees Celsius). The heating unit composed of heating rods can heat the coating chamber well to meet different coating requirements. A turbine water flow meter is set on the main path of the liquid inlet distribution unit to monitor whether the cooling water inflow meets the requirements; each branch of the liquid return collection unit corresponds to the cooling water channel branches on the coating chamber and each coating source device. The CKD water flow meter monitors whether there is water flowing out of this cooling water channel to monitor whether the cooling of each coating source device and the cooling chamber meets the requirements. If the CKD water flow meter does not detect the water flow in this branch, the functional components connected to this branch may overheat, short-circuit or burn out, which will damage the coating equipment and the coating source, achieving a reliable monitoring function.

[0027] On the pipe surface of the B1 liquid return collection pipe 31, 0.5-inch B ports are opened. At the B ports, B union joints 34 are assembled. At the other end of the B union joint 34, a 0.5-inch CKD water flow controller is installed. At the other end of the CKD water flow controller, a 0.5-inch B switch joint 35 with a switch is installed; at the outlet end of the B2 return collection pipe, a 1.5-inch end is set and connected to a 1.5-inch B return water valve 33. The signal outputs of each CKD water flow controller are connected to the PLC control terminal. The A cooling channel unit can be composed of cooling water channels or cooling water pipes welded to the coating chamber, and the B cooling channel unit can be composed of cooling water channels on each coating source. The A cooling channel unit and the B cooling channel unit can be implemented with reference to existing implementation methods. For the convenience of operators to distinguish each pipe body, further, the A connecting pipe 41 uses a red high-pressure resistant explosion-proof water pipe, and the B connecting pipe 42 uses a black high-pressure resistant explosion-proof water pipe. The A water inlet pipe 15 connecting the A cooling channel unit and the B cooling channel unit uses a blue transparent water pipe, and the B water return pipe 16 uses a white transparent water pipe.

[0028] To ensure the film quality and stability of the coating film, different coating processes require controlling different temperatures. In the above solution provided by the present utility model, through the water turbine flow controller on the total water flow path and the CKD water flow controllers arranged on each water flow branch path, the flow rate of the cooling water is accurately controlled, and the detected data signal is fed back to the PLC control terminal for the staff to refer to and operate and control. By regulating the water flow rate and the operating state of the heating unit, the temperature of the coating chamber is accurately controlled, thereby reliably discharging the heat generated in the coating chamber, preventing the vacuum state in the coating chamber from being damaged due to temperature rise, ensuring the coating environment in the coating chamber, prolonging the service life of the coating equipment and the coating source device 12, improving the stability and uniformity of the film layer, and ensuring the smooth progress of the coating process and meeting different production requirements.

[0029] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present utility model, several improvements and refinements can still be made, and these improvements and refinements should also be regarded as the protection scope of the present utility model. The structures, devices, and operation methods not specifically described and explained in the present utility model, unless otherwise specifically stated and limited, are implemented according to the conventional means in the art.

Claims

1. A cooling system for a vacuum ion coating device, characterized in that: It includes a liquid inlet distribution unit, a liquid outlet distribution unit and a heat exchange unit. Each coating source device is arranged on the coating chamber. The coating chamber is provided with an A cooling channel unit for fluid flow and for cooling the coating chamber. Each coating source device is respectively provided with a B cooling channel unit for fluid flow and for cooling the coating source device. The A cooling channel unit, the B cooling channel unit, the liquid inlet distribution unit, the liquid return collecting unit and the heat exchange unit form a flow path for the fluid to circulate. The liquid inlet distribution unit is provided with each liquid inlet joint assembly, and each liquid inlet joint assembly is respectively used for communicating and connecting with the liquid inlet of the A cooling channel unit and the B cooling channel unit. The liquid return collecting unit is provided with each liquid return joint assembly, and each liquid return joint assembly is respectively used for communicating and connecting with the liquid outlet of the A cooling channel unit and the B cooling channel unit. The heat exchange unit is arranged between the liquid return collecting unit and the liquid inlet distribution unit, and the heat exchange unit is used to reduce the temperature of the fluid. A regulating unit is also arranged on the flow path, and the regulating unit is used to regulate the flow rate or flow of the fluid. The coating chamber is also provided with a detection unit for detecting the temperature in the coating chamber. The detection unit transmits the detected signal to the control unit for analysis and processing, and the control unit regulates the operating state of each component according to the result of the analysis and processing.

2. The cooling system for a vacuum ion coating device according to claim 1, characterized in that: The liquid inlet distribution unit includes a vertically arranged A1 liquid inlet distribution pipe. The upper end of the A1 liquid inlet distribution pipe is arranged in a sealed state. Each liquid inlet distribution connection sub-unit is arranged at intervals along the height direction of the A1 liquid inlet distribution pipe. Each liquid inlet distribution connection sub-unit respectively includes each liquid inlet joint assembly arranged at intervals along the circumferential direction of the A1 liquid inlet distribution pipe.

3. The cooling system for a vacuum ion coating device according to claim 1, characterized in that: The liquid return collecting unit includes a vertically arranged B1 liquid return collecting pipe. The upper end of the B1 liquid return collecting pipe is arranged in a sealed state. Each liquid return collecting connection sub-unit is arranged at intervals along the height direction of the B1 liquid return collecting pipe. Each liquid return collecting connection sub-unit respectively includes each liquid return joint assembly arranged at intervals along the circumferential direction of the B1 liquid return collecting pipe.

4. The cooling system for a vacuum ion coating equipment according to claim 2, wherein: The liquid inlet joint assembly includes an A union arranged on the A1 liquid inlet distribution pipe. The A union is connected and communicated with one end of an A switch joint. The other end of the A switch joint is connected to an A pipe joint. The A pipe joint is connected and communicated with the liquid inlet of the A cooling channel unit or the B cooling channel unit through an A water inlet pipe.

5. The cooling system for a vacuum ion coating equipment according to claim 2, wherein: The liquid inlet distribution unit also includes a horizontally arranged A2 liquid inlet distribution pipe and an A3 liquid inlet distribution pipe. The A3 liquid inlet distribution pipe is connected and communicated with the lower end of the A1 liquid inlet distribution pipe through the A2 liquid inlet distribution pipe. The A2 liquid inlet distribution pipes are respectively perpendicular to the A1 liquid inlet distribution pipe and the A3 liquid inlet distribution pipe. An A flowmeter and an A water inlet valve are arranged on the front side of the water inlet end of the A3 liquid inlet distribution pipe.

6. The cooling system for a vacuum ion coating device according to claim 5, characterized in that: The A flowmeter is a turbine water flowmeter, and the A flowmeter is connected to the control unit. The A water inlet valve is a ball valve. The A1 liquid inlet distribution pipe, the A2 liquid inlet distribution pipe and the A3 liquid inlet distribution pipe are all square pipe bodies. The liquid inlet distribution connection sub-unit is composed of the liquid inlet joint assemblies respectively arranged on the three pipe surfaces of the A1 liquid inlet distribution pipe.

7. The cooling system for a vacuum ion coating equipment according to claim 3, characterized in that: The liquid return joint assembly includes a B union provided on the B1 liquid return manifold. The B union is connected in communication with one end of a B switch joint. The other end of the B switch joint is connected to one end of a B flow meter. The other end of the B flow meter is connected to a B pipe joint. The liquid outlet on the A cooling channel unit or the B cooling channel unit is connected in communication with the B pipe joint through a B return water pipe.

8. The cooling system for a vacuum ion coating equipment according to claim 7, wherein: The liquid return manifold unit further includes a horizontally arranged B2 liquid return manifold. The B1 liquid return manifold and the B2 liquid return manifold are connected in communication. The B1 liquid return manifold and the B2 liquid return manifold are arranged in an L shape. A B return water valve is provided at the rear side of the water outlet end of the B2 liquid return manifold.

9. The cooling system for a vacuum ion coating device according to claim 7, wherein: The B flow meter is a CKD water flow meter. The B flow meter is connected to the control unit. The B return water valve is a ball valve. The B1 liquid return manifold and the B2 liquid return manifold are respectively composed of square pipe bodies. The liquid return distribution and connection sub-unit is composed of liquid return joint assemblies respectively provided on three pipe surfaces of the B1 liquid return manifold.

10. The cooling system for a vacuum ion coating equipment according to claim 1, characterized in that: A heating unit is further provided on the coating chamber. The heating unit is used to heat the coating chamber. The heating unit includes each heating rod provided in the coating chamber. The detection unit is composed of each temperature control thermocouple provided on the coating chamber. The heat exchange unit is a chiller. The control unit is a PLC control device.

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