Double-sided coating carrier

Abstract

The utility model relates to a double-sided coating carrier, which comprises a supporting assembly and a bearing unit, the supporting assembly comprises two first supporting pieces which are oppositely arranged front and back and two second supporting pieces which are oppositely arranged left and right, and the two second supporting pieces are both arranged between the two first supporting pieces; the two opposite sides of the bearing unit are detachably connected with the two first supporting pieces respectively, the other two opposite sides of the bearing unit are detachably connected with the two second supporting pieces respectively, the bearing unit comprises a plurality of subunits, the peripheries of the subunits are closed, the subunits are through in the vertical direction, and each subunit comprises a bearing body and an annular boss. The annular boss comprises a body part convex part, the convex part is provided with an upper surface and a vertical surface, a distance is kept between the vertical surface of the convex part and the inner circumferential surface of the body part, and the silicon wafer is located at the distance. According to the carrier provided by the utility model, the annular boss is arranged, so that the silicon wafer can be conveniently fixed and positioned, the silicon wafer cannot displace when the carrier is driven, and a battery piece is prevented from falling off while the requirement of back coating is met.

Description

Technical Field

[0001] The utility model relates to a double-sided coating carrier. Background Art

[0002] In the manufacturing process of solar cells, a carrier is usually used to position and load silicon wafers and then send them into a PVD device for coating. Existing PVD carriers do not have the function of double-sided coating, which directly affects production efficiency; edge effects are generated during coating, and color difference problems are caused by the edge effects; the PVD carrier is of small size and has a small number of silicon wafer loading positions. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a double-sided coating carrier.

[0004] To achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0005] A double-sided coating carrier, comprising:

[0006] A support assembly, the support assembly includes two first support members arranged opposite to each other in the front and rear, and two second support members arranged opposite to each other in the left and right. Both of the two second support members are arranged between the two first support members, and a gap is maintained between the two second support members. The second support member is detachably connected to the first support member;

[0007] A loading unit, opposite sides of the loading unit are respectively detachably connected to the two first support members, and the other opposite sides of the loading unit are respectively detachably connected to the two second support members. The loading unit includes a plurality of sub-units. The sub-units are enclosed on all sides and penetrate in the up and down direction. The sub-unit includes a loading main body and an annular convex platform arranged on the inner peripheral surface of the loading main body. The annular convex platform includes a main body portion and a convex portion arranged on the main body portion. The convex portion has a connected upper surface and a vertical surface. A gap is maintained between the vertical surface of the convex portion and the inner peripheral surface of the main body portion, and the end of the silicon wafer is located at this gap; A gap is maintained between two adjacent loading units in the front and rear direction, and two adjacent loading units in the front and rear direction are connected by a connecting rod, and the connecting rod is connected to the second support member,

[0008] In some embodiments, the outermost connecting rod is located above the first support member and the loading unit; the connecting rod in the middle is located above the loading unit.

[0009] In some embodiments, a plurality of the second support members are provided, and the plurality of second support members extend in the left and right direction. A gap is maintained between two adjacent loading units in the left and right direction, and two adjacent loading units in the left and right direction are connected by the second support member.

[0010] In some embodiments, the upper surface of the convex portion extends obliquely upward away from the middle of the sub-unit from its bottom end to its upper end; the lower surface of the body portion extends obliquely downward away from the middle of the sub-unit from its upper end to its bottom end.

[0011] In some embodiments, the upper surface of the convex portion is arc-shaped; the lower surface of the body portion is arc-shaped.

[0012] In some embodiments, a recessed portion that recesses away from the middle of the sub-unit is provided at the vertex of the convex portion.

[0013] In some embodiments, the connecting rod has an upper side and a lower side that are oppositely arranged, a front side and a rear side that are oppositely arranged, and a left side and a right side that are oppositely arranged. First grooves that recess toward each other are provided on both the front side and the rear side. One end of the bearing unit is arranged in the first groove. Second grooves that recess toward each other are provided at both the left and right end portions. The front side, the rear side, and the lower side of the second groove are all open. One end of the first connecting block is arranged in the second groove.

[0014] In some embodiments, the first support member includes a frame and a sealing plate. The sealing plate is used to connect the frame and the bearing unit. An opening groove that recesses toward the sealing plate is provided on the side of the frame away from the sealing plate. The opening groove is used to connect with the conveying mechanism.

[0015] In some embodiments, the connecting rod is arranged parallel to the frame and the sealing plate. The outermost connecting rod is located above the sealing plate and the bearing unit. A gap is maintained between the sealing plate and one side of the bearing unit. The connecting rod is used to connect the sealing plate and the bearing unit.

[0016] In some embodiments, the second support member includes a support plate and a first connecting block. The support plate extends in the front-rear direction. A through hole that penetrates through its left and right ends is provided on the support plate. The first connecting block is arranged in the through hole, and opposite ends of the first connecting block respectively protrude a certain distance from opposite ends of the through hole. The first connecting block is connected to the connecting rod, and / or the first connecting block is connected to the bearing unit.

[0017] In some embodiments, the bearing unit and the sealing plate are both arranged on the first connecting block; corresponding mounting holes are provided on the first connecting block and the connecting rod. The first connecting block and the connecting rod are fixedly connected by installing fasteners in the mounting holes.

[0018] In some embodiments, the support plate includes a plate body and an extension portion. The extension portion is provided on the left side and / or the right side of the plate body. The upper surface of the extension portion is set lower than the upper surface of the plate body, and a lower surface portion of the carrier unit abuts against the upper surface of the extension portion.

[0019] In some embodiments, a plurality of first connection blocks are provided. The first connection blocks correspond to the perforations one by one, and the plurality of first connection blocks are arranged in sequence in the front-rear direction.

[0020] In some embodiments, the carrier further includes a reinforcing plate. The reinforcing plate is provided on a side of the support plate away from the carrier unit, and the reinforcing plate is connected to the first connection block.

[0021] In some embodiments, the carrier further includes a second connection block. The second connection block is used to connect the first support member and the second support member. The second connection block includes a block body and a protruding portion provided on the block body.

[0022] In some embodiments, corresponding mounting holes are provided on the protruding portion and the sealing plate, and the protruding portion and the sealing plate are connected by installing fasteners in the mounting holes; corresponding mounting holes are provided on the protruding portion and the reinforcing plate, and the protruding portion and the reinforcing plate are connected by installing fasteners in the mounting holes; corresponding mounting holes are provided on the second connection block, the support plate and the frame, and the second connection block is connected to the support plate and the frame by installing fasteners in the mounting holes.

[0023] Due to the application of the above technical solutions, the present utility model has the following advantages compared with the prior art:

[0024] The double-sided coating carrier provided by the present utility model is provided with an annular boss, which is convenient for fixing and positioning the silicon wafer. When the carrier is driven, the silicon wafer will not be displaced, preventing the battery chip from falling while meeting the requirements of back coating; the support assembly and the carrier unit are detachably connected, which is convenient for installing and disassembling the support assembly and the carrier unit, and also convenient for transportation and storage, occupying less space and having stronger versatility; a plurality of carrier units are provided, which can carry a plurality of silicon wafers to achieve large production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Attached Figure 1 is a structural diagram of the double-sided coating carrier provided by the present utility model from a first perspective (placing the silicon wafer);

[0026] Attached Figure 2 is Figure 1 an enlarged view of;

[0027] Attached Figure 3Structural diagram of the double-sided coating carrier provided by the present utility model from the second perspective (wafer not placed);

[0028] Appendix Figure 4 Structural diagram of the double-sided coating carrier provided by the present utility model from the third perspective (wafer and sealing plate not present);

[0029] Appendix Figure 5 Structural diagram of the double-sided coating carrier provided by the present utility model from the fourth perspective (wafer and connecting rod not present).

[0030] Appendix Figure 6 Structural diagram of the double-sided coating carrier provided by the present utility model with two loading units;

[0031] Appendix Figure 7 Structural diagram of one loading unit of the double-sided coating carrier provided by the present utility model from the first perspective;

[0032] Appendix Figure 8 Structural diagram of one loading unit of the double-sided coating carrier provided by the present utility model from the second perspective;

[0033] Appendix Figure 9 For Figure 8 Magnified view;

[0034] Appendix Figure 10 Structural diagram of the first support member of the double-sided coating carrier provided by the present utility model;

[0035] Appendix Figure 11 Structural diagram of the support plate of the double-sided coating carrier provided by the present utility model;

[0036] Appendix Figure 12 Structural diagram of the connecting rod of the double-sided coating carrier provided by the present utility model from the first perspective;

[0037] Appendix Figure 13 Structural diagram of the connecting rod of the double-sided coating carrier provided by the present utility model from the second perspective;

[0038] Appendix Figure 14 For Figure 13 Magnified view;

[0039] Appendix Figure 15 Structural diagram of the second connecting block of the double-sided coating carrier provided by the present utility model;

[0040] Appendix Figure 16 Another structural diagram of the double-sided coating carrier provided by the present utility model;

[0041] Appendix Figure 17 For Figure 16 Magnified view.

[0042] In the above figures:

[0043] 1 - Bearing unit, 111 - Upper surface of the main body, 112 - Lower surface of the main body, 113 - Upper surface of the convex part, 114 - Vertical surface of the convex part, 115 - Recessed part;

[0044] 2 - Frame; 3 - Sealing plate; 4 - Connecting rod, 41 - First groove, 42 - Second groove; 5 - Support plate, 51 - Plate body, 52 - Extension part; 6 - First connecting block; 7 - Reinforcing plate; 8 - Second connecting block, 81 - Block body, 82 - Protruding part; 9 - Fastener; 10 - Silicon wafer. Detailed implementation manner

[0045] The technical solutions of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative work shall fall within the protection scope of the present utility model.

[0046] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0047] See Figures 1 to 17 The double-sided coating carrier, the device includes a support assembly and a bearing unit, wherein:

[0048] The support assembly includes two first support members arranged opposite to each other front and back, and two second support members arranged opposite to each other left and right. Both of the two second support members are arranged between the two first support members. The second support members are detachably connected to the first support members. There is a gap between the two first support members, and there is a gap between the two second support members. The structure formed by connecting the two first support members and the two second support members is enclosed on all sides and through in the up and down directions.

[0049] The outer contour of the bearing unit 1 is square. The bearing unit 1 is arranged inside the support assembly. The opposite two sides of the bearing unit 1 are respectively detachably connected to the two first support members, and the other opposite two sides of the bearing unit 1 are respectively detachably connected to the two second support members, which is convenient for installing and disassembling the support assembly and the bearing unit 1, and also convenient for transportation and storage, occupying a smaller space and having stronger versatility.

[0050] The carrier unit 1 includes a plurality of sub-units. The four sides of the sub-unit are enclosed and there is a through-hole in the up-and-down direction, that is, a through-hole is provided. The sub-unit includes a carrier body and an annular boss provided on the inner peripheral surface of the carrier body. The annular boss is arranged in a complete circle around the inner periphery of the carrier body, and the carrier body and the annular boss are integrally formed. The annular boss includes a body portion and a convex portion provided on the body portion. Both the body portion and the convex portion are annular. The convex portion has an upper surface, a vertical surface and a lower surface. The vertical surface 114 of the convex portion connects the surface and the lower surface. The body portion has an upper surface, an inner peripheral surface and a lower surface. The inner peripheral surface of the body portion connects the upper surface and the lower surface. The lower surface of the convex portion is attached to the upper surface 111 of the body portion. There is a spacing between the vertical surface 114 of the convex portion and the inner peripheral surface of the body portion (that is, the part of the upper surface 111 of the body portion where the convex portion is not provided is exposed, and the distance between the vertical surface 114 of the convex portion and the middle of the sub-unit is greater than the distance between the inner peripheral surface of the body portion and the middle of the sub-unit). The edge of the silicon wafer 10 is arranged at this spacing, that is, the convex portion does not protrude beyond the body portion. The annular boss is provided to facilitate the fixing and positioning of the silicon wafer 10, and the silicon wafer 10 will not be displaced during the transmission of the carrier, preventing the battery chip from falling while satisfying the back coating.

[0051] In some embodiments, when the convex portion faces upward, the upper surface 113 of the convex portion extends obliquely upward away from the vertical surface from its bottom end to its upper end, that is, a chamfer is formed; the lower surface 112 of the body portion extends obliquely downward away from the middle of the sub-unit from its upper end to its bottom end, that is, a chamfer is formed. When the silicon wafer 10 is placed on the upper surface 111 of the body portion, the end of the silicon wafer 10 will not touch the upper surface 113 of the convex portion nor the lower surface 112 of the body portion. The double-sided chamfer design can effectively prevent the edge effect generated by double-sided coating and solve the color difference problem caused by the edge effect.

[0052] In some embodiments, the upper surface 113 of the convex portion is arc-shaped; the lower surface 112 of the body portion is arc-shaped.

[0053] In some embodiments, the spacing between the vertical surface 114 of the convex portion and the inner peripheral surface of the body portion ( Figure 9 as indicated by the arrow) is 0.1 - 0.8 mm, preferably 0.5 mm. When the silicon wafer 10 is placed on the upper surface 111 of the body portion, the spacing between the four end portions of the silicon wafer 10 and the corresponding vertical surfaces of the convex portion is 0.05 - 0.15 mm, preferably 0.1 mm. The upper surface 111 of the body portion is a horizontal plane, and the flatness is controlled within 0.2 mm.

[0054] In some embodiments, a recessed portion 115 that recesses away from the middle of the sub-unit is provided at the vertex of the convex portion, which facilitates the placement of the silicon wafer 10 and will not touch the silicon wafer 10.

[0055] In some embodiments, the first support member includes a frame 2 and a sealing plate 3. The sealing plate 3 is used to connect the frame 2 and the carrying unit 1. An opening groove recessed toward the sealing plate 3 is provided on the side of the frame 2 away from the sealing plate 3. The opening groove is used to connect with a conveying mechanism, and the conveying mechanism is used to drive the carrier to move. The sealing plate 3 is provided to prevent the conveying mechanism from touching the carrying unit and better protect the silicon wafer.

[0056] In some embodiments, the carrier further includes a connecting rod 4. The connecting rod 4 is arranged parallel to the frame 2 and the sealing plate 3. The connecting rod 4 is located above the sealing plate 3 and the carrying unit 1. The connecting rod 4 is used to connect the sealing plate 3 and the carrying unit 1; a gap is maintained between one side of the sealing plate 3 and the carrying unit 1, and the gap range is 0.05 - 0.15 mm (preferably 0.1 mm), which can effectively cope with deformation generated at high temperatures.

[0057] In some embodiments, the second support member includes a support plate 5 and a first connecting block 6. The support plate 5 extends in the front - rear direction. A through - hole penetrating through its left and right ends is provided on the support plate 5. The first connecting block 6 is in a cuboid shape. The first connecting block 6 is arranged in the through - hole, and opposite ends of the first connecting block 6 respectively protrude from opposite ends of the through - hole. The first connecting block 6 is perpendicular to the support plate 5. The first connecting block 6 is connected to the connecting rod 4, and / or the first connecting block 6 is connected to the carrying unit 1. The first connecting block 6 is provided to facilitate the connection of the first support member, the second support member, and the carrying unit 1.

[0058] The specific way of connecting the first connecting block 6 and the connecting rod 4 is as follows: Both the carrying unit 1 and the sealing plate 3 are arranged on the first connecting block 6. Corresponding mounting holes are provided on the first connecting block 6 and the connecting rod 4. The first connecting block 6 and the connecting rod 4 are fixedly connected by installing fasteners 9 in the mounting holes. The specific way of connecting the first connecting block 6 and the carrying unit 1 is as follows: Corresponding mounting holes are provided on the first connecting block 6 and the carrying unit 1. The first connecting block 6 and the carrying unit 1 are fixedly connected by installing fasteners 9 in the mounting holes.

[0059] A plurality of first connecting blocks 6 are provided. The plurality of first connecting blocks 6 are arranged in sequence in the front - rear direction. A plurality of through - holes are provided on the support plate 5. The first connecting blocks 6 correspond to the through - holes on the support plate 5 one by one.

[0060] In some embodiments, the support plate 5 includes a plate body 51 and an extension part 52. The left side and / or the right side of the plate body 51 is provided with the extension part 52. The upper surface of the extension part 52 is set lower than the upper surface of the plate body 51. The lower surface of the carrying unit 1 near the end part abuts against the upper surface of the extension part 52. The extension part 52 is provided to better fix the carrying unit 1. In some embodiments, the upper surface of the first connecting block 6 can be flush with the upper surface of the extension part 52.

[0061] In addition, the second support member further includes a reinforcing plate 7. The reinforcing plate 7 is disposed on the side of the support plate 5 away from the carrying unit 1. The reinforcing plate 7 is connected to the first connection block 6, and the lower surface of the reinforcing plate 7 abuts against the upper surface of the adjacent extension portion 52.

[0062] In this example, a plurality of carrying units 1 can be provided. The plurality of carrying units 1 extend in the front-rear direction, and / or the plurality of carrying units 1 extend in the left-right direction. A gap is maintained between two adjacent carrying units 1 in the front-rear direction, which can effectively cope with deformation caused by high temperature. Two adjacent carrying units 1 in the front-rear direction are connected by a connecting rod 4. A plurality of second support members are provided. The plurality of second support members extend in the left-right direction. Two adjacent carrying units 1 in the left-right direction are connected by the second support members, so that more carrying units can be installed to carry more wafers.

[0063] See Figures 13 - 14 , the connecting rod 4 has an upper side and a lower side which are oppositely arranged, a front side and a rear side which are oppositely arranged, and a left side and a right side which are oppositely arranged. First grooves 41 recessed towards each other are formed on both the front side and the rear side. One end of the carrying unit 1 is disposed in the first groove 41. Second grooves 42 recessed towards each other are formed on both the left and right end faces. The height of the second groove 42 is less than the height of the connecting rod 4. The front side, the rear side, and the lower side of the second groove 42 are all open. One end of the first connection block 6 is disposed in the second groove 42. In the assembled state, the upper surface of the connecting rod 4 is disposed higher than the upper surface of the first connection block 6.

[0064] In some embodiments, the carrier further includes a second connection block 8. The second connection block 8 is used to connect the first support member and the second support member. The second connection block 8 is in a convex shape. The second connection block 8 includes a block body 81 and a protruding portion 82 disposed on the block body 81. The protruding portion 82 is flush with the first connection block 6. The sealing plate 3 is disposed on the protruding portion 82 and the first connection block 6 adjacent to the sealing plate 3. Among them, corresponding mounting holes are formed on the protruding portion 82 and the sealing plate 3, and the protruding portion 82 and the sealing plate 3 are connected by installing fasteners in the mounting holes; corresponding mounting holes are formed on the protruding portion 82 and the reinforcing plate 7, and the protruding portion 82 and the reinforcing plate 7 are connected by installing fasteners in the mounting holes; corresponding mounting holes are formed on the block body 81 and the protruding portion 82 of the second connection block 8 and the support plate 5 and the frame 2, and the second connection block 8 is connected to the support plate 5 and the frame 2 by installing fasteners in the mounting holes.

[0065] In some embodiments, a plurality of carrying units 1 are provided, and a plurality of sub-units are provided. In another embodiment, 8 carrying units 1 are provided and 40 sub-units are provided. See Figure 16 See Figures 1 - 5 , 12 carrying units 1 are provided and 24 sub-units are provided.

[0066] In this example, the bearing unit 1, the frame 2, the sealing plate 3, the connecting rod 4, the support plate 5, the reinforcing plate 7, the first connecting block 6, and the second connecting block 8 are all made of 304 material, and the surface is sandblasted and cleaned to Sa3.

[0067] The carrier in this example is not limited to carrying silicon wafers, but can also be other sheet products.

[0068] The above embodiments are only used to illustrate the technical concept and features of the present invention. The purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A double-sided coating carrier, characterized in that, Including: A support component, the support component includes two first support members arranged opposite to each other in the front and rear directions, and two second support members arranged opposite to each other in the left and right directions. The two second support members are arranged between the two first support members, and a gap is maintained between the two second support members. The second support member is detachably connected to the first support member; A carrying unit, opposite sides of the carrying unit are respectively detachably connected to the two first support members, and the other opposite sides of the carrying unit are respectively detachably connected to the two second support members. The carrying unit includes a plurality of sub-units, the sub-units are enclosed on all sides and penetrate in the up and down directions. The sub-unit includes a carrying main body and an annular convex platform arranged on the inner peripheral surface of the carrying main body. The annular convex platform includes a main body portion and a convex portion arranged on the main body portion. The convex portion has a connected upper surface and a vertical surface. A spacing is maintained between the vertical surface of the convex portion and the inner peripheral surface of the main body portion. The end of the silicon wafer is located at this spacing; A gap is maintained between two adjacent carrying units in the front and rear directions. Two adjacent carrying units in the front and rear directions are connected by a connecting rod, and the connecting rod is connected to the second support member.

2. The double-sided coating carrier according to claim 1, characterized in that, The upper surface of the convex portion extends obliquely upward from its bottom end to its upper end in a direction away from the middle of the sub-unit; the lower surface of the main body portion extends obliquely downward from its upper end to its bottom end in a direction away from the middle of the sub-unit.

3. The double-sided coating carrier according to claim 1, wherein A recessed portion recessed in a direction away from the middle of the sub-unit is provided at the vertex of the convex portion.

4. The double-sided coating carrier according to claim 1, characterized in that, The first support member includes a frame and a sealing plate. The sealing plate is used to connect the frame and the carrying unit. An opening groove recessed in a direction close to the sealing plate is provided on the side of the frame away from the sealing plate. The opening groove is used to connect with a conveying mechanism; the connecting rod is arranged parallel to the frame and the sealing plate. The outermost connecting rod is located above the sealing plate and the carrying unit. A gap is maintained between the sealing plate and the carrying unit. The connecting rod is used to connect the sealing plate and the carrying unit.

5. The double-sided coating carrier according to claim 4, characterized in that, The second support member includes a support plate and a first connecting block. The support plate extends in the front and rear directions. A through hole penetrating through its left and right ends is provided on the support plate. The first connecting block is arranged in the through hole, and opposite ends of the first connecting block respectively extend out of opposite ends of the through hole. The first connecting block is connected to the connecting rod, and / or the first connecting block is connected to the carrying unit.

6. The double-sided coating carrier according to claim 5, characterized in that, The support plate includes a plate body and an extension portion. The extension portion is provided on the left side and / or the right side of the plate body. The upper surface of the extension portion is arranged at a lower position than the upper surface of the plate body. A part of the lower surface of the carrying unit abuts against the upper surface of the extension portion.

7. The double-sided coating carrier according to claim 5, characterized in that, The described connecting rod has an upper side and a lower side that are oppositely arranged, a front side and a rear side that are oppositely arranged, and a left side and a right side that are oppositely arranged. The front side and the rear side are both provided with first grooves that are recessed towards each other. One end of the carrying unit is arranged in the first groove. The left and right ends are both provided with second grooves that are recessed towards each other. The front side, the rear side, and the lower side of the second groove are all open. One end of the first connecting block is arranged in the second groove.

8. The double-sided coating carrier according to claim 5, characterized in that, The described vehicle further includes a reinforcing plate. The reinforcing plate is arranged on the side of the support plate away from the carrying unit. The reinforcing plate is connected to the first connecting block.

9. The double-sided coating carrier according to claim 1, wherein There are multiple second support members. The multiple second support members extend in the left-right direction. Two adjacent carrying units in the left-right direction are connected by the second support members.

10. The double-sided coating carrier according to claim 1, characterized in that, The described vehicle further includes a second connecting block. The second connecting block is used to connect the first support member and the second support member. The second connecting block includes a block body and a protruding portion arranged on the block body.

Images