Hydrostatic bearing and hydrostatic rotary table

Abstract

The utility model discloses a hydrostatic bearing and a hydrostatic rotary table. The hydrostatic bearing comprises a bearing body, a shaft core and a throttler. The shaft core comprises a front-section shaft core and a rear-section shaft core, a plurality of first static pressure cavities are formed between the peripheral surface of the front-section shaft core and the bearing body, and a plurality of second static pressure cavities are formed between the peripheral surface of the rear-section shaft core and the bearing body; the projections of two adjacent first static pressure cavities are at least partially overlapped with the projection of one second static pressure cavity; the number of the throttlers is multiple, the multiple throttlers are arranged on the outer circumferential face of the bearing body at intervals in the same circumferential direction, one part of the multiple throttlers communicate with the multiple first static pressure cavities in a one-to-one correspondence mode, and the other part of the multiple throttlers communicate with the multiple second static pressure cavities in a one-to-one correspondence mode. The problem that in the prior art, the position design of an oil film of a hydrostatic pressure rotary table is unreasonable, and the precision and stability of the hydrostatic pressure rotary table are affected can be solved.

Description

Technical Field

[0001] The present application relates to the technical field of processing equipment, and more particularly, to a hydrostatic bearing and a hydrostatic turntable. Background Art

[0002] A hydrostatic turntable is a turntable device that utilizes the principle of hydrostatic pressure to achieve support and torque transmission. In a hydrostatic turntable, lubricating oil or hydraulic oil is fed into the oil cavity through a pressure pipeline by an oil supply system. Under the action of pressure in the oil cavity, the oil forms a liquid hydrostatic oil film with a certain thickness. This oil film supports the moving part and provides support for torque transmission. The hydrostatic turntable has the advantages of small wear, high motion accuracy, long mean time between failures, small driving power, large bearing capacity, good vibration absorption, and stable motion. Therefore, it is widely used in fields that require high precision and stability, such as precision machining tools, semiconductor equipment, and optical equipment.

[0003] However, during the actual operation of the turntable, due to the influence of the workpiece shape, workpiece position, and cutting force, the supported part bears an overturning moment, which causes the oil film to be inclined to varying degrees. This inclination causes corresponding changes in the load-bearing performance of the hydrostatic turntable. In mild cases, it affects the machining quality of the workpiece, and in severe cases, it directly causes the supported part and the supporting part to scrape against each other, resulting in the hydrostatic turntable being unable to operate normally. In addition, the layout of the oil film position of the existing hydrostatic turntable is unreasonable, which affects the stability of the hydrostatic turntable. Summary of the Utility Model

[0004] The main purpose of the present application is to provide a hydrostatic bearing and a hydrostatic turntable to solve the problem that the position design of the oil film of the existing hydrostatic turntable is unreasonable, which affects the stability of the hydrostatic turntable.

[0005] According to one aspect of the present application, a hydrostatic bearing is provided, including:

[0006] A bearing body having a through hole;

[0007] A shaft core disposed through the through hole. The shaft core includes a front shaft core and a rear shaft core. The front shaft core and the rear shaft core are sequentially arranged along the thickness direction of the bearing body. And along the direction away from the rear shaft core, the cross-sectional area of the front shaft core gradually increases. Along the direction away from the front shaft core, the cross-sectional area of the rear shaft core gradually increases. There are a plurality of first static pressure cavities arranged at intervals between the outer peripheral surface of the front shaft core and the bearing body. There are a plurality of second static pressure cavities arranged at intervals between the outer peripheral surface of the rear shaft core and the bearing body. And in the projection along the thickness direction of the shaft core, the projections of two adjacent first static pressure cavities at least partially overlap with the projection of one of the second static pressure cavities.

[0008] Throttle, there are multiple throttles, and the multiple throttles are arranged at intervals along the same circumferential direction on the outer peripheral surface of the bearing body. A part of the multiple throttles is in one-to-one communication with the multiple first static pressure chambers, and another part of the multiple throttles is in one-to-one communication with the multiple second static pressure chambers. Wherein, the throttle is at least used to adjust the stiffness of the first static pressure chamber and the second static pressure chamber.

[0009] Furthermore, the shaft core further includes an adjustment part, and the adjustment part is arranged between the front shaft core and the rear shaft core. The adjustment part is at least used to adjust the gaps between the front shaft core and the bearing body, and between the rear shaft core and the bearing body.

[0010] Furthermore, the throttle includes:

[0011] A main body, the main body has a first side away from the bearing body and a second side close to the bearing body. A cavity is provided on the first side, a throttle boss is provided in the center of the cavity, an oil outlet hole is provided on the axis of the throttle boss, and the oil outlet hole extends from the first side to the second side. The second side is provided with an oil supply port, a first annular flow channel, a second annular flow channel, a first throttle channel and a second throttle channel. The first annular flow channel surrounds the outer periphery of the second annular flow channel and is coaxially arranged with the second annular flow channel. The first annular flow channel is communicated with the second annular flow channel, the oil supply port is communicated with the first annular flow channel, and the oil outlet hole is communicated with the second annular flow channel;

[0012] A cover plate, and the cover plate covers the first side;

[0013] A diaphragm, the diaphragm is arranged between the cover plate and the main body and is located in the cavity. A pressure stabilizing cavity is formed by surrounding between the diaphragm and the main body, and an adjustment cavity is formed by surrounding between the diaphragm and the cover plate;

[0014] Wherein, both ends of the first throttle channel are respectively communicated with the first annular flow channel and the pressure stabilizing cavity, and both ends of the second throttle channel are respectively communicated with the first annular flow channel and the adjustment cavity.

[0015] Furthermore, the hydrostatic bearing further includes a base, the base is connected to the bearing body, and the base is provided with a main oil inlet flow channel;

[0016] The bearing body is provided with a first oil flow passage, a second oil flow passage, and a plurality of oil inlets. The first oil flow passage is communicated with the main oil inlet flow passage, the second oil flow passage is communicated with the first oil flow passage, the plurality of oil inlets are arranged at intervals along the circumferential direction of the bearing body, and are connected to the plurality of oil supply ports in a one-to-one correspondence, and two adjacent oil inlets are communicated through the second oil flow passage.

[0017] Further, a support plane is provided on one side of the base close to the bearing body, and the included angle A between the support plane and the first plane where the base is located is greater than 0° and less than or equal to 45°.

[0018] Further, the bearing body is provided with a plurality of oil outlets and a plurality of oil flow passages. The plurality of oil outlets are arranged at intervals along the circumferential direction of the bearing body, and are connected to the oil outlet holes of the plurality of throttlers in a one-to-one correspondence. The plurality of oil flow passages are connected to the plurality of oil outlets in a one-to-one correspondence, and a part of the plurality of oil flow passages is communicated with the plurality of first static pressure chambers in a one-to-one correspondence, and another part of the plurality of oil flow passages is communicated with the plurality of second static pressure chambers in a one-to-one correspondence.

[0019] Further, the oil flow passage communicated with the first static pressure chamber includes a first oil outlet section and a second oil outlet section. The first oil outlet section extends from the outer peripheral surface of the bearing body towards the inner side of the bearing body, and opposite ends of the second oil outlet section are respectively communicated with the first oil outlet section and the first static pressure chamber, and a first predetermined angle is formed between the second oil outlet section and the first oil outlet section;

[0020] The oil flow passage communicated with the second static pressure chamber includes a third oil outlet section and a fourth oil outlet section. The third oil outlet section extends from the outer peripheral surface of the bearing body towards the inner side of the bearing body, and opposite ends of the fourth oil outlet section are respectively communicated with the third oil outlet section and the second static pressure chamber, and a second predetermined angle is formed between the fourth oil outlet section and the third oil outlet section.

[0021] Further, the hydrostatic bearing further includes a base, and the base is provided with a main oil return passage;

[0022] The bearing body is provided with a first sub-oil return passage and a second sub-oil return passage. The first sub-oil return passage includes a first oil return section and a second oil return section. The first oil return section extends from the outer peripheral surface of the bearing body towards the direction of the shaft core and is connected to the outer peripheral surface of the shaft core. Opposite ends of the second oil return section are respectively communicated with the first oil return section and the main oil return passage. Opposite ends of the second sub-oil return passage are respectively communicated with the rear section of the shaft core and the main oil return passage.

[0023] Further, the thickness T1 of the oil film in the first hydrostatic pressure chamber satisfies the relational expression: 0.02 mm ≤ T1 ≤ 0.03 mm;

[0024] The thickness T2 of the oil film in the second hydrostatic pressure chamber satisfies the relational expression: 0.02 mm ≤ T2 ≤ 0.03 mm.

[0025] On the other hand, the present application also provides a hydrostatic turntable, which includes the above-mentioned hydrostatic bearing. The hydrostatic turntable further includes a workbench and a base. The hydrostatic bearing is rotatably arranged on the base, and the workbench is installed on the base and rotates under the drive of the hydrostatic bearing.

[0026] In the present application, when the hydrostatic bearing is working, after the external oil circuit enters the hydrostatic bearing and is connected to the throttle, the oil flows through the throttle and into the first hydrostatic pressure chamber and the second hydrostatic pressure chamber respectively, so that an oil film is generated between the bearing body and the shaft core. When the supported member of the hydrostatic turntable is skewed due to the applied overturning moment, resulting in the inclination of the oil film, the throttle can automatically adjust the stiffness of the oil film according to the force condition of the oil film to ensure that the thickness of the oil film in the first hydrostatic pressure chamber and the second hydrostatic pressure chamber hardly changes, effectively improving the rigidity of the oil film. At the same time, since the projections of two adjacent first hydrostatic pressure chambers in the present application at least partially overlap with the projection of one of the second hydrostatic pressure chambers (that is, multiple first hydrostatic pressure chambers and multiple second hydrostatic pressure chambers are asymmetrically arranged), thus, when the supported member of the hydrostatic turntable is skewed in different directions due to the applied overturning moment, the oil films in the first hydrostatic pressure chamber and the second hydrostatic pressure chamber can quickly adjust the oil film thickness under the action of the throttle to adapt to the new load conditions, effectively ensuring the stability of the operation of the hydrostatic bearing. Description of the Drawings

[0027] The drawings described herein are used to provide a further understanding of the present application and form a part of the present application. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application. In the drawings:

[0028] Figure 1 is a cross-sectional view of the hydrostatic bearing disclosed in the embodiment of the present application;

[0029] Figure 2 is a cross-sectional view of the bearing body having a first oil flow passage and a second oil flow passage disclosed in the embodiment of the present application;

[0030] Figure 3 is a structural schematic diagram of the bearing body without a throttle installed disclosed in the embodiment of the present application;

[0031] Figure 4 is a cross-sectional view of the bearing body having an oil outlet passage disclosed in the embodiment of the present application;

[0032] Figure 5 A cross-sectional view of a bearing body having a first sub-oil return passage disclosed in an embodiment of the present application;

[0033] Figure 6 A cross-sectional view of a base having a main oil inlet passage disclosed in an embodiment of the present application;

[0034] Figure 7 A cross-sectional view of a base having a main oil return passage disclosed in an embodiment of the present application;

[0035] Figure 8 A schematic structural view of a throttle disclosed in an embodiment of the present application;

[0036] Figure 9 An exploded view of a throttle disclosed in an embodiment of the present application;

[0037] Figure 10 A schematic structural view of a second side surface of a main body of a throttle disclosed in an embodiment of the present application;

[0038] Figure 11 A schematic structural view of a cover plate disclosed in an embodiment of the present application;

[0039] Figure 12 A schematic structural view of a hydrostatic turntable disclosed in an embodiment of the present application;

[0040] Figure 13 A cross-sectional view of a hydrostatic turntable disclosed in an embodiment of the present application.

[0041] Among them, the above-mentioned drawings include the following reference numerals:

[0042] 10. Bearing body; 101. Through hole; 11. First oil flow channel; 111. First oil passage section; 112. Second oil passage section; 12. Second oil flow channel; 13. Oil inlet; 14. Oil outlet; 15. Oil outlet flow channel; 151. First oil outlet section; 152. Second oil outlet section; 153. Third oil outlet section; 154. Fourth oil outlet section; 16. First branch and return oil flow channel; 161. First return oil section; 162. Second return oil section; 20. Shaft core; 201. First static pressure cavity; 202. Second static pressure cavity; 21. Front shaft core; 22. Rear shaft core; 23. Adjusting part; 30. Throttle; 31. Main body; 3101. First side; 3102. Second side; 311. Cavity; 312. Throttle boss; 313. Oil outlet hole; 314. Oil supply port; 315. First annular flow channel; 316. Second annular flow channel; 317. First throttle channel; 318. Second throttle channel; 32. Cover plate; 321. Protrusion; 322. Groove; 33. Diaphragm; 34. Bolt; 40. Base; 401. Support plane; 41. Main oil inlet flow channel; 42. Main oil return flow channel; 50. Hydrostatic bearing; 60. Workbench; 70. Base. Detailed implementation manners

[0043] It should be noted that, without conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The following will describe the present application in detail with reference to the drawings and in combination with the embodiments.

[0044] It should be noted that the terms used herein are only for describing the specific implementation manners and are not intended to limit the exemplary implementation manners according to the present application. As used herein, unless otherwise clearly specified in the context, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "comprise" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or their combinations.

[0045] Unless otherwise specifically stated, the relative arrangements of the components and steps, numerical expressions and values set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that for the convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationship. Technologies, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods and devices should be regarded as part of the authorized specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0046] As mentioned in the background art, in actual operation, the existing hydrostatic turntable is affected by various factors, causing the supported member to bear an overturning moment, resulting in corresponding changes in the load-bearing performance of the hydrostatic turntable, thereby having an adverse impact on the machining quality of the workpiece. Moreover, the oil film position of the existing hydrostatic turntable is unreasonably arranged, reducing the accuracy and stability of the hydrostatic turntable. Therefore, the inventor of the present application has designed a new type of hydrostatic bearing, which can solve the problem that the position design of the oil film of the existing hydrostatic turntable in the prior art is unreasonable and affects the stability of the hydrostatic turntable. The hydrostatic bearing of the present application will be introduced in detail below with reference to the accompanying drawings.

[0047] See Figures 1 to 11 As shown, according to an embodiment of the present application, a hydrostatic bearing 50 is provided. The hydrostatic bearing 50 includes a bearing body 10, a shaft core 20, and a restrictor 30.

[0048] Among them, the bearing body 10 has a through hole 101; the shaft core 20 is inserted into the through hole 101. The shaft core 20 includes a front section shaft core 21 and a rear section shaft core 22. The front section shaft core 21 and the rear section shaft core 22 are sequentially arranged along the thickness direction of the bearing body 10. And along the direction away from the rear section shaft core 22, the cross-sectional area of the front section shaft core 21 gradually increases. Along the direction away from the front section shaft core 21, the cross-sectional area of the rear section shaft core 22 gradually increases. There are a plurality of first hydrostatic chambers 201 arranged at intervals between the outer peripheral surface of the front section shaft core 21 and the bearing body 10. There are a plurality of second hydrostatic chambers 202 arranged at intervals between the outer peripheral surface of the rear section shaft core 22 and the bearing body 10. And within the projection along the thickness direction of the shaft core 20, the projections of two adjacent first hydrostatic chambers 201 and the projection of one of the second hydrostatic chambers 202 at least partially overlap; the restrictor 30 includes a plurality of restrictors 30, and the plurality of restrictors 30 are arranged at intervals along the same circumferential direction on the outer peripheral surface of the bearing body 10. And a part of the plurality of restrictors 30 is in one-to-one communication with the plurality of first hydrostatic chambers 201, and another part of the plurality of restrictors 30 is in one-to-one communication with the plurality of second hydrostatic chambers 202. Among them, the restrictor 30 is at least used to adjust the stiffness of the first hydrostatic chamber 201 and the second hydrostatic chamber 202. It should be noted that the "thickness direction of the bearing body 10" in this embodiment is the Figure 1 direction indicated by the letter X in the attached drawings; the "cross-sectional area of the front section shaft core 21" and the "cross-sectional area of the rear section shaft core 22" in this embodiment refer to the area of the cross-section obtained by cutting the front section shaft core 21 / rear section shaft core 22 along the direction perpendicular to the thickness direction of the bearing body 10.

[0049] Exemplarily, the "first hydrostatic chamber 201" and the "second hydrostatic chamber 202" in this embodiment can be set to two, or can be set to three or more. The attached drawings of the present application Figure 4The situation where both the first static pressure chamber 201 and the second static pressure chamber 202 are provided with five is shown. Optionally, the "throttle 30" in this embodiment can be provided with two, or can be provided with three or more. The appendix of this application Figure 2 The situation where the throttle 30 is provided with ten is shown.

[0050] In this embodiment, when the hydrostatic bearing 50 is working, after the external oil circuit enters the hydrostatic bearing 50 and is connected to the throttle 30, the oil flows into the first static pressure chamber 201 and the second static pressure chamber 202 respectively through the throttle 30, so that an oil film is generated between the bearing body 10 and the shaft core 20. When the supported part of the hydrostatic turntable is skewed due to the applied overturning moment, resulting in the inclination of the oil film, the throttle 30 can automatically adjust the stiffness of the oil film according to the force condition of the oil film to ensure that the thickness of the oil film in the first static pressure chamber 201 and the second static pressure chamber 202 hardly changes, effectively improving the rigidity of the oil film. At the same time, since the projections of two adjacent first static pressure chambers 201 in this embodiment at least partially overlap with the projection of one of the second static pressure chambers 202 (that is, multiple first static pressure chambers 201 and multiple second static pressure chambers 202 are asymmetrically arranged), thus, when the supported part of the hydrostatic turntable is skewed in different directions due to the applied overturning moment, the oil films in the first static pressure chamber 201 and the second static pressure chamber 202 can both quickly adjust the oil film thickness under the action of the throttle 30 to adapt to the new load conditions, effectively ensuring the stability of the operation of the hydrostatic bearing 50. In addition, when multiple first static pressure chambers 201 and multiple second static pressure chambers 202 are asymmetrically arranged, multiple throttles 30 can be arranged at intervals along the same circumferential direction on the outer peripheral surface of the bearing body 10, so as to ensure that multiple throttles 30 can independently control their corresponding first static pressure chambers 201 and second static pressure chambers 202, and further the rigidity of the oil films in the first static pressure chamber 201 and the second static pressure chamber 202 can be adjusted through the throttles 30.

[0051] In addition, in this embodiment, in order to make the oil film fully contact with the shaft core 20, the first static pressure chamber 201 is arranged between the outer peripheral surface of the front shaft core 21 and the bearing body 10, and the second static pressure chamber 202 is arranged between the outer peripheral surface of the rear shaft core 22 and the bearing body 10. At the same time, for the convenience of assembly, the shaft core 20 in this embodiment is designed into two sections, namely the front shaft core 21 and the rear shaft core 22.

[0052] Further, as shown in Figure 1 the shaft core 20 in this embodiment further includes an adjustment part 23. The adjustment part 23 is arranged between the front shaft core 21 and the rear shaft core 22, and the adjustment part 23 is at least used to adjust the gaps between the front shaft core 21 and the bearing body 10, and between the rear shaft core 22 and the bearing body 10.

[0053] Specifically, the adjustment part 23 in this embodiment can adjust the distance between the front shaft core 21 and the rear shaft core 22, so as to change the gap between the front shaft core 21 and the bearing body 10 and the gap between the rear shaft core 22 and the bearing body 10, thereby changing the oil film thickness and the stiffness of the oil film in the gap. Exemplarily, the adjustment part 23 in this embodiment includes an adjustment pad, which has a variety of different models, and the thicknesses of the adjustment pads of multiple different models are all different. The adjustment pads of multiple different models can be selectively installed between the front shaft core 21 and the rear shaft core 22 according to actual usage requirements.

[0054] That is to say, when assembling the hydrostatic bearing 50, the thickness of the oil film can be appropriately adjusted according to the set rotational speed of the shaft core 20. When the rotational speed of the shaft core 20 is fast, the force exerted by the shaft core 20 on the oil films in the first static pressure cavity 201 and the second static pressure cavity 202 is large. At this time, an adjustment pad with a smaller thickness can be assembled to ensure the stiffness of the oil film; when the rotational speed of the shaft core 20 is slow, the force exerted by the shaft core 20 on the oil films in the first static pressure cavity 201 and the second static pressure cavity 202 is small. At this time, an adjustment pad with a thicker thickness can be assembled to ensure that there is no mechanical contact between the shaft core 20 and the bearing body 10, thereby effectively ensuring the accuracy of the hydrostatic bearing 50.

[0055] Further, as shown in Figures 8 to 10 In this embodiment, the restrictor 30 includes a main body 31, a cover plate 32 and a diaphragm 33. Among them, the main body 31 has a first side surface 3101 far from the bearing body 10 and a second side surface 3102 close to the bearing body 10. A cavity 311 is provided on the first side surface 3101, a throttling boss 312 is provided in the center of the cavity 311, and an oil outlet hole 313 is provided on the axis of the throttling boss 312. The oil outlet hole 313 extends from the first side surface 3101 to the second side surface 3102. A fuel supply port 314, a first annular flow channel 315, a second annular flow channel 316, a first throttling channel 317 and a second throttling channel 318 are provided on the second side surface 3102. The first annular flow channel 315 surrounds the outer periphery of the second annular flow channel 316 and is coaxially arranged with the second annular flow channel 316. The first annular flow channel 315 is communicated with the second annular flow channel 316, the fuel supply port 314 is communicated with the first annular flow channel 315, and the oil outlet hole 313 is communicated with the second annular flow channel 316; the cover plate 32 is covered on the first side surface 3101; the diaphragm 33 is arranged between the cover plate 32 and the main body 31 and is located in the cavity 311. A pressure stabilizing cavity is formed by surrounding between the diaphragm 33 and the main body 31, and an adjustment cavity is formed by surrounding between the diaphragm 33 and the cover plate 32; both ends of the first throttling channel 317 are respectively communicated with the first annular flow channel 315 and the pressure stabilizing cavity, and both ends of the second throttling channel 318 are respectively communicated with the first annular flow channel 315 and the adjustment cavity. Exemplarily, the diaphragm 33 in this embodiment can be a metal sheet or other structures.

[0056] Specifically, in this embodiment, the restrictor 30 is a feedback-type restrictor 30. During actual operation, when the hydraulic oil enters from the oil supply port 314: one part of the hydraulic oil enters the first annular flow channel 315, then enters the pressure stabilizing cavity from the first annular flow channel 315 and enters the oil outlet hole 313 through the second annular flow channel 316. The hydraulic oil flowing out of each oil outlet hole 313 supplies oil to the first static pressure cavity 201 and the second static pressure cavity 202 respectively; the other part of the hydraulic oil enters the adjustment cavity from the first annular flow channel 315 through the second throttle channel 318. When no other load is set on the bearing body 10, for example, when the shaft core 20 does not rotate, the shaft core 20 or the bearing body 10 does not apply pressure to the oil film, and the pressure Pr of the oil outlet hole 313 is relatively small. The oil pressure in the pressure stabilizing cavity is less than the oil pressure in the adjustment cavity. The diaphragm 33 is pressed and bent downward, and the gap between the throttle boss 312 and the diaphragm 33 is 0, and the flow rate of the oil outlet hole 313 is the smallest; when a load is set on the bearing body 10, under the pressure applied by the load, for example, when the shaft core 20 rotates, the shaft core 20 or the bearing body 10 applies pressure to the oil film, and the oil pressures in the first static pressure cavity 201 and the second static pressure cavity 202 increase, causing the oil in the pressure stabilizing cavity to increase correspondingly. The pressure in the adjustment cavity is less than the pressure in the pressure stabilizing cavity, and the original balance of the restrictor 30 is broken. The diaphragm 33 bends towards the cover plate 32, and the gap between the diaphragm 33 and the throttle boss 312 becomes larger. The hydraulic oil in the pressure stabilizing cavity can flow into the oil outlet hole 313 through the gap between the throttle boss 312 and the diaphragm 33. Then, the hydraulic oil of each restrictor 30 flows into the first static pressure cavity 201 and the second static pressure cavity 202 respectively, finally realizing feedback adjustment.

[0057] That is to say, when the load pressure on the bearing body 10 changes, the diaphragm 33 under the force will deform correspondingly. The volume in the pressure stabilizing cavity changes with the change of the diaphragm 33, playing a role in controlling the flow rate of the oil outlet hole 313. The greater the load pressure, the greater the flow rate, so that the change in the oil film thickness is very small, with higher oil film rigidity, and further ensuring that the hydrostatic bearing 50 connected to the restrictor 30 has high motion accuracy requirements.

[0058] Furthermore, as shown in Figure 11 As shown, one end of the cover plate 32 in this embodiment close to the main body 31 is provided with a protrusion 321. The protrusion 321 is inserted into the cavity 311. The end face of the protrusion 321 close to the main body 31 is provided with a spiral groove 322. When the hydraulic oil enters from the second throttle channel 318, it will flow along the spiral groove 322. Optionally, the center of the spiral groove 322 in this embodiment is located on the axis of the throttle boss 312. When the hydraulic oil enters the spiral groove 322, it is convenient to apply pressure to the diaphragm 33.

[0059] Specifically, in this embodiment, the cover plate 32 and the main body 31 are fixedly connected by bolts 34, and a sealing ring is provided between the cover plate 32 and the main body 31, which is convenient for sealing the gap between the cover plate 32 and the main body 31 to prevent hydraulic oil from leaking.

[0060] Further, referring to Figure 6 As shown, the hydrostatic bearing 50 in this embodiment further includes a base 40, the base 40 is connected to the bearing body 10, and the base 40 is provided with a main oil inlet flow channel 41; the bearing body 10 is provided with a first oil passing flow channel 11, a second oil passing flow channel 12 and a plurality of oil inlets 13. The first oil passing flow channel 11 is communicated with the main oil inlet flow channel 41, the second oil passing flow channel 12 is communicated with the first oil passing flow channel 11, and the plurality of oil inlets 13 are arranged at intervals along the circumferential direction of the bearing body 10 and are respectively connected to a plurality of oil supply ports 314 in one-to-one correspondence, and two adjacent oil inlets 13 are communicated through the second oil passing flow channel 12. Optionally, the "oil inlet 13" in this embodiment can be set to two, or can be set to three or more. The attached Figure 3 of the present application shows the case when the oil inlet 13 is set to ten.

[0061] Specifically, the external oil circuit is connected to the main oil inlet flow channel 41. After the oil enters the main oil inlet flow channel 41, it is transported to the first oil passing flow channel 11, and then is divided into two paths of oil and flows into the second oil passing flow channels 12 respectively through the first oil passing flow channel 11. The oil in the second oil passing flow channels 12 then flows into each throttle 30. The first oil passing flow channel 11 and the second oil passing flow channel 12 in this embodiment are both opened in the bearing body 10. Compared with the existing hydrostatic bearing, the hydrostatic bearing 50 in this embodiment has a compact structure, and there is no interference between the plurality of second oil passing flow channels 12. It is worth mentioning that the first oil passing flow channel 11 in this embodiment includes a first oil passing section 111 and a second oil passing section 112. Among them, the first oil passing section 111 extends from the outer peripheral surface of the bearing body 10 towards the inner side of the bearing body 10, and the second oil passing section 112 is arranged in the bearing body 10 and is communicated with the first oil passing section 111 and the main oil inlet flow channel 41. When the hydrostatic bearing 50 is in use, the opening of the first oil passing section 111 of the first oil passing flow channel 11 on the bearing body 10 needs to be blocked with an oil plug to prevent the oil from leaking through the opening of the first oil passing section 111 of the first oil passing flow channel 11. It can be understood that the main oil inlet flow channel 41 in this embodiment is connected to the hydraulic station through a hydraulic joint and a hydraulic pipeline to provide hydraulic oil through the hydraulic station.

[0062] Further, referring to Figure 6As shown, a support plane 401 is provided on one side of the base 40 in this embodiment close to the bearing body 10. The angle A between the support plane 401 and the first plane where the base 40 is located is greater than 0° and less than or equal to 45°. That is to say, the angle A between the support plane 401 and the first plane where the base 40 is located in this embodiment satisfies the relationship: 0° < A ≤ 45°. For example, A can be 1°, 2°, 5°, 7°, 10°, 15°, 20°, 25°, 30°, 35°, 40°, 45°, etc. When the angle A between the support plane 401 and the first plane where the base 40 is located satisfies the above relationship, it is convenient for the hydraulic oil to flow back into the main oil return passage 42, promoting smooth oil return. When the angle A between the support plane 401 and the first plane where the base 40 is located is greater than 45°, the support plane 401 is too inclined, reducing the structural strength of the base 40.

[0063] Furthermore, referring to Figure 4 As shown, the bearing body 10 in this embodiment is provided with a plurality of oil outlets 14 and a plurality of oil flow passages 15. The plurality of oil outlets 14 are arranged at intervals along the circumferential direction of the bearing body 10 and are connected to the oil outlet holes 313 of the plurality of restrictors 30 in one-to-one correspondence. The plurality of oil flow passages 15 are connected to the plurality of oil outlets 14 in one-to-one correspondence, and a part of the plurality of oil flow passages 15 is communicated with the plurality of first static pressure chambers 201 in one-to-one correspondence, and another part of the plurality of oil flow passages 15 is communicated with the plurality of second static pressure chambers 202 in one-to-one correspondence. Optionally, the "oil flow passage 15" in this embodiment can be set to two, or can be set to three or more. The present application does not make specific limitations here. The number of oil flow passages 15 can be set according to the number of the first static pressure chambers 201, the second static pressure chambers 202, and the restrictors 30.

[0064] Specifically, the oil in this embodiment is divided into two paths of oil after flowing into the oil supply port 314 from the second oil flow passage 12. One path of oil enters the first annular flow passage 315, enters the pressure stabilizing chamber from the first annular flow passage 315 and flows into the oil outlet hole 313 through the second annular flow passage 316. At this time, the oil flowing out of the oil outlet hole 313 will flow into the oil flow passage 15 and then flow from the oil flow passage 15 to the first static pressure chamber 201 or the second static pressure chamber 202. The oil flow passage 15 in this embodiment is opened in the bearing body 10, with a simple structure and convenient processing.

[0065] Specifically, referring to Figure 4As shown in the figure, the oil outlet flow channel 15 communicating with the first static pressure chamber 201 in this embodiment includes a first oil outlet section 151 and a second oil outlet section 152. The first oil outlet section 151 extends from the outer peripheral surface of the bearing body 10 towards the inner side of the bearing body 10. Opposite ends of the second oil outlet section 152 are respectively communicated with the first oil outlet section 151 and the first static pressure chamber 201, and there is a first predetermined angle between the second oil outlet section 152 and the first oil outlet section 151. It can be understood that the "first predetermined angle" in this embodiment can be set to 10°, 20°, 40°, 60°, 80°, 100°, 120°, 140°, 160°, 180°, etc. The specific value can be set according to actual processing requirements, and the present application does not make specific limitations here.

[0066] Specifically, in this embodiment, the oil fluid flows into the first oil outlet section 151 through the oil outlet hole 313 of the throttle 30, then is transported to the second oil outlet section 152, and then supplies oil to the first static pressure chamber 201 through the second oil outlet section 152. The settings of the first oil outlet section 151 and the second oil outlet section 152 in this embodiment reduce the processing difficulty of opening channels in the bearing body 10 and save manufacturing costs.

[0067] Specifically, referring to Figure 4 As shown in the figure, the oil outlet flow channel 15 communicating with the second static pressure chamber 202 in this embodiment includes a third oil outlet section 153 and a fourth oil outlet section 154. The third oil outlet section 153 extends from the outer peripheral surface of the bearing body 10 towards the inner side of the bearing body 10. Opposite ends of the fourth oil outlet section 154 are respectively communicated with the third oil outlet section 153 and the second static pressure chamber 202, and there is a second predetermined angle between the fourth oil outlet section 154 and the third oil outlet section 153. It can be understood that the "second predetermined angle" in this embodiment can be set to 10°, 20°, 40°, 60°, 80°, 100°, 120°, 140°, 160°, 180°, etc. The specific value can be set according to actual processing requirements, and the present application does not make specific limitations here.

[0068] Specifically, in this embodiment, the oil fluid flows into the third oil outlet section 153 through the oil outlet hole 313 of the throttle 30, then is transported to the fourth oil outlet section 154, and then supplies oil to the second static pressure chamber 202 through the fourth oil outlet section 154. The settings of the third oil outlet section 153 and the fourth oil outlet section 154 in this embodiment reduce the processing difficulty of opening channels in the bearing body 10 and save manufacturing costs.

[0069] Furthermore, referring to Figure 5 and Figure 7As shown in the figure, the hydrostatic bearing 50 in this embodiment further includes a base 40, and the base 40 is provided with a main oil return flow channel 42; the bearing body 10 is provided with a first sub-oil return flow channel 16 and a second sub-oil return flow channel (not shown in the attached drawing). The first sub-oil return flow channel 16 includes a first oil return section 161 and a second oil return section 162. The first oil return section 161 extends from the outer peripheral surface of the bearing body 10 towards the axis 20 and is connected to the outer peripheral surface of the axis 20. The two opposite ends of the second oil return section 162 are respectively communicated with the first oil return section 161 and the main oil return flow channel 42. The two opposite ends of the second sub-oil return flow channel are respectively communicated with the rear section axis 22 and the main oil return flow channel 42.

[0070] Specifically, since the oil fluid in this embodiment circulates, the oil fluid overflowing from the first hydrostatic cavity 201 will flow into the first sub-oil return flow channel 16, and then return to the main oil return flow channel 42 of the base 40 through the first sub-oil return flow channel 16, and then flow into the hydraulic oil tank; the oil fluid overflowing from the upper half of the second hydrostatic cavity 202 will also flow into the first sub-oil return flow channel 16, while the oil fluid overflowing from the lower half will flow into the main oil return flow channel 42 of the base 40 through the second sub-oil return flow channel, and then flow into the hydraulic oil tank. In this embodiment, dividing the first sub-oil return flow channel 16 into the first oil return section 161 and the second oil return section 162 can reduce the processing difficulty and save the manufacturing cost. It is worth mentioning that when the hydrostatic bearing 50 is in use, the opening of the first oil return section 161 needs to be blocked with an oil plug or a plug to prevent the oil fluid from leaking out through the opening of the first sub-oil return flow channel 16. It can be understood that the main oil return flow channel 42 in this embodiment is connected to the hydraulic oil tank of the hydraulic station.

[0071] Furthermore, the thickness T1 of the oil film in the first hydrostatic cavity 201 in this embodiment satisfies the relational expression: 0.02 mm ≤ T1 ≤ 0.03 mm. For example, T1 can be 0.02 mm, 0.022 mm, 0.024 mm, 0.025 mm, 0.026 mm, 0.028 mm, 0.03 mm, etc. Specifically, the existence of the oil film ensures that the frictional resistance is extremely small when the axis 20 rotates. When T1 is less than 0.02 mm, the thickness of the oil film in the first hydrostatic cavity 201 is too thin, resulting in a reduction in the gap between the bearing body 10 and the axis 20, and mechanical contact is likely to occur between the axis 20 and the bearing body 10, which reduces the accuracy of the hydrostatic bearing 50 to a certain extent; when T1 is greater than 0.03 mm, the thickness of the oil film in the first hydrostatic cavity 201 is too thick, and in order to maintain a relatively thick oil film, more lubricating oil flow needs to be provided, increasing the operating cost. That is to say, in this embodiment, by making the thickness T1 of the oil film in the first hydrostatic cavity 201 satisfy the relational expression: 0.02 mm ≤ T1 ≤ 0.03 mm, mechanical contact between the axis 20 and the bearing body 10 can be prevented, effectively ensuring the accuracy of the hydrostatic bearing 50.

[0072] Further, the thickness T2 of the oil film in the second hydrostatic cavity 202 in this embodiment satisfies the relational expression: 0.02 mm ≤ T2 ≤ 0.03 mm. For example, T2 can be 0.02 mm, 0.022 mm, 0.024 mm, 0.025 mm, 0.026 mm, 0.028 mm, 0.03 mm, etc. Specifically, the existence of the oil film ensures that the frictional resistance is extremely small when the shaft core 20 rotates. When T2 is less than 0.02 mm, the thickness of the oil film in the second hydrostatic cavity 202 is too thin, resulting in a reduced gap between the bearing body 10 and the shaft core 20, and mechanical contact is likely to occur between the shaft core 20 and the bearing body 10, which to a certain extent reduces the accuracy of the liquid hydrostatic bearing 50. When T2 is greater than 0.03 mm, the thickness of the oil film in the second hydrostatic cavity 202 is too thick. To maintain the relatively thick oil film, more lubricating oil flow needs to be provided, increasing the operating cost. That is to say, in this embodiment, by making the thickness T2 of the oil film in the second hydrostatic cavity 202 satisfy the relational expression: 0.02 mm ≤ T2 ≤ 0.03 mm, mechanical contact between the shaft core 20 and the bearing body 10 can be prevented, effectively ensuring the accuracy of the liquid hydrostatic bearing 50.

[0073] Combined with the above embodiments, it can be known that the hydraulic oil in the hydraulic station of the present application enters from the main oil inlet passage 41 of the base 40, rises under pressure and enters the first oil passage 11 of the bearing body 10, and then flows from the oil inlet 13 through the second oil passage 12 of the bearing body 10 into the oil supply port 314 of the restrictor 30, and enters the restrictor 30 from the oil supply port 314. After the oil is throttled by the restrictor 30, it flows into the oil outlet passage 15 of the bearing body 10 through the oil outlet hole 313 of the restrictor 30. The oil in the oil outlet passage 15 flows to the first hydrostatic cavity 201 and the second hydrostatic cavity 202 respectively. Subsequently, the oil in the upper half of the first hydrostatic cavity 201 and the second hydrostatic cavity 202 flows back to the main oil return passage 42 of the base 40 through the first sub-oil return passage 16 on the bearing body 10, and the oil in the lower half of the second hydrostatic cavity 202 flows back to the main oil return passage 42 of the base 40 under the action of gravity through the second sub-oil return passage on the bearing body 10. The oil in the main oil return passage 42 finally flows back to the hydraulic oil tank of the hydraulic station, and then supplies oil to the main oil inlet passage 41 of the base 40 through the hydraulic joint and hydraulic pipeline of the hydraulic station, thereby constituting the oil circulation of the hydraulic oil on the liquid hydrostatic bearing 50.

[0074] When the hydrostatic bearing 50 is actually used, after the oil is passed through, under the pressure of the oil film in the first hydrostatic cavity 201, an upward component force will be generated to push the shaft core 20 upward. At the same time, under the pressure of the oil film in the second hydrostatic cavity 202, a downward component force will be generated to push the shaft core 20 downward. During this process, under the action of the feedback type restrictor 30, the oil films in the first hydrostatic cavity 201 and the second hydrostatic cavity 202 reach equilibrium, effectively ensuring the stability of the hydrostatic bearing 50 during operation.

[0075] When the hydrostatic bearing 50 is actually installed, the front shaft core 21 and the rear shaft core 22 are fixedly connected through the adjustment part 23 and the bolt 34. The restrictor 30 and the bearing body 10, the bearing body 10 and the base 40, and the base 40 and the pedestal 70 are all fixedly connected through the bolt 34.

[0076] On the other hand, referring to Figures 12 to 13 As shown in the figure, the embodiment of the present application also provides a hydrostatic turntable, which includes the above-mentioned hydrostatic bearing 50. Therefore, this hydrostatic turntable includes all the technical effects of the above-mentioned hydrostatic bearing 50. Since the technical effects of the hydrostatic bearing 50 have been described in detail above, they will not be repeated here.

[0077] Furthermore, referring to Figures 12 to 13 As shown in the figure, the hydrostatic turntable in this embodiment further includes a workbench 60 and a pedestal 70. The hydrostatic bearing 50 is rotatably arranged on the pedestal 70, and the workbench 60 is installed on the pedestal 70 and rotates under the drive of the hydrostatic bearing 50.

[0078] Specifically, the workbench 60 in this embodiment is used to carry workpieces. When the hydrostatic turntable in this embodiment works, the hydrostatic bearing 50 rotates, which can drive the workbench 60 to rotate. Since there are a first hydrostatic cavity 201 and a second hydrostatic cavity 202 between the bearing body 10 and the shaft core 20 of the hydrostatic bearing 50 in this embodiment, through the action of the restrictor 30, hydraulic oil can be introduced into the first hydrostatic cavity 201 and the second hydrostatic cavity 202. At this time, there is an oil film between the bearing body 10 and the shaft core 20, which can make the shaft core 20 have extremely low friction and wear during rotation, facilitating the realization of high-precision operation control of the hydrostatic turntable.

[0079] For ease of description, spatial relative terms, such as "above", "over", "on the upper surface", "upper", etc., may be used herein to describe the spatial positional relationship of one device or feature to other devices or features as shown in the figures. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is inverted, a device described as "above" or "over" other devices or structures will then be positioned "below" or "beneath" the other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding explanations for the spatial relative descriptions used herein will be made accordingly.

[0080] In addition, it should be noted that the use of terms such as "first" and "second" to define components is only for the convenience of differentiating the corresponding components. Without additional statements, the above terms have no special meanings, and thus should not be construed as limiting the protection scope of the present application.

[0081] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A hydrostatic bearing, characterized in that, Comprising: A bearing body (10), the bearing body (10) having a through hole (101); A shaft core (20), the shaft core (20) being disposed through the through hole (101). The shaft core (20) includes a front section shaft core (21) and a rear section shaft core (22). The front section shaft core (21) and the rear section shaft core (22) are sequentially arranged along the thickness direction of the bearing body (10). And along the direction away from the rear section shaft core (22), the cross-sectional area of the front section shaft core (21) gradually increases. Along the direction away from the front section shaft core (21), the cross-sectional area of the rear section shaft core (22) gradually increases. There are a plurality of first static pressure chambers (201) arranged at intervals between the outer peripheral surface of the front section shaft core (21) and the bearing body (10). There are a plurality of second static pressure chambers (202) arranged at intervals between the outer peripheral surface of the rear section shaft core (22) and the bearing body (10). And within the projection along the thickness direction of the shaft core (20), the projections of two adjacent first static pressure chambers (201) and the projection of one of the second static pressure chambers (202) at least partially overlap; Throttle devices (30), including a plurality of throttle devices (30). The plurality of throttle devices (30) are arranged at intervals along the same circumferential direction on the outer peripheral surface of the bearing body (10). And a part of the plurality of throttle devices (30) is in one-to-one communication with the plurality of first static pressure chambers (201). Another part of the plurality of throttle devices (30) is in one-to-one communication with the plurality of second static pressure chambers (202). Wherein, the throttle devices (30) are at least used to adjust the stiffness of the first static pressure chambers (201) and the second static pressure chambers (202).

2. The hydrostatic bearing according to claim 1, characterized in that, The shaft core (20) further includes an adjustment portion (23). The adjustment portion (23) is disposed between the front section shaft core (21) and the rear section shaft core (22). The adjustment portion (23) is at least used to adjust the gaps between the front section shaft core (21) and the bearing body (10), and between the rear section shaft core (22) and the bearing body (10).

3. The hydrostatic bearing according to claim 1, wherein, The throttle device (30) includes: The main body (31), the main body (31) has a first side surface (3101) away from the bearing body (10) and a second side surface (3102) close to the bearing body (10). A cavity (311) is provided on the first side surface (3101). A throttling boss (312) is provided at the center of the cavity (311). An oil outlet hole (313) is provided on the axis of the throttling boss (312). The oil outlet hole (313) extends from the first side surface (3101) to the second side surface (3102). A fuel supply port (314), a first annular flow channel (315), a second annular flow channel (316), a first throttling channel (317) and a second throttling channel (318) are provided on the second side surface (3102). The first annular flow channel (315) surrounds the outer periphery of the second annular flow channel (316) and is coaxially arranged with the second annular flow channel (316). The first annular flow channel (315) communicates with the second annular flow channel (316). The fuel supply port (314) communicates with the first annular flow channel (315). The oil outlet hole (313) communicates with the second annular flow channel (316). The cover plate (32), the cover plate (32) is covered on the first side surface (3101). The thin film (33), the thin film (33) is arranged between the cover plate (32) and the main body (31) and is located in the cavity (311). A pressure stabilizing cavity is formed by surrounding between the thin film (33) and the main body (31). An adjusting cavity is formed by surrounding between the thin film (33) and the cover plate (32). Wherein, both ends of the first throttling channel (317) communicate with the first annular flow channel (315) and the pressure stabilizing cavity respectively. Both ends of the second throttling channel (318) communicate with the first annular flow channel (315) and the adjusting cavity respectively.

4. The hydrostatic bearing according to claim 3, characterized in that, The hydrostatic bearing further includes a base (40), the base (40) is connected to the bearing body (10), and a main oil inlet flow channel (41) is provided on the base (40). The bearing body (10) is provided with a first oil passing flow channel (11), a second oil passing flow channel (12) and a plurality of oil inlet ports (13). The first oil passing flow channel (11) communicates with the main oil inlet flow channel (41). The second oil passing flow channel (12) communicates with the first oil passing flow channel (11). The plurality of oil inlet ports (13) are arranged at intervals along the circumferential direction of the bearing body (10) and are connected to the plurality of fuel supply ports (314) one by one. And two adjacent oil inlet ports (13) are communicated through the second oil passing flow channel (12).

5. The hydrostatic bearing according to claim 4, characterized in that, A support plane (401) is provided on one side of the base (40) close to the bearing body (10). The included angle A between the support plane (401) and the first plane where the base (40) is located is greater than 0° and less than or equal to 45°.

6. The hydrostatic bearing according to claim 1, wherein, The bearing body (10) is provided with a plurality of oil outlets (14) and a plurality of oil flow channels (15). The plurality of oil outlets (14) are arranged at intervals along the circumferential direction of the bearing body (10) and are connected to the oil outlet holes (313) of the plurality of restrictors (30) in a one-to-one correspondence. The plurality of oil flow channels (15) are connected to the plurality of oil outlets (14) in a one-to-one correspondence, and a part of the plurality of oil flow channels (15) is communicated with the plurality of first static pressure chambers (201) in a one-to-one correspondence, and another part of the plurality of oil flow channels (15) is communicated with the plurality of second static pressure chambers (202) in a one-to-one correspondence.

7. The hydrostatic bearing according to claim 6, characterized in that, The oil flow channel (15) communicated with the first static pressure chamber (201) includes a first oil outlet section (151) and a second oil outlet section (152). The first oil outlet section (151) extends from the outer peripheral surface of the bearing body (10) towards the inner side of the bearing body (10). Opposite ends of the second oil outlet section (152) are respectively communicated with the first oil outlet section (151) and the first static pressure chamber (201), and a first predetermined angle is formed between the second oil outlet section (152) and the first oil outlet section (151). The oil flow channel (15) communicated with the second static pressure chamber (202) includes a third oil outlet section (153) and a fourth oil outlet section (154). The third oil outlet section (153) extends from the outer peripheral surface of the bearing body (10) towards the inner side of the bearing body (10). Opposite ends of the fourth oil outlet section (154) are respectively communicated with the third oil outlet section (153) and the second static pressure chamber (202), and a second predetermined angle is formed between the fourth oil outlet section (154) and the third oil outlet section (153).

8. The hydrostatic bearing according to claim 1, wherein, The hydrostatic bearing further includes a base (40), and the base (40) is provided with a main oil return flow channel (42). The bearing body (10) is provided with a first sub-oil return flow channel (16) and a second sub-oil return flow channel. The first sub-oil return flow channel (16) includes a first oil return section (161) and a second oil return section (162). The first oil return section (161) extends from the outer peripheral surface of the bearing body (10) towards the direction of the shaft core (20) and is connected to the outer peripheral surface of the shaft core (20). Opposite ends of the second oil return section (162) are respectively communicated with the first oil return section (161) and the main oil return flow channel (42). Opposite ends of the second sub-oil return flow channel are respectively communicated with the rear shaft core (22) and the main oil return flow channel (42).

9. The hydrostatic bearing according to claim 1, characterized in that, The thickness T1 of the oil film in the first static pressure chamber (201) satisfies the relational expression: 0.02 mm ≤ T1 ≤ 0.03 mm. The thickness T2 of the oil film in the second static pressure chamber (202) satisfies the relational expression: 0.02 mm ≤ T2 ≤ 0.03 mm.

10. A hydrostatic turntable, characterized in that, The hydrostatic turntable includes the hydrostatic bearing according to any one of claims 1 to 9. The hydrostatic turntable further includes a worktable (60) and a base (70). The hydrostatic bearing is rotatably provided on the base (70), and the worktable (60) is mounted on the base (70) and rotates driven by the hydrostatic bearing.

Images