Heat insulation connecting structure, reaction device and processing equipment

Abstract

The embodiment of the utility model relates to a heat insulation connecting structure, a reaction device and processing equipment. The heat insulation connecting structure comprises a plurality of first structural parts, a plurality of second structural parts opposite to the first structural parts and spaced from the first structural parts, a first connecting part, a second connecting part and a plurality of third connecting parts. The adjacent first structural parts and the adjacent second structural parts are nested inside and outside. And gaps are formed between the adjacent first structural parts and the adjacent second structural parts. The first connecting piece is connected with the first structural piece on the innermost side and penetrates through and exceeds the second structural piece on the innermost side in the multiple second structural pieces. The second connecting piece is connected with the second structural piece on the outermost side and exceeds the first structural pieces. Each third connecting piece is connected with the first structural piece and the second structural piece, so that the heat insulation connecting structure has a heat conduction path from the first connecting piece to the second connecting piece or from the second connecting piece to the first connecting piece and back and forth between the plurality of first structural pieces and the plurality of second structural pieces.

Description

Technical Field

[0001] This application relates to the field of thermal insulation technology. Specifically, it relates to a thermal insulation connection structure, a reaction device, and a processing device. Background Art

[0002] The thermal insulation connection structure can be applied to fields that require thermal insulation in high and low temperature environments, such as vacuum heat treatment, vacuum coating, vacuum metallurgy, and cryogenic energy storage and transportation fields. However, the existing thermal insulation connection structures have problems of low thermal insulation efficiency and insufficient support strength. Summary of the Utility Model

[0003] A first aspect of this application provides a thermal insulation connection structure. This thermal insulation connection structure is used to connect and support between an inner cavity and an outer cavity, and the inner cavity is located inside the outer cavity. This thermal insulation connection structure includes a plurality of structural members and a plurality of connecting members. The plurality of structural members includes a plurality of first structural members and a plurality of second structural members. The plurality of second structural members are opposite and spaced apart from the plurality of first structural members. Between every two adjacent first structural members, they are nested inside and outside, and there is a gap between every two adjacent first structural members. Between every two adjacent second structural members, they are nested inside and outside, and there is a gap between every two adjacent second structural members. The plurality of connecting members includes a first connecting member, a second connecting member, and a plurality of third connecting members. Each connecting member has an opposite first end and second end. The first end of the first connecting member is connected to the innermost first structural member among the plurality of first structural members. The second end of the first connecting member passes through and extends beyond the innermost second structural member among the plurality of second structural members, and is used to connect to one of the inner cavity and the outer cavity. The first end of the second connecting member is connected to the outermost second structural member among the plurality of second structural members. The second end of the second connecting member extends beyond the plurality of first structural members and is used to connect to the other of the inner cavity and the outer cavity. The first end of each third connecting member is connected to a first structural member, and the second end of each third connecting member is connected to a second structural member, so that the thermal insulation connection structure has a heat conduction path from the first connecting member to the second connecting member and back and forth between the plurality of first structural members and the plurality of second structural members, or a heat conduction path from the second connecting member to the first connecting member and back and forth between the plurality of first structural members and the plurality of second structural members.

[0004] The thermal insulation connection structure of the embodiment of this application adopts a way of winding back and forth, greatly extending the heat conduction path within a limited distance space, thereby greatly reducing heat leakage in the way of heat conduction.

[0005] In addition, the thermal insulation connection structure of the embodiment of the present application has a nested form of internal structural parts, and some structural parts are hollow structures, which is conducive to compact structure and simple manufacturing and installation, and is also conducive to increasing the internal elastic deformation capacity, so that the internal thermal stress of the thermal insulation connection structure is converted into elastic storage force, which is conducive to avoiding damage or destruction of the internal structure of the thermal insulation connection structure when the temperature changes, thereby ensuring the stability of its internal structure while also ensuring the reliability of its connection or support at both ends, greatly reducing the risk of insufficient structural strength. The thermal insulation connection structure of the embodiment of the present application is conducive to eliminating the technical problem of thermal deformation displacement of the external connections at both ends of the existing thermal insulation connection structure.

[0006] In addition, in the thermal insulation connection structure of the embodiment of the present application, under the same length path, the structural parts and the connecting parts are connected in sections, which saves space while increasing the number of contact surfaces, greatly reducing the heat conduction efficiency, and making the thermal insulation performance more superior.

[0007] In some embodiments, each structural member is plate-shaped. Among the plurality of first structural members, except for the innermost first structural member, each first structural member is projected onto two adjacent second structural members, and is connected to the two adjacent second structural members through different third connecting members. Among the plurality of second structural members, except for the outermost second structural member, each second structural member is projected onto two adjacent first structural members, and is connected to the two adjacent first structural members through different third connecting members.

[0008] In some embodiments, among the plurality of first structural members, except for the innermost first structural member, the size of each first structural member is between the sizes of two adjacent second structural members. Among the plurality of second structural members, except for the outermost second structural member, the size of each second structural member is between the sizes of two adjacent first structural members.

[0009] In some embodiments, each connecting member is threadedly connected to the corresponding structural member.

[0010] In some embodiments, the first end of each connecting member is provided with an internal thread, and the second end is provided with an external thread. The thermal insulation connection structure also includes a plurality of screw connectors. The first connecting member is threadedly connected to the corresponding first structural member at the position of its internal thread through a screw connector, and the first connecting member is also used to be threadedly connected to one of the inner cavity and the outer cavity at the position of its external thread. The second connecting member is threadedly connected to the corresponding second structural member at the position of its internal thread through a screw connector, and the second connecting member is also used to be threadedly connected to the other of the inner cavity and the outer cavity at the position of its external thread. Each third connecting member is threadedly connected to the corresponding first structural member at the position of its internal thread through a screw connector, and is threadedly connected to the corresponding second structural member at the position of its external thread.

[0011] In some embodiments, each connecting member includes opposite first and second end faces and a side face connecting the first and second end faces. At least part of the connecting member includes a first air vent channel and / or a second air vent channel. The first air vent channel communicates the side face with the first end face, and the second air vent channel communicates the side face with the second end face. Both the first air vent channel and the second air vent channel are exposed at the position of the side face.

[0012] In some embodiments, each connecting member includes opposite first and second end faces and a side face connecting the first and second end faces. A wrenching groove is provided on the side face of at least part of the plurality of connecting members.

[0013] In some embodiments, each connecting member is columnar, and each connecting member includes an end face in contact with a corresponding structural member. The end face includes a plurality of protrusions, each protrusion extending in the radial direction of the connecting member. The plurality of protrusions are spaced apart along the axial direction of the connecting member, and a depression is formed between every two adjacent protrusions. Each connecting member contacts the corresponding structural member at the protrusion, and there is a gap between each connecting member and the corresponding structural member at the depression.

[0014] In some embodiments, the adiabatic connection structure has a first temperature zone and a second temperature zone, and the temperature of the first temperature zone is higher than that of the second temperature zone. Part of the structural members are located in the first temperature zone, and part of the structural members are located in the second temperature zone. The heat-resistant temperature of the structural members located in the first temperature zone is greater than that of the structural members located in the second temperature zone; and / or, part of the connecting members are located in the first temperature zone, and part of the connecting members are located in the second temperature zone. The heat-resistant temperature of the connecting members located in the first temperature zone is greater than that of the connecting members located in the second temperature zone.

[0015] In a second aspect of the present application, a reaction device is provided. The reaction device includes an inner cavity body, an outer cavity body, and the adiabatic connection structure of the first aspect of the present application. The inner cavity body is located within the outer cavity body. The adiabatic connection structure is connected and supported between the inner cavity body and the outer cavity body. The first connecting member is connected to one of the inner cavity body and the outer cavity body, and the second connecting member is connected to the other of the inner cavity body and the outer cavity body. The inner cavity body is used for placing materials to be processed.

[0016] The reaction device of the second aspect of the present application has at least the same advantages as the adiabatic connection structure of the first aspect of the present application, and will not be elaborated here.

[0017] In some embodiments, there is a pressure difference between the inner cavity body and the outer cavity body, and at least one of the inner cavity body and the outer cavity body is in a vacuum environment.

[0018] In a third aspect of the present application, a processing device is provided. The processing device includes a handling device and the reaction device provided in the second aspect of the present application. The handling device is used for conveying materials to be processed to the reaction device.

[0019] The processing equipment according to the third aspect of the present application has at least the same advantages as the reaction device according to the second aspect of the present application, which will not be elaborated herein. Description of the Drawings

[0020] Figure 1 FIG. is a perspective schematic view of an adiabatic connection structure according to an embodiment of the present application.

[0021] Figure 2 is Figure 1 an exploded schematic view of the adiabatic connection structure in FIG.

[0022] Figure 3 is Figure 1 a top view schematic view of the adiabatic connection structure in FIG.

[0023] Figure 4A is Figure 3 a cross-sectional schematic view taken along line IV-IV.

[0024] Figure 4B is Figure 1 a schematic view of the heat conduction path of the adiabatic connection structure in FIG.

[0025] Figure 5 is Figure 4A a perspective schematic view of the connecting member of the adiabatic connection structure in FIG.

[0026] Figure 6 is Figure 4A an enlarged schematic view at VI in FIG.

[0027] Figure 7 is Figure 5 a side view schematic view of the connecting member in FIG.

[0028] Figure 8 is Figure 7 a cross-sectional schematic view taken along line VIII-VIII.

[0029] Main Element Symbol Description:

[0030] 10: Adiabatic connection structure; 11: Structural member; 111, 111a, 111b: First structural member; 112, 112a, 112b: Second structural member; G: Gap; 12: Connecting member; 121: First connecting member; 122: Second connecting member; 123: Third connecting member; 12p: Protrusion; 12r: Depression; S1: First end face; S2: Second end face; S3: Side face; H1: First air release channel; H2: Second air release channel; R: Wrenching groove; 13: Screwed member; X: First direction; Y: Second direction; Z: Third direction. Detailed Embodiment

[0031] Vacuum high and low temperature insulation technology plays a vital role in the semiconductor, pan-semiconductor photovoltaic, ultra-low temperature energy storage and transportation industries. It is widely used and irreplaceable. Taking vacuum high temperature technology in semiconductors as an example, by providing high temperature, vacuum environment and other specific requirements, vacuum high temperature industrial chambers provide the necessary conditions and guarantees for the manufacturing and processing of semiconductor devices.

[0032] As we all know, in order to effectively reduce heat conduction and heat radiation in a specific environment and maintain stable temperature control, thermal insulation is essential. There are five common thermal insulation methods.

[0033] 1. Insulation materials: Develop or select high-efficiency insulation materials, such as thermal insulation materials, insulating materials, foaming materials, etc., to reduce heat conduction and heat radiation and improve insulation performance.

[0034] 2. Vacuum technology: In some special cases, vacuum is used as a thermal insulation method to achieve thermal insulation effect by reducing the heat conducted by gas.

[0035] 3. Thermal radiation control: Use heat-reflective materials, thermal radiation shielding technology, etc. to control thermal radiation and reduce the impact of external heat sources on the insulation structure.

[0036] 4. Application of nanotechnology: Use nanotechnology to improve the performance of thermal insulation materials, such as nano-coatings and nano-materials to enhance thermal insulation performance.

[0037] 5. Structural design: Optimize the design of the insulation structure, including shape, layers, size, etc., to ensure structural stability while minimizing heat loss.

[0038] However, the above-mentioned thermal insulation methods all have shortcomings, as follows.

[0039] 1. Disadvantages of insulation materials: Some insulation materials may have high requirements for mechanical properties, and it is difficult to meet the requirements of insulation and structural strength at the same time; some insulation materials may be sensitive to specific environments, expensive, and not conducive to processing and manufacturing, which limits their scope of application; some insulation materials may be less environmentally friendly and not conducive to sustainable development.

[0040] 2. Disadvantages of vacuum technology: Vacuum technology equipment is expensive, and the operation and maintenance costs are also relatively expensive; vacuum technology may have gas leakage problems and requires regular maintenance and monitoring; in some cases, vacuum technology is difficult to achieve complete vacuum, which limits its scope of application.

[0041] 3. Disadvantages of thermal radiation control: In high temperature environments, thermal radiation control may have the problem of local over-temperature, resulting in a decrease in heat conduction effect; some thermal radiation control technologies may have high environmental requirements and are not suitable for complex environments.

[0042] 4. Disadvantages of nanotechnology applications: Some nanotechnology applications may be restricted by factors such as the stability of nanomaterials, cost, and production processes; there may be difficulties in large-scale production when nanotechnology is applied on a large scale; the radiation control effect of nanotechnology may be affected by process conditions and material properties.

[0043] 5. Disadvantages of structural design: Some existing structural designs are complex and expensive, increasing the manufacturing and maintenance costs. Some structural designs may have insufficient heat resistance or be difficult to cope with high-temperature situations. Complex structural designs may increase the assembly difficulty, project volume, and require more space. In a compact internal and external double-cavity structure, there may be defects such as insufficient paths, low heat insulation effect, and insufficient structural strength, and it is impossible to solve the damage to the cavity and its own structure caused by thermal stress deformation due to temperature changes in the support structure when there is a temperature difference between the internal and external cavities.

[0044] In summary, the existing adiabatic connection structure (or adiabatic support structure) has at least the following technical problems.

[0045] 1. Low adiabatic efficiency: Some adiabatic support structures may have heat conduction problems during use, resulting in heat transfer in the structure and reducing the adiabatic effect.

[0046] 2. Insufficient structural strength: Some existing adiabatic support structures may not be able to withstand external pressure or mechanical loads in vacuum or non-vacuum environments, resulting in structural deformation or damage.

[0047] 3. Poor high-temperature resistance performance: In vacuum or non-vacuum environments, adiabatic support structures that are affected by high temperatures for a long time may not be able to maintain stable performance, and the temperature tolerance range is limited.

[0048] 4. Poor sealing or vacuum performance: The sealing design of some adiabatic support structures may not be tight enough, resulting in gas leakage or large-scale outgassing under high-temperature conditions in a vacuum environment, affecting the vacuum degree and the adiabatic effect.

[0049] 5. High installation complexity: The installation process of some existing adiabatic support structures may be complex in a vacuum environment and requires professional personnel to operate, increasing the construction difficulty and cost.

[0050] 6. High maintenance cost: Some adiabatic support structures need to be frequently maintained or have parts replaced in a vacuum environment, and the maintenance cost is relatively high, affecting the economy of continuous operation.

[0051] In response to this, the embodiments of the present application provide a thermal insulation connection structure to solve at least one of the above technical problems. The thermal insulation connection structure can be applied to fields that require thermal insulation in high and low temperature environments, such as vacuum heat treatment, vacuum coating, vacuum metallurgy, and cryogenic energy storage and transportation fields. Further, the thermal insulation connection structure can be applied to scenarios that require thermal insulation in both atmospheric and vacuum environments.

[0052] The embodiments of the present application also provide a reaction device that applies the above thermal insulation connection structure. The reaction device includes an inner cavity, an outer cavity, and the above thermal insulation connection structure. The inner cavity is used to place the material to be processed. The outer cavity is used to accommodate the inner cavity and protect the inner cavity. The inner cavity is located within the outer cavity and forms a sandwich space with the outer cavity. The thermal insulation connection structure is connected and supported between the inner cavity and the outer cavity. That is, the thermal insulation connection structure connects the inner cavity and the outer cavity and is located in the sandwich space, so that the inner cavity is stably supported within the outer cavity. Among them, there is a temperature difference between the inner cavity and the outer cavity, and the thermal insulation connection structure is also used to insulate between the inner cavity and the outer cavity.

[0053] Specifically, the reaction device can be applied to, but is not limited to, any one of vacuum heat treatment equipment, vacuum coating equipment, vacuum metallurgy equipment, cryogenic energy storage and transportation equipment, etc. When the reaction device is applied to any one of vacuum heat treatment equipment, vacuum coating equipment, and vacuum metallurgy equipment, the inner cavity can be used to form a vacuum high temperature environment. When the reaction device is applied to cryogenic energy storage and transportation equipment, the inner cavity is used to hold cryogenic liquids.

[0054] In some embodiments, in the above reaction device, there is a pressure difference between the inner cavity and the outer cavity, and at least one of the inner cavity and the outer cavity is a vacuum environment. Thus, the thermal insulation connection structure has sufficient structural strength to withstand external pressure or mechanical loads in a vacuum environment.

[0055] The embodiments of the present application also provide a processing device. The processing device includes a handling device and the above reaction device. The handling device is used to convey the material to be processed to the reaction device.

[0056] Specifically, the processing device can be, but is not limited to, any one of vacuum heat treatment equipment, vacuum coating equipment, vacuum metallurgy equipment, etc.

[0057] The following specifically describes the thermal insulation connection structure of the embodiments of the present application with reference to the drawings.

[0058] Figure 1 It is a three-dimensional schematic diagram of the thermal insulation connection structure of an embodiment of the present application. As Figure 1As shown in the figure, the adiabatic connection structure 10 includes a structural member 11 and a connecting member 12 connected to the structural member 11. Specifically, the structural member 11 includes a plurality of first structural members 111 and a plurality of second structural members 112. The plurality of first structural members 111 are substantially at the same height. The plurality of second structural members 112 are substantially at another same height. Thus, the plurality of second structural members 112 are opposite to and spaced apart from the plurality of first structural members 111. Some of the connecting members 12 are connected between the first structural member 111 and the second structural member 112. One end of some of the connecting members 12 is connected to the first structural member 111, and the other end passes through the second structural member 112 for connecting to one of the inner cavity and the outer cavity of the reaction device. One end of the other part of the connecting members 12 is connected to the second structural member 112, and the other end extends beyond the first structural member 111 for connecting to the other of the inner cavity and the outer cavity of the reaction device.

[0059] Thus, after the adiabatic connection structure 10 is connected to the inner cavity and the outer cavity, the plurality of first structural members 111 and the plurality of second structural members 112 are in the space sandwiched between the inner cavity and the outer cavity of the reaction device. Since a plurality of connecting members 12 are connected between the plurality of first structural members 111 and the plurality of second structural members 112, when at least one of the inner cavity and the outer cavity is in a vacuum environment, the adiabatic connection structure 10 also has sufficient mechanical strength to withstand the pressure brought by the vacuum environment, which is beneficial to avoiding the structural deformation of the inner cavity, the outer cavity and the adiabatic connection structure 10 itself.

[0060] Specifically, the adjacent first structural members 111 are nested inside and outside each other, and there is a gap G between each adjacent first structural members 111. The adjacent second structural members 112 are nested inside and outside each other, and there is a gap G between each adjacent two second structural members 112.

[0061] Since the adjacent first structural members 111 are nested inside and outside each other and the adjacent second structural members 112 are nested inside and outside each other, the adiabatic connection structure 10 is more compact to meet the requirements of a narrow space, especially having advantages for the adiabatic application of a vacuum inner and outer cavity. Moreover, the form of the adjacent structural members 11 being nested inside and outside each other makes the manufacturing and installation of the adiabatic connection structure 10 simple.

[0062] In addition, the adjacent first structural members 111 do not contact each other, and the adjacent two second structural members 112 do not contact each other, which is beneficial to increasing the internal elastic deformation ability of the adiabatic connection structure 10, making the internal thermal stress of the adiabatic connection structure 10 transform into elastic storage force, which is beneficial to avoiding the damage or destruction of the internal structure of the adiabatic connection structure 10 during temperature change, and thus is beneficial to ensuring the reliability of the connection or support at both ends of the adiabatic connection structure 10 while ensuring the internal structural stability of the adiabatic connection structure 10, and greatly reducing the risk of insufficient structural strength.

[0063] In this embodiment, the number of structural members 11 is four. Specifically, the number of the first structural members 111 is two, and the number of the second structural members 112 is two. Among the two first structural members 111, a middle portion of one first structural member 111 (i.e., the first structural member 111b) has a hollow through-hole, and the other first structural member 111 (i.e., the first structural member 111a) is located within the hollow through-hole, and the size of the through-hole of the first structural member 111b is larger than the size of the first structural member 111a received therein, such that there is a gap between the two first structural members 111.

[0064] Further, there are gaps around the sleeved first structural member 111a, so that there is a certain thermal stress release space around the sleeved first structural member 111a, to effectively prevent and reduce the influence on the first structural member 111b due to possible thermal deformation of the first structural member 111a.

[0065] Similarly, among the two second structural members 112, a middle portion of one second structural member 112 (i.e., the second structural member 112b) has a hollow through-hole, and the other second structural member 112 (i.e., the second structural member 112a) is located within the hollow through-hole, and the size of the through-hole of the second structural member 112b is larger than the size of the second structural member 112a received therein, such that there is a gap between the two second structural members 112.

[0066] There are gaps around the sleeved second structural member 112a, so that there is a certain thermal expansion release space around the sleeved second structural member 112a, to effectively prevent and reduce the influence on the second structural member 112b due to possible thermal deformation of the second structural member 112a.

[0067] In this embodiment, each structural member 111 is plate-shaped, and the outer contours of the first structural member 111 and the second structural member 112 are both generally rectangular strips. More specifically, the length of each of the first structural member 111 and the second structural member 112 is more than twice its width. Thus, more connecting members 12 can be arranged at intervals along the length direction of the structural member 11, enhancing the mechanical strength of the adiabatic connection structure 10. Moreover, the narrow width of the structural member 11 is beneficial to the overall miniaturization of the volume of the adiabatic connection structure 10, and thus is beneficial to the application of the adiabatic connection structure 10 in scenarios with a narrow space.

[0068] For convenience of description hereinafter, the length direction of the structural member 11 is defined as the first direction X, the width direction of the structural member 11 is defined as the second direction Y, and the height direction of the adiabatic connection structure 10 is defined as the third direction Z. The first direction X, the second direction Y and the third direction Z intersect pairwise. In this embodiment, the first direction X, the second direction Y and the third direction Z are perpendicular to each other pairwise. In addition, the direction from the second structural member 112 to the first structural member 111 is defined as the positive direction of the third direction Z.

[0069] Figure 2 is Figure 1 the explosion schematic diagram of the adiabatic connection structure in Figure 1 and Figure 2 . In this embodiment, each connecting member 12 is columnar. The plurality of connecting members 12 include a first connecting member 121, a second connecting member 122, and a third connecting member 123. Among them, the first connecting member 121 connects one of the first structural member 111 and the inner cavity and the outer cavity. The second connecting member 122 is to connect the other of the second structural member 112 and the inner cavity and the outer cavity. The third connecting member 123 connects the first structural member 111 and the second structural member 112.

[0070] In this embodiment, the number of the first connecting members 121 is one, the number of the second connecting members 122 is two, and the number of the third connecting members 123 is six. The two second connecting members 122 are respectively located on opposite sides of the first connecting member 121. The six third connecting members 123 are evenly divided into two groups, and the two groups of third connecting members 123 are respectively located on opposite sides of the first connecting member 121. Along the first direction X, each group of third connecting members 123 is located between the first connecting member 121 and the corresponding second connecting member 122. Along the first direction X, the plurality of connecting members 12 are distributed at approximately equal intervals and are distributed approximately symmetrically with respect to the first connecting member 121. Thus, it is beneficial to the uniform distribution of heat on the adiabatic connection structure 10.

[0071] Figure 3 is Figure 1 the top view schematic diagram of the adiabatic connection structure in Figure 1 , Figure 2 and Figure 3 . Among the four structural members 11, in the order of the first structural member 111a, the second structural member 112a, the first structural member 111b, and the second structural member 112b, the sizes gradually increase.

[0072] Specifically, along the third direction Z, the projection of the first structural member 111a completely falls within the second structural member 112a, and the first structural member 111a is connected to the second structural member 112a through two third connecting members 123. Along the third direction Z, the projection of the second structural member 112a completely falls within the first structural member 111b, and the second structural member 112a is connected to the second structural member 112a through two third connecting members 123. Along the third direction Z, the projection of the first structural member 111b completely falls within the second structural member 112b, and the first structural member 111b is connected to the second structural member 112b through two third connecting members 123. That is, among the six third connecting members 123, one pair connects the first structural member 111a and the second structural member 112a, one pair connects the second structural member 112a and the first structural member 111b, and another pair connects the first structural member 111b and the second structural member 112b.

[0073] Figure 4A For Figure 3 Schematic cross-sectional view along line IV-IV. As Figure 4A shown, among the opposite ends of the first connecting member 121, one end is connected to the first structural member 111a, and the other end passes through and extends beyond the second structural member 112a for connecting to one of the inner cavity and the outer cavity.

[0074] Among the opposite ends of each second connecting member 122, one end is connected to the second structural member 112b, and the other end extends beyond the first structural member 111 for connecting to the other of the inner cavity and the outer cavity.

[0075] Among the opposite ends of each third connecting member 123, one end is connected to one first structural member 111, and the other end is connected to a corresponding second structural member 112, so that the adiabatic connection structure 10 has a heat conduction path (referred to as the first heat conduction path) from the first connecting member 121 to the second connecting member 122 and back and forth between a plurality of first structural members 111 and a plurality of second structural members 112, or a heat conduction path (referred to as the second heat conduction path) from the second connecting member 122 to the first connecting member 121 and back and forth between a plurality of first structural members 111 and a plurality of second structural members 112.

[0076] Specifically, if the temperature in the cavity connected by the first connecting member 121 is higher than the temperature in the cavity connected by the second connecting member 122, the adiabatic connection structure 10 has the above-mentioned first heat conduction path; otherwise, the adiabatic connection structure 10 has the above-mentioned second heat conduction path.

[0077] Figure 4B For Figure 1 Schematic diagram of the heat conduction path of the adiabatic connection structure in. Specifically, Figure 4B The first heat conduction path indicated by the solid arrows in. Understandably, the second heat conduction path is Figure 4B The path in the opposite direction to the arrow indicating the first heat conduction path in.

[0078] Please refer to Figure 4A and Figure 4BSpecifically, the first heat conduction path is as follows: after the cavity with high temperature inputs heat into the first connecting member 121, it goes along the positive direction of the third direction Z to the first structural member 111a, and then goes along the positive direction and negative direction of the first direction X to a third connecting member 123 respectively, and then goes along the negative direction of the third direction Z to the second structural member 112a, and then goes along the positive direction and negative direction of the first direction X to a third connecting member 123 respectively, and then goes along the positive direction of the third direction Z to the first structural member 111b, and then goes along the positive direction and negative direction of the first direction X to a third connecting member 123 respectively, and then goes along the negative direction of the third direction Z to the second structural member 112b, and then goes along the positive direction and negative direction of the first direction X to a second connecting member 122 respectively, and finally goes along the positive direction of the third direction Z to the cavity with low temperature.

[0079] Thus, the first heat conduction path includes a portion that repeatedly travels back and forth between the first structural member 111 and the second structural member 112. Moreover, in the first heat conduction path, the length of the first connecting member 121 to the second connecting member 122 in the positive direction of the first direction X, or the length of the first connecting member 121 to the second connecting member 122 in the negative direction of the first direction X is close to five times the distance between the first structural member 111 and the second structural member 112. Thus, the heat-insulating connection structure 10 extends the length of the heat conduction path on the basis of a limited support distance, and reduces the amount of heat transferred from the high-temperature end to the low-temperature end.

[0080] In the thermal insulation connection structure 10, the plurality of structural members 11 and the plurality of connection members 12 are connected to each other in a circuitous manner (or in a roundabout manner), which has at least the following advantages.

[0081] First, the multiple structural members 11 and the multiple connecting members 12 are connected in a circular manner, which is conducive to extending the heat conduction path and increasing the total number of contact surfaces between the structural members 11 and the connecting members 12. Specifically, there is an interface thermal resistance when adjacent surfaces are in contact, and the increase in the number of contact surfaces is conducive to further reducing heat transfer in the form of heat conduction to improve the thermal insulation performance of the thermal insulation connection structure 10.

[0082] Second, a supporting position is formed where each connecting member 12 is located, and the multiple connecting members 12 are arranged at intervals, which is beneficial to increase the supporting strength of the thermal insulation connection structure 10 for the inner and outer cavities.

[0083] Third, the structural member 11 and the connecting member 12 are in the form of multiple blocks and sections, and there is a temperature gradient along the heat conduction path. Different materials can be used according to the corresponding temperature zones and whether they are vacuum compatible with the vacuum environment.

[0084] In some embodiments, the adiabatic connection structure 10 has a first temperature zone and a second temperature zone, and the temperature of the first temperature zone is higher than that of the second temperature zone. The heat-resistant temperature of the structural member 11 located in the first temperature zone is greater than that of the structural member 11 located in the second temperature zone. The heat-resistant temperature of the connecting member 12 located in the first temperature zone is greater than that of the connecting member 12 located in the second temperature zone.

[0085] It should be noted that in the embodiments of the present application, the "heat-resistant temperature" refers to the highest temperature that a material or structure can withstand without losing its basic functions or structural integrity.

[0086] Specifically, the first temperature zone is, for example, a high-temperature zone (the temperature can be, but is not limited to, 800°C to 1200°C), and the second temperature zone is, for example, a medium-high temperature zone (the temperature can be, but is not limited to, 150°C to 200°C). The structural member 11 in the high-temperature zone is made of stainless steel, titanium alloy, etc. The structural member 11 in the medium-high temperature zone is made of glass fiber-reinforced epoxy resin composite material, etc. Thus, it is convenient to select the corresponding best material according to requirements, with a wider range of use. The use of a minimum amount of some expensive materials achieves the best adiabatic performance and meets the use requirements, which is more advantageous for economy.

[0087] In addition, the material of the connecting member 12 can be selected according to the different temperature zones. Thus, by using the different thermal expansion coefficients of the connecting member 12, the thermal displacement can be offset internally, and the thermal displacement at both ends of the overall connection can be zero in a simple structural manner, which is beneficial to eliminating thermal stress to avoid damage to the equipment or structure at both ends of the connection caused by thermal stress.

[0088] Furthermore, the middle of the structural member 11 is hollowed out and nested with and combined with a material with excellent elasticity, which is beneficial to achieving the effect of a leaf spring, so that the internal thermal stress of the adiabatic connection structure 10 is transformed into elastic energy storage, avoiding damage or destruction of the internal structure of the adiabatic connection structure 10 during temperature change, and thus being beneficial to ensuring the internal structural stability of the adiabatic connection structure 10 while also ensuring the reliability of its connection or support at both ends.

[0089] In this embodiment, each connecting member 12 is threadedly connected to the corresponding structural member 11. Please continue to refer to Figure 4A , at one of the opposite ends of each connecting member 12, an internal thread is provided, and at the other end, an external thread is provided.

[0090] For the convenience of description below, it is also referred to that at one of the opposite ends of each connecting member 12, the end with the internal thread is the first end of the connecting member 12, and the end with the external thread is the second end of the connecting member 12.

[0091] The adiabatic connection structure 10 further includes a plurality of screwing members 13. The number of the screwing members 13 is the same as the number of the connecting members 12, and they are arranged in one-to-one correspondence with the connecting members 12. In this embodiment, the screwing member 13 is a screw.

[0092] Specifically, one end of the first connecting member 121 provided with internal threads (or the first end of the first connecting member 121) is threadedly connected to the corresponding first structural member 111a through a screw member 13 at its internal threads. One end of the first connecting member 121 provided with external threads (or the second end of the first connecting member 121) is used to be threadedly connected to one of the inner cavity body and the outer cavity body at its external threads.

[0093] One end of each second connecting member 122 provided with internal threads (or the first end of the second connecting member 122) is threadedly connected to the corresponding second structural member 112 through a screw member 13 at its internal threads. One end of each second connecting member 122 provided with external threads (or the second end of the second connecting member 122) is used to be threadedly connected to the other of the inner cavity body and the outer cavity body at the position of its external threads.

[0094] The first end of each third connecting member 123 is threadedly connected to the corresponding first structural member 111 through a screw member 13 at the position of its internal threads, and the second end of each third connecting member 123 is threadedly connected to the corresponding second structural member 112 at the position of its external threads.

[0095] In other embodiments, the connection manner of the connecting member 12 to the inner and outer cavity bodies is not limited to the above.

[0096] It should be noted that Figure 4A In the illustrated embodiment, the first connecting member 121, the second connecting member 122, and the third connecting member 123 are different in terms of length and diameter dimensions. The lengths of both the first connecting member 121 and the third connecting member 123 are greater than the length of the second connecting member 122. The diameter dimension of the first connecting member 121 is greater than the diameter dimension of the second connecting member 122.

[0097] Taking the first connecting member 121 as an example hereinafter, the possible same structural features of the first connecting member 121, the second connecting member 122, and the third connecting member 123 will be described.

[0098] As Figure 4A shown, the first connecting member 121 includes opposite first end face S1 and second end face S2 and a side face S3 connecting the first end face S1 and the second end face S2. One end where the first end face S1 is located is provided with internal threads. One end where the second end face S2 is located is provided with external threads. After the first connecting member 121 is connected to the first structural member 111a through the screw member 13 at its internal threads, the first end face S1 is in direct contact with the first structural member 111a.

[0099] Figure 5 For Figure 4A the three-dimensional schematic diagram of the connecting member of the adiabatic connection structure in Figure 5As shown, the first end face S1 is uneven. Specifically, the first end face S1 includes a plurality of protrusions 12p. Each protrusion 12p extends radially along the first connecting member 121. The plurality of protrusions 12p are arranged at intervals in the circumferential direction of the first connecting member 121, and a recess 12r is formed between two adjacent protrusions 12p.

[0100] Figure 6 It is Figure 4A the enlarged schematic view at VI in Figure 6 As shown, the first end face S1 is in direct contact with the first structural member 111a at the protrusion 12p. There is a gap between the first end face S and the first structural member 11a at the recess 12r, or rather, the first end face S does not contact the first structural member 11a at the recess 12r. Thus, it is beneficial to reduce the contact area when the first connecting member 121 contacts the first structural member 111a.

[0101] Figure 7 It is Figure 5 the side view schematic of the connecting member in Figure 7 As shown, a wrenching groove R is provided on the side face S3 of the first connecting member 121 to facilitate the assembly of the connecting member. In addition, the first connecting member 12 further includes a first air vent channel H1 and a second air vent channel H2.

[0102] Figure 8 It is Figure 7 the sectional schematic along the line VIII-VIII. As Figure 8 shown, the first air vent channel H1 communicates the side face S3 with the first end face S1. The second air vent channel H2 communicates the side face S3 with the second end face S2, and both the first air vent channel H1 and the second air vent channel H2 are exposed at the position of the side face S1. Thus, when the first connecting member 121 is connected, there may be air between the threads, forming air resistance, resulting in an insecure connection or even an inability to connect. The first air vent channel H1 and the second air vent channel H2 can discharge this air to ensure a tight connection.

[0103] In other embodiments, the number of the structural members 11 and the connecting members 12 is not limited to the above, and the number of the structural members and the connecting members can be changed according to the heat insulation requirements and the operating conditions. Specifically, the number of the first structural members 111 is the same as the number of the second structural members 112, and the number (assumed to be N) of each of the first structural members 111 and the second structural members 112 is greater than or equal to three. Among the connecting members 12, the number of the first connecting members 121 is one, the number of the second connecting members 122 is two, and the number (assumed to be M) of the third connecting members 123 is multiple, and M = (2N - 1) × 2.

[0104] Specifically, every two adjacent first structural members 111 are arranged in an inner and outer nested manner with a gap therebetween. Every two adjacent second structural members 112 are arranged in an inner and outer nested manner with a gap therebetween. Among the opposite ends of the first connecting member 121, one end is connected to the innermost first structural member 111 among the multiple first structural members 111, and the other end passes through the innermost second structural member 112 among the multiple second structural members 112 and is used to connect to one of the inner cavity body and the outer cavity body. Among the opposite ends of the second connecting member 122, one end is connected to the outermost second structural member 112 among the multiple second structural members 112, and the other end extends beyond the multiple first structural members 111 and is used to connect to the other of the inner cavity body and the outer cavity body. Among the multiple third connecting members 123, for each third connecting member 123, one of the opposite ends is connected to a first structural member 111, and the other end is connected to a second structural member 112, so that the heat insulation connection structure 10 has a heat conduction path from the first connecting member 121 to the second connecting member 122 and back and forth between the multiple first structural members 111 and the multiple second structural members 112.

[0105] More specifically, among the multiple first structural members 111, except for the innermost first structural member 111, each first structural member 111 overlaps with two adjacent second structural members 112 (or, each first structural member 111 is orthogonally projected onto two adjacent second structural members 112). And, among the multiple first structural members 111, except for the innermost first structural member 111, the size of each first structural member 111 is between the sizes of the two adjacent second structural members 112 with which it overlaps, and is respectively connected to the two adjacent second structural members 112 with which it overlaps through different third connecting members 123.

[0106] Among the multiple second structural members 112, except for the outermost second structural member 112, each second structural member 112 overlaps with two adjacent first structural members 111 (or, each second structural member 112 is orthogonally projected onto two adjacent first structural members 111). And, among the multiple second structural members 112, except for the outermost second structural member 112, each second structural member 112 is respectively connected to the two adjacent first structural members 111 with which it overlaps through different third connecting members 123.

[0107] In summary, the heat insulation connection structure of the embodiment of the present application adopts a back-and-forth winding method within a limited distance and a narrow space, greatly extending the heat conduction path within the limited distance space, thereby greatly reducing the heat leakage in the heat conduction manner.

[0108] In addition, for the heat insulation connection structure of the embodiment of the present application, conventional materials can be selected as the materials of the structural members and the connecting members according to different temperature zones, instead of expensive and superior materials, which is beneficial to achieving the best economy.

[0109] In addition, the thermal insulation connection structure of the embodiment of the present application has a nested form of internal structural parts, and some structural parts are hollow structures, which is conducive to compact structure and simple manufacturing and installation, and is also conducive to increasing the internal elastic deformation capacity, so that the internal thermal stress of the thermal insulation connection structure is converted into elastic storage force, which is conducive to avoiding damage or destruction of the internal structure of the thermal insulation connection structure when the temperature changes, thereby ensuring the stability of its internal structure while also ensuring the reliability of its connection or support at both ends, greatly reducing the risk of insufficient structural strength. The thermal insulation connection structure of the embodiment of the present application is conducive to eliminating the technical problem of thermal deformation displacement of the external connections at both ends of the existing thermal insulation connection structure.

[0110] In addition, in the thermal insulation connection structure of the embodiment of the present application, under the same length path, the structural parts and the connecting parts are connected in sections, which saves space while increasing the number of contact surfaces. The end faces of the connecting parts are uneven and have large roughness, which greatly reduces the contact surface with the structural parts, greatly increases the interface thermal resistance, greatly reduces the heat conduction efficiency, and makes the thermal insulation performance more superior.

[0111] In addition, the thermal insulation connection structure of the embodiment of the present application has a variety of material combination options and a wider application because of the combined structural form of the threaded connection. For high-performance and expensive materials, the best thermal insulation and heat preservation effect can be achieved with the minimum usage.

[0112] In summary, the thermal insulation connection structure of the embodiment of the present application has at least one or more of the following technical effects.

[0113] 1. Excellent thermal insulation performance: The thermal insulation connection structure of the embodiment of the present application adopts a reciprocating nested structure through multiple structural parts and multiple connecting parts, which extends the heat conduction path and increases the thermal resistance in the heat conduction path, which is conducive to effectively isolating heat transfer, providing excellent thermal insulation performance, and reducing energy loss. It is suitable for occasions requiring high thermal insulation and heat preservation.

[0114] 2. Lightweight design: The thermal insulation connection structure of the embodiment of the present application has simple appearance of structural parts, connecting parts and screwed parts, simple production and manufacturing, and easy installation and maintenance. The number of structural parts and connecting parts can be increased or decreased according to demand, and different materials can be selected for manufacturing according to the temperature zone. When the structural parts and connecting parts are made of lightweight materials, it is helpful to reduce the weight of the thermal insulation connection structure. Moreover, the reciprocating nested structural form is conducive to reducing the weight of the thermal insulation connection structure while ensuring the structural strength of the thermal insulation connection structure.

[0115] 3. Reduce heat leakage: Compared with the traditional insulation support structure, the insulation connection structure of the embodiment of the present application is more conducive to reducing heat leakage and improving heat transfer efficiency.

[0116] 4. Environmental protection and energy conservation: The adiabatic connection structure of the embodiments of the present application can reduce the energy consumption of the system and minimize the negative impact on the environment, conforming to the development trend of energy conservation and environmental protection.

[0117] 5. Stable and reliable: The adiabatic connection structure of the embodiments of the present application is designed reasonably and the materials are selected scientifically, making it more reliable, with high stability and reliability, and suitable for scenarios with long-term operation requirements.

[0118] 6. Improve product performance: The adiabatic connection structure of the embodiments of the present application helps to improve the overall performance of the reaction device applying it, including aspects such as heat preservation effect, service life, energy conservation and environmental protection.

[0119] 7. Application of innovative technologies: The adiabatic connection structure of the embodiments of the present application promotes technological innovation and drives the technological development and progress in related fields.

[0120] Generally speaking, the adiabatic connection structure of the embodiments of the present application has remarkable technical effects in aspects such as heat preservation effect, lightweight design, reduction of heat leakage, environmental protection and energy conservation, stability and reliability, improvement of product performance, and application of technological innovation. These effects are of great significance for enhancing product competitiveness and promoting the development of the industry.

[0121] The above embodiments are only used to illustrate the technical solutions of the present application and not to limit them. Although the present application has been described in detail with reference to the above preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. An adiabatic connection structure for connecting and supporting between an inner cavity body and an outer cavity body, the inner cavity body being located within the outer cavity body, characterized in that, Comprising: A plurality of structural members, including a plurality of first structural members and a plurality of second structural members, the plurality of second structural members being opposite to and spaced from the plurality of first structural members, with each pair of adjacent first structural members being nested inside and outside each other, and there being a gap between each pair of adjacent first structural members, and each pair of adjacent second structural members being nested inside and outside each other, and there being a gap between each pair of adjacent second structural members; and A plurality of connecting members, including a first connecting member, a second connecting member, and a plurality of third connecting members, each connecting member having opposite first and second ends, the first end of the first connecting member being connected to the innermost first structural member among the plurality of first structural members, the second end of the first connecting member passing through and extending beyond the innermost second structural member among the plurality of second structural members and being used for connecting to one of the inner cavity body and the outer cavity body; the first end of the second connecting member being connected to the outermost second structural member among the plurality of second structural members, the second end of the second connecting member extending beyond the plurality of first structural members and being used for connecting to the other of the inner cavity body and the outer cavity body; the first end of each third connecting member being connected to one first structural member, and the second end of each third connecting member being connected to one second structural member, so that the adiabatic connection structure has a heat conduction path from the first connecting member to the second connecting member and back and forth between the plurality of first structural members and the plurality of second structural members, or a heat conduction path from the second connecting member to the first connecting member and back and forth between the plurality of first structural members and the plurality of second structural members.

2. The adiabatic connection structure according to claim 1, wherein Each of the structural members is plate-shaped; Among the plurality of first structural members, except for the innermost first structural member, each first structural member projects orthogonally onto two adjacent second structural members and is connected to the two adjacent second structural members respectively through different third connecting members; Among the plurality of second structural members, except for the outermost second structural member, each second structural member projects orthogonally onto two adjacent first structural members and is connected to the two adjacent first structural members respectively through different third connecting members.

3. The adiabatic connection structure according to claim 2, wherein Among the plurality of first structural members, except for the innermost first structural member, the size of each first structural member is between the sizes of the two adjacent second structural members; Among the plurality of second structural members, except for the outermost second structural member, the size of each second structural member is between the sizes of the two adjacent first structural members.

4. The adiabatic connection structure according to claim 1, wherein Each connecting member is threadedly connected to the corresponding structural member.

5. The adiabatic connection structure according to claim 4, wherein The first end of each of the connecting members is provided with an internal thread, and the second end is provided with an external thread; The adiabatic connection structure further includes a plurality of screw connectors; The first connecting member is threadedly connected to the corresponding first structural member at the position of its internal thread through one of the screw connectors, and the first connecting member is also used for being threadedly connected to one of the inner cavity body and the outer cavity body at the position of its external thread; The second connecting member is threadedly connected to the corresponding second structural member at the position of its internal thread through one of the screw connectors, and the second connecting member is also used for being threadedly connected to the other one of the inner cavity body and the outer cavity body at the position of its external thread; Each of the third connecting members is respectively threadedly connected to the corresponding first structural member at the position of its internal thread through one of the screw connectors, and is threadedly connected to the corresponding second structural member at the position of its external thread.

6. The adiabatic connection structure according to claim 1, wherein Each of the connecting members includes opposite first and second end faces and a side surface connecting the first and second end faces. At least part of the connecting members include a first air release channel and / or a second air release channel. The first air release channel communicates the side surface with the first end face, and the second air release channel communicates the side surface with the second end face. The first air release channel and the second air release channel are both exposed at the position of the side surface.

7. The adiabatic connection structure according to claim 1, wherein Each of the connecting members includes opposite first and second end faces and a side surface connecting the first and second end faces. The side surfaces of at least part of the plurality of connecting members are provided with wrench slots.

8. The adiabatic connection structure according to claim 1, wherein Each of the connecting members is columnar. Each of the connecting members includes an end face in contact with the corresponding structural member. The end face includes a plurality of protrusions. Each protrusion extends in the radial direction of the connecting member. The plurality of protrusions are spaced apart along the axial direction of the connecting member. A recess is formed between every two adjacent protrusions. Each of the connecting members contacts the corresponding structural member at the protrusions, and there is a gap between each of the connecting members and the corresponding structural member at the recesses.

9. The adiabatic connection structure according to any one of claims 1 to 8, wherein The adiabatic connection structure has a first temperature zone and a second temperature zone, and the temperature of the first temperature zone is higher than that of the second temperature zone; Part of the structural members are located in the first temperature zone, and part of the structural members are located in the second temperature zone. The heat-resistant temperature of the structural members located in the first temperature zone is greater than the heat-resistant temperature of the structural members located in the second temperature zone; and / or, Part of the connecting members are located in the first temperature zone, and part of the connecting members are located in the second temperature zone. The heat-resistant temperature of the connecting members located in the first temperature zone is greater than the heat-resistant temperature of the connecting members located in the second temperature zone.

10. A reaction device, characterized in that, It includes an inner cavity body, an outer cavity body, and the adiabatic connection structure as described in any one of claims 1 to 9. The inner cavity body is located within the outer cavity body. The adiabatic connection structure is connected and supported between the inner cavity body and the outer cavity body. The first connecting member is connected to one of the inner cavity body and the outer cavity body, and the second connecting member is connected to the other of the inner cavity body and the outer cavity body. The inner cavity body is used for placing the material to be processed.

11. The reaction device according to claim 10, characterized in that, There is a pressure difference between the inner cavity body and the outer cavity body, and at least one of the inner cavity body and the outer cavity body is in a vacuum environment.

12. A processing device, characterized in that, It includes a handling device and the reaction device as described in claim 10 or 11. The handling device is used to convey the material to be processed to the reaction device.

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