Device for detecting and calibrating parallelism of ion source suction electrode of ion implanter

Abstract

The utility model discloses an ion implanter ion source suction electrode parallelism detection and calibration device, which comprises a base plate and an adjusting plate rotationally connected to the base plate, four corners of the adjusting plate are connected with a distance measurement lower platform through a horizontal adjusting structure, the distance measurement lower platform is connected with a distance measurement upper platform through a stand column, and the distance measurement upper platform is connected with a distance measurement lower platform through a stand column. A through groove is formed in the distance measuring upper platform, a laser distance measuring sensor is installed in the through groove, and a fixing support used for being connected with a suction electrode support is fixedly arranged on the upper surface of the distance measuring lower platform. According to the utility model, in the assembly process of the suction electrode assembly, accurate parallelism detection can be carried out on the suction electrode suppression electrode and the ground electrode of the ion source of the ion implanter, and the installation accuracy of the suppression electrode and the ground electrode is ensured when the suction electrode assembly is conventionally maintained, cleaned and updated, so that not only can the maintenance time be shortened, but also the working efficiency is improved. And moreover, the re-assembled suction electrode component can meet the requirements of equipment performance specifications, and the stable operation of the equipment is ensured.

Description

Technical Field

[0001] The utility model relates to the field of ion source pole installation of an ion implanter, in particular to a parallelism detection and calibration device for the ion source pole of an ion implanter. Background Technique

[0002] The suppression electrode and the ground electrode of the ion source of the ion implanter are both made of graphite material and belong to consumables. When the equipment performance is abnormal, maintenance and replacement are required. When changing the doping material, the pole also needs to be maintained and updated. The electrode assembly of the pole is relatively complex with many components. In addition, the main electrode is made of graphite material with relatively low strength, and errors are inevitably generated during each manual maintenance and reassembly. The complete pole component needs to be controlled by the three-axis control system of the manipulation component to finely adjust the front-back, left-right translation distance and tilt angle of the electrode assembly. It is found in actual operation that the parallelism of the suppression electrode and the ground electrode relative to the fixing device has a great influence on the performance of the equipment to meet the process parameter requirements, and a precise detection device is needed to ensure the assembly accuracy of the components. Content of the Utility Model

[0003] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a parallelism detection and calibration device for the ion source pole of an ion implanter to solve the technical problems proposed in the above background technique.

[0004] The purpose of the utility model is realized by the following technical solutions:

[0005] A parallelism detection and calibration device for the ion source pole of an ion implanter includes a base plate and an adjustment plate rotatably connected to the base plate. The four corners of the adjustment plate are connected with a ranging lower platform through a horizontal adjustment structure. The ranging lower platform is connected with a ranging upper platform through a column. A plurality of through grooves are arranged on the ranging upper platform, and laser ranging sensors are respectively installed in the plurality of through grooves. A fixing bracket for connecting the pole bracket is fixedly arranged on the upper surface of the ranging lower platform.

[0006] In the above content of the utility model, further, the horizontal adjustment structure includes a flange plate fixed on the surface of the adjustment plate and a ball head connected to the lower surface of the ranging lower platform. The ball head connecting arm of the ball head is threadedly connected to the flange plate, and a locking nut is threadedly matched on the ball head connecting arm. A sheath plate fixed on the lower surface of the ranging lower platform and used for protecting the ball head is arranged outside the ball head.

[0007] In the above content of the utility model, further, four laser ranging sensors are provided, and the four laser ranging sensors are arranged on the ranging upper platform in a circumferential array manner.

[0008] In the above - mentioned utility model content, further, the fixed bracket includes a vertical plate fixedly arranged on the upper surface of the lower ranging platform. A connecting arm is welded on the vertical plate. An inner concave mounting groove for cooperating with the end of the suction electrode bracket is arranged at the end of the connecting arm, and a fixing hole for fixing the end of the suction electrode bracket is arranged at the top of the inner concave mounting groove.

[0009] In the above - mentioned utility model content, further, the laser ranging sensor is a phase - type laser ranging sensor.

[0010] The beneficial effects of the present utility model are as follows: During the assembly process of the suction electrode assembly, the present utility model can perform precise parallelism detection on the suction electrode suppression electrode and the ground electrode of the ion source of the ion implanter. When performing routine maintenance, cleaning, and updating of the suction electrode components, it can ensure the installation accuracy of the suppression electrode and the ground electrode. This not only can shorten the maintenance time, but also can ensure that the suction electrode components after reassembly meet the requirements of the equipment performance specifications and ensure the stable operation of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a schematic structural diagram of the present utility model;

[0012] Figure 2 is a schematic structural diagram of the horizontal adjustment structure of the present utility model;

[0013] Figure 3 is a schematic structural diagram of the fixed bracket of the present utility model.

[0014] In the figure, 1 - base plate, 2 - adjusting plate, 3 - horizontal adjustment structure, 4 - lower ranging platform, 5 - column, 6 - upper ranging platform, 7 - laser ranging sensor, 8 - fixed bracket, 3.1 - flange plate, 3.2 - ball head, 3.3 - ball - head connecting arm, 3.4 - locking nut, 3.5 - adjusting nut, 3.6 - sheath plate, 8.1 - vertical plate, 8.2 - connecting arm, 8.3 - inner concave mounting groove, 8.4 - fixing hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0015] The following uses specific examples to illustrate the embodiments of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0016] It should be noted that the illustrations provided in the following embodiments only schematically illustrate the basic concept of the present utility model. Therefore, only the components related to the present utility model are shown in the drawings, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the layout type of its components may also be more complex.

[0017] Embodiment:

[0018] An ion source anode parallelism detection and calibration device for an ion implanter, as shown in the attached Figure 1 figure, includes a base plate 1 and an adjusting plate 2 rotatably connected to the base plate 1. The four corners of the adjusting plate 2 are connected to a ranging lower platform 4 through a horizontal adjusting structure 3. The horizontal adjusting structure 3 is used to adjust the horizontal state of the ranging lower platform 4. As shown in the attached Figure 2 figure, the horizontal adjusting structure 3 includes a flange 3.1 fixed on the surface of the adjusting plate 2 and a ball head 3.2 connected to the lower surface of the ranging lower platform 4. The ball head connecting arm 3.3 of the ball head 3.2 is threadedly connected to the flange 3.1. An adjusting nut 3.5 and a locking nut 3.4 are fitted on the ball head connecting arm 3.3. A sheath plate 3.6 is provided outside the ball head 3.2 and fixed to the lower surface of the ranging lower platform 4 for protecting the ball head 3.2.

[0019] The ranging lower platform 4 is connected to a ranging upper platform 6 through a column 5. A plurality of through grooves are provided on the ranging upper platform 6, and laser ranging sensors 7 are respectively installed in the plurality of through grooves. A fixed bracket 8 for connecting the anode support is fixedly provided on the upper surface of the ranging lower platform 4.

[0020] As shown in the attached Figure 3 figure, the fixed bracket 8 includes a vertical plate 8.1 fixedly provided on the upper surface of the ranging lower platform 4. A connecting arm 8.2 is welded on the vertical plate 8.1. An inner concave mounting groove 8.3 for cooperating with the end of the anode support is provided at the end of the connecting arm 8.2. A fixing hole 8.4 for fixing the end of the anode support is provided at the top of the inner concave mounting groove 8.3.

[0021] In the specific use process of the present utility model, it is necessary to first adjust the horizontal state of the ranging lower platform 4. The horizontal adjustment of the ranging lower platform 4 requires the cooperation of multiple optical ranging sensors 7 and the horizontal adjustment structure 3. In this embodiment, preferably four laser ranging sensors are provided. The four laser ranging sensors 7 are arranged on the ranging upper platform 6 in a circumferential array. When starting the adjustment, the four laser ranging sensors 7 automatically measure the distance to the surface of the ranging lower platform 4, and observe the readings of the four laser ranging sensors 7. If the readings shown by the four laser ranging sensors 7 differ greatly, it indicates that the levelness of the ranging lower platform 4 does not meet the standard. At this time, it is necessary to operate the horizontal adjustment structure 3. Specifically, the height of the ranging lower platform 4 is adjusted by the spiral movement of the adjusting nut 3.4 and the flange 3.1, and then the levelness of the ranging lower platform 4 is adjusted. Further, the ball head 3.2 can ensure that the ranging lower platform 4 adapts to the adjusting plate 2 to ensure that there will be no structural dead points and mechanical jamming when adjusting multiple horizontal adjustment structures 3. Finally, by adjusting the horizontal adjustment structure 3 and observing the readings of the four laser ranging sensors 7, if the reading values are within a certain error range, it indicates that the ranging lower platform 4 is in a horizontal state. Preferably, the laser ranging sensor 7 adopts a phase-type laser ranging sensor to improve the ranging accuracy of the laser ranging sensor.

[0022] After the levelness of the ranging lower platform 4 is adjusted, the suction electrode bracket can be placed on the ranging lower platform 4, and the end of the suction electrode bracket is fitted into the concave mounting groove 8.3 at the end of the connecting arm 8.2, and the suction electrode bracket is fixed on the ranging lower platform 4 through the fixing hole 8.4. Finally, the suppression electrode, ground electrode and other components of the suction electrode can be installed on the suction electrode bracket. During the installation process, the four laser ranging sensors 7 can detect the installation parallelism of the suppression electrode and the ground electrode in real time, and the installation of the suppression electrode and the ground electrode can be adjusted in real time through the readings of the four laser ranging sensors 7, so as to ensure the levelness of the suppression electrode and the ground electrode after installation and guarantee the installation accuracy of the suppression electrode and the ground electrode.

[0023] The above embodiments only represent the specific implementation manners of the present utility model, and the description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several deformations and improvements can still be made, and these all belong to the protection scope of the present utility model.

Claims

1. An ion source anode parallelism detection and calibration device for an ion implanter, characterized in that It includes a base plate and an adjusting plate rotatably connected to the base plate. The four corners of the adjusting plate are connected to a lower ranging platform through a horizontal adjusting structure. The lower ranging platform is connected to an upper ranging platform through a column. A plurality of through slots are provided on the upper ranging platform, and a laser distance sensor is respectively installed in each of the plurality of through slots. A fixed bracket for connecting an electrode suction bracket is fixedly provided on the upper surface of the lower ranging platform.

2. The ion source anode parallelism detection and calibration device of an ion implanter according to claim 1, wherein, The horizontal adjusting structure includes a flange plate fixed on the surface of the adjusting plate and a ball head connected to the lower surface of the lower ranging platform. The ball head connecting arm of the ball head is threadedly connected to the flange plate, and an adjusting nut and a locking nut are fitted on the ball head connecting arm. A sheath plate for protecting the ball head and fixed on the lower surface of the lower ranging platform is provided outside the ball head.

3. An ion source anode parallelism detection and calibration device for an ion implanter according to claim 1, characterized in that, There are four laser distance sensors, and the four laser distance sensors are arranged on the upper ranging platform in a circumferential array manner.

4. An ion source anode parallelism detection and calibration device for an ion implanter according to claim 1, characterized in that, The fixed bracket includes a vertical plate fixedly provided on the upper surface of the lower ranging platform. A connecting arm is welded on the vertical plate, and an inner concave mounting groove for cooperating with the end of the electrode suction bracket is provided at the end of the connecting arm. A fixing hole for fixing the end of the electrode suction bracket is provided at the top of the inner concave mounting groove.

5. An ion source anode parallelism detection and calibration device for an ion implanter according to claim 3, characterized in that, The laser distance sensor is a phase-type laser distance sensor.

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