Detection system

Abstract

The embodiment of the utility model relates to the technical field of detection, and provides a detection system, which comprises an object placing table, a detection module and a control module, and is characterized in that the object placing table is used for placing a to-be-detected object; the transparent light source is used for generating structured light and forming a structural pattern on the surface of the object to be detected; the imaging detector, the transparent light source and the object placing table are coaxially arranged, the object space focal plane of the imaging detector is located between the object placing table and the transparent light source, and the imaging detector is used for obtaining and collecting the structured light reflected by the object to be detected and obtaining an image according to the collected structured light. The detection system provided by the embodiment of the utility model is at least beneficial to reducing errors in detection.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of detection, and particularly to a detection system. Background Art

[0002] In workpiece detection, the phase-shift measurement technique is usually used. The phase-shift measurement technique projects a periodic fringe pattern onto the surface of the object to be measured through a screen light source, and an industrial camera is used to capture the fringe pattern on the surface of the object to be measured. When the surface of the object to be measured is bent, the fringe pattern obtained by the industrial camera will generate a phase change. By relatively moving the object to be measured and the projection pattern, the phases in multiple states can be obtained; the morphology of the object to be measured can be obtained according to the fringe patterns in multiple states. However, the error of the current detection system is relatively large. Summary of the Utility Model

[0003] The embodiments of the present application provide a detection system, which is at least beneficial to reducing the error in detection.

[0004] According to some embodiments of the present application, an embodiment of the present application provides a detection system, including: a placement table for placing the object to be measured; a transparent light source for generating structured light and forming a structure pattern on the surface of the object to be measured; an imaging detector coaxially arranged with the transparent light source and the placement table, the transparent light source being located between the placement table and the imaging detector, and the object-side focal plane of the imaging detector being located between the placement table and the transparent light source, the imaging detector being used to collect the structured light reflected by the object to be measured and obtain an image according to the collected structured light.

[0005] In some embodiments, the placement table further includes: a first translation mechanism for driving at least one of the placement table, the transparent light source, and the imaging detector to reciprocally translate along a first horizontal direction, so that the structure pattern reciprocally moves along the first horizontal direction on the surface of the object to be measured; a second translation mechanism for driving at least one of the placement table, the transparent light source, and the imaging detector to reciprocally translate along a second horizontal direction, so that the structure pattern reciprocally moves along the second horizontal direction on the surface of the object to be measured, the first horizontal direction intersecting the second horizontal direction.

[0006] In some embodiments, the structure pattern includes a fringe structure pattern or a rectangular array structure pattern. The fringe structure pattern includes a plurality of mutually parallel stripes, and the rectangular array structure pattern includes a plurality of rectangles arranged in an array. Among them, the extending direction of the stripes of the fringe structure pattern is parallel to the first horizontal direction or the second horizontal direction; the sides of the rectangles of the rectangular array pattern are respectively parallel to the first horizontal direction and the second horizontal direction.

[0007] In some embodiments, it further includes: a first driver, configured to relatively move the object to be measured and the transparent light source along the bearing surface of the placement table; and cause the imaging detector to obtain multiple detection images of the transparent light source and the object to be measured at different relative positions; a processor, configured to obtain surface defects or topography of the object to be measured according to the multiple detection images obtained by the imaging detector.

[0008] In some embodiments, the structure pattern is a stripe structure pattern, and the stripe structure pattern includes a plurality of stripes arranged in parallel; it further includes: a rotating mechanism, configured to drive one of the placement table or the transparent light source to rotate along the central axis of the placement table, so that the structure pattern rotates along the central axis of the placement table on the surface of the object to be measured.

[0009] In some embodiments, the object-side focal plane of the imaging detector coincides with the light-emitting surface of the transparent light source, and the imaging detector is configured to obtain a first image of the light-emitting surface of the transparent light source according to the collected structured light; alternatively, the object-side focal plane of the imaging detector coincides with the surface of the object to be measured, and the imaging detector is configured to obtain a second image of the surface of the object to be measured according to the collected structured light.

[0010] In some embodiments, it further includes: a second driver, configured to relatively move the placement table and the imaging detector along the arrangement direction of the placement table and the imaging detector; a processor, configured to obtain the surface topography of the object to be measured according to the first image, and / or obtain the surface defects of the object to be measured according to the second image.

[0011] In some embodiments, the wavelength of the transparent light source is 400nm to 800nm.

[0012] In some embodiments, the transparent light source includes: a light guide assembly, the light guide assembly includes an opposite first surface and a second surface, and a side surface connecting the first surface and the second surface, the first surface faces the imaging detector, the second surface faces the placement table, the light guide assembly includes a plurality of spaced-apart reflection structures and a plurality of parallel light guides respectively connecting each reflection structure and the side surface; a light-emitting assembly, the light-emitting assembly is configured to generate a light source, and the light generated by the light-emitting assembly enters the reflection structure from the side surface of the light guide and is reflected by the reflection structure and then exits from the second surface.

[0013] In some embodiments, the reflection structure is an inclined cross-section of the light guide, an inclined prism, or a semi-transmissive semi-reflective mirror arranged obliquely.

[0014] The technical solution provided by the embodiments of the present application has at least the following advantages:

[0015] In the detection system provided by the embodiment of the present application, the transparent light source is arranged between the placement table and the imaging detector. In this way, the structured light generated by the transparent light source can be perpendicularly irradiated on the surface of the object to be measured, and the transparent light source is in a transparent state, so the transparent light source will not block the imaging and detection of the imaging detector. The imaging detector can also image perpendicular to the irradiation direction of the structured light, thus avoiding the problem of defocus at the field-of-view edge between the imaging detector and the structured light, and improving the accuracy of the detection system. In addition, the object-side focal plane of the imaging detector is located between the placement table and the transparent light source. When it is necessary to detect the defects on the object to be measured relative to the surface of the placement table, the object-side focal plane of the imaging detector can be located on the side close to the placement table, that is, the object-side focal plane of the imaging detector can be located on the surface of the object to be measured; when it is necessary to detect the topography of the object to be measured relative to the surface of the placement table, the object-side focal plane of the imaging detector can be located on the side close to the transparent light source, that is, the object-side focal plane of the imaging detector can be located on the light-emitting surface of the transparent light source. Brief Description of the Drawings

[0016] One or more embodiments are exemplarily illustrated by the pictures in the corresponding drawings. These exemplary illustrations do not limit the embodiments unless otherwise stated. The figures in the drawings do not constitute a proportional limitation; in order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the following-described drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0017] Figure 1 It is a schematic structural diagram when the object-side focal plane of the imaging detector in a detection system provided by an embodiment of the present application is located on the surface of the object to be measured;

[0018] Figure 2 It is a schematic structural diagram when the object-side focal plane of the imaging detector in a detection system provided by an embodiment of the present application is located on the light-emitting surface of the placement table located at the transparent light source;

[0019] Figures 3 to 6 It is a schematic structural diagram of various transparent light sources provided by an embodiment of the present application. Detailed Description of the Embodiments

[0020] As can be seen from the background art, errors are likely to occur in workpiece detection.

[0021] In the related art, in order to enable an industrial camera to obtain a stripe pattern without being blocked by a screen light source, the pattern is often projected obliquely onto the object to be measured by the screen light source, and the industrial camera collects the reflected light in the oblique direction. Due to the large projection area and imaging area, defocus often occurs at the field-of-view edge between the industrial camera and the light source, resulting in measurement errors.

[0022] In the detection system provided by the embodiment of the present application, the transparent light source is arranged between the placement table and the imaging detector. In this way, the light of the transparent light source can be perpendicularly irradiated on the placement table, that is, the structured light generated by the transparent light source can be perpendicularly irradiated on the surface of the object to be measured. Moreover, the transparent light source is in a transparent state and will not block the imaging and detection of the imaging detector. The imaging detector can also image perpendicular to the irradiation direction of the structured light, so as to avoid the defocus problem at the edge of the field of view between the imaging detector and the structured light, and improve the accuracy of the detection system. In addition, the object-side focal plane of the imaging detector is located between the placement table and the transparent light source. When it is necessary to detect the defects on the object to be measured relative to the surface of the placement table, the object-side focal plane of the imaging detector can be located on the side close to the placement table, that is, the object-side focal plane of the imaging detector can be located on the surface of the object to be measured; when it is necessary to detect the topography of the object to be measured relative to the surface of the placement table, the object-side focal plane of the imaging detector can be located on the side of the transparent light source, that is, the object-side focal plane of the imaging detector can be located on the light-emitting surface of the transparent light source.

[0023] In the description of the embodiments of the present application, technical terms such as "first" and "second" are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity, specific order or primary-secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "a plurality" is more than two, unless otherwise specifically and clearly defined.

[0024] Referring to "embodiments" herein means that the specific features, structures or characteristics described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0025] In the description of the embodiments of the present application, technical terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0026] In the description of the embodiments of the present application, when a component "includes" another component, unless otherwise stated, other components are not excluded, and other components may further be included.

[0027] In the description of the embodiments of the present application, the term "and / or" is merely an association relationship describing associated objects, indicating that three relationships may exist. For example, A and / or B may represent: the existence of A, the simultaneous existence of A and B, and the existence of B. Additionally, in this document, the character " / " generally represents an "or" relationship between the associated objects before and after.

[0028] The terms used in the description of the various embodiments herein are only for describing specific embodiments and are not intended to be limiting. As used in the description of the various embodiments and the appended claims, "component" is also intended to include the plural form unless the context clearly indicates otherwise.

[0029] The embodiments of the present application will be described in detail below in conjunction with the accompanying drawings. However, those of ordinary skill in the art can understand that in the embodiments of the present application, many technical details are presented to help readers better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present application can still be implemented.

[0030] Figure 1 Schematic diagram of the structure when the object-side focal plane of the imaging detector in a detection system provided by an embodiment of the present application is located on the surface of the object to be measured; Figure 2 Schematic diagram of the structure when the object-side focal plane of the imaging detector in a detection system provided by an embodiment of the present application is located on the light-emitting surface of the transparent light source when the placement table is located. Among them, Figure 1 The circular frame in it shows the top view of the placement table; Figure 2 The circular frame in it shows the top view of the placement table.

[0031] Refer to Figure 1 The detection system provided by the embodiments of the present application includes:

[0032] A placement table 100 for placing the object to be measured 101; a transparent light source 200 for generating structured light and forming a structured pattern on the surface of the object to be measured 101; an imaging detector 300 coaxially arranged with the transparent light source 200 and the placement table 100, the transparent light source 200 being located between the placement table 100 and the imaging detector 300, the object-side focal plane of the imaging detector 300 being located between the placement table 100 and the transparent light source 200, and the imaging detector 300 being used to acquire and collect the structured light reflected by the object to be measured 101 and obtain an image based on the collected structured light.

[0033] In the detection system provided by the embodiments of the present application, the transparent light source 200 is disposed between the placement table 100 and the imaging detector 300. In this way, the structured light generated by the transparent light source 200 can be perpendicularly irradiated on the surface of the object to be measured 101, and the transparent light source 200 is in a transparent state, so that the transparent light source 200 will not block the imaging and detection of the imaging detector 300, and the imaging detector 300 can also image perpendicular to the irradiation direction of the structured light. In this way, the problem of defocus at the field-of-view edge between the imaging detector 300 and the structured light can be avoided, and the accuracy of the detection system can be improved. In addition, the object-side focal plane of the imaging detector 300 is located between the placement table 100 and the transparent light source 200. When it is necessary to detect the defects on the object to be measured 101 relative to the surface of the placement table 100, the object-side focal plane of the imaging detector 300 can be located on the side close to the placement table 100, that is, the object-side focal plane of the imaging detector 300 can be located on the surface of the object to be measured 101; when it is necessary to detect the topography of the object to be measured 101 relative to the surface of the placement table 100, the object-side focal plane of the imaging detector 300 can be located on the side close to the transparent light source 200, that is, the object-side focal plane of the imaging detector 300 can be located on the light-emitting surface of the transparent light source 200.

[0034] The placement table may further include: a first translation mechanism (not shown in the figure), the first translation mechanism is configured to drive at least one of the placement table 100, the transparent light source 200, and the imaging detector 300 to reciprocally translate along the first horizontal direction X, so that the structure pattern reciprocally moves along the first horizontal direction X on the surface of the object to be measured 101; a second translation mechanism (not shown in the figure), the second translation mechanism is configured to drive at least one of the placement table 100, the transparent light source 200, and the imaging detector 300 to reciprocally translate along the second horizontal direction Y, so that the structure pattern reciprocally moves along the second horizontal direction Y on the surface of the object to be measured 101, and the first horizontal direction X intersects with the second horizontal direction Y.

[0035] Specifically, in this embodiment, the first translation mechanism is configured to drive the placement table 100 to reciprocally translate along the first horizontal direction X, so that the structure pattern reciprocally moves along the first horizontal direction X on the surface of the object to be measured 101; the second translation mechanism is configured to drive the placement table 100 to reciprocally translate along the second horizontal direction Y, so that the structure pattern reciprocally moves along the second horizontal direction Y on the surface of the object to be measured 101.

[0036] When the placement table reciprocally moves along the first horizontal direction X to drive the object under test 101 to reciprocally move along the first horizontal direction X, or when the transparent light source 200 reciprocally moves along the first horizontal direction X, or when the transparent light source 200 and the imaging detector 300 reciprocally move together along the first horizontal direction X, the corresponding structural pattern irradiated on the surface of the object under test 101 will generate a phase change in the first horizontal direction X according to the undulation of the surface of the object under test 101, and the imaging detector 300 can obtain the phase parameter information of the object under test 101 in multiple states in the first horizontal direction X; when the placement table 100 reciprocally moves along the second horizontal direction Y to drive the object under test 101 to reciprocally move along the second horizontal direction Y, or when the transparent light source 200 reciprocally moves along the second horizontal direction Y, or when the transparent light source 200 and the imaging detector 300 reciprocally move together along the second horizontal direction Y, the corresponding structural pattern irradiated on the surface of the object under test 101 will generate a phase change in the second horizontal direction Y according to the undulation of the surface of the object under test 101, and the imaging detector 300 can obtain the phase parameter information of the object under test 101 in multiple states in the second horizontal direction Y.

[0037] In this embodiment, referring to Figure 1 and Figure 2 , the included angle between the first horizontal direction X and the second horizontal direction Y is 90°. When the first horizontal direction X is perpendicular to the second horizontal direction Y, it is beneficial to calculate the phase parameters. In other embodiments of the present application, the first horizontal direction and the second horizontal direction have an acute included angle. For example, the included angle between the first horizontal direction and the second horizontal direction can be 30°, 45° or 60°.

[0038] In this embodiment, the structural pattern includes a stripe structural pattern, and the stripe structural pattern includes a plurality of stripes arranged in parallel with each other. When the structural pattern is a stripe structural pattern, the extending direction of the stripes of the stripe structural pattern is parallel to the first horizontal direction or the second horizontal direction.

[0039] In other embodiments of the present application, the structural pattern includes a rectangular array structural pattern, and the rectangular array structural pattern includes a plurality of rectangles arranged in an array. When the structural pattern is a rectangular array structural pattern, the sides of the rectangles of the rectangular array pattern are respectively parallel to the first horizontal direction and the second horizontal direction.

[0040] In this embodiment, the imaging detector 300 is a CCD (charge coupled device). The imaging detector can be a area array detector or a line array detector.

[0041] In other embodiments of the present application, the imaging detector 300 is a Position Sensitive Detector (PSD). A PSD is a device that uses the photoelectric effect for position detection. It consists of one or two PIN photodiodes (positive-intrinsic negative diodes) with a uniformly resistive surface. Compared with traditional discrete element detectors, the PSD has advantages such as high position resolution, simple and fast response current (related to the position of the light spot). In addition, the position signal data of the PSD is independent of the shape of the light spot on the detector, and this characteristic makes the PSD perform excellently in applications that require high-precision position measurement. The imaging detector 300 can be a one-dimensional PSD or a two-dimensional PSD. The main difference between a one-dimensional PSD and a two-dimensional PSD lies in their detection dimensions. The one-dimensional PSD is mainly used to detect position changes along a straight line, while the two-dimensional PSD can simultaneously detect position changes in two perpendicular directions, thereby providing more comprehensive position information. Both types of PSDs are widely used in fields that require high-precision position measurement, such as scientific research, industrial automation, robotics, etc.

[0042] In this embodiment, referring to Figure 1 and Figure 2 , the detection system further includes: a first driver 103, configured to relatively move the object to be measured 101 and the transparent light source 200 along the bearing surface of the placement table 100; and cause the imaging detector 300 to obtain multiple detection images of the transparent light source 200 and the object to be measured 101 at different relative positions; a processor (not shown in the figure), configured to obtain surface defects or topography of the object to be measured 101 based on the multiple detection images obtained by the imaging detector 300.

[0043] In this embodiment, when the structural pattern is a stripe structural pattern, the stripe structural pattern includes a plurality of parallel stripes. The detection system may further include: a rotating mechanism (not shown in the figure), configured to drive one of the placement table 100 and the transparent light source 200 to rotate along the central axis of the placement table 100, so that the structural pattern rotates along the central axis of the placement table 100 on the surface of the object to be measured 101.

[0044] The rotating mechanism can drive the placement table 100 to rotate along the central axis of the placement table 100, or drive the transparent light source 200 to rotate along the central axis of the placement table 100, or drive the transparent light source 200 and the imaging detector 300 to rotate along the central axis of the placement table 100. Thus, the corresponding stripe structural pattern irradiated on the surface of the object to be measured 101 will generate a phase change in the rotation direction according to the undulation of the surface of the object to be measured 101, and the imaging detector 300 can obtain phase parameter information of the object to be measured 101 in multiple states in the rotation direction.

[0045] Specifically, in this embodiment, the rotation mechanism is disposed on the transparent light source 200 and drives the transparent light source 200 to rotate along the central axis of the placement table 100.

[0046] The first driver 103 is used to drive the first translation mechanism, the second translation mechanism, and / or the rotation mechanism.

[0047] Specifically, in this embodiment, the first driver 103 drives the first translation mechanism to drive the placement table 100 to perform a first movement along the first horizontal direction X. The first horizontal direction X is perpendicular to the stripe arrangement direction. During the first movement, the imaging detector 300 acquires multiple first detection images at different relative positions between the transparent light source 200 and the object to be measured 101. After the first movement, the first driver 103 drives the rotation mechanism to drive the placement table 100 to rotate 90°. After the first driver 103 drives the rotation mechanism to drive the placement table 100 to rotate 90°, the first driver 103 drives the first translation mechanism to drive the placement table 100 to perform a second movement along the first horizontal direction X. During the second movement, the imaging detector 300 acquires multiple second detection images at different relative positions between the transparent light source 200 and the object to be measured 101.

[0048] The processor is specifically configured to obtain the slope of each point on the surface of the object to be measured according to the multiple first images and the multiple second images; and obtain the topography or defects of the object to be measured 101 according to the slope of each point.

[0049] In this embodiment, refer to Figure 1 and Figure 2 , the detection system may further include: a second driver 104. The second driver 104 is used to relatively move the placement table 100 and the imaging detector 300 along the arrangement direction of the placement table 100 and the imaging detector 300 (i.e., the Z direction); a processor (not shown in the figure), and the processor is used to obtain the surface topography of the object to be measured 101 according to the first image, and / or obtain the surface defects of the object to be measured 101 according to the second image.

[0050] The second driver 104 is used to move the placement table 100 or the imaging detector 300 to change the distance between the placement table 100 and the imaging detector 300. Specifically, in this embodiment, the second driver 104 moves the placement table 100 along the arrangement direction of the placement table 100 and the imaging detector 300 (i.e., the Z direction). By the second driver 104, the object-side focal plane of the imaging detector 300 can be made to coincide with the light-emitting surface of the transparent light source 200, or the object-side focal plane of the imaging detector 300 can be made to coincide with the surface of the object to be measured 101.

[0051] In other embodiments of the present application, the detection system may not include the second driver 104. The distance between the imaging detector 300 and the placement table 100 along the arrangement direction is fixed. The object-side focal plane of the imaging detector 300 coincides with the light-emitting surface of the transparent light source 200, or the object-side focal plane of the imaging detector 300 coincides with the surface of the object to be measured 101.

[0052] Reference Figure 2 , the object-side focal plane of the imaging detector 300 coincides with the light-emitting surface of the transparent light source 200, and the imaging detector 300 is used to obtain a first image of the light-emitting surface of the transparent light source 200 according to the collected structured light. In this way, it is beneficial to detect the topography of the object to be measured 101 relative to the surface of the placement table 100.

[0053] Reference Figure 1 , the object-side focal plane of the imaging detector 300 coincides with the surface of the object to be measured 101, and the imaging detector 300 is used to obtain a second image of the surface of the object to be measured 101 according to the collected structured light. In this way, it is beneficial to detect the defects of the object to be measured 101 relative to the surface of the placement table 100.

[0054] In this embodiment, the wavelength of the transparent light source 200 is 400 nm to 800 nm, such as 400 nm, 450 nm, 500 nm, 550 nm, 600 nm, 650 nm, 700 nm, 750 nm or 800 nm, that is, the light source generated by the transparent light source 200 is visible light.

[0055] In this embodiment, the color of the structured light generated by the transparent light source 200 is white, so as to avoid the influence of the colored light source on the detection accuracy of the imaging detector 300.

[0056] Figures 3 to 6 FIG. is a schematic structural diagram of various transparent light sources provided by the embodiments of the present application. The present application can be any one of the following transparent light sources, and any one of the following light sources can be cited in the Figures 1 to 2 illustrated embodiments.

[0057] Combined with reference to Figures 1 to 6, in some embodiments, the transparent light source 200 includes: a light guide assembly 201 and a light emitting assembly 202. The light guide assembly 201 includes opposite first and second surfaces 210 and 220, and a side surface 230 connecting the first surface 210 and the second surface 220. The first surface 210 faces the imaging detector 300, and the second surface 220 faces the placement table 100. The light guide assembly 201 includes a plurality of spaced-apart reflection structures 211 and a plurality of parallel light guides (not shown in the figure) respectively connecting each reflection structure 211 and the side surface 230; the light emitting assembly 202 is used to generate a light source, and the light generated by the light emitting assembly 202 enters the reflection structure 211 from the side surface of the light guide and is emitted from the second surface 220 after being reflected by the reflection structure 211.

[0058] In some embodiments, referring to Figure 3 , the reflection structure 211 can be an inclined prism; or, referring to Figure 4 , the reflection structure 211 can be a transmissive and reflective flat mirror arranged obliquely; or, referring to Figure 5 and Figure 6 , the reflection structure 211 can be an inclined cross-section of the light guide.

[0059] In Figures 3 to 6 , for ease of illustration, only 3 reflection structures 211 are shown as an example, which does not limit the number of reflection structures 211. In some embodiments, the number of reflection structures can be set according to the number of stripes required for the actual structured light.

[0060] In the detection system provided by the embodiments of the present application, the transparent light source 200 is disposed between the placement table 100 and the imaging detector 300. Thus, the structured light generated by the transparent light source 200 can vertically irradiate the surface of the object to be measured 101, and the transparent light source 200 is in a transparent state, so the transparent light source 200 will not block the imaging and detection of the imaging detector 300, and the imaging detector 300 can also image perpendicular to the irradiation direction of the structured light. In this way, the problem of defocus at the edge of the field of view between the imaging detector 300 and the structured light can be avoided, and the accuracy of the detection system can be improved. In addition, the object-side focal plane of the imaging detector 300 is located between the placement table 100 and the transparent light source 200. When it is necessary to detect the defects on the object to be measured 101 relative to the surface of the placement table 100, the object-side focal plane of the imaging detector 300 can be located on the side close to the placement table 100, that is, the object-side focal plane of the imaging detector 300 can be located on the surface of the object to be measured 101; when it is necessary to detect the topography of the object to be measured 101 relative to the surface of the placement table 100, the object-side focal plane of the imaging detector 300 can be located on the side close to the transparent light source 200, that is, the object-side focal plane of the imaging detector 300 can be located on the light-emitting surface of the transparent light source 200.

[0061] Those of ordinary skill in the art can understand that the above embodiments are specific examples for implementing the present application. In actual applications, various changes can be made to them in form and details without departing from the spirit and scope of the present application. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application should be subject to the scope defined by the claims.

Claims

1. A detection system, characterized in that, Comprising: A placement table for placing the object to be measured; A transparent light source for generating structured light and forming a structure pattern on the surface of the object to be measured; An imaging detector coaxially arranged with the transparent light source and the placement table, with the transparent light source located between the placement table and the imaging detector, and the object-side focal plane of the imaging detector located between the placement table and the transparent light source. The imaging detector is used to acquire and collect the structured light reflected by the object to be measured and obtain an image based on the collected structured light.

2. The detection system according to claim 1, wherein The placement table further includes: A first translation mechanism for driving at least one of the placement table, the transparent light source, and the imaging detector to reciprocally translate along a first horizontal direction, so that the structure pattern reciprocally moves along the First horizontal direction; A second translation mechanism for driving at least one of the placement table, the transparent light source, and the imaging detector to reciprocally translate along a second horizontal direction, so that the structure pattern reciprocally moves along the Second horizontal direction, where the first horizontal direction intersects the second horizontal direction.

3. The detection system according to claim 2, wherein The structure pattern includes a stripe structure pattern or a rectangular array structure pattern. The stripe structure pattern includes multiple stripes arranged in parallel, and the rectangular array structure pattern includes multiple rectangles arranged in an array. Among them, the extending direction of the stripes of the stripe structure pattern is parallel to the first horizontal direction or the second horizontal direction; the sides of the rectangles of the rectangular array pattern are respectively parallel to the first horizontal direction and the second horizontal direction.

4. The detection system according to claim 1 or 2, characterized in that, Further comprising: A first driver for relatively moving the object to be measured and the transparent light source along the bearing surface of the placement table; And enabling the imaging detector to acquire multiple detection images of the transparent light source and the object to be measured at different relative positions; A processor for obtaining the surface defects or topography of the object to be measured based on the multiple detection images acquired by the imaging detector.

5. The detection system according to claim 1 or 2, characterized in that, The structure pattern is a stripe structure pattern including multiple parallel stripes; further comprising: a rotation mechanism for driving either the placement table or the transparent light source to rotate along the central axis of the placement table, so that the structure pattern rotates along the central axis of the placement table on the surface of the object to be measured.

6. The detection system according to claim 1, characterized in that The object-side focal plane of the imaging detector coincides with the light-emitting surface of the transparent light source, and the imaging detector is used to obtain a first image of the light-emitting surface of the transparent light source based on the collected structured light; Or, the object-side focal plane of the imaging detector coincides with the surface of the object to be measured, and the imaging detector is used to obtain a second image of the surface of the object to be measured based on the collected structured light.

7. The detection system according to claim 6, wherein, Further comprising: A second driver for relatively moving the placement table and the imaging detector along the arrangement direction of the placement table and the imaging detector; A processor for obtaining the surface topography of the object to be measured based on the first image, and / or obtaining the surface defects of the object to be measured based on the second image.

8. The detection system according to claim 1, characterized in that, The wavelength of the transparent light source is 400nm to 800nm.

9. The detection system according to claim 1, wherein The transparent light source includes: A light guide assembly, the light guide assembly includes opposite first and second surfaces, and side surfaces connecting the first surface and the second surface, the first surface faces the imaging detector, the second surface faces the placement table, the light guide assembly includes a plurality of spaced-apart reflection structures and a plurality of parallel light guides respectively connecting each of the reflection structures and the side surfaces; A light emitting assembly, the light emitting assembly is used to generate a light source, the light generated by the light emitting assembly enters the reflection structure from the side surface of the light guide, and is emitted from the second surface after being reflected by the reflection structure.

10. The detection system according to claim 9, wherein, The reflection structure is an inclined cross-section of a light guide, an inclined prism or a semi-transmissive and semi-reflective mirror arranged obliquely.

Images